• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    公开号:US20010000651A1
    申请号:US09/749,485
    申请日:2000-12-26
    公开日:2001-05-03
    发明作者:Tom Miller；Roger Verkuil；Gregory Horner
    申请人:Miller Tom G.；Verkuil Roger L.；Horner Gregory S.；
    IPC主号:G01R29-24
    专利说明:
    [0001] The present invention generally relates to testing a semiconductor wafer and, more particularly, to measuring a total charge of an insulating layer of the semiconductor wafer using corona charge. [0001]
    [0002] The production of insulating layers, particularly, thin oxide layers, is basic to the fabrication of integrated circuit devices on semiconductor wafers. A variety of insulating dielectric layers are used for a wide range of applications. These insulating layers can be used, for example, to separate gate layers from underlying silicon gate regions, as storage capacitors in DRAM circuits, for electrical device isolation and to electrically isolate multilayer metal layers. [0002]
    [0003] The devices, however, are very sensitive to induced charges near the silicon surface. In most cases, device performance depends strongly on the concentration of free charges in the silicon. As a result, unwanted variations in device performance can be introduced by charges in the insulating layer and the insulating layer interface. The charges can result, for example, from static charging of the insulating layer surface, poorly forming the insulating layer, excessive ionic contamination within the insulating layer, and metallic contamination within the insulating layer. In addition to degradation of device performance, electrical isolation of individual devices can be impaired by unwanted surface channels due to induced charges. A property of increasing interest, therefore, is total charge Q[0003] tot or sometimes referred to as net charge Qnet of the insulating layer.
    [0004] As illustrated in FIG. 1, there are five principle components of the total charge Q[0004] tot of an oxide layer: surface charge Qs; mobile charge Qm; oxide trapped charge Qot; fixed charge Qf; and interface trapped charge Qit. The surface charge Qs is charge on the top surface of the oxide layer and is frequently static charge or charged contaminants such as metallics. The mobile charge Qm is ionic contamination in the oxide layer such as potassium, lithium, or sodium trapped near the air/SiO2 interface or the Si/SiO2 interface. The oxide trapped charge Qot is electrons or holes trapped in the bulk oxide. The fixed charge Qf is charge at the Si/SiO2 interface. The interface trapped charge Qlt varies as a function of bias condition.
    [0005] Conventional methods of determining the total charge Q[0005] tot of an oxide layer include capacitance-voltage (CV), surface photovoltage (SPV) with biasing, and SPV analysis. The CV method typically measures each of the individual component charges, except the surface charge Qs which can be measured by the CV method, with a metal contact formed on the surface of the oxide layer and then obtains the total charge Qtot by summing up the individual component charges. The SPV with biasing method uses a contacting probe separated from the oxide layer with a Mylar insulator to bias the semiconductor. The total charge Qtot is determined by measuring the required bias of the probe to force a certain SPV. The SPV analysis method takes SPV measurements and infers the total charge Qtot via theoretical modeling.
    [0006] While these methods may obtain the total charge Q[0006] tot, they each have drawbacks. The CV method requires expensive and time consuming sample preparation. The SPV with biasing method requires a contacting probe which can allow charge transfer from the oxide layer to the probe. The SPV analysis method relies on theoretical modeling and may not be extremely accurate. Additionally, the SPV methods only work over a narrow range of total charge Qtot when the semiconductor is in depletion. Accordingly, there is a need in the art for an improved method of measuring the total charge of an insulating layer which is contactless, is a direct measurement with no theoretical modeling, is sensitive over a wide range of total charge, and is extremely accurate. BRIEF SUMMARY OF THE INVENTION
    [0007] The present invention provides a method for measuring a total charge of an insulating layer on a substrate which overcomes at least some of the disadvantages of the above-noted related art. According to the present invention, the method includes depositing corona charges on the insulating layer and measuring a surface photovoltage for the insulating layer after depositing each of the corona charges. The method further includes determining a total corona charge required to obtain a surface photovoltage of a predetermined fixed value and using the total corona charge to determine the total charge. [0007]
    [0008] According to one variation of the method according to the present invention, the total corona charge is determined by continuing to deposit the corona charges until the surface photovoltage measured is equal the fixed value. The total corona charge then corresponds to a sum of the corona charges deposited. According to another variation of the method according to the present invention, the total corona charge is determined using a data set of discrete points, preferably by interpolation. The discrete points include the surface photovoltages measured after each of the corona charges and corresponding total corona charges deposited to obtain each of the surface photovoltages. [0008] BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
