专利摘要:
According to one aspect, cutting tools are described which include coatings adhered to the cutting tool. A coated cutting tool according to certain embodiments comprises a substrate and a coating adhered to the substrate, the coating comprising at least one composite layer deposited by chemical deposition from vapor phase, the layer comprising an alumina nitride phase and a metal oxide phase, the metal oxide phase comprising at least one oxide of a metallic element selected from group IVB of the Periodic Table.
公开号:SE1450067A1
申请号:SE1450067
申请日:2014-01-24
公开日:2014-07-26
发明作者:Volkmar Sottke;Doris Lenk;Hartmut Westpahl;Hendrikus Van Den Berg;Peter Leicht;Mark Greenfield;Yixiong Liu
申请人:Kennametal Inc;
IPC主号:
专利说明:

The metal oxinitride phase comprises at least one oxinitride of a metallic element selected from Group IVB of the Periodic Table.
According to another aspect, methods for making coated cutting tools are described herein. According to certain embodiments, a method of making a coated cutting tool, arranging a substrate and depositing over the substrate by chemical deposition from a vapor phase, comprising at least one composite coating layer comprising an alumina nitride phase and a metal oxide phase, the metal oxide phase comprising at least one oxide of a metallic element selected from Group IVB of the Periodic Table.
According to certain embodiments, the metal oxide phase comprises a number of oxides of metallic elements selected from Group IVB of the Periodic Table. The deposited composite layer may also comprise a metal oxynitride phase in addition to the aluminoxinitride and metal oxide phases, the metalloxynitride phase comprising at least one oxinitride of a metallic element selected from Group IVB of the Periodic Table.
These and other embodiments are further described in the following detailed description.
BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 illustrates a substrate for a coated cutting tool according to an embodiment described herein.
Figure 2 is a photomicrograph of a portion of a coated indexable insert having layers with a coating architecture according to an embodiment described herein.
Figure 3 is an image of a cross section taken by scanning electron microscopy (SEM) of a coated indexable insert according to an embodiment described herein.
Figure 4 is an image taken by scanning electron microscopy (SEM) of a surface of a composite layer according to an embodiment described herein.
DETAILED DESCRIPTION Embodiments described herein may be more readily understood by reference to the following detailed description and examples and by reference to descriptions preceding and following these examples. However, the elements, apparatus and methods described herein are not limited to the specific embodiments presented in the detailed description and examples. It is to be understood that these embodiments are merely intended to illustrate the principles of the present invention. A large number of modifications and adaptations will be apparent to those skilled in the art without departing from the spirit and scope of the invention.
I. Coated cutting tools According to one aspect, cutting tools are described which have adhesive coatings which, according to certain embodiments, exhibit desirable wear resistance and increased cutting life. A coated cutting tool according to certain embodiments comprises a substrate and a coating adhering to the substrate, the coating comprising at least one composite layer deposited by chemical deposition from vapor phase, the layer comprising an alumina nitride phase and a metal oxide phase, the metal oxide phase comprising at least one oxide of a metallic element selected from Group IVB of the Periodic Table.
The metal oxide phase in a composite layer may comprise a plurality of oxides of metallic elements selected from Group IVB of the Periodic Table. A composite layer for a coating described herein may further comprise a metalloxynitride phase in addition to the aluminoxynitride and metal oxide phases, the metalloxynitride phase comprising at least one oxinitride of a metallic element selected from Group IVB of the Periodic Table. The groups in the periodic table described herein have been identified by their CAS designation (CAS number).
With reference to specific components, a coated cutting tool described herein comprises a substrate. Substrates for coated cutting tools may comprise any material which does not depart from the present invention. According to some embodiments, a substrate is cemented carbide, carbide, ceramic, metal ceramic or steel.
According to certain embodiments, a cemented carbide substrate consists of tungsten carbide (WC). Tungsten carbide may be present in a substrate in an amount of at least about 70% by weight. According to some embodiments, tungsten carbide is present in a substrate in an amount of at least about 80% by weight or in an amount of at least about 85% by weight. In addition, a metallic binder material for a cemented carbide substrate may be a cobalt or a cobalt alloy. Cobalt, for example, can be present in a cemented carbide substrate in an amount ranging from about 3% to about 15% by weight.
According to some embodiments, cobalt is present in a cemented carbide substrate in an amount ranging from about 5% to about 12% by weight or from about 6% to about 10% by weight. A cemented carbide substrate may further have a zone of enrichment of binder material which begins at and extends inwardly from the surface of the substrate.
A cemented carbide substrate may also comprise one or more additives, such as, for example, one or two of the following elements and / or compounds thereof: titanium, niobium, vanadium, tantalum, chromium, zirconium and / or halium. According to certain embodiments, titanium, niobium, vanadium, tantalum, chromium, zirconium and / or haium form carbides in solid solution with the tungsten carbide (WC) in the substrate. In some embodiments, the substrate is one or more carbides in solid solution in an amount ranging from about 0.1 weight percent to about 5 weight percent. A cemented carbide substrate may additionally comprise nitrogen.
In certain embodiments, a substrate for a coated cutting tool described herein comprises one or more cutting edges formed at the junction between the chip surface and the clearance surface of the substrate. Figure 1 illustrates a substrate for a coated cutting tool according to an embodiment described herein. As illustrated in Figure 1, the substrate (10) has cutting edges (12) formed at the junction between the chip surface (14) of the substrate and the clearance surfaces (16) of the substrate. The substrate also includes an opening (18) that can be used to anchor the substrate (10) to a tool holder.
According to certain embodiments, a substrate for a coated cutting tool is a insert, a drill bit, a saw blade or other cutting apparatus.
As described herein, a coating adhered to the substrate comprises at least one composite layer deposited by chemical deposition from a vapor phase, the composite layer comprising an alumina nitride phase (AlON) and a metal oxide phase comprising at least one oxide of a metallic element which is selected from group IVB in the periodic table. The AlON phase may be present in the composite layer in any amount that does not deviate from the purpose of the present invention. The AlON phase, for example, may be the parent phase of the composite layer, and serve as the matrix for the metal oxide and metal oxynitride phases as further discussed herein. In some embodiments, the AlON phase is present in the composite layer in an amount selected from Table I.
Table I - AlON phase in the composite layer (volume percent) AlON phase (vol.%) 250 260 270 280 85-99 90-99 The levels of aluminum, nitrogen and oxygen in an AlON phase described herein can be varied according to the selected CVD parameters. The aluminum content of the AlON phase can, for example, be in the range from 20 to 50 atomic percent (A%). According to some embodiments, the content of aluminum in the AlON phase ranges from 25 to 40 atomic percent or from 32 to 38 atomic percent. The nitrogen content in the AlON phase can be in the range from 40 to 70 atomic percent. According to some embodiments, the nitrogen content in the AlON phase ranges from 55 to 70 atomic percent or from 63 to 67 atomic percent.
Furthermore, the oxygen content of the AlON phase can be in the range from 1 to 20 atomic percent.
In some embodiments, the oxygen content of the AlON phase is in the range of from 2 to 15 atomic percent or from 4 to 6 atomic percent.
In some embodiments, the AlON phase is polycrystalline. The AlON phase may, for example, have a hexagonal crystalline structure, a cubic crystalline structure or a mixture of hexagonal and cubic crystalline structures. Alternatively, the AlON phase may be amorphous The AlON phase may further have a mixture of crystalline and amorphous structures, the crystalline structures being hexagonal, cubic or a combination thereof. According to some embodiments, the AlON phase has a grain structure with grains that have sizes in the range from 10 nm to 2 μm.
As described herein, the composite layer also comprises a metal oxide phase comprising at least one oxide of a basic metallic element selected from Group IVB of the Periodic Table. The metal oxide phase can be, for example, ZrOg or HfOg. In some embodiments, the metal oxide phase in a composite layer comprises a plurality of oxides of metallic elements selected from Group IVB of the Periodic Table.
The metal oxide phase may, for example, be a mixture of ZrOg and HfOg.
