ELECTROMAGNETIC RADIATION DETECTION DEVICE WITH ENCAPSULATION STRUCTURE HAVING AT LEAST ONE INTERFER

专利摘要:
The invention relates to a device (1) for detecting electromagnetic radiation comprising: at least one thermal detector (10) arranged on a substrate; and an encapsulation structure (20) forming a cavity (3) housing said thermal detector, comprising at least one encapsulation layer (21); and at least one Fabry-Perot cavity interferential filter (31) formed by first and second semi-reflecting mirrors (32A, 32B) spaced from one another by a so-called structured layer (35); a high index layer (33A) of one of said semi-reflecting mirrors (32A) being at least partly formed of said encapsulation layer.
公开号:FR3050526A1
申请号:FR1653609
申请日:2016-04-25
公开日:2017-10-27
发明作者:Laurent Frey；Salim Boutami；Jean-Jacques Yon
申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
IPC主号:

专利说明:

ELECTROMAGNETIC RADIATION DETECTION DEVICE WITH ENCAPSULATION STRUCTURE HAVING AT LEAST ONE INTERFERENTIAL FILTER
TECHNICAL AREA
The field of the invention is that of devices for detecting electromagnetic radiation, in particular infrared or terahertz, comprising at least one thermal detector encapsulated in a cavity formed at least in part by an encapsulation structure at the level of which is at least one interference filter. The invention applies in particular to the field of multispectral detection.
STATE OF THE PRIOR ART
[002] The devices for detecting electromagnetic radiation, for example infrared or terahertz, may comprise a matrix of thermal detectors, said elementary, each detector comprising an absorbent portion capable of absorbing the electromagnetic radiation to be detected. To insure the thermal insulation of the thermal detectors, the absorbent portions are usually in the form of membranes suspended above the substrate by anchoring pillars, and are thermally insulated therefrom by holding arms and thermal insulation. These anchoring pillars and isolation arms also have an electrical function by electrically connecting the suspended membranes to a reading circuit generally disposed in the substrate.
[003] In order to ensure multispectral detection, that is to say to filter the wavelengths in a detection range of the thermal detector, the detection device may comprise interference filters each associated with a detector thermal. In this respect, FIG. 1 illustrates an example of a multispectral detection device as described in the document FR2977937. The detection device 1 comprises a matrix of micro-bolometers each comprising a filter 5 of the MIM type (metal-lsolant-metal) resting directly on the absorbent membrane 11. Each MIM 5 filter is formed of a stack of two metal layers 5.1 , 5.3 separated from each other by an insulating layer 5.2, the stack 5 being structured in the form of pads whose lateral dimensions define the value of the resonant wavelength of the filter. Thus, the detection device comprises a plurality of MIM filters different from each other, arranged on the absorbent membranes at the rate of one filter per membrane, so as to allow the simultaneous detection of several different wavelengths in a spectral domain. detection.
[004] However, there is a need to have a device for detecting an electromagnetic radiation comprising at least one thermal detector and at least one interference filter, at least part of the properties of the thermal detector is not affected. by the interference filter.
STATEMENT OF THE INVENTION
The invention aims to remedy at least in part the disadvantages of the prior art, and more particularly to provide a device for detecting electromagnetic radiation comprising: - a substrate; at least one thermal detector disposed on the substrate; an encapsulation structure arranged to define with the substrate a cavity housing said thermal detector, comprising at least one encapsulation layer extending above the thermal detector.
[006] According to the invention, it further comprises: at least one Fabry-Perot cavity interference filter, disposed at the level of the encapsulation structure and at a distance from the thermal detector, formed by first and second semicircular mirrors; reflective spaced apart from each other by a so-called structured layer; each semi-reflecting mirror comprising a so-called high refractive index layer made of at least one dielectric or semiconductor material; the structured layer comprising an alternation, in a plane parallel to the plane of the substrate, of said portions of high refractive index made of at least one dielectric or semiconductor material, and of said portions of low refractive index made in a medium of which the refractive index is less than that of the material of high index portions; the high index layer of one of said semi-reflecting mirrors being at least partially formed of said encapsulation layer.
[007] Certain preferred but non-limiting aspects of this electromagnetic radiation detection device are as follows.
[008] Each semi-reflecting mirror may comprise a single layer of high index, and at least one of said semi-reflecting mirrors may comprise a so-called low index layer made in a medium whose refractive index is less than that material of the high index layer, said low index layer being located between the high index layer and the structured layer.
[009] The difference between the refractive index of the material of the high index layer and that of the middle of the low index layer may be greater than or equal to 1.5.
The middle of the low index layer and low index portions may be vacuum or a gas.
The high index layer of at least one of said semi-reflecting mirrors may be formed of a stack of at least two sub-layers in contact with one another and made of different materials. .
The structured layer may have a volume proportion of portions of high index greater than or equal to 30%.
The structured layer may comprise a continuous layer on which the high index portions rest.
The high index layer of a semi-reflecting mirror said upper may comprise a so-called upper wall located opposite the structured layer, and so-called side walls located on either side of the upper wall, the layer structured being maintained above the high index layer of a semi-reflecting mirror said lower by the side walls.
The encapsulation layer may extend continuously around the thermal detector so as to form an upper wall located above the thermal detector and a side wall resting on the substrate.
The detection device may comprise: a plurality of thermal detectors disposed on the substrate, over which extends said encapsulation layer; a plurality of Fabry-Perot cavity interference filters, each disposed at the level of the encapsulation structure; the encapsulation layer being common to several high-index layers of one of the said semi-reflecting mirrors of the different interference filters.
The semi-reflecting mirrors and the structured layers of the interference filters may be respectively coplanar from one interference filter to the other.
The invention also relates to a method for producing a detection device according to any one of the preceding characteristics, comprising at least the following steps: a. producing at least one thermal detector; b. embodiment of an encapsulation structure arranged to define with the substrate a cavity housing said thermal detector, comprising at least one encapsulation layer extending above the thermal detector and resting on a sacrificial layer covering said thermal detector ; vs. producing at least one Fabry-Perot cavity interference filter, a sacrificial layer being located between the high index portions of the structured layer, and possibly between a high index layer and the structured layer; d. removing said sacrificial layers.
The elimination of the sacrificial layers may be carried out in one and the same step, subsequently to the step of producing the interference filter, the sacrificial layers being made of the same material, the high index layers of the two semi-reflecting mirrors comprising each having a through orifice, and the low-index portions of the structured layer being through.
The elimination of the sacrificial layers may be carried out in two sub-steps: a first substep of elimination of the sacrificial layer on which the encapsulation layer is based, carried out before the filtering step; interferential, the encapsulation layer having a through hole and a sealing layer then being deposited on the encapsulation layer so as to close the through hole; and a second substep of removing the sacrificial layer situated between the high index portions of the structured layer, the high index layer of the upper semi-reflecting mirror having a through orifice.
BRIEF DESCRIPTION OF THE DRAWINGS
Other aspects, objects, advantages and features of the invention will appear better on reading the following detailed description of preferred embodiments thereof, given by way of non-limiting example, and with reference to the accompanying drawings, in addition to Figure 1 already described, wherein: Figure 2A is a schematic sectional view of an electromagnetic radiation detection device according to a first embodiment; Figure 2B is a top view of an exemplary elemental pattern of the structured layer; and FIG. 2C illustrates the spectral response of such a detection device for different values of the fill factor of the structured layer; FIG. 3A is a schematic view of a first interference filter variant, and FIG. 3B illustrates the spectral response of such a detection device for different values of the fill factor of the structured layer; FIG. 4A is a schematic view of a second interference filter variant, and FIG. 4B illustrates the spectral response of such a detection device for different values of the fill factor of the structured layer; FIG. 5A is a schematic view of a third interference filter variant, and FIG. 5B illustrates the spectral response of such a detection device for different values of the fill factor of the structured layer; Fig. 6A is a schematic view of a fourth interference filter variant, and Fig. 6B illustrates the spectral response of such a detection device for different values of the fill factor of the structured layer; Fig. 7A is a schematic view of a fifth interference filter variant, and Fig. 7B illustrates the spectral response of such a detection device for different values of the fill factor of the structured layer; Fig. 8A is a schematic view of a sixth variant of the interference filter, and Fig. 8B illustrates the spectral response of such a detection device for different values of the fill factor of the structured layer; Figure 9 is a schematic sectional view of an electromagnetic radiation detection device according to a second embodiment, adapted to multispectral detection; FIGS. 10A to 10H illustrate various steps of a method of producing a detection device according to a third embodiment; FIGS. 11A to 11C illustrate various steps of a method of producing a detection device according to a fourth embodiment; FIGS. 12A to 12E illustrate various steps of a method of producing a detection device according to a fifth embodiment; Figures 13A to 13B illustrate different variants of the detection device.
DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
In the figures and in the following description, the same references represent identical or similar elements. In addition, the various elements are not represented on the scale so as to favor the clarity of the figures. Moreover, the various embodiments and variants are not exclusive of each other and can be combined with each other. Unless otherwise indicated, the terms "substantially", "about", "of the order of" mean within 10%.
In general, the invention relates to an electromagnetic radiation detection device comprising at least one thermal detector located in an advantageously hermetic cavity. Preferably, the detection device comprises an array of thermal detectors, located, alone or in groups, in one or more cavities.
In the following description, the thermal detectors are bolometers whose absorbent membrane is suspended above the substrate. The membrane comprises a thermistor material whose electrical conductivity varies as a function of the heating of the membrane. However, this example is given for illustrative purposes and is in no way limiting. Any other type of thermal detector may be used, for example pyroelectric, ferroelectric or even thermopile detectors.