    [0009] These and further features of the present invention will be apparent with reference to the following description and drawings, wherein: [0009]
    [0010] FIG. 1 is a diagrammatic view of a semiconductor wafer illustrating principle components of a total charge of an insulating layer; [0010]
    [0011] FIG. 2 is a schematic diagram of an apparatus for measuring a total charge of an insulating layer according the present invention; [0011]
    [0012] FIG. 3 is an exemplary graph illustrating how the total charge can be determined by incrementally depositing a corona charge until obtaining a surface photovoltage (SPV) equal to a fixed value; and [0012]
    [0013] FIG. 4 is an exemplary graph illustrating how the total charge can be determined by interpolating a data set of measured surface phiotovoltages (SPV) and associated total corona charge densities. [0013] DETAILED DESCRIPTlON OF PREFERRED EMBODIMENTS
    [0014] FIG. 1 illustrates an apparatus [0014] 10 for testing a semiconductor wafer 12 according to the present invention. The semiconductor wafer 12 includes a semiconductor substrate 14 and a dielectric or insulating layer 16 disposed on the substrate 14. The substrate 14 is typically a silicon substrate and the insulating layer 16 is typically an oxide layer. However, it should be understood that the method of the present invention is applicable to a variety of insulating layers grown and/or deposited on substrates of semiconductor materials or metals. An air/dielectric interface 18 is formed at the top surface of the insulating layer 16 and a dielectric/substrate interface 20 is formed between the insulating layer 16 and the substrate 14. A measurement region 22 of the insulating layer 16 is selected to be tested by the apparatus 10.
    [0015] The illustrated apparatus includes a wafer chuck [0015] 24 for holding the wafer 12 during testing, a contactless calibrated corona discharge source or gun 26 for depositing corona charges, a coulombmeter 28 for measuring deposited corona charges, an SPV device 30 for measuring surface photovoltages, a position actuator 34 for locating various components over the wafer 12, and a controller 36 for operating the apparatus 10. The wafer chuck 24 holds the wafer 12 during the measurement process and the wafer 12 is preferably secured to the wafer chuck 24 with a vacuum.
    [0016] The corona gun [0016] 26 includes a non-contact corona-charge depositing structure such as one or more needles 38 and an electrode housing 40 which, along with the needles 38, focuses the corona discharge onto the measurement region 22 of the insulating layer 16. The needles 38 are preferably disposed a distance above the top surface 18 of the insulating layer 16 to minimize fringing effects and other causes of charge deposition non-uniformity. U.S. Pat. No. 5,498,974, expressly incorporated herein in its entirety by reference, discloses a suitable corona gun for depositing corona charge on an insulating layer and a suitable Kelvin probe for measuring the voltage on the surface of the layer.
    [0017] The needles [0017] 38 are connected to a charge biasing means such as a high-voltage power supply 42 via a suitable line. The power supply 42 provides a desired high voltage output (e.g., +/−6-12 Kv) to the corona gun 26 to produce positive or negative corona charges depending on the polarity of the supply. The power supply 42 is suitably connected to the controller 36 via an appropriate signal line for feedback control of the power supply 42 during operation of the apparatus 10 as described in more detail hereinafter.
    [0018] The coulombmeter [0018] 28 is used to measure the deposited corona charge and preferably includes a first operational amplifier or current-to-voltage converter 44 and a second operational amplifier or charge integrator 46. The input of current-to-voltage converter 44 is connected via a suitable signal line to the substrate 14 and the wafer chuck 24. A corona current IC flows from the corona gun 26 and through the wafer 12 to the current-to-voltage converter 44. This current IC is converted by the current-to-voltage converter 44 to a voltage and then integrated by the charge integrator 46 to generate a voltage proportional to the charge Qc deposited onto the insulating layer 16 by the corona gun 26. The outputs of the current-to-voltage converter 44 and the charge integrator 46 are each connected to the controller 36 via suitable signal lines to feed the current Ic and the deposited corona charge Qc information to the controller 36 during operation of the apparatus 10 as described in more detail hereinafter. Note that an electrical contact between the wafer 12 and the chuck 24 because the regulating displacement currents are sufficient to perform the measurement.
    [0019] The SPV device [0019] 30 is used to measure surface photovoltages of the insulating layer 16 and preferably includes a very high intensity light source 48 such as, for example, a xenon flash tube. It is noted, however, that other types of SPV devices can be used such as, for example, LED, laser, or AC with lock-in.
