• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    This invention relates to compensatory accelerometers with electrostatic inverse power converters and a suspension of a sensitive element. The purpose of the invention is to increase the upper limit of the range of measured accelerations. In the device, the inertial mass is formed by six plates with conductive surfaces. The central parts of the plates form a cube, and the two side parts of each plate form the same flat protrusions that make up the electrical capacitors-sensors of the linear and angular position of the inertial mass with the electrodes of the case. In the presence of acceleration, the signals from the sensors are converted by corrective blocks into voltages proportional to linear and angular acceleration m and being the output signals of the accelerometer. Plates can be mounted on a cubic frame. 1 z.p, f-ly, 7 ill. C Q CO from 00 4 05 O SL CX cm
    公开号:SU1346058A3
    申请号:SU843731145
    申请日:1984-04-20
    公开日:1987-10-15
    发明作者:Бернар Ален；Фулон Бернар；Ле Клерк Жорж-Мари
    申请人:Оффис Насьональ Д@Этюд Э Де Решерш Аэроспасьаль О.Н.Э.Р.А. (Фирма)；
    IPC主号:
    专利说明:

    The invention relates to instrumentation, in particular to the construction of a three-axis compensation accelerometer with electrostatic inverse force transducers and a suspension of a sensitive element (inertial mass).
    The aim of the invention is to increase the upper limit of the range of measured accelerations.
    FIG. 1 shows the proposed accelerometer, a general view; figure 2 - the first version of the design of the sensitive element of the accelerometer; in fig. 3 - the same, the second option; in fig. 4 is a cross section of an accelerometer with a phousness of XOZ (Fig. 1); in fig. 5 - the same, the plane YOZ (Fig. 1); in fig. 6 - view of the electrode plate; in fig. 7 is an electrical block diagram of one accelerometer compensation circuit.
    The three-axis electrostatic accelerometer consists of a case and a sensitive element (inertial mass) located in the case with the possibility of movement relative to it. Sensitive element
    The accelerometer has two types of con-30 between the respective body electrodes 2130 and the inertial mass. To reduce the thermal sensitivity of the accelerometer, the crossmembers 14-19 are made of a material of inertial mass or another material having the same coefficient of temperature expansion.
    35
    structures
    The sensing element in the first embodiment consists of six identical rectangular plates (Fig. 2) arranged to form three pairs of parallel and spaced apart 1 and 2 plates at a distance of 1 and 2, Zi4, 5, and 6. The planes of the pairs of plates are mutually perpendicular, the middle parts of the plates assembled in the JQ sensing element form a cube, and the ends of the plates protruding beyond the surface of the cube form a wing. Sensitive plates can be made of lightweight
    Each electrode plate, for example plate 9 (Fig. 6), in addition to the active electrodes 23 and 24, which simultaneously serve to capacitively determine the position of the accelerometer's sensitive element and to create electrostatic forces of the inverse converter and suspension of the sensitive element, has side metallized surfaces 31, the bottom metallized surface 32,
    alloys of aluminum, beryllium, magnesium, titanium and are interconnected by laser welding.
    The sensitive element according to the second variant also consists of six identical rectangular plates (FIG. 3) arranged similarly to the plates in the first embodiment, however, the plates are connected in the sensitive element through a cubic frame 7. According to the second variant, the plates are made of insulating material (silicon oxide , ceramics) with a metallized surface and pasted on a cubic frame.
    The accelerometer case consists of three pairs of electrode plates 8 and 9, 10 and 11, 12 and 13 (Fig. 1), connected in pairs by cross-pieces 14-19. Plates 8 and 9 are paired with crossbars 14 and 15, plates 10 and 11 are connected with beams 16 and 17, and plates 12 and 13 are connected with crossbars 18 and 19 (Figs 1.4 and 5). Plates 8-13 with crossbars 14-19 are inserted one into the other around the inertial mass and reinforced each
    g relative to each other with fastener 20 (Fig. 1). Assembled unit of the device is installed inside the sealed enclosure.
    On each pair of electrode plas2Q tin 8-13 there is a system of four active electrodes: on the plates 8 and 9 - the electrode 21-24 (figure 4 and 5); on plates 10 and 11 - electrodes 25 and 26 and two more electrodes. (on
    25 FFIG.4 not shown); on the plates 12 and 13 - electrodes 27-30 (fig. 5) The crossbars 14-19 perform the function of calibrated adjustment pads for fixing the distances d and dj
    35
    Jq
    Jq
    Each electrode plate, for example plate 9 (Fig. 6), in addition to the active electrodes 23 and 24, which simultaneously serve to capacitively determine the position of the accelerometer's sensitive element and to create electrostatic forces of the inverse converter and suspension of the sensitive element, has side metallized surfaces 31, the bottom metallized surface 32,
    50 stops 33, which prevent the inertial mass from contacting the active electrodes.
