专利摘要:
The present invention relates to a laser apparatus for annealing coatings deposited on substrates of large width formed of a plurality of juxtaposable laser modules without any particular limitation, in which the laser modules generate elementary laser lines which combine with each other in the direction the length to form a single laser line, each elementary line having a lengthwise overlap with one or two adjacent elementary laser lines; and at least two adjacent elementary laser lines have an offset with respect to each other in the width direction, said offset being less than half the sum of the widths of said at least two adjacent elementary laser lines; the overlap of said at least two adjacent elementary laser lines being such that, in the absence of offset, the linear power profile of the single laser line has a local maximum at the overlap area.
公开号:FR3040319A1
申请号:FR1557907
申请日:2015-08-25
公开日:2017-03-03
发明作者:Brice Dubost;Emmanuel Mimoun;Lorenzo Canova;Nicolas Desboeufs
申请人:Saint Gobain Glass France SAS;
IPC主号:
专利说明:

MODULAR LASER APPARATUS
The present invention relates to a laser apparatus for annealing coatings deposited on substrates of large width formed of a plurality of juxtaposable laser modules without particular limitation.
It is known to carry out local and rapid laser annealing (laser flash heating) of coatings deposited on flat substrates. For this, the substrate is scanned with the coating to be annealed under a laser line, or a laser line above the substrate carrying the coating.
Laser annealing is used to heat thin coatings at high temperatures, on the order of several hundred degrees, while preserving the underlying substrate. The scroll speeds are of course preferably the highest possible, preferably at least several meters per minute.
In order to be able to treat large substrates at high speed, such as flat jumbo-size glass sheets (6 mx 3.21 m) emerging from float processes, it is necessary to have laser lines themselves. very long (> 3m). However, the manufacture of monolithic optics for obtaining a single laser line is not conceivable for such lengths. Modular laser devices have therefore been envisaged, in which it is proposed to combine elementary laser lines of smaller dimensions (a few tens of centimeters) each generated by independent laser modules.
A first solution for combining the elementary laser lines consists in arranging them on distinct lines, for example staggered or in "bird's eye", without there being any overlap zone between the elementary laser lines, so as to treat the entire width of the substrate. Thus, each of the points on the width of the substrate passes at least once under an elementary laser line. This solution is relatively simple to implement in particular because it imposes little space constraints for the laser modules. However, this solution is a source of inhomogeneity. Indeed, certain points of the substrate undergo two treatments, possibly with different powers, passing successively under two elementary laser lines. This usually results in defects on the treated substrate.
Another solution is to exactly align the elementary laser lines with each other and partially overlap them in the length direction while choosing the linear power profiles of the elementary laser lines as they add up to form a homogeneous line. (ie a line width and a constant linear power profile along the entire length of the line). It is generally proposed for the elementary laser lines linear power profiles in the form of a "hat-slap" (in English top-hat) with a very extensive central plateau where the power is strong and constant and, on both sides. other of this plateau, slopes descending steeply, as for example in US 6717105. The choice of this type of profile minimizes the overlap zone between two adjacent elementary laser lines but requires a very precise positioning of the elementary laser lines . WO 2015/059388 proposes to reduce the extent of the high-power central plateau of the elementary laser lines. Thus, the slope of the two sides of the power profile of the elementary laser lines is lower. This makes it possible to reduce the impact of a positioning error of the elementary laser lines on the density profile of the laser line obtained by combining the elementary laser lines. However, it is very difficult in practice to obtain elementary laser lines having exactly the desired power profile. More particularly, it is difficult to obtain elementary laser lines having sufficiently similar power profiles to each other, especially at the slopes on the sides of the power profiles. In practice, the intensity gradient on the sides of the power profiles varies from one elementary laser line to another. These differences in power profiles between the elementary laser lines mean that the elementary laser lines are not perfectly complementary to each other. This generates overcurrents and / or power sub-intensities at the overlap areas between the elementary laser lines and causes an inhomogeneity of treatment of the parts of the substrate passing under these overlapping areas relative to the rest of the substrate. For some coatings, this inhomogeneity of treatment is sufficient to cause visible defects on the final product.