    [0020] The position actuator [0020] 34 is used to locate the corona gun 26, and the SPV device 30, over the measurement region 22 of the wafer 12. The position actuator is preferably a high-speed linear translator including a mobile carriage which selectively moves along a track disposed above the wafer chuck 24. The corona gun 26 and the SPV device 30, are each suitably spaced apart and attached to the carriage. A control unit is suitably connected to the controller 36 via an appropriate signal line for feed-back control during operation of the apparatus 10 as described in more detail hereinafter.
    [0021] The controller [0021] 36 is used to control the operation of the apparatus 10 and preferably includes an input device 62 connected via a suitable line. The controller 36 controls the high-voltage power supply 42, the SPV device 30, the Kelvin control 54, and the position actuator control unit 60 and receives information from the current-to-voltage converter 44 and the current integrator 46. Based on the method set forth hereinbelow, the controller 36 can provide a measurement of total charge Qtot of the insulating layer 16. The controller 36 may be, for example, a dedicated microprocessor-based controller or a general purpose computer.
    [0022] To obtain a total charge Q[0022] tot measurement for an insulating layer 16 of a semiconductor wafer 12 according to a first method of the present invention, the actuator preferably first locates the SPV device 30 over the measuring region 22 of the wafer 12 to obtain an initial SPV measurement VSPV of the insulating layer 16. The lamp 48 is flashed and a recording of a peak intensity of the SPV transient is captured by an A/D card of the controller 36. Because of the high intensity output of the lamp 48, a measurable SPV can be obtained in both in accumulation and in depletion or inversion. Note that other types of SPV devices such as, for example, LED, laser, or AC lock-in amplifier can be used.
    [0023] The position actuator [0023] 34 next locates the corona gun 26 over the measuring region 22 of the wafer 12 to deposit a corona charge Qc on the measurement region 22 of the insulating layer 16. The controller 36 provides appropriate control signals for the corona gun 26 to deposit a corona charge Qc . The corona charge Qc deposited on the insulating layer 16 is measured by the coulombmeter 28 and recorded by the controller 36.
    [0024] The position actuator then locates the SPV device [0024] 30 over the measuring region 22 of the wafer 12 to again measure the SPV VSPV of the insulating layer 16. The SPV measurement VSPV is preferably recorded by the controller 36 and compared to a predetermined target value VSPVtarget stored in the controller 36. Preferably, the target value VSPVtarget is equal to a fixed value (0 volts) which indicates a “flatband condition”. At flatband, no net charge is present on the insulating layer 16 and no space charge imaging is in the silicon substrate 14. It should be understood that the target value VSPVtarget can be equal to fixed values other than zero. For example, the target value VSPVtarget can be equal to a fixed value (typically about +/−.300 V) which indicates a “Midband condition”. At midband, the SPV VSPV is equal to the fixed value which depends on the doping of the particular substrate 14.
    [0025] If the SPV measurement V[0025] SPV is not substantially equal to the target value VSPVtarget, the above described steps of depositing the corona charge Qc and remeasuring the SPV are repeated. If the new SPV measurement VSPV changes beyond the target value VSPVtarget from the previous SPV measurement VSPV the controller 36 provides appropriate control signals for the corona gun 26 to reverse the polarity of the next deposited corona charge Qc. Note that for a target value VSPVtarget of zero volts, a change in polarity from the previous SPV measurement to new SPV measurement indicates that the polarity of the next deposited corona charge Qc should be reversed. As required, the controller 36 can adjust the magnitude of the next deposited corona charge Qc to obtain an SPV measurement VSPV equal to the target value VSPVtarget.
    [0026] When the SPV measurement V[0026] SPV is substantially equal to the target value VSPVtarget, the controller 36 sums each of the individual corona charge increments Qc to obtain a total corona charge Qapplied@target applied to the insulating layer 16 to obtain the SPV measurement VSPV equal to the target value VSPVtarget. The controller 36 then determines the total charge Qtot of the insulating layer 16 from the total applied corona charge Qapplied@target wherein the total charge Qtot is the negative of the total applied corona charge Qapplied@target, i.e. Qtot=−Qapplied@target.