The detection device comprises an encapsulation structure which defines, with the substrate, the cavity in which are located one or more thermal detectors. The encapsulation structure comprises a thin encapsulation layer which extends over the thermal detector (s), and more precisely above the absorbing membrane (s). It is made of a material transparent to the radiation to be detected, and has a thickness of the order of a few hundred nanometers to a few microns. As detailed below, the encapsulation layer may extend around the thermal detector (s), i.e., it may define the peripheral edge of the cavity. It can furthermore extend continuously over several thermal detectors. By thin film is meant a layer deposited by microelectronic material deposition techniques, the thickness of which is preferably less than 10 μm.
The detection device further comprises a Fabry-Perot cavity interference filter. Such a filter is formed of two semi-reflecting mirrors spaced from each other by a so-called structured layer, of thickness d and having a mean refractive index ncs. A semi-reflecting mirror is said to be lower when it is located on the side of the structured layer facing the thermal detector, or is said to be higher when it is located on the opposite side of the structured layer. The interference filter provides wavelength reflection of the incident light in the detection range of the thermal detector, except for one or more wavelengths that are transmitted. The central wavelength of the transmission peak of the spectral response of the filter depends in particular on the optical thickness ncs.d of the structured layer.
Thus, the interference filter allows the detection device to detect electromagnetic radiation in a selective manner, which results in a filtering of the wavelengths of the incident radiation within a spectral range, said detection , that is to say a spectral range that can be detected by the thermal detector. The spectral range of detection is, in the following description, the infrared band LWIR (wavelengths between 8pm to 14pm) but the detection device can be used in other spectral domains in the infrared in which the Thermal detectors are sensitive, like the THz, the MWIR (between 3pm and 5pm) or the SWIR (between Ιμιτι and 3pm). In order to simplify the processing of the detected signals, it is desired here that the interference filters are narrow-band band-pass filters, with a high transmission inside the bandwidth and a strong rejection of the wavelengths. outside.
As described in detail below, each semi-reflecting mirror comprises at least one so-called high index layer made of at least one dielectric or semiconductor material, and advantageously a so-called low index layer made of a medium of which refractive index, or optical index, is less than the material of the high index layer. Preferably, each semi-reflecting mirror has only one layer of high index advantageously separated from the structured layer by a low index layer. The high index layer may be made of the same material, or a stack of sub-layers of different materials.
The structured layer has a substantially constant thickness, and is formed of an alternation, in a plane parallel to the semi-reflecting mirrors, of so-called high index portions made of at least one dielectric or semiconductor material, and of said portions. of low index made in a medium whose refractive index is lower than that of the material of the high index portions and the material of the high index layers. The volume proportion of the high-index portions on the total volume of the structured layer, in a zone situated opposite, that is to say, perpendicular, of the absorbent membrane, is understood as a filling factor of the structured layer. Thus, a filling factor of 1 corresponds to a continuous layer made in the material of the high index portion. The average refractive index ncs of the structured layer can be defined from the refractive indices of the material of the high index portions and the middle of the low index portions, weighted by the filling factor. The lateral dimensions of the high index and low index portions, in the main plane (X, Y) of the filter, participate in defining the central wavelength of the transmission peak of the spectral response of the interference filter.
According to the invention, the high index layer of one of the semi-reflecting mirrors of the interference filter, and preferably the lower semi-reflecting mirror, is at least partially formed of the thin encapsulation layer. In other words, as described below, the high index layer may comprise only the encapsulation layer, and therefore consist of it, or be formed of a stack of several sub-layers, one of which corresponds to the encapsulation layer. Thus, the interference filter does not rest on the absorbent membrane, in the sense that it is not in contact with the membrane. Thus, the properties of the absorbent membrane are preserved from any degradation related to a possible contact of the filter on the absorbent membrane.
The detection device may advantageously be used for multispectral detection. For this, the detection device comprises a matrix of thermal detectors adapted to detect electromagnetic radiation located in the same detection spectral range determined by the properties of the absorbent membranes. An array of interference filters is arranged opposite the detection matrix, at the rate of one filter per detector. The encapsulation layer is advantageously common to the cavity or cavities that house the array of detectors, so that the same encapsulation layer extends over each thermal detector. It forms the high index layer, or one of the sub-layers, of one of the semi-reflecting mirrors of each interference filter. Preferably, the semi-reflecting mirrors and the structured layer of the different interference filters are respectively coplanar. In other words, the structured layers of the different filters are preferably coplanar, the upper mirrors are preferably coplanar, and the lower mirrors are preferably coplanar. The interferential filters differ from each other essentially by the lateral dimensions of the high and low index portions of the structured layers, and therefore by the filling factor, which define the central wavelength of the spectral responses specific to each interference filter. .
Figure 2A is a schematic sectional view of a device for detecting an electromagnetic radiation according to a first embodiment.
For the rest of the description, a three-dimensional orthonormal reference (Χ, Υ, Ζ) is defined here, in which the plane (X, Y) is substantially parallel to the plane of a substrate of the detection device 1, the Z axis being oriented in a direction substantially orthogonal to the plane of the substrate 2. Thus, the terms "vertical" and "vertically" extend as being relative to an orientation along the Z axis, and the terms "lower" and "upper" Extend as being relative to an increasing position when moving away from the substrate 2 along the axis Z.
The electromagnetic radiation detection device is adapted to detect infrared radiation or terahertz. It comprises at least one thermal detector, and preferably an array of thermal detectors electrically connected to a read circuit. FIG. 2 is a partial view of the detection device 1 and represents only one thermal detector.
The detection device 1 comprises a substrate 2, made of silicon, comprising an electronic reading circuit (not shown) made in CMOS technology for applying a control signal to the thermal detectors and read the signals of detected by them in response to detection of the electromagnetic radiation of interest. The reading circuit may comprise a lower part formed of electronic devices of MOS type, for example transistors, diodes, capacitors, adapted to the implementation of the different electronic functions of the read circuit. It further comprises several levels of electrical interconnections ensuring the electrical connections between the various MOS devices and the thermal detectors, as well as the electrical connection to at least one electrical connection pad of the reading circuit with the outside of the detection device.
On the substrate 2 is a micro-bolometer 10 which comprises a membrane 11 adapted to absorb the radiation to be detected in the spectral detection range. The absorbent membrane 11 is thermally insulated and suspended above the substrate 2 by holding and thermal insulation elements such as anchoring pillars 12 associated with heat-insulating arms (not shown). The absorbent membrane 11 is spaced from the substrate 2 by a distance typically between 1pm and 5pm, preferably 2pm when the detectors are designed for detecting an infrared radiation included in the LWIR. A reflector 13 is located on the substrate 2, and disposed facing the absorbent membrane 11.
The detection device 1 comprises an encapsulation structure 20, or capsule, which defines, with the substrate 2, a cavity 3 advantageously hermetic inside which is the thermal detector 10. The encapsulation structure 20 is formed of a thin encapsulation layer 21 deposited so that it comprises a substantially flat upper wall 22 which extends above the detector 10, at a non-zero distance from the suspended membrane 11, for example included between 0.5pm and 5pm, preferably 1.5pm. It further comprises a side wall 23, possibly peripheral so as to surround the thermal detector in the plane (X, Y), which extends from the upper wall 22 and rests on the substrate 2. The encapsulation layer 21 therefore extends in this example continuously above and around the thermal detector so as to define the cavity 3 with the substrate 2. As detailed below, in the case where the encapsulation layer 21 has a through hole forming a release vent, the encapsulation structure 20 may comprise at least one sealing layer, covering the encapsulation layer 21 so as to close the vent, so as to ensure the hermeticity of the cavity. Thus, the encapsulation structure defines a cavity that houses the thermal detector (s).
The detection device comprises an optical filtering structure 30 comprising at least one interfered filter to be 31 to Fabry-Pérot cavity. The interference filter 31 is located opposite the thermal detector 10, more precisely opposite the absorbent membrane 11, at the level of the encapsulation structure 30 and is therefore not in contact with the absorbent membrane 11. The interference filter 31 can transmit a single spectral band, included in the spectral range of detection. In the case of a matrix of thermal detectors, the optical filtering device 30 comprises a plurality of interferometer filters 31 with a Fabry-Perot cavity arranged opposite the thermal detectors, for example due to a filter 31 by detector 10. The Filters 31 are then structured so that the central wavelengths of the spectral responses are different from each other.
The interference filter 31 comprises a stack of layers forming a lower semi-reflecting mirror 32A and an upper semi-reflecting mirror 32B, spaced from one another by a structured layer 35. Each half-reflecting mirror 32A, 32B comprises at least one so-called high refractive index layer, and may comprise, as illustrated in FIG. 2, a so-called low refractive index layer, located between the high-index layer and the structured layer. Preferably, at least one semi-reflecting mirror comprises such a low index layer, so that the spectral response of the interference filter has a sufficiently fine transmission peak and good rejection.
The high index layers 33A, 33B are made of at least one dielectric or semiconductor material which may be selected from silicon, germanium, a SixGei-x silicon and germanium alloy, and SixCi-x silicon carbide. x, for example amorphous. Their thicknesses are such that each layer of high index 33A, 33B advantageously forms a quarter wave plate with respect to a reference wavelength comprised in the spectral detection range, for example 10 μm. For example, for a spectral detection range corresponding to the LWIR, the thickness of the high index layers 33A, 33B may be about 0.73pm for amorphous silicon of optical index of 3.5. As detailed below, each high index layer 33A, 33B may be formed of a stack of several sub-layers of different materials in contact with each other. The materials are chosen such that the stack of sublayers is optically equivalent, in terms of optical path, to a single layer of high index, the average refractive index is then a function of the refractive indices specific to each material of the sublayers.