The present invention proposes a new way of combining the elementary laser lines which makes it possible to guarantee a better homogeneity of treatment in the overlapping zones of the elementary laser lines. More specifically, the present invention relates to a laser apparatus comprising: a plurality of laser modules each generating an elementary laser line of length L and width W focused at a work plane; and conveying means for receiving a substrate; wherein said laser modules are positioned so that the generated elementary laser lines are substantially parallel to each other and combine into a single laser line, each elementary line having a lengthwise overlap with an adjacent elementary laser line; and the conveying means allow the substrate to travel perpendicularly to the single laser line; characterized in that, for at least two adjacent elementary laser lines, the two adjacent elementary laser lines have an offset with respect to each other in the width direction, said offset being less than half the sum of the widths said two adjacent elementary laser lines; the overlap of said two adjacent elementary laser lines being such that, in the absence of offset, the linear power profile of the single laser line has a local maximum at the overlap area. FIG. 1 represents an example of elementary laser line (A) and its corresponding power profile (B). FIG. 2 represents examples of overlap zones between two elementary laser lines without offset (A) and with offset (B). FIG. 3 represents examples of profile of the merit factor at the overlap zone of two elementary laser lines without offset (A) and with offset (B).
Unlike the state of the art, it is not sought in the present invention to perfectly align the elementary laser lines together to match the power profiles of elementary laser lines, theoretically identical, to each other. The Applicant has indeed found that the homogeneity of the treatment can be improved by a shift of the adjacent elementary laser lines, thus locally creating an increase in the width of the single laser line at the overlap areas between these adjacent elementary laser lines. This approach goes against the prejudices of a person skilled in the art who, to improve the homogeneity of the treatment, seeks to make all the points of the substrate undergo the same treatment history, and in particular the same duration of treatment. On the contrary, the widening of the line on certain overlapping zones increases the processing time of the parts of the substrate passing under these zones. Surprisingly, the widening of the single laser line at the level of the recovery zones makes it possible, however, to improve the homogeneity of the treatment despite the increase in the duration of the treatment. It seems that the distribution over a longer period of over-currents, caused by the overlap of power profiles of two adjacent elementary laser lines that would not be perfectly complementary, is less detrimental to the homogeneity of the treatment.
More particularly, the increase of the width of the single laser line at the level of the overlapping zones makes it possible to reduce, at the level of the recovery zones, the variation of a merit factor F, defined in the present application as being the ratio of the linear power on the square root of the width of the line. The Applicant has indeed demonstrated that the homogeneity of the heat treatment by the single laser line can be correlated with the homogeneity of the merit factor F. The merit factor F at a point of a laser line is determined by the following formula:
where w and P are respectively the width of the laser line at this given point and the local linear power (cumulated over the entire width) of the laser line at this given point.
By the expression "at a given point" of a laser line in the sense of the present invention is meant "at a given position" along the laser line. In other words, a point of the laser line is likened to a position on the longitudinal axis x of the laser line (that is to say in the work plane and perpendicular to the direction of the scroll).
For the purposes of the present invention, the "local linear power" P at a given point of a laser line designates the power delivered by the module over the entire width of the laser line at this given point. The dimension, measured at this point given in the transverse direction y of the laser line (that is to say, and parallel to the direction of the scrolling), is referred to as "width at a given point" w of a laser line. a zone having a power at least equal to 1 / e times the maximum power of the laser line. If the longitudinal axis is named x, we can define a distribution of widths along this axis, named w (x). The laser apparatus preferably comprises at least 3 modules, in particular at least 5 modules, or even at least 10 modules, each laser module generating an elementary laser line focused at the working plane which corresponds to the plane of the coating to be annealed, c that is, generally at the upper or lower surface of the substrate. The laser modules are assembled and mounted on the laser apparatus so that the laser beams forming the laser lines intersect the work plane with a non-zero angle relative to the normal to the work plane, typically greater than 2 ° and less than 20 °, preferably less than 10 °.
As illustrated in FIG. 1A, each elementary laser line has a length L and a width W. The length, measured in the longitudinal direction x, of a zone having a less than 1 / e2 times the maximum power of the laser line. The "average width" W of a laser line, also called simply "width" of a laser line as opposed to the width at a point w of the laser line, is defined by the arithmetic mean of the widths at each of the points of the laser line. the laser line. In order to avoid any heterogeneity of treatment, the distribution of widths w (x) is narrow the whole length of a line. Thus, the variation of the width distribution w (x) along the laser line does not vary by more than 10%, preferably not more than 5%, more preferably not more than 3%, with respect to the average width of the laser line. The elementary laser lines generally have a length and a width substantially identical to each other. The elementary laser lines are typically 10 to 100 cm long, preferably 20 to 75 cm long, more preferably 30 to 60 cm long, and 10 to 100 μm wide, preferably 40 to 75 μm wide.