    Conductive surface 31 has the same potential as inertia.
    5g mass, and serves as a shield to eliminate extraneous electrostatic attraction to other non-active wire electrode electrodes.
    Conductive surface 32 is brought to the reference potential in order to minimize the effect of parasitic capacitances in the capacitive determination of the position of the sensitive element of the device.
    Electrode plates 8-13 are made of an insulating material (silicon oxide, alumina). Metallization of the active electrodes and other conductive surfaces is carried out by spraying in vacuum. Electrodes and conductive surfaces are separated by grooves formed by ultrasound.
    The mechanical stops 33 have a height on the order of 20 μm and are obtained by clicking on the method.
    The three-axis electrostatic accelerometer has three identical compensation circuits, each of which, for example, on the OZ axis and on the angle y, consists (Fig. 7) of an AC generator and a DC source 35, connected via capacitance and a resistor, respectively, via a flexible conductor 36 with inertial mass. In addition, the compensation circuit includes four transformers 37-40, two preamplifiers 41 and 42, two phase-sensitive rectifiers 43 and 44, as well as a summation-subtraction device 45, correction blocks 46 and 47, and an output amplifier unit 48 .
    The proposed three-axis electrostatic accelerometer measures six components of the movement of the instrument body: three projections of the linear acceleration vector on the axes OX, OY, OZ and three projections of the angular acceleration vector on the same axes.
    Since the accelerometer operation in all three measurement channels of linear acceleration components is similar and coincides in three measurement channels of components of angular acceleration, consider it on the example of measuring linear acceleration directed along the axis OZ,
    and angular acceleration around the axis OY. I
    With the indicated acceleration components, the inertial mass moves along the OZ axis and simultaneously rotates around the OY axis. Plates 1 and 2 of the inertial mass in the circuit of the compensation circuit form with electrodes 21–24 two differential capacitive sensors for the linear and angular positions of the inertial mass relative to the accelerometer case. The signals from these differential sensors are amplified, rectified, and summed-subtracting devices are divided into two components: S ,, proportional to the displacement of the inertial mass along the OZ axis, and Sj proportional to the angle of rotation of the inertial mass around the OY axis.
    The signals S and S are converted by correction blocks of 6 voltages and and Uj., Proportional to the linear
    5 acceleration along the axis OZ and angular acceleration around the axis OY, respectively. The voltages U- and U are the outputs of the accelerometer. In addition, the voltages U and U. are transformed
    0 and amplified by an output amplifying unit that generates voltages and, Uj, and. and and. These voltages are applied to the active electrodes 21-24 to compensate for the inertial force and inertia moment acting on the inertial mass.
    As is known, in a differential electrostatic force inverter
    -,
    where F is the electrostatic force;
    C is the capacitance of the capacitor formed by the transducer electrodes;
    e is the central electrode displacement of the transducer from the neutral position; and - voltage between electrodes. But (E is the dielectric constant of the medium between the electrodes), therefore, and
     215
    In a compensation accelerometer with an electrostatic inverse force transducer, the electrostatic force F balances the inertial force ta (t is the mass of the sensitive element; a is the measured acceleration), therefore
     ,
    0
    five
    0
    five
    0
    55
    and consequently,
    t, 2 2e2 m
    TI, - „
      E s
    Since the proposed accelerometer has a greater S / m ratio compared to the prototype, when
    Given a maximum voltage U between the electrodes of the inverse power converter, it is able to measure a higher maximum acceleration than the prototype. Thus, an increase in the upper limit of the range of the accelerations measured by the instrument is achieved. If an increase in the maximum measured acceleration is not required, then with this maximum measurable acceleration, the proposed accelerometer reduces the operating voltage in the electrostatic inverse force transducer.
    权利要求:
    Claims (2)
    [1]
    1. A three-axis electrostatic accelerometer, comprising a housing and an inertial mass located in the housing with the possibility of movement relative to it, electrically connected to the housing by a flexible conductor and formed by flat rectangular identical plates interconnected and arranged in three orthogonal planes, as well as twelve fortified the body of insulated electrodes that are isolated from it, located in four in the same three orthogonal planes
    five
    about 5 about
    They each form twelve electrical capacitors with inertial mass surfaces and a block of three compensation circuits electrically connected to the inertial mass and housing electrodes, characterized in that, in order to increase the upper limit of the range of measured accelerations, the inertial mass is formed by six plates with conducting surface connected to each other and forming an internal volume bounded by these plates, which is a cube with a side that is shorter than the plate and equal to its width; and a part of each plate forms one side of the cube, and the two side parts of each plate form identical flat protrusions, while the case electrodes are fixed in pairs opposite the plates of inertial mass, and each electrode forms an electric capacitor with opposite surface flat plates of inertial mass and with half of the surface central part of the same plate.
