• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Provided is a fl recognizable surface plasmon resonance sensor utilizing radius ellipsometry; and, more particularly, a high precision measurement technology, which is coupled to a vertical illuminating beam beam elliptometer using an incident angle measurement method, and a surface plasmon resonance (SPR) sensing partially deposited with a thin metal fi ch. The multichannel surface plasmon resonance sensor includes a vertical illuminating beam beam ellipsoometer, in which the light is polarized; a surface plasmon resonance (SPR) sensing portion which is provided on the objective lens portion of the beam ellipsoometer to generate SPR in accordance with a single angle change of the polarized light; and a flow unit which supplies a buffer solution containing a biomaterial bond to or separating from the thin metal film which generates the surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are detected simultaneously. (Fig. 2)
    公开号:SE537028C2
    申请号:SE1150497
    申请日:2009-11-30
    公开日:2014-12-09
    发明作者:Hyun Mo Cho；Yong Jai Cho；Won Chegal
    申请人:Korea Res Inst Of Standards；
    IPC主号:
    专利说明:

    537 028 The resonance phenomenon of the surface plasma is applied to a polarizer, or is applied mainly to a biosensor, i.e. an optochemical sensor by exploiting the sensitivity with respect to the polarizing properties of light.
    A sensor which utilizes the resonant damping effect of the surface plasma, i.e. a surface plasma sensor is used to measure a change in a concentration, a thickness or refractive index of a dielectric substance in contact with the metal surface, and can also be used as a biosensor to measure a change in a concentration of a sample such as a real-time biomaterial without labeling.
    Fig. 1 shows an example of a conventional SPR sensor.
    As shown in the drawing, the SPR sensor comprises a light source 110, a polarizer 120 for polarizing light emitted from the light source 110, a prism 130 in which the polarized light is incident and then reflected, a glass substrate 140 which is provided on a surface of the prism 130. and to which the polarized light passing through the prism 130 is incident, a thin metal film 150 which is coated on the glass substrate 140 with a nanometer dimensional thickness so that the polarized light passing through the glass substrate 140 is reflected by the surface plasmon resonance, and a light receiving portion 160 for detecting the light reflected by the thin metal film and passed through the glass substrate 140 and the prism 130. At the same time, the thin metal film is in contact with a sample 170. If the concentration, thickness or refractive index of the sample 170 changes between the thin metal film 150 and the sample 170, the conditions will for SPR to change accordingly. Thus, the amount of reflected light changes to the light receiving portion 160, and the change in the concentration in the sample 170 in contact with the thin metal film 150 is measured by utilizing this phenomenon.
    A conventional SPR sensor uses only reflectability measurements regarding the intensity of light or an angular change which indicates the minimum reflectability. However, a surface plasmon resonance (SPR) sensor using beam profile ellipsometry can obtain phase information as well as the amplitude of the light corresponding to reflectability information. In particular, since an ellipsometric phase change is sensitive under an optimal SPR ratio, it is possible to obtain high precision measurement accuracy.
    In particular, when a low molecular weight material which is used as a new drug candidate is conjugated to the target protein, it is required to provide the extremely accurate precision measurement. In the optimal SPR ratio, it is possible to improve the measurement accuracy by measuring the ellipsometric phase change. Summary of the Invention and Solution to the Problem An embodiment of the present invention is directed to providing an SPR sensor utilizing beam profile ellipsometry which has high precision measurement accuracy by utilizing phase change that is sensitive under an optimal SPR ratio.
    To achieve the object of the present invention, the present invention provides a multi-channel surface plasmon resonance sensor utilizing beam profile ellipsometry, comprising a vertical illumination beam beam ellipsometer in which the light is polarized, a portion of the polarized light is focused into a thin metal film 42 by utilizing a then the polarized light reflected from the thin metal film 42 is detected; a surface plasmon resonance (SPR) sensing portion 40 provided on the objective lens portion of the beam ellipsometer to generate surface plasmon resonance (SPR) in accordance with an angular change of the polarized light; and a flow unit 1 which supplies a buffer solution containing a biomaterial bonding to or separating from the thin metal film generating surface plasmon, wherein SPR and the ellipsometric phase change by change in an angle and a wavelength are detected simultaneously.
