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    • 专利摘要:
    The invention relates to a bolometric detector (100) comprising: - an absorption membrane (110) for converting incident electromagnetic radiation (200) into heat; and a reflector (120) for reflecting towards the absorption membrane part of the incident electromagnetic radiation having passed through it. The bolometric detector according to the invention has the following characteristics: it comprises a non-metallic layer (130) situated between the absorption membrane and the reflector, having a series of index jumps, so as to form a resonant network at a wavelength of interest λ0; the average pitch of the network (P) is less than λ0; and the optical distance between the absorption membrane and the reflector is substantially equal to a multiple of λ0 / 2. The bolometric detector thus has an excellent spectral sensitivity, of particular interest particularly for the production of gas sensors.
    公开号:FR3042272A1
    申请号:FR1559630
    申请日:2015-10-09
    公开日:2017-04-14
    发明作者:Salim Boutami；Fabien Eloi；Jerome Hazart；Jean-Jacques Yon
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    BOLOMETER WITH HIGH SPECTRAL SENSITIVITY DESCRIPTION
    TECHNICAL FIELD The invention relates to a bolometric detector, that is to say a detector that converts the energy of an incident electromagnetic radiation into heat, so that an intensity of this radiation corresponds to a variation in temperature.
    The bolometric detectors are particularly suitable for detecting electromagnetic radiation located in the infrared, in particular at wavelengths between 0.7 μm and 3 mm.
    STATE OF THE PRIOR ART
    Bolometers are known in the prior art as described in FIG. 1A of the patent application FR-2977937, comprising a membrane forming an absorber-thermistor block, suspended above a reflector, at a distance λο / 4 of it, where λο is the central wavelength of a spectral band of detection.
    The membrane comprises an absorber element such as a thin metal layer, which absorbs incident electromagnetic radiation and whose temperature increases in response to this absorption, and a thermometric element whose resistivity varies with temperature.
    The reflector and the absorber-thermistor unit together form a quarter-wave cavity allowing high absorption, typically 90%, over a spectral band ranging from 8 to 12 μm or over a spectral band ranging from 3 μm to 5 μm.
    A disadvantage of this bolometer is that it does not offer a great spectral selectivity, all the wavelengths being absorbed over a spectral width of several micrometers.
    To overcome this drawback, the document proposes to deposit, on the membrane forming an absorber-thermistor block, a metal-insulator-metal stack (MIM structure). At least one side dimension of the stack is determined to generate a plasmon resonance with incident frequency radiation within said wide spectral band.
    A disadvantage of these stacks deposited on the absorbent membrane is that they increase the thermal mass of the latter, and therefore the thermal time constant.
    An object of the present invention is to provide a bolometric detector having a high spectral selectivity, and which does not present at least one of the disadvantages of the prior art.
    In particular, an object of the present invention is to provide a bolometric detector having a high spectral selectivity, and a thermal mass equivalent to that of the absorber-thermistor block alone.
    STATEMENT OF THE INVENTION
    This objective is achieved with a bolometric detector having at least one pixel, each pixel comprising: an absorption membrane adapted to convert incident electromagnetic radiation into heat; and a reflector, arranged to reflect towards the absorption membrane part of the incident electromagnetic radiation having passed therethrough.
    According to the invention, the bolometric detector has the following characteristics: at least one pixel further comprises a non-metallic layer called structured layer, located between the absorption membrane and the reflector, having a series of index hops between a first optical index and a second optical index in a plane parallel to the absorption membrane, so as to form a resonant network at a wavelength of interest λ0; the average pitch of the network is less than said wavelength of interest; and the optical distance between the absorption membrane and the reflector is substantially equal to a multiple of λο / 2.
    The structured layer does not convert incident electromagnetic radiation into heat because it is non-metallic.
    In the structured layer, each index jump is constituted by an interface between a first material and a second material.
    The structured layer forms a resonant network at a wavelength of interest. This is in particular a so-called sub-wavelength network, the average pitch of the network being less than said wavelength of interest. In other words, an average difference between two successive index jumps from the first optical index to the second optical index is less than this wavelength of interest.
    The network being sub-wavelength, there is no diffraction phenomenon. At least a portion of the incident electromagnetic radiation passes through the absorption membrane, and reaches the structured layer where the resonance phenomenon occurs at the wavelength of interest. A peak of narrow electromagnetic intensity is thus formed, centered on the wavelength of interest.
    This intensity peak is emitted in the direction of the absorption membrane, and / or in the direction of the reflector which returns it to the absorption membrane.
    This peak intensity is then absorbed by the absorption membrane, which then has a narrow peak of absorbed energy, centered on said wavelength of interest. This peak is said to be narrow because it has a width at half height less than 150 nm, or even 100 nm, 50 nm, 10 nm or even less. To this first phenomenon is added a second phenomenon, related to the optical distance between the absorption membrane and the reflector. The overall spectrum of power absorbed by the absorption membrane as a function of the wavelength depends on these two phenomena.
