Semiconductor device manufacturing apparatus with tools for locking carrier

专利摘要:
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device manufacturing apparatus, and more particularly, a wafer arm for transferring wafers in a carrier in a process of handling a plurality of wafers by using a carrier on which wafers are loaded. The present invention relates to a semiconductor device manufacturing apparatus equipped with a carrier locking means, which prevents damage to the wafer, and for this purpose, a lock for fixing the carrier to a loading portion on which the carrier is placed. Disclosed is a semiconductor device manufacturing apparatus, and a semiconductor device manufacturing apparatus comprising a notification means using a count bar, an indicator light, a ringtone, or the like so that an operator can easily grasp a progress state by a plurality of carriers. In which the wafer is transported among a number of carriers By making it easy to grasp the row state, it is possible to prevent the carrier from being accidentally lifted due to the operator's mistake, and furthermore to prevent the wafer in the carrier from being damaged.
公开号:KR20020047445A
申请号:KR1020000075860
申请日:2000-12-13
公开日:2002-06-22
发明作者:강장원；최상용
申请人:윤종용；삼성전자 주식회사；
IPC主号:

专利说明:

Semiconductor device manufacturing apparatus with tools for locking carrier
[14] BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device manufacturing apparatus, and more particularly, a wafer for transporting wafers in a carrier in a process of handling a plurality of wafers by using a carrier on which wafers are loaded. A device for manufacturing a semiconductor device with a carrier locking means, characterized by preventing an arm from damaging a wafer.
[15] In fabrication (FAB) of the semiconductor manufacturing process, in which an integrated circuit is formed on a surface of a wafer to manufacture a plurality of semiconductor chips, the wafer is generally stored and transported by a loading means such as a carrier. After the carrier is loaded in the device, each wafer in the carrier may be loaded / unloaded through a transfer means such as a wafer arm.
[16] FIG. 1 is a perspective view illustrating a state in which a wafer 20 in a carrier 10 is transferred by a wafer arm 30, which will be described in detail with reference to FIG. 1.
[17] The carrier 10 has an inner space in which the wafers 20 are loaded in a box-shaped exterior, and guides 12 supporting each of the stacked wafers are formed at both inner sides thereof. A wafer arm is used as a means for transferring the wafer in such a carrier, and the wafer arm 30 transfers the wafer 20 while supporting the bottom center of the wafer.
[18] The wafer arm is operated by an arm control unit (not shown) which controls the driving of the wafer arm, and usually the wafer arm is operated with a plurality of carriers placed in the loading section.
[19] As such, when wafers in each carrier are transferred in a state where a plurality of carriers are placed, there is a difficulty that an operator does not accurately grasp the progress of each carrier. Accordingly, in the state of not knowing the progress of each carrier, the operator determines that any carrier has completed the process, and in the process of lifting the carrier, wafers in the carrier come into contact with the wafer arm operating in the carrier and are damaged. Could occur.
[20] An object of the present invention is to provide a semiconductor device manufacturing apparatus characterized in that the carrier locking means is provided so that each carrier can be fixed in a state placed on the mounting portion.
[21] Another object of the present invention is to provide a semiconductor device manufacturing apparatus including an alarm means so that the operator can determine the progress of each carrier in a state in which a plurality of carriers are placed on the loading portion.
[1] 1 is a perspective view showing a carrier loaded with a plurality of wafers,
[2] Figure 2 is a perspective view showing a state equipped with a carrier locking means according to an embodiment of the present invention,
[3] Figure 3 is a front view showing a state equipped with a carrier locking means according to another embodiment of the present invention,
[4] Figure 4 is a front view with a carrier locking means according to another embodiment of the present invention.
[5] <Description of Symbols for Main Parts of Drawings>
[6] 10, 110: carrier 12: guide
[7] 20, 120: wafer 30: wafer arm
[8] 114: bottom 140: lock
[9] 150: rotation controller 154, 174: solenoid valve
[10] 160: loading portion 162: protective cover
[11] 170: count bar 172: count bar driving means
[12] 180: signal 190: indicator light
[13] 200: semiconductor device manufacturing apparatus
[22] In order to achieve the above object, the present invention provides a carrier having an inner space in which a plurality of wafers are loaded; A loading unit in which a plurality of carriers are stacked; A wafer arm which is formed at one side of the loading part and is driven into the carrier and supports and transports the lower surface of the wafer; And an arm controller for controlling driving of the wafer arm, the apparatus comprising: carrier locking means for fixing the carrier while wafers in the carrier are transported based on each carrier; The carrier locking means includes: a lock that fixes the bottom surface of the carrier by rotation after being inserted into the bottom surface of the carrier; And a rotation controller connected to the arm control unit through the solenoid valve and adjusting the rotation of the lock, wherein the rotation controller receives the signal of the arm control and rotates the lock to prevent contact between the wafer and the wafer arm in the carrier. Provided is a semiconductor device manufacturing apparatus provided with a carrier locking means.
[23] In addition, in order to achieve another object of the present invention is formed in one-to-one correspondence with each carrier on one side of the loading portion and is driven up and down along the side of the carrier and counting the number of wafers in the carrier; includes; A count bar is fixedly lifted over a carrier while wafers in the carrier are transferred, thereby fixing the carrier.
[24] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
[25] 2 illustrates an example including a locking stand 140 fitted to the bottom surface 114 of the carrier 110 according to an embodiment of the present invention. Referring to FIG.
[26] As shown in the figure, a lock 140 that is fitted to the lower surface 114 of the carrier 110 and rotated to fix the lower surface of the carrier is formed in the loading unit 160 on which the carrier is placed. The stand 140 may be connected by a rotation controller 150 such as an actuator and rotated by 180 °.
[27] Such a lock 140 is formed corresponding to each carrier 110, the rotation controller for rotating the lock is driven by receiving a signal 180 transmitted when the wafer arm is driven through the solenoid valve 154, etc. Accordingly, the carrier 120 may be fixed while the wafers 120 in the corresponding carrier 110 are transferred.
[28] That is, the lock is adjusted in relation to the driving state of the wafer arm that transports the wafer in the carrier, and when the wafer arm is driven with respect to any wafer, it receives the signal and rotates by the rotation controller on the lower surface of the carrier to receive the signal. After the wafer transfer in the carrier is completed, the rotation controller is operated again so that the lock can rotate to its original position.
[29] Therefore, while the wafers are transported in any carrier, the lock is rotated while holding the carrier, so that the carrier does not move even if an operator makes a mistake such as lifting the carrier. I can protect it.
[30] 3 is an example showing a locking means according to another embodiment of the present invention, and specifically shows an embodiment in which the carrier is fixed using the count bar 170.
[31] The conventional count bar is formed in one-to-one correspondence with each carrier on one side of the loading unit, and is driven up and down along the side of the carrier to count the number of wafers in the carrier. According to an embodiment of the present invention, the count bar is moved until the wafers in the carrier 110 are all transferred using the signal 180 transmitted when the wafer arm operates to the count bar 170 having the above function. It is located at the top of the. That is, the signal 180 transmitted when the wafer arm operates is transmitted to the count bar driving means 172 through the solenoid valve 174, so that the count bar 170 is located at the top of the carrier 110. And the count bar can be lowered to the bottom of the carrier after the operation of the wafer arm is over.
[32] As such, by placing a count bar at the top of the carrier for the purpose of counting the number of wafers in the carrier, the operator can easily recognize that the carrier is in operation, thereby preventing errors such as lifting the carrier by mistake. This embodiment has the advantage of achieving the desired purpose by utilizing an existing device without adding a separate device.
[33] 4 is a configuration diagram briefly showing another embodiment of the present invention, which will be described with reference to FIG. 4 as follows.
[34] Generally, in the semiconductor device manufacturing apparatus 200, the loading part 160 in which the plurality of carriers 110 are placed is covered with a protective cover 162. At this time, since the operator can not easily know the progress of each carrier in the state that the four carriers are loaded at the same time, as shown in the figure, the indicator light 190 is formed on the surface of the protective cover, the signal of the wafer arm operating in each carrier Receiving the corresponding indicator light is turned on so that the operator can easily distinguish the carrier during the transfer of the wafer. Through this, it is possible to prevent the operator from lifting the carrier in progress of the wafer transfer, and further prevent the wafers in the carrier from being damaged.
[35] In FIG. 4, an indicator in which a number is indicated corresponding to each carrier is illustrated. Alternatively, a simple color change (for example, lighting of red and blue colors) may be applied. In addition, after configuring the sound output means other than the indicator light, a ring tone (e.g., patrol car sound, phone ring sound, shaking sound, fire engine sound, etc.) classified by each carrier is applied to the carrier when the wafer transfer is completed within a certain carrier. It is also possible to prevent the wrong entry of the carrier by ringing the ringtone set in.
[36] As described above, the carrier may be physically fixed to the carrier in which the wafer is being transferred by providing a notification means such as a count bar or an indicator light so that an operator may easily know the wafer progress state in the carrier, or by rotating the lock on the lower surface of the carrier. According to such a configuration, it is possible to prevent the carrier, which is in progress of the wafer transfer, from being lifted up by an operator, thereby preventing the wafer in the carrier from being damaged.
[37] The semiconductor device manufacturing apparatus according to the present invention is characterized in that it comprises a lock for fixing the carrier to the mounting portion on which the carrier is placed, and also the count bar and indicator light or so that the operator can easily grasp the progress of each carrier It is characterized in that it comprises a notification means using a ringtone, etc. Through this, the operator can easily grasp the progress of the wafer transfer from a plurality of carriers can be prevented from accidentally lifting the carrier by the operator's mistake. In addition, it is possible to prevent the wafer in the carrier from being damaged.