In some embodiments, the metal oxide phase is a minor phase in the composite layer and is part of or distributed in the matrix phase of AlON. In some embodiments, the metal oxide phase is present in the composite layer in an amount selected from Table II.
Table II - Metal oxide phase in the composite layer (volume percent) Metal oxide phase (Vol.%) 1-15 2-12 3-10 According to some embodiments, the metal oxide phase is polycrystalline. The metal oxide phase may, for example, have a cubic crystalline structure, a monoclinic crystalline structure or a tetragonal crystalline structure or mixtures thereof. According to some embodiments, the metal oxide phase has a grain structure with grains that have sizes in the range from 10 nm to 2 μm. According to some embodiments, grains in the metal oxide phase have spherical or elliptical geometry.
The composite layer of a coating described herein may further comprise, in addition to the aluminoxynitride and metal oxide phases, a metalloxynitride phase, the metal oxynitride phase comprising at least one oxinitride of a metallic element selected from Group IVB of the Periodic Table. The metal oxynitride phase may be, for example, titanium oxonitride (TiON). In some embodiments, the metal oxynitride phase comprises a plurality of oxinitrides of metallic elements selected from Group IVB. In some embodiments, a metal oxynitride phase has the formula MOXNLX, wherein M is selected from Group IVB metallic elements in the Periodic Table and wherein X = 0.1 - 0.9.
In some embodiments, the metal oxynitride phase is polycrystalline. According to such embodiments, the metal oxynitride phase may have a cubic crystalline structure.
The metal oxynitride phase may further exhibit an ultra-fine grain structure with grains having sizes in the range of 1 nm to 20 nm. In some embodiments, the metal oxynitride phase is a minor phase in the composite layer and is part of or distributed in the matrix phase of AlON. In some embodiments, the metal oxynitride phase is present in the composite layer in an amount selected from Table III.
Table III - Metalloxynitride Phase in the Composite Layer (Volume Percent) Metalloxynitride Phase (Vol.%) 0-10 0.5-10 1-9 2-8 The Volume Percentages of the AlON Phase, the Metal Oxide Phase and the Metalloxynitride Phase in a Composite Layer Described herein , can be determined using inductively coupled plasma emission spectroscopy (GDOES) and energy dispersive X-ray spectrometry (EDX / EDS). In one embodiment, the composition of a composite layer for a coating described herein can be analyzed by inductive coupled plasma emission spectroscopy (GDOES) using a GDA750 Glow Discharge Spectrometer (Spectrum Analytic Ltd., Hof, Germany). with a fl corner diameter of 1.0 mm. Removal of the sputtered material for analysis can be administered in steps of 0.5 μm from the top of the coating to the side facing the substrate. Furthermore, further analysis of a composite coating layer described herein can be performed by energy dispersive X-ray spectrometry (ED S) using LEO 430i scanning electron microscopy equipment (LEO Ltd. Oberkochen, Germany) using analysis systems from LINK ISIS (Oxford Ltd.). phase analysis / characterization of coated cutting tools described herein, a diffractometer of the type D5 000 (Siemens) with Bragg-Brentano system for graying incidence (X grazing incidence system) and X-ray Cu Koi with Ni- fi lter (Ä 0.01578 nanometer) be used in combination with the operating parameters 40 KV and 40 MA.
Furthermore, a composite layer for a coating described herein may have any thickness that does not deviate from the purposes of the present invention. According to some embodiments, a composite layer has a thickness selected from Table IV.
Table IV - Composite layer, thickness (μm) Composite layer, thickness (μm) 0.5- 15 1-12 1.5- 10 2.5 -8 According to some embodiments, a composite layer is deposited directly on the substrate surface of the cutting tool. Alternatively, a coating described herein may further comprise one or more inner layers between the composite layer and the substrate. According to certain embodiments, one or more of the inner layers comprise one or more metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB of the Periodic Table, and one or more non-metallic elements which are selected from the group consisting of non-metallic elements of groups IIIA, VIA, VA and VIA of the Periodic Table. According to certain embodiments, one or more of the inner layers between the substrate and the composite layer comprise a carbide, nitride, carbonitride, oxide or boride of one or more of the metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB. VB and VIB in the periodic table. One or more inner layers are selected, for example, from the group consisting of titanium nitride, titanium carbonitride, titanium carbide, titanium oxide, zirconia, zirconium nitride, zirconium carbonitride, halium nitride, halium carbonitride and alumina and mixtures thereof.
Inner layers of coatings described herein may have any thickness that does not differ from the objects of the present invention. An inner layer of a coating has a thickness in the range from 0.5 μm to 12 μm. According to some embodiments, the thickness of an inner layer is selected according to the location of the inner layer in the coating. An inner layer deposited directly on a substrate surface such as a first coating layer may, for example, have a thickness in the range fi of 0.5 to 2.5 μm. An inner layer deposited over the first layer, for example a layer of TiCN, may have a thickness in the range of from 2 μm to 12 μm. An inner layer on which a composite layer described herein is deposited, for example a layer comprising alumina, may have a thickness in the range of 1 to 6 μm.
A composite layer described herein is, according to certain embodiments, the outermost layer of the coating. A coating described herein may alternatively comprise one or more of its outer layers over the composite layer. According to certain embodiments, one or fl your inner layers comprise one or fl your metallic elements selected from the group consisting of aluminum and metallic elements from groups IVB, VB and VIB of the Periodic Table and one or fl your non-metallic elements selected from the group consisting of non-metallic elements of groups IIIA, IVA, VA and VIA of the Periodic Table. In some embodiments, one or more of the outer layers of the composite layer are a nitride, carbonitride, oxide or boride of one or more metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB in periodic the system. One or more outer layers are selected, for example, from the group consisting of titanium nitride, titanium carbonitride, titanium carbide, titanium oxide, zirconia, zirconium nitride, zirconium carbonitride, haium nitride, halium carbonitride and alumina and mixtures thereof.
Outer layers in coatings described herein may have any thickness that does not differ from the objects of the present invention. An outer layer of a coating may, according to some embodiments, have a thickness in the range of from 0.5 μm to 5 μm.
According to certain embodiments, a coating described herein may further comprise one or more bonding layers. A bonding layer may have different locations in a coating described herein. According to certain embodiments, a bonding layer is arranged between two inner layers of the coating, for example between an inner layer of titanium nitride or titanium carbonitride and an inner layer comprising alumina. A bonding layer may also be disposed between an inner layer and a composite layer described herein. A bonding layer may further be provided between a composite layer and an outer layer of the coating. In some embodiments, binding layers are used to increase the adhesion between the layers of the coating and / or to form a core for the desired morphology of the coating layer deposited on the binding layer. According to certain embodiments, a bonding layer has the formula M (OXCyNZ), wherein M represents a metal selected from the group consisting of metallic elements from groups IVB, VB and VIB of the Periodic Table and x 2 0, y 2 0 and z 2 0, where x + y + z = 1.
According to one embodiment, for example, a bonding layer of TiC is used between an inner layer of TiCN and an inner layer comprising alumina.
A bonding layer of formula M (OXCyNZ) may have any thickness which does not deviate from the purposes of the present invention. According to some embodiments, a layer of M (OXCyNZ) has a thickness of about 0.5 μm. Furthermore, a layer of M (OXCyNZ) may have a thickness in the range from 0.5 μm to 5 μm.
A coating that adheres to a substrate may have any architecture of composite layers, inner layers and / or outer layers described herein. According to some embodiments, a coating has an architecture selected from Table V.