Each semi-reflecting mirror 32A, 32B here comprises a low index layer 34A, 34B, made in a medium having a refractive index lower than that of the high index layer 33A, 33B, with an index contrast. preferably greater than 1.5. This medium may be chosen from a dielectric or semiconductor material, gas or vacuum. In the case of gas and vacuum, the low index layer 34A, 34B then corresponds to a gas or vacuum zone situated between the structured layer 35 and the high index layer 33A, 33B, of substantially constant thickness. The thickness of the low index layers 34A, 34B is such that each layer 34A, 34B advantageously forms a quarter wave plate with respect to the reference wavelength. By way of example, for the spectral detection range corresponding to the LWIR, the thickness of the low index layers may be approximately 2.5 μm for air.
A high index contrast, preferably greater than or equal to 1.5, between the refractive indices of the high index layer 33A, 33B and the low index layer 34A, 34B makes it possible to obtain a peak of fine transmission centered on a central wavelength, while pushing the orders higher than the order 1 of the Fabry-Pérot cavity out of the spectral detection range.
Between the two semi-reflecting mirrors 32A, 32B extends a structured layer 35, forming the spacer of the Fabry-Pérot cavity. It comprises so-called high-index portions 36 made of at least one dielectric or semiconductor material, and low-index portions 37 made of a medium of refractive index lower than that of the material of the high-index portions. The portions of high index 36 and low index portions 37 alternate in the plane (X, Y) of the filter, that is to say in a plane parallel to the planes of the semi-reflecting mirrors. They are arranged so as to form a pattern, or structuring, which is repeated periodically or not. Thus, each portion of a first medium is located between two portions of the second medium in the plane (X, Y) of the filter, so that the portions 36, 37 are arranged mutually alternately. It is therefore not a superposition of layers of two different media along the Z axis.
The material of the high index portions 36 may be a dielectric or semiconductor material, and is preferably identical to that of the high index layers of the semi-reflecting mirrors. It can thus be silicon for example amorphous or germanium. The middle of the low index portions is preferably a gas or vacuum, but may be a dielectric or semiconductor material. The difference between the refractive index of the high index material and that of the low index medium is preferably greater than or equal to 1.5. Thus, the interference filter does not comprise any metallic material that can affect the detection of infrared or terahertz radiation.
The structured layer 35 has a substantially constant thickness, so that the high index portions 36 and the low index portions 37 have substantially the same thickness. The thickness can be of the order of 2 μm, to limit the parasitic resonances in the operating range of the multispectral detection device.
The high index portions 36 and the low index portions 37 are arranged mutually to form an elementary pattern, which repeats periodically or not along one or two axes in the plane (X, Y). The patterns may be periodic in two dimensions, and take any form of square, circular or other studs. They are then adapted to perform a filtering of unpolarized light or having two polarizations. The patterns may alternatively be periodic in one dimension, and then take the form of slits. They are then adapted to perform filtering of light having a single polarization.
The central wavelength of the transmission peak of the spectral response of the interference filter 31 depends in particular on the dimensional parameters of the structured layer 35, namely the lateral dimensions of the portions of high index 36 and of low index 37, the period of the arrangement of the patterns, as well as the value of the refractive indices of these media. The dimensions of the patterns of the structured layer 35, in terms of period and lateral dimensions, in the main plane (X, Y) of the structured layer 35, may be less than a value of a central wavelength of the peak transmission of the spectral response of the filter to order 1.
The encapsulation layer 21 of the encapsulation structure 20 here forms the high index layer 33A of one of said semi-reflecting mirrors, here the lower half mirror 32A. The interference filter 31 does not then rest directly on the absorbent membrane 11 but is spaced therefrom. The presence of the filter 31 therefore does not affect the intrinsic performance of the thermal detector, in particular the response time of the detector which depends in particular on the thermal inertia of the absorbent membrane, the latter being degraded when the interference filter rests directly on the membrane as in the example of the prior art described above.
It is advantageous that one and / or the other of the semi-reflecting mirrors 32A, 32B have only one layer of high index 33A, 33B, and not several layers of high index alternating with low index layers, as is usually the case with multilayer dielectric mirrors. Indeed, as will be described later, the implementation process is simplified while obtaining interference filters with high spectral selectivity and high rejection.
FIG. 2B is a top view of an exemplary elementary pattern formed by a high index portion and a low index portion of the structured layer, and FIG. 2C illustrates the spectral responses of the filter for different values. the fill factor of the structured layer.
As mentioned above, the filling factor f is defined as the ratio between the volume occupied by the high index portions 36 on the total volume of the structured layer 35, in particular in a zone of the structured layer situated opposite , that is to say perpendicularly, of the absorbent membrane. Moreover, the spectral response is here characterized by the value of the transmission coefficient of the filter as a function of the wavelength of the incident radiation and by the width at half height of the peak of transmission, as well as by the rejection, in the detection spectral range corresponding here to LWIR (8-14pm). The rejection is defined here as the ratio of the maximum transmission value in the bandwidth of the filter to the minimum value of transmission out of the bandwidth, in the spectral range of detection considered.
In the example of FIG. 2B, the elementary pattern formed by the high-index portions 36 and the low-index portions 37 of the structured layer 35 is in the form of a through orifice 37 with a square section in the plane (X, Y) side "a", surrounded by a portion of high index 36. The structured layer 35 thus has a grid shape made in the material portions of high index in which the through holes form the portions of low index 37, these being spaced apart from each other by a period P. As mentioned above, the through hole may have different sectional shapes in the plane (X, Y).
Each semi-reflecting mirror 32A, 32B comprises a layer of high index 33A, 33B of amorphous silicon with a thickness of about 0.8pm and a layer of low index 34A, 34B of vacuum with a thickness of 2, 5pm, both forming a quarter wave plate for a reference wavelength of 10pm. The structured layer 35 has a thickness of about 1.9 μm and is formed of high index portions 36 of amorphous silicon and portions of low vacuum index 37. Figure 2C illustrates the spectral response of the interference filter for different values of the side dimension "a" of low index portions 37, and the table below indicates the corresponding value of the central wavelength of the transmission peak.
In the spectral detection range corresponding to the LWIR, each spectral response here has a fine transmission peak with a strong rejection out of the bandwidth of the filter.
FIGS. 3A and 3B respectively illustrate a detection device comprising an interference filter according to a first variant of the first embodiment, and the spectral responses associated with different values of the fill factor of the structured layer.
In this example, the interference filter 31 differs from that illustrated in FIG. 2A essentially in that each semi-reflecting mirror 32A, 32B comprises a low index layer 34A, 34B made of a dielectric or semiconductor material other than air or emptiness. The index contrast of each semi-reflecting mirror between the high and low index layers is thus reduced compared to that of the mirrors of FIG. 2A. Thus, by way of illustration, the low index layers 34A, 34B may be formed of ZnS zinc sulfide having a refractive index of 2.2 in the 8-14pm detection spectral range. For the same period P of the patterns and different values of the width at low index portions, filters are obtained whose value of the central wavelength is indicated in the table below.
The transmission peaks expand and the rejection is degraded, in particular because of the presence of secondary transmission peaks, in particular caused by orders greater than the order 1 of the Fabry-Pérot cavities. In order to maintain a correct spectral response, in terms of transmission peak width and rejection, the index contrast between the high and low index layers of the semi-reflective mirrors is advantageously greater than or equal to 1.5. and preferably chosen to be as high as possible.
FIGS. 4A and 4B respectively illustrate a detection device comprising an interference filter according to a second variant of the first embodiment, and the spectral responses associated with different values of the filling factor of the structured layer.
In this example, the interference filter 31 differs from that illustrated in FIG. 2A essentially in that the high index layer of the lower semi-reflecting mirror 32A is formed of the stack, along the Z axis, of at least two sub-layers 33A.1, 33A.2 of different materials, these materials being dielectric or semiconductor, and having an optical index greater than that of the middle of the low index layers 34A, 34B and the middle of the portions of low index 37 of the structured layer. The second sub-layer 33A.2 covers and is in contact with the first sub-layer 33A.1, the latter being here the encapsulation layer 21. The high index layer formed of several high-index materials is then optically equivalent to a single layer of high index. The thickness of the high index layer is advantageously such that it forms a three-quarter wave layer. Thus, the filter has a selective spectral response and a strong rejection.
By way of illustration, the lower high-index layer is formed of an amorphous silicon sublayer 33A.1 having a thickness of approximately 0.73 μm and covered with a Germanium sublayer 33A.2. , About 25pm, and the upper high index layer 33B is amorphous silicon about 0.73 μm thick, the high index layers being separated from the structured layer by layers of low index 34A, 34B air About 2.5 pm thick. For the same period P of the patterns and different values of the width at low index portions, filters are obtained whose value of the central wavelength is indicated in the table below.
With respect to the spectral responses illustrated in FIG. 2C, the transmission peaks remain fine and the rejection is high. Only the transmission rate decreases slightly when the width has portions of low index is close to or equal to 0 (filling factor close to or equal to 1).
FIGS. 5A and 5B respectively illustrate a detection device comprising an interference filter according to a third variant of the first embodiment, and the spectral responses associated with different values of the filling factor of the structured layer.
