• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    - Method and system for precision error compensation of a hexapod. - The precision error compensation method of a hexapod (2), said hexapod (2) having a base (3), an actuating assembly (4) provided with six cylinders (5) linear translation, a control unit (6) and a movable carriage (7) having a platform (8) connected via the actuating assembly (4) to the base (3), comprises a measuring step for determining geometry and position errors on the hexapod (2), the measuring step comprising sub-steps for determining position errors of the pivot centers on the carriage (7) and on the base (3), for determining length errors of the cylinders (5) and for measuring positioning errors of the jacks (5) on their stroke, the compensation method also comprising a step for calculating, from the measurements made, error compensation values and a step for applying these error compensation values to the control unit (6) of the hexapod (2), at a later use of the latter.
    公开号:FR3042590A1
    申请号:FR1559795
    申请日:2015-10-15
    公开日:2017-04-21
    发明作者:Eric Durand；Franck Duquenoy
    申请人:Micro Controle Spectra Physics SAS；
    IPC主号:
    专利说明:

    The present invention relates to a method and system for precision error compensation of a hexapod.
    It is known that a hexapod has a kinematic structure composed of two platforms, a base platform and an upper platform, and six jacks. The base platform is fixed, while the upper platform (or mobile cart) and six cylinders are movable. The cylinders are connected by a first end to the upper platform via a hinge, the other end of each cylinder being connected to the base via another hinge. All cylinders are independent of each other and allow to orient and position the upper platform. The hexapod is a system with parallel mechanics allowing the positioning and movement of objects in space following the six degrees of freedom. Because of its architecture, this system is used for high precision positioning, position measurement, and motion generation in dynamic testing.
    Hexapods find applications particularly in the naval, space, aerospace, automotive, optical, medical, nuclear, electronic, ...
    Although hexapods generally have satisfactory accuracies on their axes, a certain level of error still appears.
    The object of the present invention is to overcome this disadvantage by providing for the compensation of precision errors.
    It relates to a precision error compensation method of a hexapode, said hexapode comprising at least: - a fixed base; an actuation assembly provided with six linear, independent and controllable linear translation cylinders; a control unit of the actuation assembly; and a movable carriage having a platform connected through the actuating assembly to the base, each of said actuating actuator cylinders being connected by a first longitudinal end via a first articulation at the base and by the second longitudinal end via a second hinge to the carriage, said six jacks defining six centers (or points) of pivot on the base and six centers (or points) of pivot on the carriage.
    According to the invention, said method is remarkable in that it comprises: a measuring step consisting of determining geometry and position errors on the hexapod, the measurement step comprising: a first substep consisting of: measuring the positions of each of the pivot centers on the carriage and each of the pivot centers on the base, to determine position errors of the pivot centers, and to measure the length of each of the cylinders, to determine errors of length of said cylinders; and a second substep of measuring positioning errors of each of the cylinders on its stroke; - a calculation step of calculating, from the measurements made in the measuring step, error compensation values; and an application step of applying the error compensation values to the hexapod control unit when using the hexapod.
    Thus, thanks to the invention, it is possible to determine and compensate the different types of errors (geometry and position) likely to appear on the hexapod, so as to have a particularly precise hexapode (with a very precise and controlled displacement of the mobile carriage relative to the fixed base) during a subsequent use of the hexapod.
    In a first embodiment, said first substep is a single substep, and it consists of: - directly measuring the positions of each of the pivot centers on the carriage and of each of the pivot centers on the base; and - directly measuring the length of each of the cylinders, to determine errors in the length of said cylinders.
    In this first embodiment, the hexapod must have a geometry allowing such direct measurements.
    In addition, in a second embodiment, said first substep comprises several individual substeps specified below.
    Advantageously, the first sub-measurement step comprises a first individual substep of measuring the positions of each of the pivot centers on the base, said first individual substep consisting of, for measuring the positions of the pivot centers on the base: - to fix balls on the base at the position of the centers of pivot; - to fix the base on a ground plate; and - to measure the position of the balls using a three-dimensional measuring device.
    In addition, advantageously, the calculation step comprises a substep of comparing the measured values of the positions of the pivot centers (on the basis) with corresponding theoretical values and of constructing a compensation matrix of the geometry errors of the based.