    In the prior art, the optical distance between the absorption membrane and the reflector is equal to λο / 4, to form a resonant cavity over a broad spectral band centered on the wavelength λο.
    Here, the optical distance between the absorption membrane and the reflector is substantially equal to a multiple of λο / 2, where λο is the wavelength of interest. Thus, for a broad spectral band centered substantially on λο, incident electromagnetic radiation on the reflector is in phase opposition with electromagnetic radiation reflected by the reflector. Therefore, for a broad spectral band centered substantially on λο, the spectrum of the energy absorbed by the absorption membrane has a wideband trough. The hollow is said broadband because it has a width at half height greater than 500 nm, or even 1 μιτι or more. This hollow corresponds to a weak absorption, less than 20%, over a spectral width greater than 100 nm, and even 200 nm, 300 nm or more.
    The overall spectrum of power absorbed by the absorption membrane as a function of the wavelength exhibits both the broad band, and the narrow peak, as described above.
    Thus, around the wavelength of interest, the absorption membrane has a narrow absorption peak, surrounded on both sides by low absorption zones. Thus, on the spectral band corresponding to the broad band trough, the bolometric detector according to the invention has a high spectral sensitivity.
    In particular, the bolometric detector according to the invention has, on the spectral band corresponding to the wide-band hollow, a quality factor greater than 20.
    This high spectral selectivity is obtained by means of a clever choice of the optical distance between the reflector and the absorption membrane, and a structured layer located between the two. The structured layer is not deposited on the absorption membrane. Therefore, it does not increase the thermal mass of the absorption membrane. Thus, the bolometric detector according to the invention has a very good thermal time constant, lower than those of the MIM structure bolometers described in the introduction.
    In addition, the high spectral selectivity of a pixel of the bolometric detector according to the invention is obtained without the need to place a spectral filter upstream of this pixel.
    The wavelength of interest according to the invention is a function of the characteristics of the structured layer. It is therefore possible to produce a bolometric detector having two adjacent pixels that are not both sensitive to the same wavelength of interest, without a spectral filter upstream of each pixel.
    This prevents a light radiation filtered by the spectral filter of a first pixel is received by an adjacent pixel (phenomenon called cross-talk).
    In addition, the invention makes it possible to further refine the spectral selectivity of each pixel by means of filters placed upstream. Light radiation filtered by the spectral filter of a first pixel, and received by an adjacent pixel, does not produce heating of the absorption membrane of said adjacent pixel, thanks to the intrinsic spectral selectivity of each pixel.
    Preferably, a difference between the first optical index and the second optical index is greater than 0.5.
    The average network step can be between λο / 2 and λο, where λο is the wavelength of interest.
    The resonant network is advantageously a periodic network.
    Alternatively, the resonant network may be a pseudo-periodic network, having variations in the shape of the elementary pattern such that a recovery rate relative to a mean shape of the elementary patterns is between 90% and 99%.
    The resonant network may have index jumps distributed along the two dimensions of a plane parallel to the absorption membrane.
    As a variant, the resonant network may have index jumps distributed in a single dimension of a plane parallel to the absorption membrane.
    Each index jump advantageously consists of an interface between a first material and a second material, one of said materials being a vacuum or a gas such as air.
    Preferably, a gap between the structured layer and the absorption membrane is less than λο / 2, where Xo is the wavelength of interest.
    The structured layer may be covered with a non-metallic layer called low index layer, spaced from the absorption membrane.
    The bolometric detector according to the invention advantageously has a plurality of pixels, and at least two pixels differ in their average shape from the elementary patterns so that they are adapted to the detection of different wavelengths of interest.
    According to an advantageous embodiment, each pixel has a low index layer, covering the structured layer associated with this pixel and spaced from the corresponding absorption membrane, the low index layers each associated with a pixel having different thicknesses.
    A non-metallic interlayer may extend between the reflector and the structured membrane. The invention also relates to a gas sensor comprising an infrared source, arranged to emit electromagnetic radiation inside a cavity, the cavity containing a bolometric detector according to the invention.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The present invention will be better understood on reading the description of exemplary embodiments given purely by way of indication and in no way limiting, with reference to the appended drawings, in which: FIGS. 1A and 1B illustrate diagrammatically, according to two sectional views. a first embodiment of a bolometric detector according to the invention; FIG. 2 illustrates absorption spectra of bolometric detectors of the type of that of FIGS. 1A and 1B; FIGS. 3A and 3B schematically illustrate, in two sectional views, a second embodiment of a bolometric detector according to the invention; FIG. 4 illustrates absorption spectra of bolometric detectors of the type of that of FIGS. 3A and 3B; FIGS. 5A to 5C illustrate different variants of a structured layer of a bolometric detector according to the invention; FIG. 6 schematically illustrates a third embodiment of a bolometric detector according to the invention; FIG. 7 schematically illustrates a fourth embodiment of a bolometric detector according to the invention; FIGS. 8A and 8B illustrate two other variants of a structured layer of a bolometric detector according to the invention; FIG. 9 schematically illustrates two pixels of a fifth embodiment of a bolometric detector according to the invention; and FIG. 10 schematically illustrates a gas sensor comprising a bolometric detector according to the invention.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    FIG. 1A illustrates a first embodiment of a bolometric detector 100 according to the invention.