    Preferably, the vertical illuminating beam beam elliptometer comprises a light source 10; a polarizer 20 for polarizing the emitted light from the light source 10; a beam splitter 30 for dividing the polarized light from the polarizer 20; an objective lens portion for focusing a portion of the polarized divided light from beam splitter 30 into a thin metal film having multiple channels; an analysis means 50 for polarizing the light reflected from the thin metal film 42 and passing through the beam splitter 30, and then detecting the polarized light; an optical detector 60 for detecting amplitude and phase of the light detected by the analyzer; and a processing device 70 for processing the ellipsometric phase change which has been detected by the optical detector 60.
    Preferably, light source 10 is one of a light source for emitting a short wavelength or a wavelength band of an ultraviolet beam, visible beam or an infrared beam, and a wavelength variable light source of a wavelength variable laser or diode.
    Preferably, the analyzing means 50 is one of an analyzer, a simple polarizing beam splitter, a beam splitter and a polarizer.
    Preferably, the SPR sensing portion 40 includes a first lens 41, which is a converging lens for focusing a portion of the polarized light; and a second lens 43 which acts as a high numerical objective lens aperture for a microscope together with the first lens 41, and which is formed into a single spherical or non-spherical lens or the group of spherical or non-spherical lenses. to have the thin metal film 42 deposited on an underside thereof.
    Preferably, the SPR sensing portion 40 comprises a third lens 44 which has the function of focusing a portion of the polarized light and which is formed into an integrating type high objective lens aperture or solid immersion lens (SIL) having a plurality of lenses; a glass substrate 45, which is provided on an underside of the third lens 44 to have the thin metal film 42 deposited on an underside thereof; and a matching refractive index material 46 which is applied between the third lens 44 and the glass substrate 45 to match a refractive index of the third lens 44 and the refractive index of the glass substrate 45 to each other.
    Preferably, the analyzing means 50 includes a second polarizer 51 for polarizing the light reflected from the thin metal film 42 and passed through the SPR sensing portion 40 and the beam splitter 30; a slit 52 for passing the polarized light of the second polarizer 51; and a monochromator 53 for detecting the polarized light passing through the gap 52.
    Preferably, the multichannel surface plasmon resonance sensor further comprises means for rotating the polarizer 20 or the second polarizer 51, or for modulating the polarization of the light.
    Preferably, the multi-channel surface plasmon resonance sensor further comprises means for rotating the second polarizer 51 in the vertical direction to a light direction, so that the polarized light of the second polarizer 51 can be independently detected at each incident angle of the monochromator 53.
    Preferably, the multi-channel surface plasmon resonance sensor further comprises a compensator 80 which is arranged between the beam splitter 30 and the SPR sensing portion 40 or between beam splitter 30 and the optical detector 60 to compensate for the divided light from beam splitter 30.
    Preferably, the multi-channel surface plasmon resonance sensor further comprises means for rotating the compensator 80 in a vertical direction to a light direction, so that the light compensated by compensator 80 can be detected at each incident angle of the polarized light detecting portion 50.
    Preferably, the multi-channel surface plasmon resonance sensor further comprises a collimator 90 which is arranged between the light source 10 and the polarizer 20 to convert the light emitted from the light source 10 into parallel light and then transmits the parallel light to the polarizer 20. 10 15 20 25 30 537 028 Preferably, the SPR sensing portion 40 includes a first lens 41, which is a converging lens for focusing a portion of the polarized light; a second lens 43 which is formed into a single spherical or non-spherical lens or the group of spherical or non-spherical lenses to provide a high numerical objective lens aperture for a microscope together with the first lens 41; a glass substrate 45 (not shown) provided on an underside of the second lens 43 and a underside of which is deposited with the thin metal film 42; and a matching refractive index material (not shown) which is applied between the second lens 43 and glass substrate to match a refractive index of the second lens 43 and a refractive index of glass substrates with each other.