In this example, the interference filter 31 differs from that illustrated in FIG. 4A essentially in that only the high index layer of the upper semi-reflecting mirror 32B, and no longer the lower mirror 32A, is formed of the Z-axis stacking of at least two sub-layers 33B.1, 33B.2 in different materials, these materials being dielectric or semiconductor, and having an optical index greater than that of the middle of the layer of low index 34B and the middle of the low index portions 37 of the structured layer. The encapsulation layer 21 here forms the single high index layer 33A of the lower mirror 32A. Thus, by way of illustration, the upper high-index layer is formed of an amorphous silicon sub-layer 33B.1 having a thickness of approximately 0.73 μm covered with a germanium sub-layer 33B.2 of 1.25 μm about the thickness, and the lower high index layer 33A is amorphous silicon about 0.73 μm thick, the high index layers being separated from the structured layer by layers of low air index 34A, 34B 2.5 pm thick. For the same period P of the patterns and different values of the width at low index portions, filters are obtained whose value of the central wavelength is indicated in the table below.
With respect to the spectral responses illustrated in FIG. 4B, the transmission peaks remain fine and the rejection is high. When the width has portions of low index is near or equal to 0 (filling factor close to or equal to 1), the transmission peak has a decreased maximum value and an increased half-height width.
FIGS. 6A and 6B respectively illustrate a detection device comprising an interference filter according to a fourth variant of the first embodiment, and the spectral responses associated with different values of the filling factor of the structured layer.
In this example, the interference filter 31 differs from those illustrated in FIGS. 4A and 5A essentially in that the high-index layers of the lower half mirror 32A and the upper 32B mirror are both formed of the stack, along the Z axis, at least two sub-layers of different materials, these materials being dielectric or semiconductor, and having an optical index greater than that of the middle of the possible low-index layer and the middle of the portions of low index of the structured layer. The encapsulation layer 21 forms the first sub-layer 33A.1 of high index of the lower mirror 32A. Thus, by way of illustration, the high-index layers of the semi-reflecting mirrors 32A, 32B are each formed of a first sublayer 33A.1, 33B.1 made of amorphous silicon having a thickness of approximately 0.73 μm. a second sublayer 33A.2, 33B.2 germanium of l, 25pm approximately. They are separated from the structured layer 35 by layers of low index 34A, 34B of air 2.5 μm thick. For the same period P of the patterns and different values of the width at low index portions, filters are obtained whose value of the central wavelength is indicated in the table below.
Compared to the spectral responses illustrated in FIGS. 4B and 5B, the transmission peaks remain fine but the rejection decreases, in particular because of the presence of bounces that appear at the limits of the spectral detection range 8-14pm.
In general, it is advantageous for the high-index layers and the low-index layers to have a thickness such that they form a quarter-wave plate or an odd multiple of a quarter-wave plate. . A single transmission peak is thus obtained in the spectral detection range, the value of the central detection length of which can be adjusted as a function of the lateral dimensions of the structured layer.
One and / or the other of the high index layers may also have a thickness such that they form a half-wave plate or an even multiple of a half-wave plate. A transmission peak or a broad band of transmission is thus obtained in the spectral detection range, as a function of the lateral dimensions of the high and low index portions of the structured layer. A transmission peak here has a width at mid-height of less than or equal to about one micron, while a broad band of transmission has a width half-height greater than one micron, for example equal to 2 or even 3 microns.
One and / or the other of low index layers may also have a thickness such that they form a half-wave plate or an even multiple of a half-wave plate. In this way, several distinct transmission peaks are obtained in the spectral detection domain, with a strong rejection.
FIGS. 7A and 7B respectively illustrate a detection device comprising an interference filter according to a fifth variant of the first embodiment, and the spectral responses associated with different values of the filling factor of the structured layer.
In this example, the interference filter 31 differs from that illustrated in FIG. 2A essentially in that the high index portions 36 of the structured layer 35 rest on the high index layer 33A of the lower semi-reflecting mirror 32A. . The lower half mirror 32A then has no low index layer, and the upper half mirror 32B has a low index layer 34B.
Thus, by way of illustration, the lower semi-reflecting mirror 32A is formed of a single layer of high index 33A in amorphous silicon of 0.8 μm thick, on which rests the structured layer 35 formed of high portions. index 36 in amorphous silicon and portions of low index 37 of air, these portions being in contact with the high index layer 33A. The upper mirror 32B is formed of the low air index layer 34B and the high index layer 33B of amorphous silicon. The thickness of the upper mirror 32B can be decreased, so that the high index layer 33B is here 0.45pm and the low index layer 34B of 1.70pm. The structured layer 35 here has a thickness of 1.27 μm. For the same period P of the patterns and different values of the width at low index portions, filters are obtained whose value of the central wavelength is indicated in the table below. In this example, the configuration at P = 2pm and a = 1, 3pm differs from the other configurations in that the structured layer 35 takes the form of high index pads 36 of square section of lateral dimension "a" spaced from periodically other portions 36 of a pitch P.
The spectral responses have broad transmission peaks with a transmission rate of between 0.8 and about 1, which decreases for the shorter wavelengths. In this example, the distance between the reflector and the absorbent membrane 11 is reduced from 1.8 pm to approximately 1 pm, which makes it possible to reduce the transmission bandwidth and to increase the transmission rate by up to at 25%.
When a semi-reflecting mirror has no low index layer and the structured layer is in contact with the high index layer, it is advantageous, in terms of spectral response quality, that it is the mirror lower and not the upper mirror. Moreover, in a variant (not shown), the lower mirror may comprise a low index layer separating the high index layer from the structured layer, and the upper mirror may not have a low index layer, so that the layer structured would then be in contact with the high index layer of the upper mirror.
FIGS. 8A and 8B respectively illustrate a detection device comprising an interference filter according to a sixth variant of the first embodiment, and the spectral responses associated with different values of the filling factor of the structured layer.
In this example, the lower half mirror 32A comprises a high index layer formed of two sub-layers made of different materials from each other, here an amorphous silicon sublayer 33A.1. 0.73 thick, covered by a second sublayer 33A.2 germanium l, 45pm thick, and a layer of low index 34A air of 2.37pm thick. The structured layer 35 comprises an alternation of portions of high index 36 of amorphous silicon, approximately 1.36 μm thick, and portions of low index of air 37, the low index portions not being through so that the portions of high index 36 are based on a continuous layer of high index 41, here amorphous silicon of 0.73 pm thick. Finally, the upper mirror 32B comprises a high index layer 33B in a single material, here amorphous silicon of 0.73 μm thick and a low index layer 34B, here air of 2.37 μm thick. For the same period P of the patterns and different values of the width at low index portions, filters are obtained whose value of the central wavelength is indicated in the table below. In this example, the configurations at P = 2pm, a = 1, 2pm (f = 0.36), and P = 2pm, a = 1.5pm (f = 0.56) differs from other configurations in that the structured layer takes the form of pads of high index of square section of lateral dimension "a", spaced periodically from other portions of a pitch P.
This configuration is advantageous insofar as each transmission peak is fine, the high transmission rate and the quality of rejection.
FIG. 9 is a diagrammatic sectional view of a multispectral detection device comprising a matrix of thermal detectors located alone or in a plurality in a hermetic cavity, and a matrix of Fabry-Perot cavity interference filters each arranged in look of a thermal detector. The thermal detectors are adapted to operate in the same spectral range of detection, here the LWIR. Also the different absorbent membranes have substantially identical optoelectronic properties.
The filters 31.1, 31.2 are such that the central wavelengths λ ^ ι, λα of the spectral responses are different from each other. Two different filters 31.1, 31.2 are illustrated here by way of example, but the detection device may comprise several sets of one or more identical filters, the filters being different from one set of filters to the other, depending on the number distinct spectral responses in the spectral detection domain.
The interference filters 31.1, 31.2 are adjacent and substantially coplanar with each other. In particular, the lower high index layer 33A and the upper high index layer 33B are respectively coplanar from one filter to another, and are preferably common to all the filters. The encapsulation layer 21 is preferably common to all the filters 31.1, 31.2. The structured layers 35.1, 35.2 are here coplanar and have substantially the same thickness, as are the low index layers 34A, 34B.
The interferential filters 31.1, 31.2 are distinguished from each other essentially with respect to the lateral dimensions of the high index portions 36.1, 36.2 and low index 37.1, 37.2 of the structured layers 35.1, 35.2, which define the value of the lengths d central waves λα, λα of each spectral response.
In this example where several thermal detectors are arranged in the same sealed cavity 3, the encapsulation layer 21, and in particular its upper wall 22, extends above said detectors in a continuous manner. The encapsulation layer, in particular its upper wall 22, here forms the lower high index layer 33A, or one of its sub-layers, interference filters 31.1, 31.2.
Each filter 31.1, 31.2 is preferably positioned at a distance from the absorbent membrane 11 of the facing detector, less than the lateral dimension of a pixel (surface in the plane (X, Y) of the thermal detector), so as to avoid the cross-talk between adjacent pixels, that is to say so as to prevent radiation transmitted by an interference filter is detected by a thermal detector neighbor of the detector located opposite the filter in question.
Figures 10A to 10H illustrate different steps of a method of producing the device according to a third embodiment. In this example, the encapsulation layer 21 forms the high index layer 33A of the lower semi-reflecting mirror 32A, and the high index layer 33B of the upper semi-reflecting mirror 32B comprises a sealing layer 33B.2.
With reference to FIG. 10A, a matrix of thermal detectors 10, each connected to an electronic circuit (for example CMOS) intended to supply and measure the signals delivered by the detectors, is produced on a substrate 2. The thermal detectors 10 are, for example, micro-bolometers, each comprising a membrane 11 capable of absorbing the radiation to be detected, suspended above the substrate 2 and thermally insulated from it by anchoring pillars 12 and maintenance and thermal insulation (not shown). Obtaining suspended membranes 11 is conventionally obtained by surface micromachining techniques consisting in producing the absorbent membranes 11 on a first sacrificial layer 26.1 which is eliminated at the end of the process. Each absorbent membrane 11 further comprises an absorbent element which heats up and a thermometer element which measures this heating, for example in the form of a thermistor connected to the CMOS electronic circuit by electrical connections provided in the anchoring pillars 12. Furthermore, a reflective layer 13 rests on the upper surface of the substrate 2, located opposite the absorbent membrane 11. The attachment portions also rest on the upper surface of the substrate 2, for example attachment portions 14.1 on which the side wall of the encapsulation layer is intended to rest, and attachment portions 14.2 on which the anchoring pillars 12 rest.