    For reasons of legibility of the figures, there is shown a single pixel of said detector.
    Each pixel comprises an absorption membrane 110 and a reflector 120.
    The absorption membrane 110 consists of a material adapted to convert into heat the energy of an incident electromagnetic radiation, especially an infrared radiation, at a wavelength of between 0.7 μιτι and 3 mm (of near infrared to far infrared). The absorption membrane is particularly adapted to convert into heat wavelengths between 3 μιτι and 12 μιτι. The absorption membrane, or bolometric plate, may be metal, in particular titanium nitride (TiN).
    The absorption membrane 110 is in thermal contact with a thermometric element, not shown, for measuring the heating of the absorption membrane. The thermometric element is for example a layer of a material having a high variation of resistivity as a function of temperature, deposited directly on the absorption membrane. The thermometric element is, for example, vanadium oxide.
    The reflector 120, or mirror, consists of a reflective surface facing the absorption membrane. The reflector 120 may be formed by a reflective treatment deposited on a substrate 121. The reflector is reflective at the wavelengths at which the absorption membrane is absorbent. It may consist of a very thin metal layer, for example a layer of copper or aluminum 50 nm thick.
    The reflector 120 extends parallel to the absorption membrane 110, on the opposite side to a source emitting the electromagnetic radiation 200.
    The reflector 120 and the absorption membrane 110 are known elements of a bolometric detector, so they are not described here further.
    At least one pixel of the bolometric detector according to the invention, preferably all, has the additional characteristics as described below, so as to have a high spectral sensitivity.
    A so-called structured layer 130, non-metallic, is interposed between the reflector 120 and the absorption membrane 110, at a distance from each of these two elements.
    The absorption membrane 110 is suspended above the structured layer 130 by means of support, thermally insulating, not shown.
    In particular, the distance d2 between the structured layer and the absorption membrane is greater than λο / 10, where λο is the central wavelength of an absorption peak of the pixel of the bolometric detector, referred to as the wavelength interest. We give in the following more details on this wavelength.
    The distance d2 is measured from the upper face of the structured layer 130, on the side of the absorbent membrane, to the lower face of the absorbent membrane 110, on the structured layer side.
    The structured layer 130 is thermally insulated from the absorption membrane 110, in particular by a layer of a vacuum or a gas such as air.
    Without precision on the pressure, a layer of a gas such as air designates a layer at the pressure of the surrounding air, generally 1.013 bar.
    Throughout the text, a void denotes a volume of a gas such as air, having a pressure strictly less than 1 bar, for example less than 0.5 bar, less than 50 mbar or less.
    In the example illustrated here, this layer of a vacuum or a gas such as air has a thickness equal to the distance di.
    The structured layer is further located away from the reflector.
    Preferably, it is in direct physical contact with the same material, the side of the reflector and the side of the absorption membrane.
    The structured layer 130 is constituted here of a network made of a first material, having an optical index rt2h, the recesses of the network being filled with a material of optical index r 2b strictly less than r 2h.
    Here, the hollows of the n2h optical index material network are filled with a vacuum. Alternatively, they are filled with a gas such as air, or other solid material.
    Preferably, the height of the recesses of the network of material of index n2h is equal to the thickness of the structured layer 130 (dimension along the axis (Oz) defined below). Here, the structured layer has a thickness h2 = 380 nm.
    It can be considered that the structured layer 130 consists of two nested mono-material networks of index n2h respectively n2b, the index material n2b being a vacuum, or a gas such as air or a solid material. The structured layer can then be considered as a bi-material network.
    In other words, the structured layer 130 can be considered as a high-index membrane structured with a medium of low index, or as a network consisting of an alternation of non-metallic materials with an index contrast such that n2b < n2h (in particular n2b <n2h-0.5, as detailed in the following).
    Throughout the text, an optical index denotes a refractive index at the wavelength of interest.
    The structured layer 130 is thus defined by a series of hops of index between the optical index n2h and the optical index n2b. These index jumps are distributed in planes parallel to the absorption matrix 110. Thus, the structured layer does not form a Bragg grating-type network, but a network having structures distributed in a plane parallel to the matrix of 'absorption.
    In the example illustrated here, the structured layer 130 consists of an amorphous silicon lattice, the troughs of the lattice being filled with a vacuum. We therefore have n2h = 3.6, and n2b = 1.
    Numerous variants can be implemented without departing from the scope of the invention, preferably checking n2h-n2b> 0.5, and even more preferably n2h-n2b> 1. In addition, n2h> l, 5, and even n2h> 3 are preferably checked.
    The material of index n2h may be amorphous silicon or germanium. The optical index material n2b may be a vacuum, a gas such as air, silica, zinc sulphide, a nitride.