    Preferably, the converging lens 41 is formed into one of a biconvex shape, a plano convex shape and a meniscus shape.
    Advantages of the Invention In accordance with the present invention, it is possible to measure a conjugation property and a dynamic conjugation property of biomaterial in real time by simultaneously measuring the amplitude and phase of light and thus simultaneously measuring the ellipsometric phase change and SPR measurement caused by the change in angle and wavelength. Furthermore, since it is possible to perform the measurement in optimal SPR conditions in which the phase change is sensitive, it is possible to perform the higher more accurate measurement than the conventional SPR measurement using only the reflectability.
    While the present invention has been described with respect to particular embodiments, it will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims.
    Brief Description of the Figures Fig. 1 is a schematic view of a conventional surface plasmon resonance (SPR) sensor, Fig. 2 is a view showing a structure of an SPR sensor using beam profile ellipsometry in accordance with the present invention; Fig. 3 is a view showing a Fig. 4 is a view showing still another type of structure of an SPR sensor using beam profile ellipsoometry in accordance with the present invention, Fig. 5 is a graphical graph showing a change in the SPR ratio according to a wavelength when the BK7 lens is used, Fig. 6 is a graphical curve showing a change in the reflectivity according to an angular change which has a thickness of 45nm is coated on SF10 glass and a wavelength is 860nm, Fig. 7 is a graphical curve which shows a change in the ellipsometric coefficient in accordance with a vi key change, when a thin metal film having a thickness of 45nm is coated on SF10 glass and a wavelength is 860nm, Fig. 8 is a graphical curve showing a change in SPR angle according to a wavelength, Fig. 9 is a graphical curve which shows an inclination of a phase change in accordance with a wavelength and an angle.
    Main elements 1: flow unit 1a: thin film 1b: 10: 20: 30: 40: 41: 42: 43: 44: 45: 46: 50: 51: 52: 53: 60: 70: 80: 90: buffer solution light source polarizer beam splitter SPR sensing portion first lens thin metal film second lens third lens glass substrate matching refractive index material polarizing detecting portion second polarizer span monochromator optical detector processing unit compensator collimator 10 15 25 25 30 35 537 028 Embodiments of the Invention and more particularly, to a high-precision measurement technology coupled to a polarizer, an ellipsometer which utilizes an analyzer, an SPR sensing member (or a high numerical objective lens aperture, a matching refractive index material, a glass substrate deposited with a thin metal film), to allow real-time SPR measurements. The beam profile ellipsometry can simultaneously measure the amplitude and phase of the light reflected from a surface of a sample, especially if the ellipsometry is performed under optimal surface plasmon resonance (SPR) conditions in which a phase change is sensitive, it is possible to perform measurements which have higher precision than a conventional SPR measurement method which only uses reflectability. A conventional light beam lipometer is used in a semiconductor sample and has no connection with an SPR measurement of the present invention.
    In the following, surface plasmon resonance sensor using beam profile ellipsometry will be fully described with reference to the drawings.
    Fig. 2 is a view showing a structure of an SPR sensor with beam profile ellipsometry in accordance with the present invention, fi g. Fig. 3 is a view showing another type of structure of an SPR sensor utilizing beam profile ellipsometry in accordance with the present invention, and Fig. 4 is a view showing yet another type of structure of an SPR sensor utilizing beam profile ellipsometry in accordance with the present invention. .
    As shown in the figures, an SPR sensor utilizing beam profile ellipsometry in accordance with the present invention includes a vertical illumination beam beam elliptometer (not shown) having a light source 10, a polarizer 20 for polarizing light emitted from the light source 10, a beam splitter 30 for dividing the polarized light, an objective lens 41, 43 for focusing a portion of the divided polarized light into a thin metal film 42, a polarized light detecting portion 50 for polarizing the light reflected from the thin metal film 42, and detecting the polarized light, an optical detector 60 for detecting amplitude and phase of the polarized light and simultaneously detecting SPR and ellipsometric phase change caused by the angular change and phase change, and a processing device 70 for processing the detected SPR and the ellipsometric phase change; an SPR sensing portion 40 which includes the thin metal film 42 which is coupled to the objective lens 43 of the collecting beam ellipsoometer to generate the SPR 10 caused by angular changes; and a multi-channel flow unit 1 which supplies a buffer solution comprising a biomaterial bonding to or separating from the thin metal film 42 which generates the surface plasma.