Referring to Figure 10B, a second sacrificial layer 26.2 is deposited, preferably of the same nature as the first sacrificial layer, for example polyimide obtained by dispensing and centrifugation. The sacrificial layer 26.2 covers the sacrificial layer 26.1 as well as the absorbent membrane 11 and the anchoring pillars 12. Using conventional photolithography techniques, the sacrificial layers 26.1 and 26.2 are then locally etched to the attachment portions 14.1. The etched areas may take the form of trenches 27 of continuous and closed perimeter surrounding one or more thermal detectors 10, or may take the form of localized notches between the detectors. Subsequently, the deposition of a first thin layer of high index 21, in this case amorphous silicon, which covers both the upper surface of the second sacrificial layer 26.2 and the flanks of the trenches 27, for example by chemical vapor phase (CVD for Chemical Vapor Deposition, in English). The thickness of the high index layer 21 of amorphous silicon is approximately 0.73 μm to correspond to a quarter wave plate at 10 μm. The high index layer is intended to form the encapsulation layer 21 of the encapsulation structure, and the high index layer 33A of the lower semi-reflective mirror 32A. It extends above and away from the absorbent membrane 11, and here surrounds in the plane (X, Y) continuously one or more thermal detectors 10.
At this stage, it is advantageous to deposit and locally etch portions 14.3 of a basal material which can act as an etch stop layer and / or adhesion layer where it is intended to anchoring support elements of a matrix of multispectral interference filters. The choice of whether or not these portions of basal material, and if necessary the nature of the basal material, is determined as a function of the other materials in the presence, in particular the nature of the sacrificial layers and anchoring elements. In the present case polyimide sacrificial layers and silicon anchor structures, the basal portions 14.3 may be made, for illustrative purposes, of silicon oxide, silicon nitride, titanium, or aluminum.
Localized etching of the encapsulation layer 21 is then carried out, so as to achieve at least a first release vent 24.1 passing through the encapsulation layer 21.
[0090] With reference to FIG. 10C, a third sacrificial layer 26.3, here polyimide, which covers the encapsulation layer 21 and the basal portions 14.3, then a second layer of high index, here in silicon, is deposited successively. amorphous, on the sacrificial layer 26.3. The thickness of the sacrificial layer 26.3 is here about 2.5 μm to advantageously correspond to a quarter-wave optical distance in the vacuum or the air, with respect to a wavelength of reference here of lOpm. . The second high-index layer is intended to form the high-index portions 36 of the structured layer 35. Its optimum thickness is here about 2 μm so as not to introduce parasitic resonances into the operating range of the multispectral detection device. The second layer of high index can be deposited by a CVD deposition technique that allows good control of the deposited thickness.
By photolithography and etching, the second amorphous silicon layer is then structured in such a way as to alternate, in the plane (X, Y), portions of high index 36 in amorphous silicon and portions of low index 37. It is thus possible to form a grid with periodic openings, for example with a pitch P of 2 μm. The lateral dimensions, in the plane (X, Y), of the high index portions 36 are adjusted to obtain a structured layer 35 of predefined mean optical index, and to obtain a spectral response in the form of a transmission band centered on a determined central wavelength. In the particular case where the structured layer 35 is a continuous layer without low-index portions 37, localized etching of the second amorphous silicon layer is carried out in the form of second release vents which will be necessary to eliminate the layers. sacrificial 26.1, 26.2, 26.3 underlying. A 0.5pm width vent repeated at a rate of 20pm, up to 50pm, may be suitable without significantly disturbing the spectral response of the filter.
At this stage, in the context of a multispectral detection of the detection device, it is expected that the structured layer 35 has lateral dimensions of the portions 36 and 37 different for several thermal detectors, which allows to provide the elementary detectors. a frequency selectivity predefined by the lateral dimensions of the structured layer for each interference filter. It is also possible to provide a structured layer whose patterns formed by the portions 36 and 37 are arranged aperiodically over the same elementary detector, so as to widen the spectral response of the interference filter and therefore of the thermal detector. question.
Referring to Figure 10D, is then deposited a first thickness of a fourth sacrificial layer 26.4, here polyimide, preferably greater than 2pm thickness, for example 3pm. Then a planarizing layer 28, for example a suitable photosensitive resin, is deposited by dispensing and centrifugation. The thickness of the planarizing layer 28, and the fluidity of the resin, are chosen so as to fill after centrifugation the residual reliefs of the upper face of the sacrificial layer 26.4. A chemical step of dry etching, for example by oxygen plasma, then makes it possible to etch at the same time the planarizing layer 28 and the sacrificial layer 26.4, with a substantially identical etching rate for the two materials, resulting in a front essentially planar engraving. The etching step is stopped at the moment when the etching front discovers the upper face of the high-index portions 36 of the structured layer 35. This instant can be detected automatically by an end-of-attack detection device, for example by a spectroscopic analysis of optical emission. At this stage, a structured layer 35 is obtained whose high index portions 36 each have an upper surface substantially not covered by another material, and whose interstices in the plane (X, Y) are filled by the sacrificial layer 26.4.
A similar result can be obtained by a chemical mechanical polishing process (CMP) but which must be adapted to the organic nature of sacrificial layers, here polyimide. In the case where one would use mineral sacrificial layers, for example silicon oxide as described below in connection with a fourth embodiment, a CMP process would be particularly advantageous.
Referring to Figure 10E, is then deposited a second thickness of the fourth sacrificial layer 26.4, here polyimide, thickness about 2.5pm. By photolithography and etching, then trenches 38, peripheral continuous or localized and non-continuous, are then produced by successive etching of the sacrificial layer 26.4, the structured layer 35 at a portion of high index 36, as well as the sacrificial layer 26.3, up to the basal portions 14.3 which advantageously act as an etch stop layer. The etching sequence advantageously provides an isotropic etching step of the sacrificial layers 26.3 and 26.4 polyimide, so as to clear portions of high index portions 36, projecting into the trench 38. These protruding portions will facilitate the mechanical maintenance of the structured layer 35 with support walls 40 of the optical filtering device.
Referring to FIG. 10F, a third layer of high index, here in amorphous silicon, whose thickness is about 0.73 μm is deposited to correspond to a quarter-wave plate at the reference wavelength. from 10pm. The compliant deposit, for example of the CVD type, is particularly advantageous insofar as it allows the third layer of high index to cover the sidewall of the trenches 38. The good overlap of the etching flanks makes it possible to produce in the same layer of high index, both an upper wall 39 of the high index layer 33B of the upper semi-reflecting mirror 32B, and a side wall 40, possibly peripheral, for supporting the optical filtering device on the encapsulation structure. Advantageously, the side wall 40 is in contact with the protruding portions of the high index portions 36 opening into the trenches 38, which solidly secures the structured layer 35 to the optical filter structure. An etching step provides release vents 24.2 through the top wall 39 of the high index layer 33B.
Referring to FIG. 10G, the various sacrificial layers 26.1, 26.2, 26.3, 26.4 are eliminated, for example by dry etching, under oxygen plasma, with possible input of N 2 and CF 4, through the various release vents 24.1 and 24.2 and through the interstices of the high index portions 36 which will form the low index portions 37, so as to suspend the absorbent membrane 11 of the thermal detector, and so as to obtain the low index layers 34A, 34B of the lower 32A and upper 32B mirrors, and the low index portions 37 of the structured layer 35. A high index hopping interference filter is thus obtained comprising a structured layer 35 suspended between the two mirrors semi-reflective 32A, 32B.
According to a variant, the detection device thus obtained is then integrated in a sealed cavity under vacuum or under reduced pressure, for example in a hermetic housing inside which is placed the substrate 2 of the device. The evacuation at the housing is echoed via the vents 24.1 and 24.2, so as to obtain both thermal detectors with thermally insulated membranes by vacuum, and interference filters with high index jump using amorphous silicon as a high index material (n = 3.5) and vacuum as a low index medium (n = 1).
According to another variant illustrated in FIG. 10H, following the step of elimination of the sacrificial layers 26.1, 26.2, 26.3, 26.4, the evacuation device is put under vacuum and a layer is deposited. sealing 33B.2 on the amorphous silicon layer 33B.1 of the upper mirror 32B, so as to close the release vent 24.2. The cavity 3 is then under vacuum and is sealed by the sealing layer 33B.2. The sealing layer 33B.2 is made of a material of high index, for example germanium, that is to say that its refractive index is greater than that of the medium of the low index layers 34A, 34B, and mid-portions of low index 37. Its thickness, for example here l, 2pm, is adjusted so that the stack of the sublayer 33B.1 amorphous silicon and the sub-layer 33B.2 germanium form a three-quarter wave plate for a reference wavelength of 10pm.
According to another variant (not shown), following the step of elimination of the sacrificial layers 26.1, 26.2, 26.3, 26.4, the detection device is put under vacuum, and a stud is deposited. a sealing material at the vent 24.2, so as to obtain the hermeticity of the cavity 3 under vacuum. The high index layer 33B of the upper semi-reflecting mirror 32B then comprises only the amorphous silicon layer.
Thus, in that the sacrificial layers 26.1, 26.2, 26.3 and 26.4 are made of the same material, here the polyimide, and by the presence of the release vents 24.1 and 24.2 and the interstices between the high index portions. 36, it is possible to eliminate the different sacrificial layers in a single step, and thus to obtain at the same time the suspension of the suspended membrane 11 and that of the structured layer 35. The production method is greatly simplified.
This is further accentuated by the fact that the semi-reflecting mirrors each comprise only one layer of high index, and advantageously a low index layer located between the high index layer and the structured layer, and not not a superposition of several high index layers separated from each other by low index layers as in the conventional case of multilayer dielectric mirrors.
The method thus makes it possible to obtain a simple and rapid release of the structured layer and the formation of at least one low index layer, without this affecting the spectral response quality of the filter, in terms of selectivity. transmission and rejection quality.