权利要求:
Claims (3)
[1" claim-type="Currently amended] A carrier having an inner space in which a plurality of wafers are loaded;
A stacking unit in which a plurality of carriers are stacked;
A wafer arm which is formed at one side of the loading part and is driven into the carrier and supports and transports a lower surface of the wafer; And
An apparatus for manufacturing a semiconductor device comprising: an arm controller for controlling driving of the wafer arm.
And a carrier locking means for fixing the carrier while the wafers in the carrier are transported based on the respective carriers.
[2" claim-type="Currently amended] The method of claim 1 wherein the carrier locking means
A lock to secure the bottom surface of the carrier by rotation after being inserted into the bottom surface of the carrier;
And a rotation controller connected to the arm controller through a solenoid valve and controlling rotation of the lock.
And the rotation controller rotates the lock in response to a signal of the arm control unit, thereby preventing contact between the wafer in the carrier and the wafer arm.
[3" claim-type="Currently amended] The method of claim 1 wherein the carrier locking means
And a count bar formed in a one-to-one correspondence with each carrier on one side of the stacking unit, and counting the number of wafers in the carrier while being driven up and down along the side of the carrier.
And the count bar is fixedly lifted over the carrier while the wafers in the carrier are transferred, thereby fixing the carrier.

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引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2000-12-13|Application filed by 윤종용, 삼성전자 주식회사

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2000-12-13|Priority to KR1020000075860A

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2002-06-22|Publication of KR20020047445A

优先权:

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申请号 | 申请日 | 专利标题

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KR1020000075860A|KR20020047445A|2000-12-13|2000-12-13|Semiconductor device manufacturing apparatus with tools for locking carrier|