    In addition, advantageously, the first measurement sub-step comprises a second individual sub-step of measuring the positions of each of the pivot centers on the carriage, said second individual sub-step consisting, for measuring the positions of the centers. pivoting on the carriage: - to fix balls on the carriage at the position of the pivot centers; - to fix the carriage on a ground plate; and - to measure the position of the balls using a three-dimensional measuring device.
    In addition, advantageously, the calculation step comprises a substep of comparing the measured values of the positions of the pivot centers (on the carriage) with corresponding theoretical values and of constructing a compensation matrix for the errors of the geometry of the carriage. .
    Furthermore, advantageously, the first measurement sub-step comprises a third individual substep consisting in measuring the length of each of the cylinders, said third individual substep consisting in measuring, for each jack, with a measuring device three-dimensional, the length of the cylinder between the centers of ball joints of the cylinder, with the cylinder at the origin.
    In addition, advantageously, the calculation step comprises a substep consisting in comparing the measured values of the lengths of the cylinders with corresponding theoretical values and in constructing a compensation matrix for cylinder length errors.
    In addition, advantageously, the calculation step includes a substep of using the measured values of the positioning errors to construct a positioning error compensation matrix.
    The present invention also relates to a precision error compensation system of a hexapod as described above.
    According to the invention, said compensation system comprises: a measurement system configured to determine geometry and position errors on the hexapod, the measurement system comprising: a first measurement assembly configured to measure the positions of each; pivot centers on the carriage and each of the pivot centers on the base, to determine position errors of the pivot centers, and to measure the length of each of the cylinders, to determine length errors of said cylinders; and a second measurement assembly configured to measure positioning errors of each of the cylinders on its stroke; and a calculation unit configured to calculate, from these measurements, error compensation values, the error compensation values being applied to the hexapod control unit when used (later ) of the last.
    In a particular embodiment, said first measurement assembly comprises: a measuring assembly configured to measure the positions of each of the pivot centers on the carriage and of each of the pivot centers on the base, in order to determine errors of position of pivot centers; and a second measurement assembly configured to measure the length of each of the cylinders.
    The appended figures will make it clear how the invention can be realized. In these figures, identical references designate similar elements.
    Figure 1 is a block diagram of a particular embodiment of a precision error compensation system.
    Figure 2 is a perspective view of a hexapod to which the invention is applied.
    Figures 3 to 6 are perspective views of measurement assemblies of an error compensation system.
    System 1 (hereinafter "compensation system 1") diagrammatically shown in FIG. 1 and making it possible to illustrate the invention, is a system for compensating for precision errors on a hexapod 2 as represented, as shown in FIG. illustration, in figure 2.
    Usually, the hexapod 2 comprises: a fixed base 3; - An actuating assembly 4 provided with six cylinders 5 of linear translation, which are independent of each other, and whose length is variable and controllable; a control unit 6 (not shown specifically) for controlling the actuating assembly 4; and a mobile carriage 7 comprising a platform 8 connected via the actuating assembly 4 to the base 3.
    Each of the six jacks 5 of the actuating assembly 4 is connected by a first longitudinal end 5A via a first hinge 9A to the base 3 and by the second longitudinal end 5B via a second hinge 9B to the platform 8 of the trolley 7. The joints 9A and 9B represent ball joints with two or three degrees of freedom. The six jacks 5 thus define six centers (or points) of pivot on the base 3 and six centers (or points) of pivot on the platform 8. The hexapod 2 therefore comprises six legs, each leg having a jack 5 of which the lengthening allows to vary the length of the leg.
    The two plates (base plate 3 and platform 8) are arranged substantially parallel to an XY (horizontal) plane defined by a so-called X direction and a Y direction. In a neutral position of said plates 3 and 8, they are all two completely parallel to the XY plane.
    These directions X and Y are part of an R mark (or XYZ) which is represented in FIG. 2. This reference R intended to facilitate comprehension comprises, in addition to X and Y directions (or axes) forming the XY plane, a direction (or axis) Z which is orthogonal to said XY plane, as well as angles ΘΧ, ΘΥ, and ΘΖ (highlighted by double arrows), which illustrate rotations, respectively, about the X, Y and Z axes.
    The base 3 can be fixed, in the usual way, on a support element (not shown) via fastening means, for example screws.