Table V ~ Coating Architectures Inner Layer (one or fl era) Custom Layer Outer Layer TiN AlON / ZrOg - TiN AlON / ZrOz / TiON - TiN AlON / ZrOZ / TiON ZrN TiN AlON / ZrOz / TiON ZrCN TiN-AlCON (MT) ZrOz / TiON - TiN-TiCN (MT) AlON / ZrOz / TiON ZrN TiN-TiCN (MT) -Al2O3 / ZrOz / TiOx AlON / ZrOz / TiON - TiN-TiCN (MT) AlON / ZrOz / TiON AlzOg / ZrOz / TiOx TiN-TiCN (MT) -Al2O3 / ZrOZ / TiOX AlON / ZrOz / TiON ZrN TiN-TiCN (MT) -AI2O3 AlON / ZrOz / TiON - TiN-TiCN (MT) AlON / ZrOg / TiON Al2; T1N-T1CN (MT) (AioN / zfoz / rioN-zfNyk * * MT = Medium High CVD ** Multiple Layer According to certain embodiments where a coating described herein comprises alumina in an inner layer and / or an outer layer, the alumina may be alpha alumina, kappa alumina or mixtures of alpha and kappa alumina.
A coating having a structure described herein has, according to certain embodiments, a hardness (HV 0.05) in the range of about 1,500 to 2,500, with HV 0.05 referring to a Vickers hardness using a load of 0. 05 kgf. In some embodiments, a coating has a hardness that ranges from about 1,700 HV 0.05 to 2,200 HV 0.05. Values for Vickers Hardness set forth herein have been determined in accordance with ASTM E 384, “Standard Method for Knoop and Vickers Hardness of Materials,” ASTM Intemational.
In addition, a coating described herein may exhibit a critical load (LC) up to about 90 N. Lc values for coatings described herein have been determined according to ASTM C1624-05 - Standard Test for Adhesion Strength by Quantitative Single Point Scratch Testing, (Standard Test for adhesive strength by means of quantitative tests with scraping of single points) using a progressive load of 10 N.
Coatings described herein may further, in the deposited state, exhibit a low residual tensile stress or low to moderate residual compressive stress. According to certain embodiments, post-coating blasting can increase residual compressive stresses in the coating. The post-coating blast can be administered in any desired manner. In some embodiments, post-coating blasting may include steel ball blasting or pressure blasting. Pressure blasting can be administered according to a variety of forms and may include compressed air blasting, wet compressed air blasting, blasting with liquid under high pressure, wet blasting, blasting with liquid under high pressure and steam blasting.
In an exemplary embodiment, post-coating treatment of a coating described herein may be administered by dry blasting the coating with alumina particles and / or ceramic particles. Alternatively, the coating can be wet blasted using a slurry of alumina particles and / or ceramic particles in water at a concentration of from 5 volume percent to 35 volume percent.
Alumina particles and / or ceramic particles for post-coating techniques described herein have a size distribution of from 60 microns to 120 microns. The blasting pressures can further be in a range from 2 bar to 3 bar for a period of time from 1 to 15 seconds, the blasting nozzle being 2 to 8 inches from the blasted coating surface. The angle of impact of the alumina particles and / or the ceramic particles can further be selected in a range from 45 degrees to 90 degrees. Post-coating blasting can also be administered on coated cutting tools described herein, as described in U.S. Patent 6,869,334, which is incorporated herein by reference in its entirety.
II. Methods of making coated cutting tools In another aspect, methods of making coated cutting tools are described herein. A method of making a coated cutting tool according to certain embodiments comprises arranging a substrate and depositing over the substrate, by chemical deposition from a vapor phase, a composition composed of at least one alumina nitinide phase and a metal oxide phase, the metal oxide phase comprising at least one oxide of a metallic phase. element selected from group IV of the Periodic Table. According to certain embodiments, the metal oxide phase comprises a number of oxides of metallic elements selected from Group IV of the Periodic Table. Furthermore, the deposited composite layer, in addition to the aluminoxynitride and metal oxide phases, may also comprise a metalloxynitride phase, the metal oxynitride phase comprising at least one oxynitride of a metallic element selected from Group IVB of the Periodic Table.
A method comprising arranging a substrate will now be described with reference to specific steps. A substrate may comprise any substrate previously set forth in Section I. In certain exemplary embodiments, the substrate is cemented carbide, for example cemented carbide carbide metal as described in Section I herein. In addition, a composite layer deposited according to the methods described herein may exhibit any structures, compositional parameters and / or properties described previously in Section I with respect to a composite layer.
According to certain exemplary embodiments, a composite layer comprises, for example, a matrix phase of AlON in which a metal oxide phase is distributed, the metal oxide phase comprising at least one oxide of a metallic element selected from group IV in the periodic table. The metal oxide phase may be ZrOg, HfOg or mixtures thereof.
According to a process described herein, a composite layer can be deposited from a gaseous mixture comprising an aluminum source, an oxygen source, a nitrogen source and a source of the Group IVB metallic element. According to certain exemplary embodiments, the aluminum source is AlCl 3, and the source of the metallic element is a chloride of a Group IVB metal, for example ZrCl 4, HfCl 4 or mixtures thereof.
Furthermore, as described herein, a composite layer, in addition to the AlON and metal oxide phases, may also comprise a metal oxinitride phase, the metal in the oxinitride phase being selected from Group IVB metallic elements in the Periodic Table. In some embodiments, the metal oxynitride phase is titanium dioxinitride (TiON). Titanium chloride (TiCl 4), to give an example, can be added to the gaseous mixture to deposit a TiON phase in the matrix of AlON.
The percentages of the phases contained in the composite layer set forth in Tables I-III can be achieved by varying amounts of the individual reagent gases in the mixture. In addition, the percentages of alumina, nitrogen and oxygen in the AlON phase as previously indicated in Section I can be achieved by varying amounts of individual reagent gases in the mixture. General parameters of the CVD process for depositing a composite layer for a coating described herein are set forth in Table VI.
Table VI ~ Composite layer, parameters for CVD process Interval for process parameters for composite layer Temperature 900 - 1,000 ° C Pressure 50 - 100 mbar Time 120 - 300 min.
H2 Residual proportion of AlCl; 1 - 4 vol% MCl4 * 0.5 - 3 vol% NH3 1 - 4 vol% CO2 1 - 5 vol% HCl 2 - 6 vol% TiCl4 ** 0.1 - 2 vol% * M = Group IVB Metal ** Optional According to some embodiments, a composite layer is deposited directly on a surface of the substrate. Alternatively, a composite layer is deposited on an inner layer of the coating. An inner layer of the coating may have any structure, any composition parameters and / or properties previously set forth in Section I with respect to an inner layer. An inner layer may comprise one or more metallic elements selected from the group consisting of aluminum and one or fl your metallic elements of groups IVB, VB and VIB of the Periodic Table and one or fl your non-metallic elements selected from that group consisting of non-metallic elements of groups IIIA, IVA, VA and VIA of the Periodic Table.
According to some embodiments, an inner layer of a carbide, nitride, carbonitride, oxide or boride consists of one or more metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB of the Periodic Table. An inner layer over which a composite layer is deposited may, for example, be selected from the group consisting of titanium nitride, titanium carbide, titanium carbonitride, titanium oxide, zirconia, zirconium nitride, zirconium carbonitride, ha fi1 aluminum nitride, ha fi potassium carbonitride and alumina and mixtures. According to an exemplary embodiment, an inner layer consists of a mixture of alumina, zirconia and titanium oxide (AlgOg / ZrOg / TiOX).
In the same manner as with the composite layer, one or more of the inner layers of a coating described herein may be deposited by vapor phase chemical deposition (CVD).
According to certain embodiments, an inner layer of the coating, for example a layer of TiCN, can be deposited by chemical deposition from vapor phase (CVD) at medium temperature (MT).
In addition, methods described herein may also include depositing one or more of your outer layers over the composite layer. According to certain embodiments, one or more of the outer layers are deposited in a coating described herein, by vapor phase chemical deposition (CVD). An outer layer of the coating may have any structure, any composition parameters and / or properties previously set forth in Section I with respect to an outer layer. An outer layer may comprise one or fl your metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB of the Periodic Table and one or fl your non-metallic elements selected from the group consisting of non-metallic elements of groups IIIA, IVA, VA and VIA of the Periodic Table.