    As shown in Figs. 2 and 3, the vertical light collecting beam ellipse meter (not shown) may use a polarizer, a beam splitter and an analyzer, or a simple polarizing beam splitter may be used instead of the polarizer, beam splitter and analyzer, or the beam splitter and polarizer may be used.
    The light source 10 can emit a short wavelength or a wavelength band of an ultraviolet beam, visible beam or an infrared beam. Further, the light source 10 may be a wavelength variable light source of a wavelength variable laser or diode and the like to perform the measurement at a desired wavelength appropriate to the optimum sensitivity ratio of SPR according to a thickness difference in the thin metal film 42.
    The task of the polarizer 20 is to polarize the light emitted from the light source 10.
    The beam splitter 30 divides the polarized light from the polarizer 20 and transmits a portion of the divided light to the SPR sensing portion 40.
    The objective lens 41, 43 of the SPR sensing part 40 focuses towards the thin metal film 42 a part of the polarized divided light from beam splitter 30. At this time, the flow unit 1 which provides access to the buffer solution 1b including biomaterial provided on the underside of the thin the metal film 42 comprising a thin biofilm 1a and a small channel 1c which is formed at an underside of the thin biofilm 1a so that it can be filled with the buffer solution 1b.
    For example, the SPR sensing portion 40 includes two types of lenses, i.e., a first lens 41, which is a converging lens for focusing a portion of the polarized divided light from beam splitter 30, and a second lens 43 as the thin metal film 42. is deposited on a surface of the lens, to obtain a high numerical objective lens aperture together with the first lens 41.
    The converging lens can be formed into a biconvex shape, a plano convex shape or a meniscus shape.
    After a portion of the polarized divided light from the beam splitter 30 is focused by the first lens 41, the polarized light focused by the first lens 41 is focused on the thin metal film 42 through the second lens 43. At this time, the second lens is 43 formed into a single spherical or non-spherical lens or the group of spherical or non-spherical lenses and whose function is to increase a maximum angle of incidence of the lens. The second lens 43 may comprise the thin metal film 427 deposited on a lower flat surface. Alternatively, in a state where the thin metal film 42 is not deposited on the second lens 43, the second lens 43 may comprise a glass substrate (not shown) which is provided on an underside of the second lens 43 to have the thin metal film 42 therefrom. deposited on an underside, and a matching refractive index material (not shown) which is applied between the second lens and the glass substrate to match a refractive index of the second lens 43 and a refractive index of the glass substrate with each other. The thin metal film 42 is formed of a metal material such as Au and Ag and has the task of generating SPR.
    As another example (Fig. 3), the SPR sensing member 40 may include an integrated lens, the glass substrate, and the matching refractive index material. The SPR sensing member 40 includes a third lens 44, which has functions for focusing a portion of the polarized divided light from the beam splitter 30 and which is formed into a highly integrated type of objective lens aperture or solid immersion lens (SIL) having a plurality of lenses. , the glass substrate 45 provided on an underside of that of the third lens 44 to have the thin metal film 42 deposited on an underside thereof, and a matching refractive index material 46 which is applied between the third lens 44 and the glass substrate 45 to match a refractive index of the third lens 44 and a refractive index of glass substrate 45 with each other. Here, matching refractive index oil and thin film are used as matching refractive index material 46.
    Preferably, the glass substrate deposited with the thin metal film 42 has a structure that can be easily replaced with a new one. In cases where the matching refractive index material 46 is not used, since the total reflection occurs in the air, it is impossible to perform the SPR measurement.
    If a portion of the polarized divided light from the beam splitter 30 is focused by the third lens 44, the focused light is incident on the glass substrate 45 of the matching refractive index material 46, and the incident polarized light is focused on the thin metal film 42 which is deposited on the underside of the glass substrate 45 and in contact with the flow unit 1 to supply the buffer solution containing the biomaterial.