    As for the mobile carriage 7, it can support, in the usual way, particular elements (not shown) which can be fixed on it, via fastening means, for example screws. Hexapod 2 is particularly well suited for positioning or moving mechanical or optical parts in six degrees of freedom, in particular for specimen positioning in spectrography, for optical fiber alignment in optoelectronics, or for alignments of optics. The actuating assembly 4 is therefore configured to allow movement of the movable carriage 7 relative to the base 3. More specifically, the actuating assembly 4 can generate: a relative displacement along the X direction and / or around (ΘΧ) of the latter; and / or - a relative displacement in the direction Y and / or around (ΘΥ) of the latter; and / or - a relative displacement in the direction Z and / or around (ΘΖ) of the latter. The hexapod 2 thus has six degrees of freedom: three degrees of freedom in translation (along the X, Y and Z axes), as well as three degrees of freedom in rotation (according to the angles ΘΧ, ΘΥ and ΘΖ).
    The six jacks 5 are actuated (by the control unit 6) to change length and thus vary the orientation of the movable carriage 7 (relative to the fixed base 3). At a given position of the movable carriage 7 is a unique combination of six lengths of the six jacks 5.
    The base 3, the movable carriage 7 and the cylinders 5 are connected by the twelve pivot centers (six on the base and six on the carriage 7), and the control of the length of each cylinder 5 allows moving the movable carriage 7 of hexapod 2 along or around the X, Y and Z axes.
    According to the invention, the compensation system 1 comprises, as represented in FIG. 1: a measurement system 10 configured to determine geometry and position errors on the hexapod 2, the measurement system comprising: measuring assembly 11 configured to measure the positions of each of the pivot centers 9A on the base 3 and each of the pivot centers 9B on the carriage 7 to determine positional errors of the pivot centers 9A and 9B; A measuring assembly 12 configured to measure the length of each of the jacks 5, in order to determine length errors of said jacks 5; and • a measuring assembly 13 configured to measure positioning errors of each of the jacks 5 on its stroke; and - a computing unit 14 which is connected via links 15 to 17 respectively to the measuring assemblies 11 to 13 and which is configured to calculate, from the measurements made by these measuring assemblies 11 to 13, values error compensation.
    The error compensation values are applied to the control unit 6 of the hexapod 2 during use of the latter, as illustrated by an arrow 19 in phantom in FIG.
    The positioning accuracy of the carriage 7 along the X, Y, Z, U, V and W axes essentially depends on the following three elements: the accuracy of the position of each of the pivot centers 9A and 9B, as illustrated by arrows of marks 20A and 20B in Figure 2; the accuracy of measuring the initial length (at the origin) of each of the jacks 5 (or legs), as illustrated by arrows 21 in FIG. 2; and the positioning accuracy of each of the jacks 5, as illustrated by arrows 22 in FIG.
    The compensation system 1 makes it possible to improve the positioning accuracy of hexapod 2 by offsetting the three types of errors mentioned above.
    The compensations are of mathematical type and are supported by the control unit 6 (or controller) which makes it possible to control the hexapod 2. This provides: - a compensation of the positional deviations of the centers of pivots 9A and 9B of the base 3 and the carriage 7 with respect to the definition of the theoretical geometry; a compensation of the length at the origin of each of the jacks 5; and a compensation of the positioning errors of each of the jacks 5.
    To apply the compensations, the measurement unit 10 carries out measurements which supply the input data of calculations implemented by the calculation unit 14, the results of which are transmitted to the control unit 6.
    The technology of realization of the pivots, used for hexapod 2, makes it possible to carry out these measurements.
    In a preferred embodiment, for measuring the positions of the pivot centers on the base 3, the following operations are carried out: - Beads 23 (for example made of ceramic material) are fixed, for example by bonding or by another means. or other material) on the base 3 at the position of the pivot centers, as shown in Figure 3; the base 3 is fixed on a ground plate 24; and - the position of the balls 23 is measured using a three-dimensional measuring device (not shown).
    The ground plate 24 and the measuring device form part of the measuring assembly 11.
    In an alternative embodiment, the measurement system 10 carries out a direct measurement of the pivot centers on the base.
    In this case, the computing unit 14 compares the values of the positions of the pivot centers, measured in the aforementioned manner and received from the measurement set 11, with corresponding recorded theoretical values, and it constructs a compensation matrix of the geometry errors of the base 3. This matrix is transmitted to the control unit 6.
    In addition, to measure the positions of the pivot centers on the carriage 7, the following operations are carried out: - balls 25 (for example ceramic or other material) are fixed on the carriage 7 at the position of the centers as shown in Figure 4; the carriage 7 is fixed on a ground plate 26; and the position of the balls 25 is measured using a three-dimensional measuring device (not shown).