According to certain embodiments, one or more of the outer layers of the composite layer comprise a nitride, carbonitride, oxide or boride of one or more metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB. , VB and VIB in the periodic table. For example, one or more outer layers are selected from the group consisting of titanium nitride, titanium carbonitride, titanium carbide, titanium oxide, zirconia, zirconium nitride, zirconium carbonitride, halo nitride, halo carbonitride and alumina, and mixtures thereof.
Furthermore, methods of making coated cutting tools described herein may further include post-coating-post-coating blasting of the deposited coating. Post-coating blasting can be administered in any desired manner, including dry blasting and wet blasting techniques. In some embodiments, post-coating-post-coating blasting is administered according to a method described above in Section I. In some embodiments, post-coating-post-coating blasting may change moderate tensile stress in the coating to moderate compressive stress or increase the compressive stress in the deposited the coating.
These and other embodiments are further illustrated by the following non-limiting examples.
EXAMPLE 1 Coated Cutter Hoof Body A coated cutting tool described herein was prepared by placing a sintered tungsten carbide (WC) indexable insert [ANSI standard geometry HNGJ0905ANSN-GD] in a CVM reactor of the Bemex 200 type. the percentage consisted of grain of sintered tungsten carbide (WC) with grain sizes from 1 to 5 μm. A coating having a coating architecture described herein was deposited on the sintered tungsten carbide (WC) indexable insert according to the CVD process parameters set forth in Tables VII-VIII. Table V11 - CVD deposition of coating Process step H2 N2 TiCb CHgCN C114 AlCl; CO 2 ZrCl 2 NH; HCl vol.% Vo1.% Vol.% Vo1.% Vo1.% Vol.% Vol.% Vo1.% Vol.% Vol.% TiN Residual 40-48 0.5-2% share MT-TiCN Remaining 25- 0.52 0.1 -1.5% share TiC Remaining 0.52 5-8% share AlgOg / Z10; Remaining Û, 1-1.5 3-6 1.54 2-5 0.1-1.5 3-6 / Ti0x *% share A10N / Zr02 / Ti0N ** Remaining Û, 1-1.5 1, 54 2-5 0.1-1.5 1-4 3-6% share * Layers with mixed phases of Al2O3, ZrOZ and TiOx ** Co-applied layer with mixed phases of AlON, ZrOQ and TiON 10 15 20 25 Table VIII ~ CVD deposition of coating Procedure step Temp. Pressure Time ° C mbar min.
TiN 930 - 960 600 - 900 20 - 40 MT-TiCN 900 - 940 70 - 100 70 - 110 TiC 950 - 1000 70 -100 10 - 20 Al2O3 / ZrOz / TiOx * 950 - 1000 70 - 100 15 - 60 AlON / ZrOZ / TiON ** 950 - 1000 70 - 100 200 - 280 * Layers with mixed phases of AlzOg, ZrOz and TiOx ** Composite layer with mixed phases of AlON, ZrOg and TiON The obtained ersk multilayer coating which consisted of a composite layer of AlON / ZrOg / TiON exhibited the properties shown in Table IX.
Table IX ~ Properties of CVD Coating Coating Layer Thickness (μm) Hardness (0.05 HV) TiN 0.4 - MT-TiCN + TiC 4.2 - AlzOg / ZrOz / TiOx 1.6 1800 AlON / ZrOz / TiON 3, 9 2000 Figure 2 is a photomicrograph of a portion of the coated indexable insert in this example and shows the layers in the coating sheet duration. Figure 3 is a scanning electron microscope image showing a cross section of the coated indexable insert, at 5000x magnification. Figure 4 is an ice scanning electron microscope image from top to bottom of the surface of the composite layer of (AlON / ZrOg / TiON) at 5000x magnification.
EXAMPLE 2 Coated Cutter Hook A coated cutting tool described herein was prepared by placing a sintered tungsten carbide (WC) indexable insert [ANSI standard geometry HNGJ0905ANSN-GD] in a Bemex 200 CVD reactor. and with the remaining percentage consisted of grain of sintered tungsten carbide (WC) with grain sizes from 1 to 5 μm. A coating having an architecture described herein was deposited on the sintered tungsten carbide (WC) indexable insert according to the CVD process parameters set forth in Tables X-XI. 17 Table X - CVD deposition of coating Process step H2 N; TiCl 2 CH 2 CN CH1 AlCl 3 CO 2 ZrCl 2 NH; HCl vol.% Vol.% Vol.% Vol.% Vol.% Vol.% Vol.% Vol.% Vol.% Vol.% TiN Residual 4048 0.52% share MT-TiCN Residual 2540 0.52 0, ll, 5% share TiC Remaining - 0.52 - 5-8% share AlgOglZrOg Remaining - Û, ll, 5 - 3-6 1.54 2-5 0, ll, 5 - 3-6 lTi0x *% - share AlON / ZrOf * Remaining - - - - 1.54 2-5 ll, ll, 5 l-4 3-6% share * Layers with mixed lasers of A603, ZrOZ and Ti0x ** Combined layer with mixed phases of AlON and ZrO 2. 10 15 20 25 Table XI ~ CVD deposition of coating Procedure step Teinp. Pressure Time ° C mbar min.
TiN 930 - 960 600 - 900 20 - 40 MT-TiCN 900 - 940 70 - 100 70 - 110 TiC 950 - 1000 70 -100 10 - 20 Al2O3 / ZrOz / TiOx * 950 - 1000 70 - 100 15 - 60 AlON / ZrO2 ** 950 - 1000 70 - 100 200 - 280 * Layers with mixed phases of AlzOg, ZrOz and TiOx ** Composite layer with mixed phases of AlON and ZrOg.
The resulting multilayer coating, which consisted of a composite layer of AlON and ZrO 2, exhibited the properties shown in Table XII.
Table XII ~ Properties of CVD coating Coating layer Thickness (μm) TiN 0.6 MT-TiCN + TiC 5.1 AlzOg / ZrOz / TiOx 1.3 AlON / ZrOz 5.5 EXAMPLE 3 Milling, test A coated indexable insert according to Example 1 and coated comparative indexable inserts (1 and 2) were tested during milling according to the following parameters. The coated comparative indexable inserts (1 and 2) consisted of the same sintered tungsten carbide (WC) substrate as in Example 1 and had the following CVD-deposited coating architectures: Comparative inserts 1: TiN-TiCN (MT) -TiC- (o.) Al2O3- ZrCN Comparative insert 2: TiN-TiCN (MT) -TiC- (u) Al 2 O 3 -TiN (the outer layer of TiN was removed by Wet Blasting) During the milling test, two cutting edges were tested for each coated insert according to Example 1, Comparative insert 1 and Comparative insert 2 .
Milling spare parts Workpiece - GGG 70 Cutting speed - 300 m / min 19 10 15 20 25 Measurement per tooth - 0.25 mm Axial cutting depth - 2 mm Radial cutting depth - 60 mm Coolant - No Average milling lengths (mm) up to service life (EOL) of the coated inserts are shown in Table XIII. Yield (EOL) was recorded by fault condition by wear of the clearance surface (VB)> 0.3 mm and / or micro-chip formation on the cutting edge, determined by visual inspection.
Table XIII - Results from milling test (Length - mm) Coated indexable insert Cutting edge 1 Cutting edge 2 Average Example 1 5500 5500 5500 Comparative insert 1 [TiN-TiCN (MT) - 4500 4500 4500 TiC- (u) Al2O3-ZrCN] Comparative insert 2 [TiN-TiCN-TiC-4500 3500 4000 (G) Al 2 O 3 As shown in Table XIII, the coated indexable insert of Example 1 having a coating architecture described herein exhibited better performance than the composite inserts and an increased life of at least 20 percent. .