    The structured layer 130 forms a resonant network at the wavelength of interest λο.
    The structured layer 130 is a resonant structure, which sends to the absorption membrane 130 and / or to the reflector, electromagnetic radiation having an intensity peak centered on the wavelength of interest λο. This peak is narrow, of width at half-height lower, for example, at 50 nm. This intensity peak is called resonance at the wavelength of interest.
    The resonance at the wavelength of interest is returned to the absorption membrane, directly, or indirectly via the reflector 120.
    One can speak of concentrator membrane to designate the structured layer 130, or integrated filter structure.
    This resonance is absorbed by the absorbent membrane 110. The absorption can implement a phenomenon of evanescence.
    In order for the resonance to be absorbed at best by the absorbent membrane 110, the thickness d2 defined above is preferably less than λο / 2. We then have Ao / 10 <d2 <λο / 2. In the example represented here, d2 = 2000 nm.
    The structured layer 130 here forms a periodic resonant network, such that the pitch P of the network is less than the wavelength of interest λο.
    In particular, we have λο / 2 <Ρ <λο.
    It is more particularly a network having a second order periodicity.
    FIG. 1A shows a pixel of the bolometric detector in a section in a plane parallel to the plane (zOy), where (Oz) is an orthogonal axis to the plane of the absorbing membrane, and (Oxyz) an orthonormal reference.
    FIG. 1B shows this pixel in a sectional view in a plane parallel to the plane (xOy) passing through the structured layer 130.
    In the example illustrated here, the structured layer 130 has a periodicity in two dimensions (according to (Ox) and (Oy)), and the pitch is the same according to these two dimensions.
    The structured layer 130 is formed here of pads 131 made of the index material n2h, the pads being separated by vacuum gaps.
    It is possible to define a volume filling factor corresponding to the ratio between the volume occupied by the material of index n2h in the structured layer 130 and the total volume of the structured layer 130. Since the studs are square-based, we are interested here. rather to a linear filling factor, corresponding to the ratio between the width L of this square and the pitch P of the network. The linear filling factor is here 0.85.
    In order to maintain the structured layer 130 away from the reflector, it is deposited on an intermediate layer 140 itself deposited on the reflector. The intermediate layer 140 provides a mechanical support of the structured layer 130, especially when the space between the pads is filled with vacuum or a gas such as air.
    The intermediate layer 140 is in direct physical contact with the reflector 120 on one side, and the structured layer 130 on the other side. It preferably has an extent at least equal to that of the structured layer 130.
    The intermediate layer 140 is made of solid material. It is made of a nonmetallic material, here zinc sulphide (ZnS), of index n = 2.2. Alternatively, it may be silica, nitride (or consisting of a vacuum or a gas such as air as illustrated below).
    Here it has a thickness hi = 620 nm.
    The intermediate layer 140 forms a homogeneous layer of index no less than n2h, preferably n2h-ni> 0.5, and even more preferably n2h-ni> 1. Preferably, ni <2.
    The optical distance between the absorbent membrane 110 and the reflector 120 is substantially equal to a multiple of λο / 2. By "substantially" is comprised between plus or minus 15% of λο / 2, around a multiple of λο / 2, preferably 10% and even 5%. In other words, each pixel of the bolometric detector forms a cavity of optical thickness N * λο / 2, N positive integer.
    This optical distance is measured from the underside of the absorbent membrane, on the reflector side, to the upper face of the reflector, on the side of the absorbent membrane.
    An optical distance is defined by the product of a length and an optical index, in particular an average optical index when considering an optical distance along the axis (Oz), in the structured layer 130.
    Here, the optical distance between the absorbent membrane 110 and the reflector 120 is approximately defined by:
    Dl = hi * ni + h2 * [F * n2h + (lF) * n2b] + d2 * ngap with ngap the index in the air or vacuum layer between the absorbent membrane and the structured layer, and F the factor volume filling defined above.
    With the values given above, we obtain Dl = 4.45 μι · η = λο.
    As explained in the description of the invention, this optical distance is at the origin of a quasi-null absorption around λ 0, over a broad spectral band, except for the narrow absorption peak generated by the resonance of the layer. structured 130.
    FIG. 2 illustrates the absorption spectra 21, 22, 23 of bolometric detectors of the type of that of FIGS. 1A and 1B, which differ only in the pitch P in the structured layer 130. The abscissa axis is a length of wave in nm. The y-axis is a normed absorption rate.
    As expected, each spectrum has a narrow mid-height peak less than 50 nm, for example 10 nm, and an absorption trough centered on 4.45 μm (= D1).
    The absorption trough has a width at half height of about 1 μιτι (width of the trough at a value of absorption equal to half the peak-valley amplitude of the absorption trough). This absorption trough corresponds in first approximation to the complementary broadband absorption peak of a bolometric detector according to the prior art as described in the introduction.