    [0027] FIG. 3 illustrates an example of this first method wherein the target value V[0027] SPVtarget is zero volts, or flatband condition. A first corona charge Qc of −0.20E-07 C/cm2 is applied on the insulating layer and an SPV measurement VSPV of about 0.090 volts is obtained. A second corona charge Qc of −0.20E-07 C/cm2 is then applied on the insulating layer 16 such that the total corona charge Qapplied is −0.40E-07 C/cm2. The second SPV measurement VSPV is about 0.100 volts. A third corona charge Qc of +0.40E-07 C/cm2 is applied on the insulating layer 16 such that the total corona charge Qapplied is 0.00E-07 C/cm2. The third SPV measurement VSPV is about 0.060 volts. Note that the polarity of the third deposited corona charge Qc was changed, because the SPV measurements VSPV were going away from the target value (zero) and the magnitude of the third deposited corona charge Qc was changed, specifically increased or doubled, to avoid duplicating the first measurement. A fourth corona charge Qc of +0.20E-07 C/cm2 is applied on the insulating layer 16 such that the total corona charge Qapplied is +0.20E-07 C/cm2. The fourth SPV measurement VSPV is about −0.100 volts. A fifth corona charge Qc of −0.10E-07 C/cm2 is applied on the insulating layer 16 such that the total corona charge Qapplied is +0.10E-07 C/cm2. The fifth SPV measurement VSPV is about 0.000 volts and substantially equal to the target value VSPVtarget. Note that the polarity of the fifth deposited corona charge Qc was changed because the fourth SPV measurement VSPV went past the target value (zero) VSPVtarget and the magnitude of the fifth deposited corona charge Qc was changed, specifically reduced by half, to avoid duplicating the third measurement. Therefore, the total applied corona charge Qapplied@target to obtain the target value VSPVtarget is +0.10E-07 C/cm2. The controller 36 then determines the total charge Qtot of the insulating layer is +0.10E-07 C/cm2.
    [0028] In a second method of measuring the total charge Q[0028] tot of the insulating layer 16 according to the present invention, the position actuator 34 alternately locates the corona gun 26 and the SPV device 30 over the measuring region 22 of the wafer 12 to deposit increments of corona charge Qc on the insulatingc layer 16 and to obtain SPV measurements VSPV of the insulating layer 16. The controller 36 records each SPV measurement VSPV and determines and records the total corona charge Qapplied applied to the insulating layer 16 to obtain that SPV measurement VSPV. Therefore, a data set is obtained containing the plurality of SPV measurements VSPV along with the corresponding total applied corona charges Qapplied.The controller 36 then determines the total applied corona charge Qapplied@target required for the SPV measurement VSPV to be substantially equal to the target value VSPVtarget from the data set. The value Qapplied@target is preferably interpolated from the data set of discrete points. The controller 36 then determines the total charge Qtot of the insulating layer 16 from the total applied corona charge Qapplied@target wherein the total charge Qtot is again the negative of the total applied corona charge Qapplied@target, i.e. Qtot=−Qapplied@target. FIG. 4 illustrates an example of this second method wherein the target value VSPVtarget is zero volts, or flatband condition. A data set is obtained by incrementally depositing a plurality of corona charges Qc on the insulating layer and obtaining a SPV measurement VSPV for each incremental deposition. The illustrated data set contains 19 discrete points containing the SPV measurements VSPV and the corresponding total applied corona charges Qapplied. The controller 3G interpolates the discrete points to determine that the total applied corona charge Qapplied@target at the target value VSPVtarget is about +0.10E-07 C/cm2. The controller 36 then determines the total charge Qtot of the insulating layer is +0.10E-07 C/cm2.
    [0029] When the target value V[0029] SPVtarget is zero volts, each of the SPV measurements VSPV are preferably corrected with a small Dember Voltage correction in either of the methods. The Dember Voltage correction is a small “second order” correction which can be applied via well known equations.
    [0030] It should be evident that this disclosure is by way of example and that various changes may be made by adding, modifying or eliminating details without departing from the fair scope of the teaching contained in this disclosure. The invention is therefore not limited to particular details of this disclosure except to the extent that the following claims are necessarily so limited. [0030]
    权利要求:
    Claims (21)
    [1" id="US-20010000651-A1-CLM-00001] 1. A method for measuring a total charge of an insulating layer on a substrate, said method comprising the steps of:
    (a) depositing corona charges on the insulating layer;
    (b) measuring a surface photovoltage for the insulating layer after depositing each of said corona charges;
    (c) determining a total corona charge required to obtain a surface photovoltage of a predetermined fixed value; and
    (d) using said total corona charge to determine the total charge of the insulating layer.
    [2" id="US-20010000651-A1-CLM-00002] 2. The method according to
    claim 1 , further comprising the step of measuring a charge density for each of said deposited corona charges.