EXAMPLE 4 Milling, Testing The substrates D and E of sintered tungsten carbide (WC) with an ANSI standard geometry HNGX0905160-MR were provided with coatings according to Examples 1 and 2 as shown in Table XIV. The substrate F of sintered tungsten carbide (WC) with an ANSI standard geometry HNGX0905l60-MR was provided with a comparative CVD coating, as shown in Table XIV. Substrates D, E and F of sintered tungsten carbide (WC) comprised a cobalt binder in an amount of 6.1% by weight, the remaining percentage being sintered tungsten carbide (WC) particles having grain sizes less than 1 micron to 2 microns. pm. Table XIV ~ Coated indexable inserts Coated indexable inserts Coating architecture, CVD D TiN - TiCN (MT) - TiC - AlzOg / ZrOz / TiOX -AlON / ZrOz / TiON E TiN - TiCN (MT) - TiC - AlzOg / ZrOz / TiOfAlON / ZR TiN - TiCN (MT) - TiC - (a) Al 2 O; For each coated insert D - F, two notches were tested according to the following milling parameters. 5 Milling parameters Workpiece - GGG 70 Cutting speed - 300 m / min Feed per tooth - 0.2 mm Axial cutting depth - 1.5 mm 10 Radial cutting depth - 60 mm Coolant - No Average milling lengths (mm) up to service life (EOL) for the coated inserts D - F are shown in Table XV. The yield (EOL) was recorded by fault condition in the form of wear of the clearance surface (VB)> 0.3 mm and / or micro-chip formation on the cutting edge, determined by visual inspection.
Table XV - Results from milling test (Length - mm) Coated indexable insert Cutting edge l Cutting edge 2 Average D 4000 4000 4000 E 3000 3500 3250 F 4000 3500 3750 20 As shown in Table XV, the notches D and E showed coating architectures described here, similar or increased service life relative to the comparative notch F, which had a coating of oi-alumina.
EXAMPLE 5 Milling, test 21 The substrate G of sintered tungsten carbide (WC) with an ANSI standard geometry HNGX090516 (0) -MR was coated according to Example 1 as shown in Table XVI. Substrates H and I of sintered tungsten carbide (WC) with an ANSI standard geometry HNGX090516 (0) -MR were each provided with a comparative CVD coating, as shown in Table XVI. Substrates G, H and I of sintered tungsten carbide (WC) comprised a cobalt binder in an amount of 6.1% by weight, the remaining percentage being sintered tungsten carbide (WC) particles having grain sizes less than 1 μm to 2 pm.
Table XVI ~ Coated indexable inserts Coated indexable inserts Coating architecture, CVD G TiN - TiCN (MT) - TiC - Al2O3 / ZrOz / TiOX- AlON / ZrOz / TiON H TiN - TiCN (MT) - TiC - AlzOg / ZrOZ / TiOX ~ AlON I - TiCN (MT) - TiC - (oi) Al2O3 For each coated insert G - I, two cutting edges were tested according to the following milling parameters.
Milling parameters Workpiece - GGG 70 Cutting speed - 300 rn / min Feed per tooth - 0.2 mm Axial cutting depth - 1.5 mm Radial cutting depth - 60 mm Coolant - No Average milling lengths (mm) up to service life (EOL) for the coated inserts G - As shown in Table XVII. The yield (EOL) was registered by fault condition in the form of wear of the clearance surface (VB)> 0.3 mm and / or micro-chip formation on the cutting edge, determined by visual inspection.
Table XVII ~ Results from milling test (Length ~ mm) 22 10 15 20 25 Coated indexable insert Cutting edge 1 Cutting edge 2 Average G 3500 4500 4000 H 3000 3500 3250 I 3500 3500 3500 As shown in Table XVII, the insert showed G which included a coating architecture as described here, better performance than the Comparative inserts H and I, and showed increased service life when milling.
EXAMPLE 6 Extraction, Test The substrate J of sintered tungsten carbide (WC) with an ANSI standard geometry HNGJ0905ANSNGD was coated according to Example 1 as shown in Table XVIII. The substrate K of sintered tungsten carbide (WC) with an ANSI standard geometry HNGJ0905ANSNGD was provided with a comparative CVD coating, as shown in Table XVIII. The sintered tungsten carbide (WC) substrates comprised a cobalt binder in an amount of 6.1% by weight, the balance being sintered tungsten carbide (WC) particles having grain sizes less than 1 micron to 2 microns.
Table XVIII ~ Coated indexable inserts Coated indexable inserts Coating architecture, CVD J TiN - TiCN (MT) - TiC - Al2O3 / ZrOz / TiOX-AION / ZrOz / TiON K TiN - TiCN (MT) - TiC - Al2O3 / ZrOz / TiOX For each coated J and K tested two cutting edges according to the following milling parameters.
Milling parameters Workpiece - GGG 70 Cutting speed - 300 m / min Feed per tooth - 0.25 mm Axial cutting depth - 2 mm 23 10 15 20 25 Radial cutting depth - 60 mm Coolant - No Average milling lengths (mm) up to service life (EOL) for the coated inserts J and K are shown in Table XIX. The service life (EOL) was registered by fault condition in the form of wear of the clearance surface (VB)> 0.3 mm and / or micro-chip formation on the cutting edge, determined by visual inspection.
Table XIX ~ Result from milling test (Length ~ mm) Coated indexable insert Cutting edge 1 Cutting edge 2 Average J 5000 4500 4750 K 2500 2000 2250 As stated in Table XIX, the insert J, which includes a coating architecture described herein, showed better performance than the comparative insert K, and exhibited an average life of twice the life of insert K.
EXAMPLE 7 Milling, test The substrate L of sintered tungsten carbide (WC) with an ANSI standard geometry HNGJ0905ANSNGD was coated according to Example 1 as shown in Table XX. The substrate M of sintered tungsten carbide (WC) with an ANSI standard geometry HNGJ0905ANSNGD was provided with a comparative CVD coating, as shown in Table XX. The sintered tungsten carbide (WC) substrates comprised a cobalt binder in an amount of 12.2% by weight, the remaining percentage being sintered tungsten carbide (WC) particles having grain sizes smaller than 1 μm to 3 μm.
Table XX ~ Coated indexable inserts Coated indexable inserts Coating architecture L TiN - TiCN (MT) - TiC - Al2O3 / ZrOz / TiOX-AlON / ZrOZ / TiON M TiN - TiCN (MT) - TiC - (K) A12O3 24 10 15 20 25 30 For each coated insert L and M tested two cutting edges according to the following milling parameters.
Milling parameters Workpiece - 42CrMo4V Cutting speed - 200 m / min Feed per tooth - 0.3 mm Axial cutting depth - 2 mm Radial cutting depth - 120 mm Coolant - No Average milling lengths (mm) up to service life (EOL) for the coated inserts L and M are shown of Table XXI. The service life (EOL) was registered by fault condition in the form of wear of the clearance surface (VB)> 0.3 mm and / or micro-chip formation on the cutting edge, determined by visual inspection.
Table XXI - Results from fi ä test (Length - mm) Coated cutting insert Cutting edge 1 Cutting edge 2 Average L 9 200 10 800 10 000 M 4 400 6 400 5 400 As indicated in Table XXI, the insert L, which includes a coating architecture described herein, showed better performance than the comparative insert M, and exhibited an average life that was almost twice as long as the life of the insert M coated with K-alumina.
EXAMPLE 8 Milling, Testing The substrate N of sintered tungsten carbide (WC) with an ANSI standard geometry HNGJ0905ANSNGD was coated according to Example 1 as shown in Table XXII. The substrate P of sintered tungsten carbide (WC) with an ANSI standard geometry HNGJ0905ANSNGD was provided with a comparative CVD coating, as shown in Table XXII. Substrates N and P of sintered tungsten carbide (WC) comprised a cobalt binder in an amount of 12.2% by weight, the remaining percentage being sintered tungsten carbide (WC) particles having grain sizes less than 1 micron to 3 microns. pm.
Table XXII - Coated indexable inserts Coated indexable inserts Coating architecture, CVD N TiN - TiCN (MT) - TiC - Al2O3 / ZrOz / TiOfAlON / ZrOz / TiON P TiN - TiCN (MT) - TiC - (K) Al2O3 For each coated insert N and P two cutting edges were tested according to the following milling parameters.
