• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Displacement Measuring Apparatus and Method Displacement measuring apparatus comprises a light source (10), a lens (12), an index grating (14), a reflective scale grating (16), and three photodetectors (18) at positions corresponding to the zero order and positive and negative first order images of the source (10). The index grating (14) has a castellated surface profile with a mark/space ratio (a/b, Figure 3) and a castellation height (h, Figure 3) chosen so that the three photodetectors (18) see wavefronts having a phase separation of 120. The electrical signals from the photodetectors (18) are used to sense the magnitude and direction of movement of a reading head carrying the components (10, 12, 14 and 18) with respect to the scale grating (16).
    公开号:SU1560068A3
    申请号:SU853898055
    申请日:1985-05-24
    公开日:1990-04-23
    发明作者:Мартин Петигру Роберт
    申请人:Доктор Иоханнес Ханденхайн, Гмбх (Фирма)；
    IPC主号:
    专利说明:

    The invention relates to a measurement technique, to devices for measuring relative displacements based on the use of interference moirés, by which linear and angular displacements can be measured.
    The aim of the invention is to increase the resolution due to the use of diffraction gratings with a step of 40 µm.
    Figure 1 shows the optical layout of the device; figure 2 shows the grid, Fragment; on AIG.Z - optical diagram of the device.
    The device contains a source of optical radiation and consistently installed along the radiation path.
    a collimating lens 2, a transparent grid 3 attached to one of the objects, made with a toothed profile, the ratio of the teeth width to the distance between them a: b is different from 1: 1, and the height h of the teeth other than the grid module is a reflective scale grid 4, fastened with another object, and three detectors 5-7, located on the side of the radiation source 1 in the focal plane of the lens 2 in the Zero-order generation zone and the positive and negative first-order diffraction images. Each prong of a transparent grating profile can have a flat or vaulted top.
    cl
    ABOUT
    about
    00
    si
    The device works as follows.
    When the transparent and reflective gratings 3 and 4 are illuminated by a radiation beam from the source 1, the image of the transparent grating 3, attached to the object, interacts with the reflection grating 4, which leads to the formation of an interference pattern. In FIG. 3, the reflecting grating 4 is shown as transmissive in order to simplify the description of the trajectory of the optical front and its corresponding. phases. Then the other two lattices actually form a transparent lattice 3 according to Lig.1. The input beam is split by grating 3 into zero and first orders of dillation, delayed by V radians relative to zero order. On lattice 4, the first order is delayed by Q radians, which leads to the zero phase of the wave front 8, to the second phase of the wave Lronth 9 of the first order and to phase 2 at the wave front 10 of the first order. A phase shift of 120 between the three wave fronts 8-10 for the three detectors 5-7 ensures maximum accuracy of the signals from the detectors, which is achieved by making a transparent grid 3 with a gear profile, the ratio of the width of the teeth to the distance between them is a: b different from 1: 1 and the height h of the tooth, other than the lattice module, to obtain the desired frequency separation and modulation depth of the signals from the detectors 5–7, the electrical outputs from which give the value of the direction and magnitude of the mixing of the objects.
    High resolution is achieved by using gratings with fine pitch (on the order of 40 µm), which is a result of choosing the ratio of the width of each tooth to the width of the gap between adjacent teeth.
    权利要求:
    Claims (3)
    [1]
    1. A device for measuring the displacements of two objects, containing an optical radiation source and a collimating lens sequentially installed along the radiation path, a transparent grating attached to one of the objects, and a reflective scale grating attached to another object, and three detectors located on the side source in the local plane of the lens in the zone of formation of the zero order and the positive and negative first orders of the diffraction image, respectively, characterized in that, in order to increase Neither is the resolution, the transparent grid is made with a serrated profile, the ratio of the width of the teeth to the distance between them is different from 1: 1, and the height h of the tooth is different from the grid module.
    [2]
    2. A device according to claim 1, characterized in that each tooth of the profile of the transparent grid has a flat top.
    i
    [3]
    3. The device according to claim, characterized in that each tooth of the profile of the transparent lattice has a vaulted vertex.
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    B
    but
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    Fie.2
    PHASE - 2F
    eight
    . PHASE 0
    ten
    §Г PHASE 2Ф
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    GB848413955A|GB8413955D0|1984-05-31|1984-05-31|Displacement measuring apparatus|
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