    If a concentration, thickness or refractive index of the thin biofilm 1a changes in the multi-channel flow unit 1, the SPR ratio changes and the light is reflected and emitted to the glass substrate 45. And the emitted light is passed through the matching refractive index material 46 and then passed to the third lens 44. The light directed toward the third lens 44 passes through beam splitter 30 and is then detected by the polarized light detecting portion 50. The lens used in the present invention has a high numerical objective lens aperture, a S11 lens and the like.
    Here, the maximum incident angle of the light incident on the lens is determined by a numerical aperture NA of the lens and a refractive index n of a medium. _. The polarized light detecting member 50 has the function of polarizing the reflecting light from the thin metal film 42 and passing through the SPR sensing member 40 and the beam splitter 30 and then detecting the polarized light.
    Preferably, the polarized light detecting portion 50 includes a second polarizer 51 for polarizing the reflecting light from the thin metal film 42 and passing through the SPR sensing portion 40 and the beam splitter 30, a gap 52 for passing the light polarized by the second polarizer. 51, and a monochromator 53 for detecting the polarized light passing through the gap 52.
    The task of the optical detector 60 is to detect the amplitude and phase of the polarized light which has been detected by the analyzer 50.
    The processing unit 70 processes the SPR and the ellipsometric phase change detected by the optical detector 60.
    The machining method in the SPR sensor of Figs. 2 and 3 is a non-incident surface / multi-incident angle measurement method, which is described below.
    A signal corresponding to a unit device (one unit pixel in the case of CCD) of the optical detector 60 is read along a path that a diameter is within a desired distance from a center of a signal intensity, and then processed to obtain an ellipsometric coefficient (which refers to Korean Patent Application No. 10-2007-0115398).
    The signal intensity is lo j 1+ az cos 2ç0 + a4 cos4rpj _and the ellipsometric coefficient y /, A is calculated using the coefficient aTa, The ellipsometric coefficient 1/1 which is relevant for the amplitude is used to calculate the angular change in the SPR measurement and denotes a value in the optimum resonance ratio 10 10 15 20 25 30 537 028. An amount of motion of the angle corresponds to an amount of motion of the SPR angle, and a change in a value of y / can also be used to calculate the resonant angle. The coefficient A denoting the phase change can be used to perform accurate SPR measurements, and the phase change is maximum under the optimal SPR ratio (refer to Figs. 6 and 7). Therefore, if the change in a phase value in optimal SPR conditions is measured, it can be used in the adsorption dynamic property of different biomaterials (eg the adsorption dynamic property of a low molecular weight material used as a new drug candidate, etc.), which requires a accurate measurement, and it can also be used in the calculation and determination of the SPR angle by simultaneously using the amplitude and the phase. In the processing method in the sensor of Fig. 4, an ellipsometric coefficient z //, A is calculated from the principle that the ellipsometry which has a polarizer sample analyzer (PSA) or polarizer sample compensator analyzer (PSCA) type structure in each unit device (device pixels in case of CCD).
    In the ellipsometric equation, a complex reflection coefficient ratio p is a reflection coefficient ratio (rs, rp) with respect to p-wave and s-wave, and can be expressed as follows. rip = l = tan * Pe A rs In addition, it is preferable to further provide a collimator 100 which is arranged between the light source 10 and the polarizer 20 to convert the emitted light from the light source 10 to parallel light and then transmit the parallel light to the polarizer. 20.
    Furthermore, it is preferable to further provide a compensator 80 which is arranged between beam splitter 30 and the SPR sensing portion 40 or between beam splitter 30 and the optical detector 60 to compensate for the divided light from beam splitter 30.
    As shown in Fig. 4, a gap as well as a rotating member or a polarization modulating member (not shown) may be further provided for rotating the second polarizer 51 in a vertical direction toward a light direction, so that the polarized light through the second polarizer 51 can be independently detected at each incident angle by the optical detector 70 to grasp a wavelength property. Similarly, a rotating means (not shown) may be further provided for rotating the compensator 80 in the vertical direction to the light direction, so that the light compensated by the compensator 80 can be independently detected at each incident angle. of the polarized light detecting portion 50.