Thus, the low index layer or layers of the semi-reflecting mirrors can be obtained with a sacrificial layer release method as for the realization of the micro-bolometer. Having restricted the stacking of each of the mirrors to a single layer of high index limits to only two the number of sacrificial layers of the Fabry-Perot cavity, which allows a release of these two layers in one only step. The method for producing the filter matrix is thus particularly simple, with few layers to be deposited, a single release step, and a single structuring step. It is surprising to obtain with this simplified architecture of interference filter and a simple realization method and compatible with that of the micro-bolometer, spectral responses that remain selective in terms of the fineness of the transmission peaks, and in terms of rejection.
[00105] FIGS. 11A to 11C illustrate various steps of a method of producing the device according to a fourth embodiment. In this example, only the lower mirror 32A has a sealing sub-layer 33A.2 sealing the cavity 3.
With reference to FIG. 11A, a matrix of thermal detectors is made on a substrate 2 comprising a CMOS electronic circuit, an encapsulation structure forming with the substrate 2 a hermetic cavity 3 in which are located one or more thermal detectors. . Here, a sealing layer 33A.2 is deposited on an encapsulation layer 21 with a thickness sufficient to ensure the sealing, that is to say the sealing, of the release vent 24.1. The encapsulation layer 21 further forms an underlayer 33A.1 of the high index layer 33A of the lower semi-reflecting mirror 32A, while the sealing layer 33A.2 forms a second sub-layer of the lower layer. high index 33A. The encapsulation layer 21 may be made by a first layer of amorphous silicon, for example 0.73 μm thick. The sealing layer 33A.2 is also transparent to infrared radiation, and may be formed for example of a germanium layer, preferably deposited by a technique of deposition of thin layers under vacuum, such as evaporation under vacuum of a electron beam heated source (EBPVD, for Electron Beam Physical Vapor Deposition, in English). Thus, a sealed cavity 3 is obtained under vacuum or reduced pressure in which the matrix of detectors is housed. As described in the patent application FR1551487, the average transverse width X of the vent 24.1 can be chosen as a function of the thickness e of the deposited sealing layer, the fraction of the thickness B of the sealing layer 33A .2 effectively ensuring the hermeticity, and the growth angle a of the sealing layer 33A.2, from the relation: X = 2.e. (lB) .tan (a). By way of example, for a technique for deposition of the sealing layer 33A.2 by evaporation, the angle a is typically of the order of 15 ° to 20 °.
For a thickness of the amorphous silicon encapsulation layer 21 of 0.73pm, it is advantageous to provide a 1.25pm germanium-based 33A.2 sealing layer so as to obtain a high index layer 33A forming a blade. three wavelength for a reference wavelength of 10pm, which makes it possible to obtain an interference filter with a single transmission peak in the detection spectral range 8-14pm. If it is desired that two thirds of the sealing layer, ie 0.83 μm of germanium, ensures the hermeticity of the cavity 3, a transverse mean width X of the vent is obtained, preferably between 0.22 μm and 0.3 μm.
[00108] With reference to FIG. 11B, the structured layer 35 and the high index layer 33B are produced on the sacrificial layers 26.3 and 26.4 by the steps described above, except that they are carried out on a hermetic cavity 3 under vacuum or under reduced pressure, in which are housed one or more thermal detectors. This produces a matrix of detectors housed alone or in several in one or more hermetic cavities 3 formed by an encapsulation structure, on which rests an optical filtering structure comprising a matrix of filters each arranged facing a thermal detector. The hermetic cavity 3 is free of any sacrificial layer while the filters comprise the sacrificial layers 26.3 and 26.4 between the high index layers 33A.1 and 33A.2, and 33B, and at the level of the structured layer 35.
With reference to FIG. 11C, the third and fourth sacrificial layers 26.3, 26.4 are then eliminated through the release vent 24.2 and the interstices of the high index portions 36, so as to form an interference filter. with a high index jump comprising a structured layer 35 with portions of high index 36 in amorphous silicon and with low air ratio portions, suspended between the high index layers 33A.1 and 33A.2, and 33A semi mirrors reflectors 32A, 32B, each further comprising a low air index layer 34A, 34B separating the corresponding high index layer from the structured layer. In this embodiment, the third and fourth sacrificial layers 26.3, 26.4 are eliminated at a different step from that in which the first and second sacrificial layers 26.1, 26.2 are eliminated. As a result, these two pairs of sacrificial layers may be provided in different materials, the third and fourth sacrificial layers 26.3, 26.4 may, for example, be of silicon oxide, which can be removed by chemical etching in a vapor HF medium. The use of silicon oxide in place of the polyimide can simplify the planarization step of the first thickness of the fourth sacrificial layer 26.4 by preferentially using a CMP technique. The basal layer 14.3 may for example be aluminum, so as to resist the HF attack in the vapor phase.
Alternatively not shown, it may then be advantageous to close the vent 24.2 by depositing a thin layer transparent to infrared radiation, for example a germanium layer or an amorphous silicon layer. This additional sealing sub-layer may be provided for producing, together with the amorphous silicon sublayer, a three-quarter wave plate for the reference wavelength of 10 μm, which makes it possible to obtain an interference filter with a only peak transmission in the spectral range of detection 8-14pm. For this purpose, it is possible to deposit an amorphous silicon sealing layer of 1.5 μm or a 1.25 μm germanium layer on the amorphous silicon layer 33B of 0.73 μm. The advantage of closing the vent 24.2 is to prevent external agents, likely to degrade the mechanical strength of the filters, to penetrate inside the interference filters. It is not necessary for this additional sealing layer to have the function of keeping the cavities of the interference filters under vacuum, so that techniques for deposition under intermediate pressure (sputtering, CVD for example) can be used and can be used. advantage of a lower deposition time, which contributes to reducing the cost of production of the detection device. Advantageously, it is possible to deposit an anti-reflection layer (for example a quarter-wave layer made of ZnS, or a textured Si layer) at the top of the stack in order to improve the rejection at both ends of the spectral detection range 8-14pm. .
[00111] Figures 12A to 12E illustrate different steps of a method of producing the device according to a fifth embodiment. In this example, the lower semi-reflecting mirror 32A comprises a sealing sub-layer 33A.2, and the structured layer 35 comprises a continuous layer of high index 41 on which rests an alternation of portions of high index 36 and portions of low index 37.
Figure 12A is the same as or similar to Figure 11A and is therefore not described in detail. A matrix of thermal detectors 10 rests on the substrate 2 and an encapsulation structure, formed of an encapsulation layer 21 and here of a sealing layer 33A.2, delimits with the substrate 2 one or more hermetic cavities 3 each housing one or more thermal detectors 10.
With reference to FIG. 12B, basal portions 14.3, which are identical or similar to those described above, are then made, these basal portions being optional, and a third sacrificial layer 26.3, for example made of silicon oxide, is deposited so as to cover the basal portions 14.3 and the sealing layer 33A.2. As such, the third and fourth sacrificial layers 26.3 and 26.4 are here silicon oxide but polyimide could be used.
Then a layer 41 of high index, here in amorphous silicon, for example 0.73 μm thick, is deposited, so as to cover the sacrificial layer 26.3, then a thin etch stop layer 43, preferably chosen in silicon oxide so that it can be removed with the sacrificial layers 26.3 and 26.4, in a thickness range between 10 nm and 200 nm, for example between 30 nm and 50 nm. By means of photolithography and etching of the barrier layer 43, openings are made here in the form of holes opening onto the underlying layer 41. In a variant that is not shown, the stop layer 43 can be etched. to keep only pads disposed on the layer 41. Then deposited a layer 42 of high index, here amorphous silicon, for example 1.36pm thick. Preferably, the high index layer 41 has a thickness less than about 60% of the total thickness of the layers 41 and 42, to limit the parasitic resonances in the operating range of the multispectral detection device.
With reference to FIG. 12C, photolithography and etching processes of the high-index layer 42 are then carried out using a network of high-index portions 36. Each portion 36 thus has a thickness substantially equal to thickness of the initial layer 42, and is in contact with the underlying continuous layer of high index 41.
[00116] With reference to FIGS. 12D and 12E, the steps already described above are carried out, but which, in the present case, provides for eliminating the etch stop layer 43 at the same time as the sacrificial layers are eliminated. 26.3 and 26.4 in silicon oxide. The elimination of these layers 26.3, 43 and 26.4 in silicon oxide is carried out by an acid etching by vapor HF, through second and third vents 24.2 and 24.3, respectively provided at the level of the continuous layer 41 of the structured layer 35. and at the high index layer 33B of the upper mirror 32B. An interference filter is thus obtained whose structured layer comprises a high index continuous layer 41 on which the high index portions 36 rest. The continuous layer 41 is in contact with the side wall 40 so as to ensure the mechanical strength of the layer. structured 35.
In this embodiment, the opening of the second vent 24.2 is possible at several stages, either after the deposition of the continuous layer 41, or between the etching of the layer 42 and the deposition of the sacrificial layer 26.4 (according to FIG. this second option, we engrave a set of 2 layers, sequentially silicon oxide and amorphous silicon), with a mask level and an etching step dedicated to the realization of the second vents, at the same time as the realization of the third vent 24.3. Other approaches are possible. Optionally, it can then proceed, as described above, to the closure of the third vents 24.3 by the deposition of a thin layer of transparent seal infrared radiation, for example germanium, or even a ZnS antireflection layer .
[00118] FIGS. 13A to 13C illustrate different variants of the electromagnetic radiation detection device, which are distinguished from one another essentially by the way in which the optical filtering structure rests on the substrate 2.
FIG. 13A shows a diagrammatic sectional view in which support elements 40 of a matrix of multispectral interference filters rest on the upper face of the encapsulation structure, as described hitherto.
FIG. 13B shows a diagrammatic sectional view in which the support walls 40 of a matrix of multispectral interference filters rest on the upper face of the substrate 2. The encapsulation structure thus does not ensure the mechanical maintenance of the optical filtering structure.
13C shows a schematic sectional view in which the support walls 40 rest on the upper face of the substrate 3 and support both a matrix of multispectral interference filters and the encapsulation layer of the thermal detectors.
[00122] Particular embodiments have just been described. Various variations and modifications will occur to those skilled in the art. In particular, it is possible for the optical filtering structure to comprise a plurality of interference filters by thermal detector, the filters then being superimposed on each other along the Z axis.