    [3" id="US-20010000651-A1-CLM-00003] 3. The method according to
    claim 1 , wherein said fixed value is associated with a flatband condition.
    [4" id="US-20010000651-A1-CLM-00004] 4. The method according to
    claim 3 , wherein said fixed value is about 0.0 volts.
    [5" id="US-20010000651-A1-CLM-00005] 5. The method according to
    claim 1 , wherein said fixed value is associated with a midband condition.
    [6" id="US-20010000651-A1-CLM-00006] 6. The method according to
    claim 5 , wherein said fixed value is about +/−0.3 volts.
    [7" id="US-20010000651-A1-CLM-00007] 7. The method according to
    claim 1 , wherein said step of determining said total corona charge includes continuing to deposit said corona charges until the surface photovoltage measured is equal said fixed value and said total corona charge corresponds to a sum of said corona charges deposited.
    [8" id="US-20010000651-A1-CLM-00008] 8. The method according to
    claim 7 , further comprising the step of reversing polarity of said corona charges if said surface photovoltage changes in a direction away from said fixed value.
    [9" id="US-20010000651-A1-CLM-00009] 9. The method according to
    claim 1 , wherein said step of determining said total corona charge includes using a data set of discrete points, wherein said discrete points include said surface photovoltages measured after depositing said corona charges and corresponding total corona charges deposited to obtain said surface photovoltages.
    [10" id="US-20010000651-A1-CLM-00010] 10. The method according to
    claim 9 , wherein said step of using said data set includes interpolating said total corona charge from said discrete points.
    [11" id="US-20010000651-A1-CLM-00011] 11. The method according to
    claim 1 , further comprising the step of correcting each surface photovoltage with a Dember Voltage.
    [12" id="US-20010000651-A1-CLM-00012] 12. A method for measuring a total charge of an oxide layer on a semiconductor wafer, said method comprising the steps of:
    (a) measuring a surface photovoltage of the oxide layer;
    (b) depositing a corona charge on the oxide layer;
    (c) remeasuring said surface photovoltage of the oxide layer;
    (d) reversing polarity of said corona charge if said surface photovoltage changed away from a predetermined fixed value;
    (e) repeating steps (b) to (d) until said surface photovoltage is equal to said fixed value;
    (f) determining a total corona charge deposited on the oxide layer corresponding to said surface photovoltage which is equal to said fixed value; and
    (g) using said total corona charge to determine the total charge of the oxide layer.
    [13" id="US-20010000651-A1-CLM-00013] 13. The method according to
    claim 12 , wherein said fixed value is associated with a flatband condition.
    [14" id="US-20010000651-A1-CLM-00014] 14. The method according to
    claim 13 , wherein said fixed value is about 0.0 volts.
    [15" id="US-20010000651-A1-CLM-00015] 15. The method according to
    claim 12 , wherein said fixed value is associated with a midband condition.
    [16" id="US-20010000651-A1-CLM-00016] 16. The method according to
    claim 15 , wherein said fixed value is about +/−0.3 volts.
    [17" id="US-20010000651-A1-CLM-00017] 17. The method according to
    claim 12 , further comprising the step of correcting each surface photovoltage with a Dember Voltage.
    [18" id="US-20010000651-A1-CLM-00018] 18. The method according to
    claim 12 , further comprising the step of selectively adjusting a magnitude of said corona charge prior to the step of repeating steps (b) to (e).
    [19" id="US-20010000651-A1-CLM-00019] 19. A method for measuring a total charge of an oxide layer on a semiconductor wafer, said method comprising the steps of:
    (a) depositing a corona charge on the oxide layer;
    (b) measuring a surface photovoltage of the oxide layer;
    (c) determining a total corona charge density associated with said surface photovoltage;
    (d) repeating steps (a) to (c) a plurality of times to obtain a data set of discrete points for the surface photovoltages and the total corona densities;
    (e) using said data set to determine a total corona charge density corresponding to a surface photovoltage of a predetermined fixed value; and
    (f) using said total corona charge to determine the total charge of the oxide layer.
    [20" id="US-20010000651-A1-CLM-00020] 20. The method according to
    claim 19 , wherein said step of using said data set includes interpolating said fixed value from said discrete points.
    [21" id="US-20010000651-A1-CLM-00021] 21. The method according to
    claim 18 , further comprising the step of correcting each surface photovoltage with a Dember Voltage.
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    优先权:
    申请号 | 申请日 | 专利标题
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    US09/964,944| US6448804B2|1997-08-18|2001-09-27|Contactless total charge measurement with corona|
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