    In operation, the electromagnetic radiation 200 incident on the bolometric detector has a spectral range included in this absorption trough. For example, this radiation is emitted by a broadband source whose emission band is included in the absorption trough. In a variant, a very broadband radiation is emitted and then filtered by a spectral filter whose transmission band is included in the absorption trough.
    Thus, a pixel of the bolometric detector detects only intensity variations at the wavelength of the absorption peak, without being disturbed by the absorption at the neighboring wavelengths, which is almost zero.
    This results in detection with a very high spectral sensitivity, thanks to the narrow peak located in an absorption trough.
    The absorption spectrum 21 corresponds to P = 3750 nm. The narrow peak of the spectrum 21 is centered on a first wavelength of interest λοι equal to 4350 nm.
    The optical distance DI satisfies the condition stated above, in particular: Dl = Ν * (λοι / 2) - (λ0ι / 2) * 4.6%, with N = 2.
    The absorption spectrum 22 corresponds to P = 3900 nm. The narrow peak of the spectrum 22 is centered on a second wavelength of interest λο2 equal to 4450 nm.
    The optical distance DI satisfies the condition stated above, in particular: D1 = N * (λ.02 / 2), with N = 2.
    The absorption spectrum 23 corresponds to P = 4050 nm. The narrow peak of the spectrum 23 is centered on a third wavelength of interest Xcb equal to 4550 nm.
    The optical distance DI satisfies the condition stated above, in particular: Dl = Ν * (λ03 / 2) + (λο3 / 2) * 4.4%, with N = 2.
    FIG. 2 illustrates that the characteristics of the structured layer 130 make it possible to adapt the characteristics of the narrow peak of absorption.
    In particular, the pitch of the resonant network forming the structured layer defines the wavelength of interest λο.
    It is therefore possible to produce a multi-pixel bolometric detector, in which several pixels have the characteristics of the invention, but are not all associated with the same wavelength of interest.
    In particular, two adjacent pixels may each be sensitive to a different wavelength of interest, without the need for each pixel to be covered by a separate spectral filter. This avoids cross-talk phenomena, due in particular to the diffraction of light on the edge of a filter, when two different filters are arranged above two adjacent pixels. In addition, the invention allows detections at two different wavelengths simultaneously.
    In particular, it is possible to produce a bolometric detector consisting of a matrix of different types of pixels differing in their wavelength of interest, distributed in a periodic arrangement, with an elementary pattern comprising at least one pixel of each type. The pixels are then divided into groups of pixels, each group corresponding to an elementary pattern.
    For example, the different types of pixels are distributed according to a matrix of Bayer. Thus, not all types of pixels are necessarily present in the same number, and the proportion of each pixel type makes it possible to give more or less weight to certain wavelengths of interest.
    A multi-spectral imager is thus produced, providing several interlaced images, each associated with a particular wavelength, the interlaced images forming together a multi-spectral image. Such an imager can be adapted to the acquisition of an image of a night scene.
    Figure 2 also illustrates that for small variations in the wavelength of interest, from one pixel to another, the optical distance DI can remain the same from one pixel to another. These small variations are, for example, variations of less than 300 nm or even 200 nm.
    FIGS. 3A and 3B schematically illustrate a second embodiment of a bolometric detector 300 according to the invention.
    The reference numerals of FIGS. 3A and 3B correspond to those of FIGS. 1A and 1B, the number of the hundreds being replaced by a 3.
    The second embodiment of a bolometric detector differs from the first mode only in that the structured layer 330 is a through-hole grid. The through holes each have a square section in the plane (xOy), and are distributed in this plane according to a periodic grid in two dimensions of pitch P.
    The linear filling factor is here 0.25. The distance 02 is adjusted so that the optical distance DI between the reflector 320 and the structured layer 310 is always equal to 4.45 μιτι.
    The graph of Figure 4 corresponds to that of Figure 2.
    The spectrum 41 corresponds to a pitch P = 3450 nm, the spectrum 42 corresponds to a pitch P = 3600 nm, the spectrum 43 corresponds to a pitch P = 3750 nm.
    Results similar to those obtained with the first embodiment are obtained, the narrow peaks being even thinner (width at mid-height of only a few nm, approximately 5 nm).
    FIGS. 5A to 5C illustrate different variants of a structured layer of a bolometric detector according to the invention. In FIG. 5A, the structured layer consists of a network of cylindrical studs with a circular base, distributed in a square grid.
    The linear filling factor is 0.85, and the distance DI is 4.45 μm. For P = 3300 nm, P = 3450 nm, and P = 3600 nm, absorption spectra of the types of those of FIG. 2 are obtained, except that the width at half height is wider, from order of 50 nm. In FIG. 5B, the structured layer consists of a grid of through-holes. The through holes each have a circular section in the plane (xOy), and are distributed in this plane according to a periodic mesh in two dimensions.
    The linear filling factor is 0.25, and the distance DI is 4.45 μm. For P = 3450 nm, P = 3600 nm, and P = 3750 nm, absorption spectra of the type of those of FIG. 3 are obtained. In FIG. 5C, the structured layer consists of a network of square base pads, of the type shown in Figure IB, the pads being connected in pairs by narrow bridges.