权利要求:
Claims (14)
[1" id="c-fr-0001]
A device (1) for detecting electromagnetic radiation, comprising: - a substrate (2); at least one thermal detector (10) disposed on the substrate; an encapsulation structure (20) arranged to define with the substrate a cavity (3) housing said thermal detector, comprising at least one encapsulation layer (21) extending above the thermal detector; characterized in that it further comprises: at least one Fabry-Pérot cavity interference filter (31), disposed at the level of the encapsulation structure and at a distance from the thermal detector, formed by first and second semicircular mirrors; reflectors (32A, 32B) spaced from each other by a so-called structured layer (35); each semi-reflecting mirror (32A, 32B) comprising a so-called layer of high refractive index (33A, 33B) made of at least one dielectric or semiconductor material; the structured layer (35) comprising an alternation, in a plane parallel to the plane of the substrate, of so-called high refractive index portions (36) made of at least one dielectric or semiconductor material, and of so-called bottom portions (37). refractive index carried out in a medium whose refractive index is lower than that of the material of the high-index portions; the high index layer (33A) of one of said semi-reflecting mirrors (32A) being at least partially formed of said encapsulation layer (21).
[2" id="c-fr-0002]
2. Detection device (1) according to claim 1, wherein each semi-reflecting mirror (32A, 32B) comprises a single high index layer (33A, 33B), and at least one of said semi-reflective mirrors comprises a so-called low index layer (34A, 34B) made in a medium whose refractive index is less than that of the material of the high index layer (33A, 33B), said low index layer (34A, 34B) being located between the high index layer (33A, 33B) and the structured layer (35).
[3" id="c-fr-0003]
3. Detection device (1) according to claim 2, wherein the difference between the refractive index of the material of the high index layer (33A, 33B) and that of the middle of the low index layer (34A, 34B ) is greater than or equal to 1.5.
[4" id="c-fr-0004]
4. Detection device (1) according to claim 2 or 3, wherein the medium of the low index layer (34A, 34B) and low index portions (37) is vacuum or a gas.
[5" id="c-fr-0005]
5. Detection device (1) according to any one of claims 1 to 4, wherein the high index layer (33A, 33B) of at least one of said semi-reflecting mirrors is formed of a stack of at least two sub-layers (33A.1, 33A.2; 33A.1, 33A.2) in contact with one another and made of different materials.
[6" id="c-fr-0006]
6. Detection device (1) according to any one of claims 1 to 5, wherein the structured layer (35) has a volume proportion of portions of high index (36) greater than or equal to 30%.
[7" id="c-fr-0007]
7. Detection device (1) according to any one of claims 1 to 6, wherein the structured layer (35) comprises a continuous layer (41) on which rest the high index portions (36).
[8" id="c-fr-0008]
8. Detection device (1) according to any one of claims 1 to 7, wherein the high index layer (33B) of an upper so-called semi-reflecting mirror (32B) comprises a so-called upper wall (39) located opposite the structured layer (35), and said side walls (40) located on either side of the upper wall (39), the structured layer (35) being maintained above the high index layer (33A) of a semi-reflecting mirror said lower (32A) by the side walls (40).
[9" id="c-fr-0009]
9. Detection device (1) according to any one of claims 1 to 8, wherein the encapsulation layer extends continuously around the thermal detector (10) so as to form an upper wall (22) located above the thermal detector (10) and a side wall (23) resting on the substrate (2).
[10" id="c-fr-0010]
10. Detection device (1) according to any one of claims 1 to 9, comprising: - a plurality of thermal detectors (10) disposed on the substrate (2), above which extends said encapsulation layer (21); a plurality of interference filters (31) with a Fabry-Perot cavity, each disposed at the level of the encapsulation structure (30); the encapsulation layer (21) being common to several high-index layers (33A) of one of said semi-reflecting mirrors (32A) of the various interference filters (31).
[11" id="c-fr-0011]
11. Detection device (1) according to claim 10, wherein the semi-reflecting mirrors (32A, 32B) and the structured layers (35) of the interference filters (31) are respectively coplanar from one interference filter to the other .
[12" id="c-fr-0012]
12. A method of producing a detection device (1) according to any one of claims 1 to 11, comprising at least the following steps: a. producing at least one thermal detector (10); b. embodiment of an encapsulation structure (20) arranged to define with the substrate (2) a cavity (3) housing said thermal detector, comprising at least one encapsulation layer (21) extending over the thermal detector and resting on a sacrificial layer (26.2) covering said thermal detector; vs. making at least one Fabry-Perot cavity interference filter (31), a sacrificial layer (26.4) being located between the high index portions (36) of the structured layer (35), and possibly between a high index layer (33A, 33B) and the structured layer (35); d. removing said sacrificial layers (26.2, 26.4).
[13" id="c-fr-0013]
13. The production method as claimed in claim 12, in which the elimination of the sacrificial layers (26.2, 26.4) is carried out in one and the same step, subsequently to the step of producing the interference filter (31), the sacrificial layers (26.2, 26.4) being made of the same material, the high index layers (33A, 33B) of the two semi-reflecting mirrors (32A, 32B) each having a through hole (24.1, 24.3), and the low index portions (37). of the structured layer (35) being through.
[14" id="c-fr-0014]
14. The production method as claimed in claim 12, in which the elimination of the sacrificial layers is carried out in two sub-steps: a first substep of elimination of the sacrificial layer on which the encapsulation layer is based; (21), performed before the step of producing the interference filter (31), the encapsulation layer comprising a through hole (24.1) and a sealing layer (33A.2) being then deposited on the encapsulation layer (21) to close the through hole (24.1); and a second substep of removing the sacrificial layer (26.4) between the high index portions (36) of the structured layer (35), the high index layer (33B) of the upper semi-reflecting mirror ( 32B) having a through hole (24.3).