    The optimum SPR ratio easily changes the wavelength and angle of the light according to a thickness of the thin metal film 42 deposited on the glass substrate.
    Therefore, if an ellipsometric structure in which the polarizer, or compensator is rotated, is used, it is possible to perform the measurement in the optimum SPR ratio without degrading the precision, which may occur due to the error of a thickness or physical property, when the thin the metal film 42 is manufactured. In a method of simultaneously measuring the wavelength and the angle which utilizes the ellipsometric structure in which the polarizer or compensator is rotated, it is possible to perform the measurement in real time under the optimum SPR ratio which can be changed according to a machining ratio. The phase measurement which uses the ellipsometry is most sensitive in the optimal SPR ratio. However, since the refractive index and the thickness of the thin metal film 42 which is an important part of the SPR sensor can be easily changed in accordance with a manufacturing operation, it is possible to easily obtain the optimal SPR ratio within a measuring angle and a wavelength range and thus it is possible to simultaneously use the advantage of SPR and ellipsometry.
    A reference number 100 which is not described is an interference filter.
    Embodiments 1. Measurement of angle and wavelength generating SPR Angle and wavelength generating SPR have been measured and shown in Fig. 5, wherein the wavelength was 750 to 1100nm, the glass substrate 45 was formed of BK7, the thin metal film was formed of Au, a thickness of the thin metal film was 45nm, and a refractive index buffer solution was 1,333.
    As shown in the drawing, if the refractive index of the lens and glass substrate increases further, SPR can be generated in a smaller angle and shorter wavelength range. 2. measurement of the change in reflectivity and ellipsometric coefficient according to angle The reflectivity and ellipsometric coefficient according to angle have been measured and shown in Figs. 6 and 7, where the wavelength was 850, glass substrate 45 was formed of SF10, the thin metal film was formed of Au , a thickness of the thin metal film was 45nm, a thickness of the thin biofilm is Onm and 1nm (n = 1.45), and a refractive index of the buffer solution was 1,333.
    As shown in Fig. 6, the ellipsometric coefficient relevant to the amplitude provides information such as the change in the SPR angle, and as shown in Fig. 7, phase change is sensitively changed under optimal SPR conditions.
    By taking advantage of the sensitive change, it is possible to perform the high precision measurement of the surface conjugating properties of biomaterials in real time.
    In particular, when a low molecular weight material is used as a new drug candidate is conjugated to the target protein, it is required to provide the extremely accurate precision measurement. In this case, it is possible to perform the measurement which has higher precision than a conventional SPR measurement method using only the reflectability. 3. measurement of change in SPR angle according to wavelength The change in SPR angle according to wavelength has been measured and shown in Figs. 8 and 9, where the wavelength was 750 to 1000 nm, the lens was formed by SF 10, the thin the metal film was formed of Au, a thickness of the thin metal film was 44 nm and a refractive index of the buffer solution was 1,333.
    Fig. 8 shows that the SPR angle is changed according to the wavelength and fi g. 9 shows that an inclination of the phase change is changed in accordance with the angle and the wavelength and it is also possible to select the angle and the wavelength in which the inclination of the phase change becomes maximum. 13
    权利要求:
    Claims (13)
    [1]
    A surface plasmon resonance sensor utilizing beam profile ellipsometry, comprising: a vertical illumination beam beam ellipsoometer in which the light is polarized, a portion of the polarized light is focused on a thin metal film using an objective lens portion, and then the polarized light reflected from the thin film is detected; a surface plasmon resonance (SPR) sensing portion which is provided on the objective lens portion of the beam ellipsoometer to generate SPR according to an angular change of the polarized light; and a flow unit which supplies a buffer solution containing a biomaterial bond to or separating from the thin metal film generating the surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are detected simultaneously, wherein the SPR sensing member comprises: a first lens which is a converging lens for focusing a portion of the polarized light; and a second lens which acts as a high numerical objective lens aperture for a microscope together with the first lens, and which is formed into a simple spherical or non-spherical lens or the group of spherical or non-spherical lenses to have the thin metal film deposited on an underside hence.