    The ground plate 26 and the measuring device form part of the measuring assembly 12.
    In an alternative embodiment, the measurement system 10 carries out a direct measurement of the pivot centers on the base.
    In this case, the computing unit 14 compares the values of the positions of the pivot centers, measured in the aforementioned manner and received from the measurement set 12, with corresponding recorded theoretical values, and it constructs a compensation matrix of the cart geometry errors.
    This matrix is transmitted to the control unit 6.
    Preferably, the computing unit 14 determines a single compensation matrix from the two previous matrices for all twelve pivot centers. This compensation matrix then comprises twelve coordinates in X, Y and Z.
    In an alternative embodiment, the positions of the pivot centers and the lengths of the jacks on a mounted hexapode are measured in a single step, the hexapod being designed to allow such a direct measurement.
    Moreover, to measure the length of each of the cylinders 5, for each jack 5, a length measuring device is measured with the three-dimensional measuring device between the pivot centers of the jack 5 and the jack 5 at the position initial minimum length.
    More particularly, the distance between the center of two balls (for example ceramic or other material) is measured on a three-dimensional measuring device 27 when the jack 5 is at the origin (length of the legs), as illustrated. in Figure 5.
    The lower pivot of this tool is maintained identically to those mounted on the base and on the hexapod carriage. The ball is fixed, for example glued. The axis of the cylinder nose is maintained in 3 centers and the cylinder is loaded, in its original position, with a force of 20N applied by a spring along an axis defined by the translation plate. The ball of the upper pivot is placed in the pivot cup of the cylinder nose. It is maintained with a spring system that ensures its immobilization during the measurement phase.
    The measurement is implemented in four successive steps: - measurement of the position of the center of the lower ball (cylinder not mounted) and locating the position of a corner of the support plate; - mounting of the cylinder and positioning of the upper ball; - measuring the position of the center of the upper ball; and - checking the position of the corner of the plate (to confirm that it did not move when placing the cylinder on the tool).
    In this case, the computing unit 14 compares the measured values of the positions of the lengths of the cylinders 5 with corresponding theoretical values, and it constructs a compensation matrix of the cylinder length errors.
    Moreover, to measure positioning errors of each of the jacks 5 on its stroke, the device 28 shown in FIG. 6 is preferably used.
    In this case, the calculation unit 14 uses the measured values of the positioning errors of the cylinders, to construct a positioning error compensation matrix.
    The implementation of the invention thus has two phases: a first phase during which the various measures mentioned above are carried out, then the calculations of the errors (or deviations) presented preferably in the form of compensation matrix are carried out; and a second phase, during which hexapod 2 is used in the usual manner to carry out usual operations. In this case, the errors (or deviations) calculated or measured in a conventional algorithm or algorithms of the control unit 6 (or controller), which takes them into account in determining the movements of the mobile carriage 7 with respect to the fixed base 3, in order to compensate for these errors.
    This gives a hexapod 2 with particularly precise and controlled movements between the mobile carriage 7 and the base 3.
    权利要求:
    Claims (11)
    [1" id="c-fr-0001]
    1. A method for compensating accuracy errors of a hexapod, said hexapod (2) comprising at least: - a fixed base (3); - an actuating assembly (4) provided with six cylinders (5) of linear translation, independent and controllable; - a control unit (6) of the actuating assembly (4); and - a movable carriage (7) having a platform (8) connected through the actuating assembly (4) to the base (3), each of said cylinders (5) of the assembly of actuation (4) being connected by a first longitudinal end (5A) via a first articulation (9A) to the base (2) and by the second longitudinal end (5B) via a second articulation (9B) to the carriage (7), said six jacks (5) defining six pivot centers on the base (3) and six pivot centers on the carriage (7), said method being characterized in that it comprises: - a measuring step consisting in determining errors of geometry and position on the hexapod (2), the measuring step comprising: • a first substep of measuring the positions of each of the pivot centers on the carriage (7) and each of the pivot centers on the base (3), to determine position errors of the pivot centers, and to measure the length of each of the jacks (5) for determining length errors of said jacks (5); and a second substep of measuring positioning errors of each of the cylinders (5) on its stroke; - a calculation step of calculating, from the measurements made in the measuring step, error compensation values; and - an application step of applying the error compensation values to the control unit (6) of the hexapod (2), when using it.