Milling parameters Workpiece - C45EN Cutting speed - 300 rn / min Feed per tooth - 0.25 mm Axial cutting depth - 2 mm Radial cutting depth - 62.5 mm Coolant - No Average milling lengths (mm) up to service life (EOL) for the coated inserts N and P is shown in Table XXIII. Yield (EOL) was recorded by fault condition in the form of wear of the clearance surface (VB)> 0.3 mm and / or micro-chip formation on the cutting edge, determined by visual inspection.
Table XXIII ~ Results from milling test (Length ~ 1n1n) Coated indexable insert Cutting edge 1 Cutting edge 2 Average N 16 200 14 400 15 300 P 12 600 12 000 12 300 26 10 As indicated in Table XXIII, the insert showed N which included a coating architecture described herein , better performance than the comparative insert P, and showed a 16% increase in service life compared to the insert P.
Various embodiments according to the invention have been described as fulfilling the various objects according to the invention. It is to be understood that these embodiments are merely intended to illustrate the principles of the present invention. A variety of modifications and adaptations of the invention will be apparent to those skilled in the art without departing from the spirit and scope of the invention.
What is being applied for is: 27
权利要求:
Claims (30)
[1]
A coated cutting tool, comprising: a substrate; and a coating adhering to the substrate, the coating comprising at least one composite layer deposited by chemical deposition from meadow phase, the layer comprising an alumina nitride phase and a metal oxide phase, the metal oxide phase comprising at least one oxide of a metallic element selected from Group IVB in periodic the system.
[2]
The coated cutting tool of claim 1, wherein the metal oxide phase comprises ZrO 2, HfO 3 or mixtures thereof.
[3]
The coated cutting tool of claim 1, further comprising a metal oxynitride phase in addition to the aluminoxinitride and metal oxide phases, the metal oxynitride phase comprising at least one oxinitride of a metallic element selected from Group IVB of the Periodic Table.
[4]
The coated cutting tool of claim 3, wherein the metal oxynitride phase comprises TiON.
[5]
The coated cutting tool of claim 1, wherein the metal oxide phase is distributed in the alumina nitride phase.
[6]
The coated cutting tool of claim 3, wherein the metal oxide phase and the metal oxynitride phase are distributed in the alumina nitinide phase.
[7]
The coated cutting tool of claim 1, wherein the aluminoxynitride phase comprises a hexagonal crystalline structure, a cubic crystalline structure or an amorphous structure or mixtures thereof. 28 10 15 20 25 30
[8]
The coated cutting tool of claim 1, wherein the aluminum oxynitride phase comprises aluminum in an amount of from 20 to 50 atomic percent, nitrogen in an amount of from 40 to 70 atomic percent, and oxygen in an amount of from 1 to 20 atomic percent.
[9]
The coated cutting tool of claim 1, wherein the aluminum oxynitride phase is present in the composite layer in an amount from 80 volume percent to 99 volume percent.
[10]
The coated cutting tool of claim 1, wherein the metal oxide phase comprises a cubic, monoclinic or a tetragonal crystalline structure or mixtures thereof.
[11]
The coated cutting tool of claim 1, wherein the coating further comprises one or more inner layers between the composite layer and the substrate.
[12]
Coated cutting tool according to claim 11, wherein the one or fl outer layers each comprise one or fl your metallic elements selected from the group consisting of aluminum and metallic elements from groups IVB, VB and VIB of the Periodic Table and one or fl are not -metallic elements selected from the group consisting of non-metallic elements of groups IIIA, IVA, VA and VIA of the Periodic Table.
[13]
A coated cutting tool according to claim 11, wherein the inner layers or layers each comprise a carbide, nitride, carbonitride, oxide or a boride of a metallic element selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB in the periodic table.
[14]
The coated cutting tool of claim 1, wherein the coating further comprises one or more outer layers over the composite layer.
[15]
The coated cutting tool of claim 14, wherein the one or fl outer layers each comprise one or fl your metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB in periodic the system and one or fl your non-metallic elements selected from the group consisting of non-metallic elements of groups IIIA, IVA, VA and VIA of the Periodic Table.
[16]
16. l6. Coated cutting tool according to claim 1, wherein the coating further comprises one or fl your inner layers between the substrate and the composite layer, an inner layer comprising one or fl your metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB in the Periodic Table and one or fl your non-metallic elements selected from the group consisting of non-metallic elements from groups IIIA, IVA, VA and VIA of the Periodic Table and one or fl your outer layers over the composite layer, a outer layer comprising one or more metallic elements selected from the group consisting of aluminum and metallic elements from groups IVB, VB and VIB of the Periodic Table and one or more non-metallic elements selected from the group consisting of non-metallic elements metallic elements of groups IIIA, IVA, VA and VIA of the Periodic Table.
[17]
17. l7. Coated cutting tool according to claim 1, wherein the substrate is cemented carbide, metal ceramic or ceramic based on Si3N4, AlgOg or ZrOg or mixtures thereof.
[18]
A method of making a coated cutting tool comprising: arranging a substrate; and depositing over the substrate by chemical deposition from vapor phase, of at least one composite layer of a coating, the layer comprising an alumina nitride phase and a metal oxide phase, the metal oxide phase comprising at least one oxide of a metallic element selected from Group IVB of the Periodic Table.
[19]
The coated cutting tool of claim 18, wherein the metal oxide phase comprises ZrOg, HfOg or mixtures thereof. 30 10 15 20 25 30
[20]
The method of claim 18, wherein the composite layer is deposited from a gaseous mixture comprising an aluminum source, an oxygen source, a nitrogen source and a source of the Group IVB metallic element.
[21]
The method of claim 20, wherein the aluminum source is AlCl 3, and the source of metallic element is a Group IVB metal chloride.
[22]
The method of claim 20, wherein the oxygen source is CO 2 and the nitrogen source is NH 3.
[23]
The method of claim 18, wherein the composite layer, in addition to the aluminoxynitride and metal oxide phases, further comprises a metalloxynitride phase, wherein the metalloxynitride phase comprises at least one oxinitride of a metallic element selected from Group IVB of the Periodic Table.
[24]
The method of claim 23, wherein the metal oxynitride phase comprises TiON.
[25]
The method of claim 24, wherein the composite layer is deposited from a gaseous mixture comprising an aluminum source, a single oxygen source, a nitrogen source, a titanium source and a Group IVB metallic source.
[26]
The method of claim 18, wherein the composite layer is deposited on an inner coating layer.
[27]
The method of claim 26, wherein the inner layer comprises one or fl your metallic elements selected from the group consisting of aluminum and metallic elements from groups IVB, VB and VIB of the Periodic Table and one or fl your non-metallic elements which are selected from the group consisting of non-metallic elements from groups IIIA, IVA, VA and VIA of the Periodic Table.
[28]
The method of claim 18, further comprising depositing by chemical deposition from a vapor phase, one or more of the outer layers over the composite layer. 31 10
[29]
The method of claim 28, wherein the one or fl outer layers each comprise one or fl your metallic elements selected from the group consisting of aluminum and metallic elements of groups IVB, VB and VIB of the Periodic Table and one or icke your non- metallic elements selected from the group consisting of non-metallic elements of groups IIIA, IVA, VA and VIA of the Periodic Table.