    [2]
    The surface plasmon resonance sensor of claim 1, wherein the vertical illumination-collecting beam ellipsometer comprises a light source; a polarizer for polarizing the emitted light from the light source; a beam splitter for dividing the polarized light from the polarizer; an objective lens portion for focusing a portion of the polarized divided light from beam splitters into a thin metal film having multiple channels; an analyzing means for polarizing the light reflected from the thin metal film and passing through the beam splitter and then detecting the polarized light; an optical detector for detecting amplitude and phase of the light detected by the analyzing means; and a processing device for processing the ellipsometric phase change detected by the optical detector. 14 10 15 20 25 30 35 537 028
    [3]
    The surface plasmon resonance sensor of claim 2, wherein the light source is one of a light source for emitting a wavelength or a wavelength band of an ultraviolet beam, visible beam or an infrared beam, and a wavelength variable light source of a wavelength variable laser or diode.
    [4]
    The surface plasmon resonance sensor of claim 2, wherein the analyzing means is one of an analyzer, a single polarizing beam splitter, a beam splitter and a polarizer.
    [5]
    The surface plasmon resonance sensor of claim 1, wherein the SPR sensing member comprises: a third lens whose function is to focus a portion of the polarized light and which is formed into an integrated type of high numerical objective lens aperture or solid immersion lens (SIL) which has a number of lenses; a glass substrate which is provided on an underside of the third lens to have the thin metal film deposited on an underside thereof; and a matching refractive index material which is applied between the third lens and the glass substrate to match a refractive index of the third lens and the refractive index of glass substrates with each other.
    [6]
    The surface plasmon resonance sensor of claim 2, wherein the analyzing means comprises: a second polarizer for polarizing the light reflected from the thin metal film and passed through the SPR sensing portion 40 and the beam splitter; a slit to pass the polarized light of the second polarizer; and a monochromator for detecting the polarized light passing through the crack.
    [7]
    The surface plasmon resonance sensor of claim 6, further comprising means for rotating the polarizer or the other polarizer, or for modulating the polarization of the light.
    [8]
    The surface plasmon resonance sensor of claim 6, further comprising means for rotating the second polarizer in the vertical direction to a light direction so that the polarized light of the second polarizer can be independently detected at each incident. angle of the monochromator.
    [9]
    The surface plasmon resonance sensor of claim 2, further comprising a compensator which is arranged between beam splitter and the SPR sensing part or between beam splitter and the optical detector to compensate for the divided light from the beam splitter.
    [10]
    The surface plasmon resonance sensor of claim 9, further comprising means for rotating the compensator in the vertical direction to a light direction so that the compensated light of compensator can be detected at each incident angle of the polarized light detecting portion.
    [11]
    The surface plasmon resonance sensor of claim 2, further comprising a collimator which is arranged between the light source and the polarizer to convert the light emitted from the light source into parallel light and then transmit the parallel light to the polarizer.
    [12]
    The surface plasmon resonance sensor of claim 1, wherein, the SPR sensing portion comprises: a first lens which is a converging lens for focusing a portion of the polarized light; a second lens which is formed into a single spherical or non-spherical lens or the group of spherical or non-spherical lenses to form a high numerical objective lens aperture for a microscope together with the first lens; a glass substrate provided on an underside of the second lens and of which an underside is deposited with the thin metal film; and a matching refractive index material which is applied between the second lens and glass substrate to match a refractive index of the second lens and a refractive index of glass substrates with each other.
    [13]
    The surface plasmon resonance sensor of claim 1 or 12, wherein the converging lens is formed into one of a biconvex shape, a plano convex shape and a meniscus shape. 16
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    申请号 | 申请日 | 专利标题
    KR1020080119912A|KR101029473B1|2008-11-28|2008-11-28|Surface plasmon resonance sensor using beam profile ellipsometry|
    PCT/KR2009/007084|WO2010062150A2|2008-11-28|2009-11-30|Surface plasmon resonance sensor using beam profile ellipsometry|
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