    [2" id="c-fr-0002]
    2. Method according to claim 1, characterized in that the first measurement sub-step comprises a first individual substep consisting in measuring the positions of each of the pivot centers on the base (3), said first substep individual device for measuring the positions of the pivot centers on the base (3): - to fix balls (23) on the base (3) at the position of the pivot centers; - to fix the base (3) on a ground plate (24); and - measuring the position of the balls (23) using a three-dimensional measuring device.
    [3" id="c-fr-0003]
    3. Method according to claim 2, characterized in that the calculation step comprises a substep consisting in comparing the measured values of the positions of the pivot centers with corresponding theoretical values and in constructing a compensation matrix for the geometry errors. from the base (3).
    [4" id="c-fr-0004]
    4. Method according to any one of the preceding claims, characterized in that the first measurement sub-step comprises a second individual sub-step of measuring the positions of each of the pivot centers on the carriage (7), said second individual sub-step consisting, for measuring the positions of the pivot centers on the carriage (7): - to fix balls (25) on the carriage (7) at the position of the pivot centers; - to fix the carriage (7) on a ground plate (26); and - measuring the position of the balls (25) using a three-dimensional measuring device.
    [5" id="c-fr-0005]
    5. Method according to claim 4, characterized in that the calculation step comprises a substep consisting in comparing the measured values of the positions of the pivot centers with corresponding theoretical values and in constructing a compensation matrix for the geometry errors. of the carriage (7).
    [6" id="c-fr-0006]
    6. Method according to any one of the preceding claims, characterized in that the first measurement sub-step comprises a third individual sub-step of measuring the length of each of the cylinders (5), said third individual sub-step consisting of measuring, for each cylinder (5), with a three-dimensional measurement device (27), the length of the cylinder (5) between the ball joint centers of the cylinder (5), with the cylinder (5) at the origin .
    [7" id="c-fr-0007]
    7. Method according to claim 6, characterized in that the calculation step comprises a substep consisting in comparing the measured values of the lengths of the jacks (5) with corresponding theoretical values and in constructing a compensation matrix of the error errors. length of cylinders (5).
    [8" id="c-fr-0008]
    The method according to claim 1, characterized in that said first substep consists of: - directly measuring the positions of each of the pivot centers on the carriage (7) and each of the pivot centers on the base (3); and - directly measuring the length of each of the cylinders (5), to determine length errors of said cylinders (5).
    [9" id="c-fr-0009]
    9. Method according to any one of the preceding claims, characterized in that the calculation step comprises a substep of using the measured values of the positioning errors of the cylinders (5) to build a compensation matrix of the errors of positioning.
    [10" id="c-fr-0010]
    A system for precision error compensation of a hexapod, said hexapod (2) comprising: - a fixed base (3); - an actuating assembly (4) provided with six cylinders (5) of linear translation, independent and controllable; - a control unit (6) of the actuating assembly (4); and - a movable carriage (7) having a platform (8) connected through the base actuating assembly (3), each of said actuating unit cylinders (5) (4). ) being connected by a first longitudinal end (5A) via a first articulation (9A) to the base (3) and by the second longitudinal end (5B) via a second articulation (9B) to the carriage (7), said six cylinders ( 5) defining six pivot centers on the base (3) and six pivot centers on the carriage (7), said compensation system (1) being characterized in that it comprises: - a measuring system (10) configured for determining geometry and position errors on the hexapod (2), the measurement system (10) comprising: • a first measurement unit (11, 12) configured to measure the positions of each of the pivot centers on the carriage (7) and each of the pivot centers on the base (3), in order to determine position errors of s pivot centers, and for measuring the length of each of the cylinders (5), to determine errors in the length of said cylinders (5); and a second measuring assembly (13) configured to measure positioning errors of each of the cylinders (5) on its stroke; and - a calculation unit (14) configured to calculate, from these measurements, error compensation values, the error compensation values being applied to the control unit (6) of the hexapod ( 2) when using the latter.
    [11" id="c-fr-0011]
    11. System according to claim 10, characterized in that said first measuring unit (11, 12) comprises: a measuring unit (11) configured to measure the positions of each of the pivot centers on the carriage (7) and each of the pivot centers on the base (3) to determine positional errors of the pivot centers; and a second measuring assembly (12) configured to measure the length of each of the jacks (5).
