Drive nut of toggle assembly for Chemical Mechanical Polishing

专利摘要:
The present invention relates to a drive nut for a toggle assembly of a chemical mechanical polishing facility. To this end, the present invention relates to a toggle assembly for a polishing facility that is fastened to one side of a sliding block 230 to support sliding movement of the sliding block 230. In the drive nut, it is divided into semi-circular ring shapes corresponding to each other, and screw holes 11 are formed in the center of the plate surface of each main body 10, and one end facing each other forms a circular cross section and is 1/2 thickness Formed so that they overlap each other, on each of the surfaces of each circular cross section facing each other to form a fitting projection 12 and the fitting hole 13, the other end is made of a close contact with each other This makes it easier to replace the drive nut, which minimizes replacement time and process downtime. This is to improve the process performance efficiency.
公开号:KR20030028882A
申请号:KR1020010061160
申请日:2001-10-04
公开日:2003-04-11
发明作者:신일철
申请人:삼성전자주식회사；
IPC主号:

专利说明:

Drive nut of toggle assembly for Chemical Mechanical Polishing
[12] The present invention relates to a drive nut of a toggle assembly for a polishing plant, and more particularly to a drive nut of the toggle assembly for a polishing plant to facilitate replacement when the drive nut is damaged due to severe stress.
[13] In general, a planarization process of the wafer (Chemical Mechanical Polishing, hereinafter abbreviated as CMP) is a process of performing planarization by polishing a film of a wafer using chemical and mechanical actions.
[14] CMP is largely divided into polishing process for polishing and cleaning process for cleaning.
[15] That is, since various contaminants, such as slurry used as an abrasive and removed film particles, remain on the polished wafer film surface, cleaning is necessarily performed to remove these contaminants.
[16] The equipment provided for such cleaning is a post clean facility, which is largely an input station 110, a first brush station 120, a second brush station 130, and a spin station 140 as shown in FIG. 1. ).
[17] The input station 110 is a step in which the polished wafer W is introduced in the polishing process, and the front and rear surfaces of the wafer W are cleaned by deionized water.
[18] The first brush station 120 is trapped by the rotation and pressing of the brush 121 while using NH40H.
[19] Then, as the brush 121 is separated from the wafer W, the brush 121 releases particles onto the wafer W, and the particles present in the wafer W are transferred to the drain region of the brush box (not shown). Discharged.
[20] The second brush station 130 is a step of cleaning using HF to effectively remove metal contamination from the surface of the wafer W once cleaned in the first brush station 120.
[21] On the other hand, the spin station 140 is a step of rinsing the cleaned wafers W through the first and second brush stations 120 and 130 as ultrapure water and then drying them using a centrifugal force and a heat lamp.
[22] In such a post-clean installation, in particular, the first and second brush stations 120 and 130 are provided with two brushes 121 and 131, respectively, and the wafer W between the pair of brushes 121 and 131. Is passing through.
[23] In addition, when the center portion of the wafer W is positioned behind each of the brushes 121 and 131, the wafer W is stopped and the wafer W is rotated. Toggle assembly is provided.
[24] Toggle assembly is generally provided with a pair of sliding blocks 230 in a direction corresponding to each other at a predetermined interval on both sides of the first shaft 210 formed a spiral on the outer peripheral surface as shown in Figure 2, each The sliding block 230 is configured to be provided with a toggle roller 231 to enable horizontal rotation to the upper end.
[25] The toggle roller 231 is rotated by the rotational force of the second shaft 220 having a rectangular cross section provided in the sliding block 230 in parallel with the first shaft 210.
[26] That is, a bush having an inner diameter of the same shape as that of the second shaft 220 is rotatably inserted into the sliding block 230 into which the second shaft 220 is inserted, and the gear 232 is pin-coupled to one end of the bush. This gear 232 is engaged with the gear 233, which is axially supported on the same axis perpendicular to the toggle roller 231 of the upper end, so that the rotational force is transmitted.
[27] The first shaft 210 and the second shaft 220 are rotated by respective motors (not shown), and these motors may rotate simultaneously.
[28] When the motor rotates at the same time, as the first shaft 210 and the second shaft 220 is rotated at the same time, the pair of sliding blocks 230 which are axially supported on the first shaft 210 slides in a corresponding direction. At the same time, the toggle roller 231 provided in each sliding block 230 rotates.
[29] The movement of the sliding block 230 is performed when the transfer of the wafer W is to be interrupted.