[30]
The method of claim 18, further comprising wet blasting or dry blasting the deposited coating, resulting in a change in residual stress level in the alumina nitride phase of the composite layer. 32
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同族专利:
公开号 | 公开日
CN103966571B|2018-01-23|
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CN106995917A|2017-08-01|
DE102013113501B4|2019-06-13|
CN106995917B|2019-11-12|
US9017809B2|2015-04-28|
US20140208659A1|2014-07-31|
CN104968832B|2017-05-24|
DE112014000550T5|2016-01-21|
DE112014000550B4|2021-12-02|
DE102013113501A1|2014-07-31|
WO2014116967A1|2014-07-31|
CN103966571A|2014-08-06|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题

DE2851584B2|1978-11-29|1980-09-04|Fried. Krupp Gmbh, 4300 Essen|Composite body|
USRE32111E|1980-11-06|1986-04-15|Fansteel Inc.|Coated cemented carbide bodies|
US4357382A|1980-11-06|1982-11-02|Fansteel Inc.|Coated cemented carbide bodies|
DE3346873C2|1982-12-24|1990-12-13|Mitsubishi Kinzoku K.K., Tokio/Tokyo, Jp|
JPS59219122A|1983-05-27|1984-12-10|Sumitomo Electric Ind Ltd|Covered sintered hard alloy tool and manufacturing method thereof|
DE3332260A1|1983-09-07|1985-03-28|Fried. Krupp Gmbh, 4300 Essen|COATED CARBIDE BODY|
JPS626748B2|1984-05-14|1987-02-13|Sumitomo Electric Industries|
SE442305B|1984-06-27|1985-12-16|Santrade Ltd|PROCEDURE FOR CHEMICAL GAS DEPOSITION FOR THE PREPARATION OF A DIAMOND COATED COMPOSITION BODY AND USE OF THE BODY|
US4714660A|1985-12-23|1987-12-22|Fansteel Inc.|Hard coatings with multiphase microstructures|
EP0247630B1|1986-05-28|1996-01-31|NGK Spark Plug Co. Ltd.|Material for cutting tools, use of same and cutting tools|
US4749629A|1987-01-20|1988-06-07|Gte Laboratories|Ultrathin laminated oxide coatings and methods|
US4943450A|1987-01-20|1990-07-24|Gte Laboratories Incorporated|Method for depositing nitride-based composite coatings by CVD|
US4950558A|1987-10-01|1990-08-21|Gte Laboratories Incorporated|Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof|
SE464818B|1989-06-16|1991-06-17|Sandvik Ab|COVERED SHOULD BE CUTTING|
US5075265A|1990-12-10|1991-12-24|Ford Motor Company|Preparation of aluminum oxynitride from organosiloxydihaloalanes|
US5665431A|1991-09-03|1997-09-09|Valenite Inc.|Titanium carbonitride coated stratified substrate and cutting inserts made from the same|
US5494743A|1992-08-20|1996-02-27|Southwall Technologies Inc.|Antireflection coatings|
DE69320913T2|1992-11-09|1999-03-11|Central Glass Co Ltd|Glass plate with an ultraviolet absorbing multilayer coating|
TW250618B|1993-01-27|1995-07-01|Mitsui Toatsu Chemicals|
CA2149567C|1994-05-31|2000-12-05|William C. Russell|Coated cutting tool and method of making same|
US5500279A|1994-08-26|1996-03-19|Eastman Kodak Company|Laminated metal structure and metod of making same|
EP0704880A3|1994-09-28|1998-09-30|Matsushita Electric Industrial Co., Ltd.|High-pressure discharge lamp, method for manufacturing a discharge tube body for high-pressure discharge lamps and method for manufacturing a hollow tube body|
DE69521410T2|1994-10-04|2001-10-04|Sumitomo Electric Industries|COATED HARD ALLOY|
NO309233B1|1995-06-07|2001-01-02|Aker Eng As|Procedure for installation of tensioning platform|
US6652922B1|1995-06-15|2003-11-25|Alliedsignal Inc.|Electron-beam processed films for microelectronics structures|
US5722803A|1995-07-14|1998-03-03|Kennametal Inc.|Cutting tool and method of making the cutting tool|
JPH09165670A|1995-12-14|1997-06-24|Orient Watch Co Ltd|Transparent protective film-coated structure and its production|
GB2310218B|1996-02-13|1999-12-22|Marconi Gec Ltd|Coatings|
JP3418066B2|1996-07-03|2003-06-16|日立金属株式会社|Alumina-coated tool and manufacturing method thereof|
US6010283A|1997-08-27|2000-01-04|Kennametal Inc.|Cutting insert of a cermet having a Co-Ni-Fe-binder|
JP3031907B2|1998-03-16|2000-04-10|日立ツール株式会社|Multilayer coating member|
WO2000017416A1|1998-09-24|2000-03-30|Widia Gmbh|Composite material coating and a method for the production thereof|
US6161990A|1998-11-12|2000-12-19|Kennametal Inc.|Cutting insert with improved flank surface roughness and method of making the same|
WO2000040402A1|1998-12-28|2000-07-13|Asahi Glass Company, Limited|Layered product|
WO2000052225A1|1999-03-02|2000-09-08|Kennametal Inc.|A tool having a multilayer coating comprising multiple mtcvd layers|
DE10017909B4|1999-04-13|2009-07-23|Mitsubishi Materials Corp.|Coated cemented carbide cutting tool element|
DE19924422C2|1999-05-28|2001-03-08|Cemecon Ceramic Metal Coatings|Process for producing a hard-coated component and coated, after-treated component|
LU90420B1|1999-07-20|2001-01-22|Glaverbel|Pyrolitic layer of aluminum oxynitride and glazing comprising this layer|
FR2800998B1|1999-11-17|2002-04-26|Saint Gobain Vitrage|TRANSPARENT SUBSTRATE HAVING AN ANTI-REFLECTIVE COATING|
US6582777B1|2000-02-17|2003-06-24|Applied Materials Inc.|Electron beam modification of CVD deposited low dielectric constant materials|
US6528180B1|2000-05-23|2003-03-04|Applied Materials, Inc.|Liner materials|
FR2810118B1|2000-06-07|2005-01-21|Saint Gobain Vitrage|TRANSPARENT SUBSTRATE HAVING ANTIREFLECTION COATING|
US20030036483A1|2000-12-06|2003-02-20|Arendt Paul N.|High temperature superconducting thick films|
SE522736C2|2001-02-16|2004-03-02|Sandvik Ab|Aluminum-coated cutting tool and method for making the same|
AU2002305393A1|2001-05-04|2002-11-18|General Atomics|O2 and h2o barrier material|
US6667121B2|2001-05-17|2003-12-23|Guardian Industries Corp.|Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same|
US6733874B2|2001-08-31|2004-05-11|Mitsubishi Materials Corporation|Surface-coated carbide alloy cutting tool|
KR20040073570A|2002-01-18|2004-08-19|스미토모덴키고교가부시키가이샤|Surface-coated cutting tool|
US7829194B2|2003-03-31|2010-11-09|Ut-Battelle, Llc|Iron-based alloy and nitridation treatment for PEM fuel cell bipolar plates|
US7514037B2|2002-08-08|2009-04-07|Kobe Steel, Ltd.|AG base alloy thin film and sputtering target for forming AG base alloy thin film|
WO2004026787A1|2002-09-14|2004-04-01|Schott Ag|Method for producing layers and layer systems and coated substrate|
US6811880B1|2003-04-04|2004-11-02|Ensci Inc.|Metal oxyanion coated substrates|
US6811881B1|2003-04-07|2004-11-02|Ensci Inc.|Metal oxyanion coated nano substrates|
US7322776B2|2003-05-14|2008-01-29|Diamond Innovations, Inc.|Cutting tool inserts and methods to manufacture|
US7592077B2|2003-06-17|2009-09-22|Kennametal Inc.|Coated cutting tool with brazed-in superhard blank|
US20050064247A1|2003-06-25|2005-03-24|Ajit Sane|Composite refractory metal carbide coating on a substrate and method for making thereof|
FR2856627B1|2003-06-26|2006-08-11|Saint Gobain|TRANSPARENT SUBSTRATE WITH COATING WITH MECHANICAL STRENGTH PROPERTIES|
FR2856677B1|2003-06-27|2006-12-01|Saint Gobain|SUBSTRATE COATED WITH A DIELECTRIC LAYER AND METHOD FOR MANUFACTURING THE SAME|