Taken independently, the elementary laser lines typically have a linear power profile having a central plate p and two lateral flanks / as schematically illustrated in FIG. For the purposes of the present invention, the term "linear power profile" of a laser line is the distribution over the entire length of the laser line of the local linear power P as a function of the position on the line. laser. The longitudinal axis being named x, the linear power profile is thus defined by P (x). The central plate has a substantially constant power, and each lateral flank corresponds to a power gradient. The central plate generally represents at least 50%, preferably 70 to 98%, more preferably 80 to 96%, of the length of the elementary laser line. The width of an elementary laser line is substantially constant along the central plate. By the expression "substantially constant" is meant that the quantity considered varies from not more than 10%, preferably not more than 5%, more preferably not more than 3%. The lateral flanks generally represent each independently less than 25%, preferably from 1 to 15%, more preferably from 2 to 10%, of the length of the elementary laser line. The lateral flanks preferably have substantially the same length.
The elementary laser lines are abutted to one another in the direction of their lengths so as to form a single continuous laser line. The single laser line typically has a length greater than 1.2 m, preferably greater than 2 m, more preferably greater than 3 m. By continuous laser line is meant that there is a path from one end to the other along the single laser line on which the power is never less than 90% of the maximum power of the laser line unique. For this purpose, two adjacent elementary laser lines have a covering zone. By "overlap area" is meant an area in which two adjacent elementary lines are superimposed. The term "covering" R is the dimension of the overlap area measured in projection on the longitudinal axis x. The offset is defined with respect to a reference position in which the elementary laser lines are exactly aligned. As illustrated in FIG. 2A, two adjacent elementary laser lines LAI and LA2 are considered to be exactly aligned when, at the level of the overlap zone between the two adjacent elementary laser lines, the centroids of the intensity distributions C1 and C2 of the two elementary laser lines projected on the transverse axis y have an identical coordinate. Thus, the "shift" D between two adjacent elementary laser lines is defined as the distance between the projections, on the transverse axis y, of the barycentres of the powers of the ends of the two adjacent elementary laser lines participating in the overlap zone between these two lines. A barycenter of intensity distributions is defined by the point having as coordinates the average of the coordinates, weighted by the value of the intensity distributions, of all the points of the zone considered. In practice, for two adjacent elementary laser lines shifted as illustrated in FIG. 2B, it is possible to define for each of the elementary lines LAI and LA2 an envelope line El, respectively E2, defined by the contour of the zone having a power at least equal to 1 / e2 times the maximum power of the laser line. The envelope lines then have two points of intersection I and F. The overlap R can be defined by the distance between the projections of the points I and F on the longitudinal axis x. The offset D can be defined by the difference between the half-sum of the average widths of the adjacent elementary laser lines and the distance between the projections of the points I and F on the transverse axis y-
The overlap between two adjacent elementary laser lines is generally at least equal to the shortest of the lateral flanks of said two adjacent elementary laser lines at the overlap zone. Thus, the recovery is generally less than 25%, preferably 1 to 15%, more preferably 2 to 10%, of the length of each of the elementary laser lines. In a preferred embodiment, the lateral flanks of the elementary laser lines have a length substantially equal to each other and the overlap is substantially equal to the length of the lateral flanks.
In the present invention, at least two adjacent elementary laser lines have a non-zero offset, preferably greater than 10%, more preferably greater than 25%, of the width of each of said adjacent elementary laser lines. Said at least two adjacent elementary laser lines also have an overlap such that, in the absence of offset, the linear power profile of the single laser line has a local maximum at the overlap area. In other words, said at least two adjacent elementary laser lines have linear power profiles whose side flanks are not exactly complementary. Said local maximum of the linear power profile of the single laser line preferably has a value greater than 20%, more preferably greater than 10%, relative to the average linear power of each of the adjacent elementary laser lines out of the overlapping areas. The offset and the overlap of said at least two adjacent elementary laser lines are preferably such that the merit factor F of the single laser line at the overlap area has a variation of less than 20%, preferably less than 15%, more preferably less than 10%, even more preferably less than 5% with respect to the average merit factor of each of said at least two adjacent elementary laser lines out of the overlapping areas. In the case of elementary laser lines having a substantially constant power and width at the center plate of the linear power profile, the average linear power and the average merit factor outside the overlap areas may be considered as the average linear power and the average merit factor on the central plateau of the linear power profile.