类似技术:

---

公开号 | 公开日 | 专利标题

---

EP3239671B1|2019-08-14|Device for detecting electromagnetic radiation with encapsulation structure comprising at least one interference filter

---

CA2853751C|2020-07-14|Infrared detector made up of suspended bolometric micro-plates

---

EP3067674B1|2021-01-13|Device for detecting radiation comprising an encapsulation structure with improved mechanical strength

---

CA2732448C|2018-09-11|Electromagnetic radiation detector with micro-encapsulation, and device for detecting electromagnetic radiation using such detectors

---

EP2743659A1|2014-06-18|Method for manufacturing an infrared detection device

---

EP2466283A1|2012-06-20|Infrared detector using suspended bolometric microplates

---

EP3067675A2|2016-09-14|Device for detecting electromagnetic radiation with sealed encapsulation structure having a release vent

---

EP3196615A1|2017-07-26|Method for manufacturing an electromagnetic-radiation detector with microencapsulation

---

EP3067676B1|2020-09-16|Device for detecting radiation comprising an encapsulation structure with improved mechanical strength

---

EP2019301B1|2013-05-01|Electromagnetic radiation detector and method of manufacturing such a detector

---

FR3045148A1|2017-06-16|DETECTION DEVICE WITH SUSPENDED BOLOMETRIC MEMBRANES WITH HIGH ABSORPTION EFFICIENCY AND SIGNAL-TO-NOISE RATIO

---

CA3058107A1|2020-04-12|Process for manufacturing a device for detecting electromagnetic radiation with an improved encapsulation structure

---

EP2746826A1|2014-06-25|Optical frequency filter and detector comprising such a filter

---

FR3066017B1|2019-07-05|PYROELECTRIC INFRARED DETECTION DEVICE HAVING INFRARED MODULATION TRANSMITTER

---

FR3054318A1|2018-01-26|BOLOMETRIC DETECTOR WITH GUIDE MODE FILTER MATRIX.

---

FR3081990A1|2019-12-06|DETECTION DEVICE WITH A THERMAL DETECTOR COMPRISING A SEALING AND FOCUSING LAYER

---

FR3103552A1|2021-05-28|method of manufacturing a detection device having improved protection of the getter

---

EP3864386A1|2021-08-18|Process for manufacturing a device for detecting electromagnetic radiation, comprising a suspended detection element

---

FR3104321A1|2021-06-11|Light sensor

---

FR3033042A1|2016-08-26|DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION COMPRISING AN EVENT OF RELEASE ENCAPSULATION STRUCTURE

同族专利:

---

公开号 | 公开日

---

FR3050526B1|2018-05-25|

---

US20170309758A1|2017-10-26|

---

JP2017215315A|2017-12-07|

---

EP3239671B1|2019-08-14|

---

EP3239671A1|2017-11-01|

---

US10825936B2|2020-11-03|

引用文献:

---

公开号 | 申请日 | 公开日 | 申请人 | 专利标题

---

WO1996021140A1|1994-12-30|1996-07-11|Honeywell Inc.|Fabry-perot micro filter-detector|

---

US20100294935A1|2006-12-08|2010-11-25|Talghader Joseph J|Detection beyond the standard radiation noise limit using reduced emissivity and optical cavity coupling|

---

US8933389B2|2010-05-27|2015-01-13|Commissariat A L'energie Atomique Et Aux Energies Alternatives|Optical filter suitable for dealing with a radiation of variable incidence and detector including said filter|

---

US20150316472A1|2012-12-17|2015-11-05|Ulis|Infrared detection device|

---

WO2015169761A1|2014-05-06|2015-11-12|Commissariat à l'énergie atomique et aux énergies alternatives|Optical filtering device including fabry-perot cavities comprising a structured layer and having different thicknesses|

---

DE1653760B1|1967-02-25|1970-11-05|Uwe Unterwasser Electric Gmbh|Device for generating a water flow in a swimming pool|

---

US5726805A|1996-06-25|1998-03-10|Sandia Corporation|Optical filter including a sub-wavelength periodic structure and method of making|

---

JP3979982B2|2003-08-29|2007-09-19|シャープ株式会社|Interferometric modulator and display device|

---

FR2977937B1|2011-07-15|2013-08-16|Centre Nat Rech Scient|BOLOMETRIC DETECTOR WITH IMPROVED PERFORMANCES|

---

DE102011111883B4|2011-08-31|2015-08-27|X-Fab Semiconductor Foundries Ag|CMOS compatible fabrication process for a planar hyperspectral optical filter|

---

FR2983297B1|2011-11-29|2015-07-17|Commissariat Energie Atomique|INFRARED DETECTOR BASED ON SUSPENDED BOLOMETRIC MICRO-PLANKS|

---

US8682129B2|2012-01-20|2014-03-25|Micron Technology, Inc.|Photonic device and methods of formation|

---

JP6290594B2|2013-10-31|2018-03-07|浜松ホトニクス株式会社|Photodetector|

---

US10324117B2|2014-04-28|2019-06-18|Landis+Gyr Innovations, Inc.|Monitoring power consumption by electrical devices using monitored operational parameters|KR101841131B1|2016-08-22|2018-03-22|삼성전자주식회사|Optical Filter, and Optical device using the same|

---

EP3522217B1|2016-09-29|2021-07-14|Yantai Raytron Technology Co., Ltd.|Method to prepare pixel for uncooled infrared focal plane detector|

---

US10101212B1|2017-03-13|2018-10-16|The United States Of America As Represented By The Secretary Of The Air Force|Wavelength-selective thermal detection apparatus and methods|

---

WO2020180174A1|2019-03-07|2020-09-10|Technische Universiteit Eindhoven|A multi-pixel spectral sensor|

---

DE102019206758A1|2019-05-10|2020-11-12|Robert Bosch Gmbh|Mirror device for an interferometer device, interferometer device and method for producing a mirror device|

---

DE102019209749A1|2019-07-03|2021-01-07|Robert Bosch Gmbh|Mirrors for an optical device|

---

CN112539846A|2020-12-04|2021-03-23|武汉高芯科技有限公司|Uncooled infrared detector and pixel level packaging structure thereof|

法律状态:
2017-04-28| PLFP| Fee payment|Year of fee payment: 2 |

---

2017-10-27| PLSC| Publication of the preliminary search report|Effective date: 20171027 |

---

2018-04-26| PLFP| Fee payment|Year of fee payment: 3 |

---

2019-04-29| PLFP| Fee payment|Year of fee payment: 4 |

---

2020-04-30| PLFP| Fee payment|Year of fee payment: 5 |

---

2022-01-07| ST| Notification of lapse|Effective date: 20211205 |

优先权:

---

申请号 | 申请日 | 专利标题

---

FR1653609A|FR3050526B1|2016-04-25|2016-04-25|ELECTROMAGNETIC RADIATION DETECTION DEVICE WITH ENCAPSULATION STRUCTURE HAVING AT LEAST ONE INTERFERENTIAL FILTER|

---

FR1653609|2016-04-25|FR1653609A| FR3050526B1|2016-04-25|2016-04-25|ELECTROMAGNETIC RADIATION DETECTION DEVICE WITH ENCAPSULATION STRUCTURE HAVING AT LEAST ONE INTERFERENTIAL FILTER|

---

EP17167674.5A| EP3239671B1|2016-04-25|2017-04-24|Device for detecting electromagnetic radiation with encapsulation structure comprising at least one interference filter|

---

JP2017085451A| JP7030422B2|2016-04-25|2017-04-24|A device for detecting electromagnetic radiation having an enclosed structure including at least one interference filter.|

---

US15/494,715| US10825936B2|2016-04-25|2017-04-24|Device for detecting electromagnetic radiation having an encapsulating structure including at least one interference filter|