[30] That is, when the wafer W comes to the cleaning position during conveyance by the conveyor, as shown in FIG. 3, the sliding blocks 230 on both sides move in a direction facing each other, and thus are positioned at intervals smaller than the outer diameter of the wafer W. While both sides of the outer circumferential surface is in contact with the toggle roller 231 of the sliding block 230 is in a state where the movement is stopped.
[31] In this state, when the toggle rollers 231 on both sides are rotated in the same direction, the wafer W that is in surface contact with the toggle roller 231 rotates in the opposite direction to the rotation direction of the toggle roller 231.
[32] At this time, the center portion of the wafer W is in contact with the brush (B) is rotated in the upper and lower parts to clean the wafer (W).
[33] When the cleaning is completed in this way, the pair of slide blocks 230 which are in contact with the toggle roller 231 at the outer end surface of the wafer W move outwards at a distance greater than the outer diameter of the wafer W, The drive transfers the wafer W to a subsequent process.
[34] Meanwhile, the drive nut 300 as shown in FIG. 4 is coupled to one side of the outer side to which the first shaft 210 of the sliding block 230 is fitted by screwing.
[35] The drive nut 300 serves to guide the sliding block 230 in the first shaft 210 so that the sliding block 230 can be safely moved in the axial direction during the sliding movement.
[36] However, since the portion supported by the first shaft 210 is slid along the second shaft 220 on the other side when the sliding movement is also sliding at the same time, so that the sliding shaft between the two shafts 210, 220 at the first shaft 210 It moves along the second shaft 220 on the basis of the movement force of the closed end that is easily broken while a severe stress acting on the drive nut 300 by the minute movement force difference in both shafts (210, 220) have.
[37] In order to replace such a drive nut 300 when it is damaged, not only the first shaft 210 but also the brush B and each driving motor and parts connected to each motor must be disassembled, which is very cumbersome and requires a long time to replace the drive nut 300. There is an inefficient problem because it takes.
[38] Therefore, the present invention has been invented to solve the above-mentioned problems of the prior art, the object of the present invention is to facilitate the replacement of the broken parts to improve the work convenience and efficiency.
[1] 1 is a block diagram showing a general cleaning process;
[2] 2 is a front view showing a conventional toggle assembly,
[3] 3 is a plan view showing an operating state of a conventional toggle assembly,
[4] 4 is an exploded perspective view showing a drive nut according to the present invention;
[5] 5 is a coupling structure of the drive nut according to the present invention.
[6] 6 is a state in which the drive nut is coupled to the sliding block according to the present invention.
[7] Explanation of symbols on the main parts of the drawings
[8] 10 main body 11: screw hole
[9] 12: alignment protrusion 13: fitting hole
[10] 20: screw 210, 220: shaft
[11] 230: sliding block
[39] In order to achieve the above object, the present invention is a drive nut of the toggle assembly for a polishing machine which is fastened to one side of the slide block to support the sliding movement of the slide block, divided into semi-circular ring shapes corresponding to each other, A screw hole is formed in the center of the plate, and the ends facing each other form a circular cross section so that they can overlap each other by forming a thickness of 1/2. Forming a hole, the other end is characterized in that the end surface is made of a close contact with each other.
[40] Hereinafter, described with reference to the accompanying drawings a preferred embodiment of the present invention.
[41] Figure 5 shows a drive nut according to the present invention, the drive nut in the present invention is a configuration consisting of a semi-circular ring shape corresponding to each other.
[42] That is, while forming the main body 10 in a semi-circular ring shape corresponding to each other, forming a screw hole 11 in the center of the plate surface of each main body 10, each end to form a circular cross section, the other end is mutually end It is a structure which makes the cross section closely contact.
[43] Particularly, the circular ends are formed to be 1/2 of the thickness of the main body, so that the ends of the circular ends can overlap each other. Protruding, so that the other side fitting hole 12 is inserted into the fitting hole 13 is formed.
[44] In more detail, the most prominent feature is that the main body is formed in a configuration that is separated by dividing what was previously formed in a circular shape.
[45] At this time, the main body 10 on both sides provided in a semi-circular ring shape is to be symmetric with each other.
[46] In particular, the screw holes 11 formed on the corresponding centers of the respective main bodies 10 are configured to be screwed to the sliding block.