The conveying means are intended to receive a substrate and to allow the substrate to travel perpendicularly to the single laser line. The important thing is to allow the relative movement of the substrate relative to the single laser line, the device can be designed so that the substrate is fixed and the laser modules scroll above or below the substrate or vice versa . However, from the industrial point of view, especially for the treatment of large jumbo-type substrates, it is preferable that the laser modules are fixed and the substrate to be treated scrolls below or above the modules. The substrate may be set in motion by any mechanical conveying means, for example using strips, rollers, translational trays. The conveyor system controls and controls the speed of travel. The conveying means preferably comprises a rigid frame and a plurality of rollers. The pitch of the rollers is advantageously in a range from 50 to 300 mm. The rollers preferably comprise metal rings, typically made of steel, covered with plastic bandages. The rollers are preferably mounted on low-clearance bearings, typically three rolls per step. In order to ensure perfect flatness of the conveying plane, the positioning of each of the rollers is advantageously adjustable. The rollers are preferably driven by means of pinions or chains, preferably tangential chains, driven by at least one motor. If the substrate is of flexible polymeric organic material, the displacement can be achieved using a film feed system in the form of a succession of rollers. In this case, the flatness can be ensured by an adequate choice of the distance between the rollers, taking into account the thickness of the substrate (and therefore its flexibility) and the impact that heat treatment can have on the creation. of a possible arrow.
The present invention also relates to a method of adjusting a laser apparatus comprising: a plurality of laser modules each generating an elementary laser line of length L and width W focused at a work plane; and conveying means for receiving a substrate; wherein said laser modules are positioned so that the generated elementary laser lines are substantially parallel to each other and combine in the length direction into a single laser line; and the conveying means allow the substrate to travel perpendicularly to the single laser line; said method comprising: - measuring linear power profiles and widths of two adjacent individual elementary laser lines; determining the overlap-shift torque necessary so that the merit factor F of the single laser line at the overlap zone has a variation of less than 20%, preferably less than 15%, more preferably less than 10% relative to the average merit factor of each of said two adjacent elementary laser lines out of overlap zone; and positioning the laser modules corresponding to said two adjacent elementary laser lines so that said two adjacent elementary laser lines have the determined overlap-shift torque.
The linear power profiles of each of the elementary laser lines are measured separately from each other at the work plane. They can be measured by placing a power detector along the laser line, for example a calorimetric power meter, such as, in particular, the Cohérent Inc. power meter Beam Finder, or a laser beam analysis system. using a camera, such as the FM 100 system from Metrolux GmbH. A laser beam analysis system has the advantage of allowing a simultaneous measurement of the widths of the laser lines. From the measured profiles, it is possible to determine by simulation, for a given overlap and offset between two elementary laser lines, the profile of the merit factor F at the level of the overlap zone. Thus, by scanning the recovery-offset pairs with a suitable pitch, these can be chosen, for example using a suitable software, so that the merit factor F satisfies the conditions mentioned above. . Ideally, we will choose the recovery-lag pair for which the variation of the merit factor is minimal. However, a simple decrease in the variation of the merit factor so that this variation is less than 20% relative to the average merit factor of each of said two adjacent elementary laser lines outside the overlap zone, even if it It is not minimal, already makes it possible to improve the homogeneity of the treatment satisfactorily for most of the coatings to be treated.
In a preferred embodiment, in which the laser apparatus comprises n laser modules generating n elementary laser lines, where n is strictly greater than 2, it is also possible to further determine which combination of elementary laser lines with which overlap-shift pairs is likely to minimize the variation of the merit factor. In fact, since each of the elementary laser lines does not have exactly the same linear power profile, especially at the level of the lateral flanks, the profile of the single line also depends on the order in which the elementary laser lines are combined. For example, for three elementary lines A, B and C, the different combinations of juxtaposition of the elementary laser lines ABC, ACB, BAC, BCA, CAB and CBA do not necessarily give, even after optimization of the recovery-shift pairs, merit factor identical. Thus, the adjustment method according to the invention preferably comprises: measuring the linear power profiles of each of the n elementary laser lines taken individually; determination of the juxtaposition combination of the n elementary laser lines and, for each pair of adjacent laser lines, of the overlap-shift torque necessary for the merit factor F of the single laser line at the overlap areas to exhibit variation less than 20%, preferably less than 15%, more preferably less than 10% relative to the average merit factor of each of said elementary laser lines out of overlap zones; and positioning the laser modules corresponding to the elementary laser lines so that said elementary laser lines are in the determined juxtaposition combination and each pair of adjacent elementary laser lines have the determined overlap and offset.