    [2]
    2. The accelerometer according to claim 1, which is based on the fact that the plates of inertial mass are mounted on a cubic frame.
    20
    cpue.l
    2
    ffJuff.S
    di
    Zj
    Jj
    Jf
     g .6
    iSlSLr Compiler A. Trunov Editor A. Makovska. Tehred L. Oliynyk Proofreader L. Pilipesho
    Order 4937/58 Circulation 776 Subscription VNIIPI USSR State Committee
    for inventions and discoveries - 113035, Moscow, Zh-35, Raushsk nab., 4/5
    Production and printing company, Uzhgorod, Projecto st., 4
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    同族专利:
    公开号 | 公开日
    US4566328A|1986-01-28|
    FR2544865B1|1985-10-04|
    JPS59208468A|1984-11-26|
    FR2544865A1|1984-10-26|
    EP0127500A1|1984-12-05|
    DE3465791D1|1987-10-08|
    EP0127500B1|1987-09-02|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    RU2693010C1|2018-12-07|2019-07-01|Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Томский политехнический университет"|Three-axis micromechanical accelerometer|DE1137241B|1961-04-13|1962-09-27|Int Standard Electric Corp|Inertia accelerometer|
    US3272016A|1961-10-03|1966-09-13|North American Aviation Inc|Three-axis accelerometer|
    FR1462195A|1965-03-30|1966-04-15|Onera |Micro-accelerometer|
    US3680392A|1970-10-08|1972-08-01|Singer Co|Three-axis accelerometer|
    FR2124055B1|1971-02-02|1975-03-21|Onera |
    JPS5328473A|1976-08-27|1978-03-16|Katsumi Furuya|Acceleration detector|
    FR2495328B1|1980-11-28|1986-04-11|Onera |IMPROVEMENTS ON ELECTROSTATIC ACCELEROMETERS|
    FR2511509B1|1980-12-31|1986-01-31|Onera |ELECTROSTATIC SUSPENSION TRIAXIAL ACCELEROMETER OF A CRUCIFORM TEST MASS|FR2566599B1|1984-06-25|1986-09-26|Onera |ELECTROSTATIC SUSPENSION DEVICE OF A BODY|
    FR2592491B1|1985-12-31|1988-02-12|Onera |ELECTROSTATIC TRIAXIAL ACCELEROMETER WITH DOUBLE ELECTRICAL CONNECTION TO THE TEST MASS|
    US4839838A|1987-03-30|1989-06-13|Labiche Mitchell|Spatial input apparatus|
    FR2617607B1|1987-06-30|1989-12-01|Applic Gles Electrici Meca|PENDULUM RE-BALANCING ACCELEROMETER AND METHOD FOR MANUFACTURING SUCH AN ACCELEROMETER|
    US4922756A|1988-06-20|1990-05-08|Triton Technologies, Inc.|Micro-machined accelerometer|
    US5050435A|1989-07-18|1991-09-24|The Boeing Company|Position detection system for a suspended particle accelerometer|
    JP2802954B2|1989-12-28|1998-09-24|株式会社ワコー|Test method for a sensor having a force acting body and a sensor capable of implementing the method|
    WO1991010118A1|1989-12-28|1991-07-11|Wacoh Corporation|Apparatus for detecting physical quantity that acts as external force and method of testing and producing this apparatus|
    US6864677B1|1993-12-15|2005-03-08|Kazuhiro Okada|Method of testing a sensor|
    US5128671A|1990-04-12|1992-07-07|Ltv Aerospace And Defense Company|Control device having multiple degrees of freedom|
    US5177331A|1991-07-05|1993-01-05|Delco Electronics Corporation|Impact detector|
    US5852242A|1995-12-04|1998-12-22|I/O Sensors, Inc.|Apparatus with mechanical and electric springs and method for its manufacture|
    CN103344786A|2013-06-21|2013-10-09|浙江大学|Method using static electricity supporting type differential capacitance method to measure three-dimensional acceleration|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    FR8306528A|FR2544865B1|1983-04-21|1983-04-21|ELECTROSTATIC SUSPENSION ACCELEROMETERS|
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