    The pads are distributed along lines parallel to (Ox) and along columns parallel to (Ox). Each narrow bridge extends parallel to (Ox) or (Oy), along an axis connecting the centers of two neighboring studs. Each block is connected to the neighboring block located below, above, to the right and to the left (if this neighbor exists).
    The narrow peak of absorption depends on the characteristics of the structured layer. As detailed above, a network step makes it possible to adjust the wavelength of interest (central wavelength of the peak). Other parameters also make it possible to adjust the wavelength of interest and / or the spectral width of the peak. These parameters are in particular the linear or volume filling factor, the section of the pads, the thickness of the structured layer, the shape of the pads, etc. These parameters are characteristic of the shape of an elementary pattern of the network formed by the structured layer.
    For example, an array of circular base pads has an absorption peak of greater spectral width than a grid of square-based pads. Similarly, the linear filling factor of a network of pads makes it possible to adjust the spectral width of the absorption peak.
    FIG. 6 schematically illustrates a third embodiment of a bolometric detector 600 according to the invention.
    The reference numbers of FIG. 6 correspond to those of FIG. 3A, the number of the hundreds being replaced by a 6.
    The third embodiment of a bolometric detector differs from the second mode only in that the structured layer 630 is kept suspended above the reflector, without direct physical contact with the reflector.
    To maintain the structured layer 630 suspended, pillars 641 are disposed between the structured layer 630 and the reflector 620.
    The structured layer 630 and the reflector 620 are then separated by an air or vacuum layer of height hi ', here hi' = 620 nm.
    This embodiment is suitable when the structured layer is formed by a grid of through holes, or by pads connected together by narrow bridges, or by two nested mono-material networks, each network being made of a solid material.
    This embodiment is obtained using a sacrificial layer which is removed after completion of the structured layer 630.
    It establishes a symmetry on both sides of the structured layer (same material on each side), making it possible to obtain total absorption at the wavelength of interest.
    FIG. 7 schematically illustrates a fourth embodiment of a bolometric detector 700 according to the invention.
    The reference numbers of FIG. 7 correspond to those of FIG. 3A, the number of the hundreds being replaced by a 7.
    The fourth embodiment of a bolometric detector differs from the second mode only in that the structured layer 730 is covered by a non-metallic layer called low index layer 750.
    The low index layer is in direct physical contact with the structured layer 730, and separated from the absorption membrane 710 by an air or vacuum layer.
    This low index layer 750 has an optical index n3 <n2h, preferably n2h-n3> 0.5, and even n2h-n3> 1.
    Preferably, the low index layer is made of the same material as the intermediate layer 740.
    It may also have the same thickness as the intermediate layer 740.
    The low index layer 750 makes it possible to maintain a symmetry on both sides of the structured layer (same material on each side), when the structured layer is deposited on an intermediate layer of solid material. Such symmetry makes it possible to obtain total absorption at the wavelength of interest.
    The low index layer 750 also makes it possible to protect the structured layer 730.
    It is particularly suitable when the structured layer consists of two nested mono-material networks, each network consisting of a solid material.
    It has an optical index greater than that of a vacuum or air, which makes it possible, if necessary, to reduce a total height of the bolometric detector according to the invention for the same optical distance DI between the reflector 720 and the diaphragm. absorption 710.
    Another advantage of this low index layer is detailed in the following.
    FIGS. 8A and 8B illustrate two other variants of a structured layer of a bolometric detector according to the invention. In FIG. 8A, the structured layer 830A forms a periodic resonant grating in a single direction. It is a network of the network type of features.
    This variant is suitable when the electromagnetic radiation to be detected is polarized, in particular in a rectilinear polarization. In FIG. 8B, the structured layer 830B forms a pseudoperiodic resonant network.
    A pseudo-periodic network is a periodic network, in which the elementary patterns have slight variations with respect to each other.
    These are variations of the shape of an elementary pattern, for example a variation of the total width of a pattern (pitch of the grating), a variation of a linear or volume filling factor (for example variation of the width of the pads), and / or a variation of the shape of a stud or a through-hole of a grid.
    These variations are limited. In particular, the recovery rate of each elementary pattern, relative to a mean shape of the elementary patterns, is between 90% and 99%, and even between 95% and 99%.
    In the example illustrated in FIG. 8B, pads are distributed substantially in a square grid, the spacing between two pads along the axis (Oy) varying slightly from one pad to the other. The network pitch according to (Oy) has variations of between 1% and 10%, relative to a mean network pitch according to (Oy). For reasons of legibility of the figure, the offsets are exaggerated in FIG. 8B. In FIG. 8B, the structured layer forms a pseudo-periodic network in two dimensions.
    As a variant, the structured layer may form a pseudo-periodic network in one dimension (of the type of line network with slight variations from one line to another).
    In a pseudo-periodic network, the absorption peak is a function of the average parameters of the elementary pattern, for example the average grating pitch, the average linear or volume filling factor, an average form of the pads, and so on.