JP2005029849A|2003-07-07|2005-02-03|Kobe Steel Ltd|Ag ALLOY REFLECTIVE FILM FOR REFLECTOR, REFLECTOR USING THE Ag ALLOY REFLECTIVE FILM, AND Ag ALLOY SPUTTERING TARGET FOR DEPOSITING THE Ag ALLOY REFLECTIVE FILM|
EP1498397A1|2003-07-16|2005-01-19|Glaverbel|Coated substrate with a very low solar factor|
US20050025973A1|2003-07-25|2005-02-03|Slutz David E.|CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same|
US7244520B2|2003-08-12|2007-07-17|Nippon Telegraph And Telephone Corporation|Substrate for nitride semiconductor growth|
FR2858975B1|2003-08-20|2006-01-27|Saint Gobain|TRANSPARENT SUBSTRATE COATED WITH A STACK OF THIN LAYERS WITH INFRARED REFLECTION PROPERTIES AND / OR IN THE FIELD OF SOLAR RADIATION|
DE10342364A1|2003-09-12|2005-04-14|Kennametal Widia Gmbh & Co.Kg|Carbide or cermet body and process for its preparation|
DE10342398B4|2003-09-13|2008-05-29|Schott Ag|Protective layer for a body, and methods of making and using protective layers|
JP2005271190A|2003-12-05|2005-10-06|Sumitomo Electric Hardmetal Corp|Surface coated cutting tool|
WO2007005925A1|2005-06-30|2007-01-11|Varian Semiconductor Equipment Associates, Inc.|Clamp for use in processing semiconductor workpieces|
WO2005099945A1|2004-04-13|2005-10-27|Sumitomo Electric Hardmetal Corp.|Surface-coated cutting tool|
WO2005100635A1|2004-04-19|2005-10-27|Pivot A.S.|A hard, wear-resistant aluminum nitride based coating|
US7262145B2|2004-04-23|2007-08-28|Kennametal Inc.|Whisker-reinforced ceramic containing aluminum oxynitride and method of making the same|
US7378157B2|2004-06-28|2008-05-27|Dai Nippon Printing Co., Ltd.|Gas barrier film, and display substrate and display using the same|
WO2006017070A2|2004-07-07|2006-02-16|General Electric Company|Protective cotaing on a substrate and method of making thereof|
US7812522B2|2004-07-22|2010-10-12|Ifire Ip Corporation|Aluminum oxide and aluminum oxynitride layers for use with phosphors for electroluminescent displays|
EP1772216B1|2004-07-23|2018-05-30|Sumitomo Electric Hardmetal Corp.|Surface coating cutting tool with coating film having intensity distribution of compression stress|
JP4987717B2|2004-08-18|2012-07-25|ダウ・コーニング・コーポレイション|Substrate with coating and method for preparing the same|
WO2006019184A1|2004-08-20|2006-02-23|Teijin Limited|Transparent conductive multilayer body and transparent touch panel|
US7208044B2|2004-11-24|2007-04-24|Mark A. Zurbuchen|Topotactic anion exchange oxide films and method of producing the same|
US7608335B2|2004-11-30|2009-10-27|Los Alamos National Security, Llc|Near single-crystalline, high-carrier-mobility silicon thin film on a polycrystalline/amorphous substrate|
US7258927B2|2004-12-23|2007-08-21|Los Alamos National Security, Llc|High rate buffer layer for IBAD MgO coated conductors|
US7727934B2|2004-12-23|2010-06-01|Los Alamos National Security, Llc|Architecture for coated conductors|
US7393584B2|2005-01-14|2008-07-01|Solutia Incorporated|Multiple layer laminate with moisture barrier|
US7362053B2|2005-01-31|2008-04-22|Osram Sylvania Inc.|Ceramic discharge vessel having aluminum oxynitride seal region|
JP4573673B2|2005-02-28|2010-11-04|富士フイルム株式会社|Water vapor barrier film|
BE1016553A3|2005-03-17|2007-01-09|Glaverbel|Glass low emissivity.|
SE528891C2|2005-03-23|2007-03-06|Sandvik Intellectual Property|Cut coated with a multi-layer of metal oxide|
SE528929C2|2005-04-18|2007-03-20|Sandvik Intellectual Property|Cut coated with a layer system and method of making this|
WO2006124503A2|2005-05-12|2006-11-23|Agc Flat Glass North America, Inc.|Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same|
WO2007007622A1|2005-07-07|2007-01-18|Asahi Glass Company, Limited|Electromagnetic wave shielding film and protective plate for plasma display panel|
US20070030569A1|2005-08-04|2007-02-08|Guardian Industries Corp.|Broad band antireflection coating and method of making same|
FR2893023B1|2005-11-08|2007-12-21|Saint Gobain|SUBSTRATE PROVIDED WITH A STACK WITH THERMAL PROPERTIES|
US20070172696A1|2006-01-17|2007-07-26|Georgia Tech Research Corporation|Protective thin film layers and methods of dielectric passivation of organic materials using assisted deposition processes|
US8119226B2|2006-10-18|2012-02-21|Sandvik Intellectual Property Ab|Coated cutting tool|
CN1923508A|2006-09-21|2007-03-07|上海交通大学|TiN/AlON nano multilayer coating for cutting tool|
US7782569B2|2007-01-18|2010-08-24|Sae Magnetics Ltd.|Magnetic recording head and media comprising aluminum oxynitride underlayer and a diamond-like carbon overcoat|
US8080323B2|2007-06-28|2011-12-20|Kennametal Inc.|Cutting insert with a wear-resistant coating scheme exhibiting wear indication and method of making the same|
WO2009023744A1|2007-08-13|2009-02-19|University Of Virginia Patent Foundation|Thin film battery synthesis by directed vapor deposition|
SE532020C2|2007-09-13|2009-09-29|Seco Tools Ab|Coated cemented carbide inserts for milling applications and manufacturing methods|
JP2009120912A|2007-11-15|2009-06-04|Kobe Steel Ltd|Wear resistant member with hard film|
TWI510361B|2008-04-29|2015-12-01|Agency Science Tech & Res|Inorganic graded barrier film and methods for their manufacture|
US20100255337A1|2008-11-24|2010-10-07|Langhorn Jason B|Multilayer Coatings|
WO2010065564A1|2008-12-02|2010-06-10|Georgia Tech Research Corporation|Environmental barrier coating for organic semiconductor devices and methods thereof|
KR20110008398A|2009-07-20|2011-01-27|삼성전자주식회사|Layer structure, capacitor including the layer structure and method of manufacturing the same|
US20110016946A1|2009-07-21|2011-01-27|Sudhir Brahmandam|Coated Tooling|
SE533972C2|2009-07-27|2011-03-15|Seco Tools Ab|Fine-grained cemented carbide cutting tool for turning in hardened steel and tool steel|
US8877300B2|2011-02-16|2014-11-04|Veeco Ald Inc.|Atomic layer deposition using radicals of gas mixture|
US8574728B2|2011-03-15|2013-11-05|Kennametal Inc.|Aluminum oxynitride coated article and method of making the same|
FR2973939A1|2011-04-08|2012-10-12|Saint Gobain|LAYERED ELEMENT FOR ENCAPSULATING A SENSITIVE ELEMENT|
FR2973940A1|2011-04-08|2012-10-12|Saint Gobain|LAYERED ELEMENT FOR ENCAPSULATING A SENSITIVE ELEMENT|US9427808B2|2013-08-30|2016-08-30|Kennametal Inc.|Refractory coatings for cutting tools|
US9650714B2|2014-12-08|2017-05-16|Kennametal Inc.|Nanocomposite refractory coatings and applications thereof|
JP6417227B2|2015-01-27|2018-10-31|株式会社ディスコ|Cutting blade, cutting apparatus, and wafer processing method|
WO2016136520A1|2015-02-23|2016-09-01|住友電気工業株式会社|Rotating tool|
JP6462422B2|2015-03-03|2019-01-30|株式会社ディスコ|Cutting apparatus and wafer processing method|
CN106581783A|2016-12-30|2017-04-26|马爱进|Ceramic coating scalpel|
CN106917066B|2017-03-17|2019-03-05|大连理工大学|A kind of quaternary single layer of super hard thin-film material and preparation method thereof|
法律状态:
2015-09-22| NAV| Patent application has lapsed|
优先权:
申请号 | 申请日 | 专利标题
US13/750,252|US9017809B2|2013-01-25|2013-01-25|Coatings for cutting tools|
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