• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    An apparatus for damping oscillations in a vacuum system e.g. an electron irradiation device, includes a mechanical vacuum generator (1) and a first compensation member (5) disposed between the vacuum generator (1) and a vessel (7) which is connected at (7') to a vacuum processing cell. A second compensation member (8), which has substantially the same static and dynamic properties as the first compensation member (5), is rigidly mechanically coupled, coaxially in relation to the first compensation member, to the vacuum generator (1) (Fig. 3) or to the vessel (7) (as shown). The second compensation member (8) is directly vacuum connected to the vessel (7) (as shown) or, via coupling hoses 20, to a pre-vacuum generator (4) (Figs. 2, 3). Compensation members (5) (8) may be corrugated tubes, and spacers (12) rigidly connect the furthest apart flanges of members (5) (8) so that forces acting on these members due to atmospheric pressure neutralise each other. <IMAGE>
    公开号:SU1502889A1
    申请号:SU857773781
    申请日:1985-03-19
    公开日:1989-08-23
    发明作者:Нойланд Руди
    申请人:Феб Карл Цейс Йена (Инопредприятие)；
    IPC主号:
    专利说明:

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    31502
    The invention relates to mechanical engineering, namely, devices; uut damping of oscillations in vacuum systems, and can be used for vibration isolation of highly sensitive to vibration devices, in particular, electron-beam installations in the semiconductor industry of iLiu electronic microcars.
    A device for damping oscillations in vacuum systems is known in which a compensator is installed between the vacuum pump and the container. In order to exclude the possibility of a compensator under the action of atmospheric pressure in high-vacuum conditions, distance rods are provided between the vacuum pump and the container, successively in relation to which rubber damping elements are installed, the tension of which is regulated depending on the frequency of / Kdeni (Turbomolekularpumpen und Zubehor prospectus - NTM 5.1,1-HV200 - part 5 of the company Leybold-Heraeus, Koln, 1977).
    The disadvantage of this device is that the effectiveness of damping is significantly limited by the effect of atmospheric pressure.
    The purpose of the invention is to increase the damping efficiency by compensating for the influence of atmospheric pressure on Lenin on the damping effect.
    This goal is achieved by the fact that the device is equipped with an installed, coaxially with the main compensator, a. additional compensator with the same basic static and dynamic properties, rigidly connected by means of remote rods with a vacuum pump and vacuum directly with the container or through hose connections with a forevacuum pump, widely connected by means of remote rods with capacity and through a hose vacuum connections with a forevacuum pump.
    FIG. 1 shows a diagram of an apparatus for damping vibrations in vacuum systems; in fig. 2 - connection of an additional compensator with a fore-vacuum pump vacuum through hose connections; in fig. 3 -, / kestka connection; an additional compensator with a receptacle and through hose connections nakumuno with a booster pump.
    A device for damping oscillations in vacuum systems consists of a vacuum pump 1, which is connected via vacuum to flange connections 2 and 3 with a fore-vacuum pump 4 and to the main compensator 5. A container 7 is connected through another flange connection 6 of compensator 5, an additional compensator 8 flanged The connection 9 is also directly connected to the receptacle 7. The compensator 8 is rigidly connected to the vacuum pump 1 through the plate 10 by means of the remote rods 12. The receptacle 7 is through mechanical coupling elements 13 and through money-P1fir Cl-1; s elements, such as spring 14 tension, associated with the base 15 of the device.
    The vacuum pump 1 through the supports 24 rests on the base 15 of the device
    In contrast to FIG. 1 compensator 8 in FIG. 2 is not in direct vacuum communication with the receptacle 7. The flange 17 of the compensator 8 (Fig. 2) with the plate 18 is vacuum-tightly insulated from the container 7, and through the flange connection 19 the vacuum pipe 20 and the flange connection 21 of the additional compensator 8 are vacuum-connected with the fore vacuum; pump 4.
    : In the device (Fig. 3), an additional compensator B is fixed on the suction flange (flange connection 3) of the vacuum pump 1. The plate 22, attached to the vacuum pump 1 by means of the struts 24, rests on the base 15 of the device and is connected through the flange connection 23 with a compensator 8. The vacuum connection of the compensator 8 with the fore-vacuum pump 4 is similar to FIG. 2 through a flange connection 11, a plate 10, a flange connection 19, a vacuum pipe 20, and a flange connection 21. I
    The vibration damping device operates as follows.
    Vibrations arising from the operation of the vacuum pump 1 are perceived by the main compensator 5 and additionally from the compensator 1-1 8, which provides the vibration insulation of the container 7. At the same time, the atmospheric pressure forces Pj and. PJ, acting along the axis of symmetry of the device and having the same magnitude and opposite direction, are closed through the distance rods 12 and are mutually destroyed, thereby eliminating the effect of atmospheric pressure on the damping effect.
    权利要求:
    Claims (1)
    [1]
    Invention Formula
    An apparatus for damping vibrations in vacuum systems, comprising a compensator mounted between a vacuum pump and a container, characterized in that.
    in order to increase the efficiency of the damping of the expertise carried out by the Woofer, it is equipped with the installation according to the invention of the Germanskoy coaxially with the main compensator of the Democratic Republic,
     / T ///////////////////
    FIG. 2
    Up to 11 compensator compensators with the same basic static and dynamic properties, rigidly connected by means of remote rods with a vacuum pump and vacuum directly to the container or through hose connections to a forevacuum pump, or rigidly connected by means of remote rods from a part and through a vacuum connection vacuum with booster pump.
    Recognized as an invention by result // //////////////,
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    类似技术:
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    同族专利:
    公开号 | 公开日
    DD238175A3|1986-08-13|
    GB8511024D0|1985-06-12|
    JPS6117737A|1986-01-25|
    GB2159891B|1987-07-01|
    GB2159891A|1985-12-11|
    FR2563883B1|1989-12-08|
    FR2563883A1|1985-11-08|
    DE3508575A1|1985-11-07|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US4363217A|1981-01-29|1982-12-14|Venuti Guy S|Vibration damping apparatus|
    JPS57188787A|1981-05-18|1982-11-19|Toshiba Corp|Vibration-proof mechanism for vacuum pump|
    JPS6065288A|1983-09-21|1985-04-15|Hitachi Ltd|Cryopump|JPH0526746Y2|1987-07-14|1993-07-07|
    JPH0681894A|1992-08-31|1994-03-22|Hitachi Zosen Corp|Shock absorber for vacuum vessel|
    DE20202893U1|2002-02-25|2003-07-03|Sachsenring Fahrzeugtechnik Gm|Bearings arrangement for piston compressor component e.g. for passenger car, has torque support which absorbs vibration of piston compressor and reduces structure-borne noise|
    DE102004012677A1|2004-03-16|2005-10-13|Leybold Vakuum Gmbh|vacuum system|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DD26255784A|DD238175A3|1984-05-02|1984-05-02|DEVICE FOR VIBRATION DAMPING IN VACUUM SYSTEMS|
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