    This absorption peak is also a function of the standard deviation on these average parameters, from one elementary pattern to the other. The higher the standard deviation, the higher the absorption peak has a large spectral width.
    For example, one can set the wavelength of interest using the average grating pitch, and the spectral width of the absorption peak by using the standard deviation on the network pitch, d one elementary pattern to another.
    Thus, the structured layer according to the invention can form a periodic or pseudo-periodic network in two dimensions (having a second order periodicity), or a periodic or pseudo-peridioque network in one dimension (having a one-order periodicity). ).
    FIG. 9 schematically illustrates two pixels of a fifth embodiment of a bolometric detector 900 according to the invention.
    Each pixel will only be described for its differences relative to the pixel of the fourth embodiment.
    The reference numbers of FIG. 9 correspond to those of FIG. 7, the number of the hundreds being replaced by a 9.
    The two pixels represented are two pixels of a bolometric matrix detector, consisting of a plurality of pixels.
    The pixels share the same substrate 921, the same reflector 920, and the same intermediate layer 940, each formed in one piece over the entire extent of the pixel array.
    Alternatively, each pixel comprises a separate reflector.
    Each pixel has its own absorption membrane 910i, respectively 9102, and its own structured layer 930i, respectively 9302.
    Their respective structured layers each form a resonant grating of linear load factor Li / P, respectively L2 / P.
    The two adjacent pixels are therefore each adapted to the detection of a different wavelength of interest λοι, respectively λο2.
    Each structured layer 930i, respectively 9302, is covered with a corresponding low index layer 950i, respectively 9502. The thickness h3i, respectively h32 of each low index layer is adapted so that in each pixel, the optical distance between the reflector and the absorption membrane is substantially equal to a multiple of half the wavelength of interest.
    In particular, h3i is adapted so that this optical distance in the left pixel is substantially equal to a multiple of λοι / 2, and h32 is adapted so that this optical distance in the right pixel is substantially equal to a multiple of λο2 / 2.
    The low index layer therefore allows that in a multi-spectral bolometric detector, all the absorption membranes are located in the same plane, all the reflectors are located in the same plane, and that in each pixel the optical distance between the reflector and the absorption membrane is adjusted to the wavelength of interest associated with this pixel.
    This embodiment is particularly suitable when the pixels of the same bolometric detector are associated with wavelengths that differ by more than 200 nm, and even more than 300 nm.
    The bolometric detector according to the invention is of particular interest for the detection of gas (infrared spectroscopy), by allowing each pixel of the detector to be sensitive only over a spectral range characteristic of a gaseous species. It is thus possible to produce gas sensors having an excellent signal-to-noise ratio.
    FIG. 10 illustrates a gas sensor 1000 comprising a cavity 1001 provided with openings 1002 to admit a gas.
    A black body infra-red source 1003 emits electromagnetic radiation 200 inside this cavity. The source is called black body type, because it emits infrared radiation at a wavelength function including its temperature. In particular, the source emits broadband radiation over a spectral band ranging from 3 pm to 5 pm. In a variant, it emits radiation over a spectral band ranging from 8 μm to 12 μm. A filter may be arranged at the output of the source, to select a narrower spectral band, for example with a spectral width of 1 μm.
    A bolometric detector 1100 according to the invention is disposed inside the cavity, facing the infra-red source. The spectral extent of the broadband radiation emitted inside the cavity corresponds to the spectral extent of the absorption trough of the bolometric detector.
    The electromagnetic radiation 200 emitted by the infra-red source passes through the cavity filled with a gas.
    The gas absorbs in a narrow spectral band of width at half height generally less than 300 nm. Said spectral band is characteristic of a gas. Thus, by identifying the spectral band or bands absorbed inside the cavity 1001, it is possible to identify the gas or gases present in the cavity.
    The bolometric detector comprises several pixels, each associated with an absorption peak centered on a wavelength of different interest. Each wavelength of interest corresponds to a central wavelength of a characteristic absorption of a gas.
    Thanks to the high spectral sensitivity of the bolometric detector according to the invention, a gas is very reliably identified, and its concentration within the cavity 1001 can be precisely determined by measuring a relative signal variation.
    Thanks to the narrow absorption peak located in a zone of quasi-zero absorption, a pixel of the bolometric detector absorbs only in the spectral absorption band of the gas, and does not absorb a continuous bottom due to all the lengths from the source and not absorbed by the gas. The relative signal variation as a function of a concentration of this gas will therefore be much higher than with bolometers according to the prior art. The invention is also of particular interest in that it allows simultaneous detection of multiple gases. For this purpose, a bolometric detector with several pixels (or groups of pixels), each responsive to one of the gases, is provided. It is thus easy to determine the different concentrations of the different gases. The bolometers of the prior art are incapable of going back to the concentration of each gas because they are sensitive to all gases at the same time, and different combinations of gas concentrations will give the same signal on the bolometer. Other advantageous uses can be implemented, for example imagers, in particular night vision imagers.