[47] On the other hand in the configuration of the present invention has a different feature to be formed in each of the alignment projections 12 and the fitting hole 13 to the surface facing each other between the circular cross-section.
[48] That is, when the alignment protrusions 12 are fitted into the fitting holes 13 while overlapping the circular cross-sections, the bisected main body 10 is in a state where one end is connected to each other.
[49] When one end is connected to the one side of the sliding block 230 using the screw 20 to the screw hole 11 in the center of each body 10 as shown in Figure 6 when the present invention is a sliding block ( 230 is firmly coupled to.
[50] Therefore, in the past, the shaft was once fitted to the shaft to be fastened by screwing, and during replacement, the shaft had to be disassembled first and then replaced, but in the present invention, the fastening and replacement can be easily performed regardless of the shaft 210. Make sure
[51] In other words, even when the shaft 210 is fitted to the sliding block 230, the bisected main body 10 is assembled so that one end of the circular ends are fitted on both sides about the shaft 210 on one side of the sliding block 230. When the screw 20 is fastened to the screw hole 11, the screw 20 can be simply fastened.
[52] In addition, when disassembling, if the screw 20, which is fastened in reverse, is separated from each other and the circular ends are separated, the shaft 20 can be simply separated without interference.
[53] As such, the present invention can be easily combined and detached only without disassembling other parts, and thus it is very easy to replace when broken.
[54] On the other hand, the present invention is divided into two configurations so that the breakage rate can be significantly reduced when stress caused by the difference in the moving force in the first shaft 210 and the second shaft 220 supporting the sliding block 230.
[55] That is, when a slight difference in movement force between the shafts 210 and 220 is generated, a stress is applied to the main body, and a tension force is generally generated in the horizontal direction, and at the same time, the plate is cracked or severely broken. Since the main body is already separated, it is possible to reduce the breakage by buffering against tension in the horizontal direction.
[56] As such, the present invention is characterized in that the main body 10 can be easily detached while the main body 10 is connected to each other by fitting so that replacement and replacement of the sliding block 230 is very easy.
[57] On the other hand, while many matters have been described in detail in the above description, they should be construed as illustrative of preferred embodiments rather than to limit the scope of the invention.
[58] Therefore, the scope of the present invention should not be defined by the described embodiments, but should be determined by the technical spirit described in the claims.
[59] As described above, according to the present invention, the main body 10 is simply formed as a pair of semi-circular shapes, and one end portion of the circular portion is overlapped with each other so that the fitting protrusion 12 and the fitting hole 13 are assembled by the fitting fitting. (10) By improving the simple configuration to screw the sliding block 230 through the screw hole 11 in the center it is very easy to replace by damage during operation in the toggle assembly to improve the work efficiency and labor costs At the same time, the rate of breakage can be significantly reduced, resulting in more economical maintenance.

权利要求:
Claims (2)
[1" claim-type="Currently amended] In the drive nut of the toggle assembly for the polishing equipment is fastened to one side of the sliding block 230 to support the sliding movement of the sliding block 230,
Divided into semi-circular ring shapes corresponding to each other, screw holes 11 are formed in the center of the plate surface of each main body 10, and one end facing each other is formed to a thickness of 1/2 while forming a circular cross section to overlap each other. Drive nuts of a toggle assembly for a polishing facility, each of which has alignment protrusions 12 and fitting holes 13 formed on opposite sides of the circular cross-sections that overlap each other, and the other ends are in close contact with each other. .
[2" claim-type="Currently amended] 2. The drive nut of claim 1, wherein the alignment protrusion (12) and the fitting hole (13) are coupled by mutual fitting.

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同族专利:

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2001-10-04|Application filed by 삼성전자주식회사

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2001-10-04|Priority to KR1020010061160A

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2003-04-11|Publication of KR20030028882A

优先权:

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申请号 | 申请日 | 专利标题

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KR1020010061160A|KR20030028882A|2001-10-04|2001-10-04|Drive nut of toggle assembly for Chemical Mechanical Polishing|