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    同族专利:
    公开号 | 公开日
    FR3042590B1|2017-11-10|
    JP2019500581A|2019-01-10|
    EP3362765B1|2021-08-04|
    EP3362765A1|2018-08-22|
    US10830582B2|2020-11-10|
    CN108369092A|2018-08-03|
    WO2017064392A1|2017-04-20|
    JP6894432B2|2021-06-30|
    KR20180074678A|2018-07-03|
    CN108369092B|2020-12-08|
    US20180299267A1|2018-10-18|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    WO1999028097A1|1997-12-01|1999-06-10|Giddings & Lewis, Inc.|System and method for calibrating a hexapod positioning device|
    JPH0774964B2|1987-06-25|1995-08-09|日本鋼管株式会社|Robot positioning error correction method|
    GB0805021D0|2008-03-18|2008-04-16|Renishaw Plc|Apparatus and method for electronic circuit manufacture|
    TW201015457A|2008-10-03|2010-04-16|Hon Hai Prec Ind Co Ltd|Robot state inspecting system|
    US8215199B2|2008-11-17|2012-07-10|Marcroft Sacha L|Parallel kinematic positioning system|
    US9545697B2|2009-04-06|2017-01-17|The Boeing Company|Automated hole generation|
    GB201003599D0|2010-03-04|2010-04-21|Renishaw Plc|Measurement method and apparatus|
    CN102909728B|2011-08-05|2015-11-25|鸿富锦精密工业（深圳）有限公司|The vision correction methods of robot tooling center points|
    US20150321360A1|2012-10-02|2015-11-12|Avs Added Value Industrial Engineering Solutions, S.L.|Manipulator for an ultra-high-vacuum chamber|
    FR2997887B1|2012-11-14|2015-07-10|Commissariat Energie Atomique|HEXAPODE SYSTEM|
    US9694455B2|2012-12-05|2017-07-04|Alio Industries, Inc.|Precision tripod motion system with six degrees of freedom|
    US9279658B1|2013-03-14|2016-03-08|Exelis, Inc.|System and method for setting up secondary reflective optic|
    GB2512059B|2013-03-18|2016-08-31|Rolls Royce Plc|An independently moveable machine tool|
    CN103968761A|2014-05-28|2014-08-06|中科华赫（北京）科技有限责任公司|Absolute positioning error correction method of in-series joint type robot and calibration system|
    US9928097B1|2015-09-14|2018-03-27|VCE IP Holding Company LLC|Methods, systems, and computer readable mediums for defining and updating a virtual computing system comprising distributed resource components|CN109500814B|2018-11-30|2020-08-14|北京精密机电控制设备研究所|Full-dimensional ground physical verification system and method for variable load condition of space manipulator|
    US20200192311A1|2018-12-17|2020-06-18|Divergent Technologies, Inc.|Systems and methods for high accuracy fixtureless assembly|
    CN109955227B|2019-04-04|2021-04-02|银河航天通信技术有限公司|Pointing mechanism, mechanical arm and spacecraft|
    CN110722540B|2019-10-31|2021-04-06|北京机械设备研究所|Three-degree-of-freedom platform driven by pneumatic artificial muscles|
    法律状态:
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    2017-04-21| PLSC| Publication of the preliminary search report|Effective date: 20170421 |
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    申请号 | 申请日 | 专利标题
    FR1559795A|FR3042590B1|2015-10-15|2015-10-15|METHOD AND SYSTEM FOR PRECISION ERROR COMPENSATION OF A HEXAPODE|FR1559795A| FR3042590B1|2015-10-15|2015-10-15|METHOD AND SYSTEM FOR PRECISION ERROR COMPENSATION OF A HEXAPODE|
    PCT/FR2016/052552| WO2017064392A1|2015-10-15|2016-10-05|Method and system for compensating for accuracy errors of a hexapod|
    EP16790664.3A| EP3362765B1|2015-10-15|2016-10-05|Method and system for compensating for accuracy errors of a hexapod|
    CN201680059563.5A| CN108369092B|2015-10-15|2016-10-05|Method and system for compensating for accuracy errors of hexapod|
    KR1020187010099A| KR20180074678A|2015-10-15|2016-10-05|Method and system for compensating for hexapod accuracy errors|
    JP2018519719A| JP6894432B2|2015-10-15|2016-10-05|Methods and systems for compensating for hexapod accuracy errors|
    US15/767,571| US10830582B2|2015-10-15|2016-10-05|Method and system for compensating for accuracy errors of a hexapod|
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