    权利要求:
    Claims (14)
    [1" id="c-fr-0001]
    A bolometric detector (100; 300; 600; 700; 900; 1100) having at least one pixel, each pixel comprising: an absorption membrane (110; 310; 610; 710; 910i; 9102) adapted to convert to heat incident electromagnetic radiation (200); and a reflector (120; 320; 620; 720; 920) arranged to reflect to the absorption membrane a portion of the incident electromagnetic radiation having passed therethrough; characterized in that: at least one pixel further comprises a non-metallic layer, said structured layer (130; 330; 630; 730; 930i; 9302), located between the absorption membrane and the reflector, exhibiting a series of jumps; index between a first optical index and a second optical index in a plane parallel to the absorption membrane, so as to form a resonant network at a wavelength of interest λο; the average pitch of the network (P) is smaller than said wavelength of interest; and the optical distance between the absorption membrane and the reflector is substantially equal to a multiple of λο / 2.
    [2" id="c-fr-0002]
    2. Bolometer detector (100; 300; 600; 700; 900; 1100) according to claim 1, characterized in that a difference between the first optical index and the second optical index is greater than 0.5.
    [3" id="c-fr-0003]
    3. bolometric detector (100; 300; 600; 700; 900; 1100) according to claim 1 or 2, characterized in that the average pitch of the grating (P) is between λο / 2 and λο, where λο is the length wave of interest.
    [4" id="c-fr-0004]
    4. Bolometer detector (100; 300; 600; 700; 900; 1100) according to any one of claims 1 to 3, characterized in that the resonant network is a periodic network.
    [5" id="c-fr-0005]
    Bolometer detector according to one of claims 1 to 3, characterized in that the resonant network (830B) is a pseudo-periodic network, having variations in the shape of the elementary pattern such as a recovery rate relative to an average shape of the elementary motifs is between 90% and 99%.
    [6" id="c-fr-0006]
    6. bolometric detector (100; 300; 600; 700; 900; 1100) according to any one of claims 1 to 5, characterized in that the resonant network has index jumps distributed along the two dimensions of a plane parallel to the absorption membrane.
    [7" id="c-fr-0007]
    7. bolometric detector according to any one of claims 1 to 5, characterized in that the resonant network (830A) has index jumps distributed in a single dimension of a plane parallel to the absorption membrane.
    [8" id="c-fr-0008]
    8. bolometric detector (100; 300; 600; 700; 900; 1100) according to any one of claims 1 to 7, characterized in that each index jump is constituted by an interface between a first material and a second material. , and in that one of said materials is a vacuum or a gas such as air.
    [9" id="c-fr-0009]
    9. A bolometric detector (100; 300; 600; 700; 900; 1100) according to any one of claims 1 to 8, characterized in that a difference (d2> between the structured layer and the absorption membrane is less than at λο / 2, where Ao is the wavelength of interest.
    [10" id="c-fr-0010]
    10. bolometric detector (700; 900) according to any one of claims 1 to 9, characterized in that the structured layer (730; 930i; 9302) is covered with a non-metallic layer called low-index layer (750; 950i). 9502), spaced apart from the absorption membrane.
    [11" id="c-fr-0011]
    11. Bolometer detector (100; 300; 600; 700; 900; 1100) according to any one of claims 1 to 10, characterized in that it has a plurality of pixels, and in that at least two pixels differ by their average shape of the elementary patterns so that they are adapted to the detection of wavelengths of different interest.
    [12" id="c-fr-0012]
    12. A bolometric detector (900) according to claim 11, characterized in that each pixel has a low index layer (950i; 9502), covering the structured layer associated with this pixel and spaced from the corresponding absorption membrane, the low layers. index (950i; 9502) each associated with a pixel having different thicknesses.
    [13" id="c-fr-0013]
    13. A bolometric detector (100; 300; 700; 900; 1100) according to any one of claims 1 to 12, characterized in that a non-metallic intermediate layer (140; 340; 740; 940) extends between the reflector and the structured membrane.
    [14" id="c-fr-0014]
    14. A gas sensor (1000) comprising an infrared source (1003), arranged to emit electromagnetic radiation (200) inside a cavity (1001), characterized in that the cavity contains a bolometric detector (1100) according to any one of claims 1 to 13.
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    优先权:
    申请号 | 申请日 | 专利标题
    FR1559630A|FR3042272B1|2015-10-09|2015-10-09|BOLOMETER WITH HIGH SPECTRAL SENSITIVITY.|FR1559630A| FR3042272B1|2015-10-09|2015-10-09|BOLOMETER WITH HIGH SPECTRAL SENSITIVITY.|
    US15/287,175| US9733180B2|2015-10-09|2016-10-06|Bolometer with high spectral sensitivity|
    EP16192592.0A| EP3153831A1|2015-10-09|2016-10-06|Bolometer with high spectral sensitivity|
    JP2016198805A| JP2017072597A|2015-10-09|2016-10-07|Bolometer having high spectral sensitivity|
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