• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    PURPOSE: A door structure of a load lock chamber used for manufacturing a semiconductor device is to prevent a door of the chamber to be contacted with a user when the door is opened/closed. CONSTITUTION: A door structure of a load lock chamber used for manufacturing a semiconductor device comprises a load lock chamber having a carrier in which a wafer is mounted and a passage(150) through which the carrier is transferred, a door portion(200) mounted at a side wall(100) of the load lock chamber to open/close the passage, and a rail portion(210) disposed at the side wall of the load lock chamber to support the door portion and guide a sliding operation of the door portion. In the door structure, the door portion is connected through a shaft or a link with a driving unit(25) to be automatically slid along the rail portion.
    公开号:KR20000059387A
    申请号:KR1019990006938
    申请日:1999-03-03
    公开日:2000-10-05
    发明作者:이채영
    申请人:윤종용；삼성전자 주식회사；
    IPC主号:
    专利说明:

    Door structure of load lock chamber used for manufacturing semiconductor device
    BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to semiconductor devices, and more particularly to a door structure of a load lock chamber.
    When mounting a wafer in a process facility for manufacturing a semiconductor device, such as an ion implantation facility, the wafer may be mounted while inserted in a cassette carrier. At this time, the process equipment includes a load lock chamber and the like, and a cassette carrier is mounted to the load lock chamber. In order to mount the cassette carrier, a door structure is formed on one surface of the load lock chamber.
    1 schematically shows a door structure of a conventional load lock chamber.
    Specifically, a passage 15 through which a cassette carrier (not shown) into which a wafer is inserted is formed is formed on one wall surface 10 of the load lock chamber. When the cassette carrier is mounted in the load lock chamber through this passage 15, the passage 15 must be closed and closed. To this end, one wall surface 10 of the load lock chamber is provided with an opening and closing door part 20 for opening and closing the passage 15.
    The door part 20 is connected to a driving means 25 such as a motor or the like and a driving force transmission means 27 such as a link. By this driving means 25, the door part 20 is opened or closed in such a manner as to project toward the front of the load lock chamber. That is, the door part 20 is installed on one wall surface 10 of the load lock chamber in a manner of opening and closing to open and close the passage 15.
    At this time, since the door part 20 is operated in a swinging manner, when the door part 20 is opened, the door part 20 may protrude toward the operator. The door part 20 may protrude approximately 90 ° to 145 ° with respect to the wall surface 10 of the load lock chamber. Accordingly, the door part 20 may contact the worker. Due to such contact, the wafer loaded on the cassette carrier held by the worker may be separated from the cassette carrier and dropped on the work floor, and the like, and damage such as cracking of the wafer may occur.
    In addition, a free space in which the door part 20 may protrude and open may be secured. Accordingly, since a part of the work space is used as the free space, it may be a detrimental factor in using the work space efficiently.
    The technical problem to be achieved by the present invention is that the door of the load lock chamber used in the manufacture of a semiconductor device that can prevent the door portion from contacting the operator when the door portion opening and closing operation to prevent damage to the wafer handled by the operator To provide a structure.
    1 is a view schematically showing a door structure of a conventional load lock chamber.
    2 is a view schematically illustrating a door structure of a load lock chamber according to an embodiment of the present invention.
    <Description of Major Codes in Drawings>
    100; Load lock chamber walls, 150; Passage,
    200; A door part 210; Rail,
    250; Drive means.
    One aspect of the present invention for achieving the above technical problem is a load lock chamber in which a carrier is inserted into the wafer is inserted and a passage through which the carrier is transferred is formed, and is installed on one wall of the chamber and slid left and right Provided is a door structure of a load lock chamber for use in manufacturing a semiconductor device including a door portion for opening and closing the passage.
    The door structure further includes a rail part installed at one wall of the chamber to support the door part and to induce sliding of the door part.
    According to the present invention, the door part can be prevented from coming into contact with the worker when the door part is opened and closed, thereby preventing damage such as the wafer being handled from falling off the floor and the like being broken.
    Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, embodiments of the present invention may be modified in many different forms, and the scope of the present invention should not be construed as being limited by the embodiments described below. Embodiments of the present invention are provided to more completely explain the present invention to those skilled in the art. Accordingly, the shape and the like of the elements in the drawings are exaggerated to emphasize a more clear description, and the elements denoted by the same reference numerals in the drawings means the same elements.
    2 schematically illustrates a door structure of a load lock chamber according to an embodiment of the present invention.
    Specifically, the door structure according to the embodiment of the present invention includes a door unit 200 that is operated in a sliding manner on one wall surface 100 of the load lock chamber. In this case, the load lock chamber may be provided with two load lock chambers.
    One wall surface 100 of the load lock chamber is provided with a passage 150 through which a cassette carrier (not shown) into which wafers are inserted is transferred and mounted. The door part 200 slides to the left and right of one wall surface 100 of the load lock chamber to open and close the passage 150.
    In order to slide the door part 200, a rail part 210 is installed on one wall surface 100 of the load lock chamber adjacent to the lower end and the upper end of the door part 200. The rail unit 210 serves as a guide for inducing sliding of the door unit 200. In addition, the door part 200 is connected to a driving means 250 such as a motor, or the like by a shaft or a link 270, and driven by the driving means 250.
    Since the door 200 is operated in a sliding manner as described above, the door part 200 cannot be contacted with an operator located at the front side. Therefore, it is possible to prevent the wafer from being detached from the cassette carrier or the like handled by the operator and falling to the floor by the contact. Accordingly, it is possible to prevent the wafer from being broken or damaged. Thereby, the effect of improving the productivity of the whole process can be obtained.
    In addition, since the door part 200 slides to the left and right of the one wall surface 100 of the load lock chamber, the space required for opening and closing the door part 200 is limited to the left or right side of the one wall surface 100 of the load lock chamber. do. Therefore, the front space of the door part 200 can be utilized to improve the efficiency of the work space.
    As mentioned above, although this invention was demonstrated in detail through the specific Example, this invention is not limited to this, It is clear that the deformation | transformation and improvement are possible by the person of ordinary skill in the art within the technical idea of this invention.
    According to the present invention described above, it is possible to prevent the contact with the operator and the like when the door is opened and closed. Accordingly, it is possible to prevent the operator from dropping the wafer or the like and damaging the wafer by the contact.
    In addition, since the door is slid to the left and right to open and close, a space for the worker to work can be more secured. Accordingly, the work space in front of the door can be used more efficiently.
    权利要求:
    Claims (2)
    [1" claim-type="Currently amended] A load lock chamber in which a carrier into which the wafers are inserted is mounted and a passage through which the carrier is transferred is formed on one wall; And
    The door structure of the load lock chamber used in the manufacture of a semiconductor device, characterized in that it comprises a door portion which is installed on one wall of the chamber and sliding left and right to open and close the passage.
    [2" claim-type="Currently amended] The door structure of a load lock chamber of claim 1, further comprising a rail unit installed at one wall of the chamber to support the door unit and to induce sliding of the door unit.
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    同族专利:
    公开号 | 公开日
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1999-03-03|Application filed by 윤종용, 삼성전자 주식회사
    1999-03-03|Priority to KR1019990006938A
    2000-10-05|Publication of KR20000059387A
    优先权:
    申请号 | 申请日 | 专利标题
    KR1019990006938A|KR20000059387A|1999-03-03|1999-03-03|Door structure body of load lock chamber used for manufacturing semiconductor device|
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