It is understood that several juxtaposition combinations of the elementary laser lines, with the appropriate choice of overlap-shift pairs for each pair of adjacent elementary laser lines, may make it possible to satisfy the conditions mentioned above for the factor of merit F, or even minimize the variation of the merit factor. The laser apparatus of the present invention is suitable for the heat treatment of coatings deposited on the surface of a substrate. Another object of the present invention relates to the use of the laser apparatus as described above for the heat treatment of a coating deposited on a substrate.
The present invention also relates to a method of heat treatment of a coating deposited on a substrate using the laser apparatus as defined above comprising: - the supply of the substrate coated with the coating to be treated on the conveying means so that the coating is at the level of the worktop; the scrolling of the substrate perpendicularly to the single laser line; and recovering the substrate coated with the heat-treated coating.
Alternatively, the method of heat treatment of a coating deposited on a substrate comprises: - the supply of a laser apparatus as defined in the adjustment method above; the adjustment of the laser apparatus according to the adjustment method above; supplying the substrate coated with the coating to be treated on the conveying means so that the coating is at the level of the work plane; the scrolling of the substrate perpendicularly to the single laser line; the recovery of the substrate coated with the heat-treated coating.
The substrate may be an organic or inorganic substrate. The substrate is preferably glass, glass ceramic or polymeric organic material. It is preferably transparent, colorless (it is then a clear or extra-clear glass) or colored, for example blue, gray, green or bronze. The glass is preferably of the silico-soda-lime type, but it may also be of borosilicate or alumino-borosilicate type glass. Preferred polymeric organic materials are polycarbonate, polymethyl methacrylate, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), or fluorinated polymers such as ethylene tetrafluoroethylene (ETFE). The substrate advantageously has at least one dimension greater than or equal to 1 m, or even 2 m and even 3 m. The thickness of the substrate generally varies between 0.5 and 19 mm, preferably between 0.7 and 9 mm, especially between 2 and 8 mm, or even between 4 and 6 mm. The substrate may be flat or curved, or even flexible.
The coating preferably comprises a layer of which at least one property is improved when the crystallization rate of said layer increases. The layer is preferably based on a metal, oxide, nitride, or mixture of oxides chosen from silver, titanium, molybdenum, niobium, titanium oxide, mixed oxides of indium and of zinc or tin, zinc oxide doped with aluminum or gallium, nitrides of titanium, aluminum or zirconium, titanium oxide doped with niobium, cadmium stannate and / or tin, tin oxide doped with fluorine and / or antimony. The present invention is particularly suitable for coatings comprising a layer based on silver or titanium, these being more sensitive to the inhomogeneities of the heat treatment. The term "based on" with reference to the composition of a layer means that said layer comprises more than 80%, preferably more than 90%, more preferably more than 95%, by weight of the material concerned. The layer may consist essentially of said material, that is to say comprising more than 99% by weight of said material.
The substrate is positioned on the conveying means so that the coating is at the level of the work plane. In other words, the substrate is positioned so that the elementary laser lines are focused at the coating to be treated. The speed of travel of the substrate relative to the laser line depends of course on the nature of the coating to be treated, its thickness but also the power of the laser lines. As an indication, the speed of travel is advantageously at least 4 m / min, especially 5 m / min and even 6 m / min or 7 m / min, or 8 m / min and even 9 m / min or 10 m / min. According to some embodiments, the movement speed of the substrate is at least 12 m / min or 15 m / min, especially 20 m / min and even 25 or 30 m / min. In order to ensure a treatment which is as homogeneous as possible, the speed of displacement of the substrate varies during the treatment by at most 10% in relative, in particular 2% and even 1% compared to its nominal value. The invention is illustrated with the following non-limiting examples.
EXAMPLE
A laser unit is equipped with two laser modules each generating an elementary laser line length 40 cm and width 65 μm and whose linear power profiles have a central plate and two lateral flanks, with a linear power of 250 W / cm at plateau level.
Two samples SI and S2 of a soda-lime float glass substrate, sold under the name Planiclear® by the applicant, of size 80 cm * 80 cm and coated with a PLANITHERM® coating comprising a layer of silver, were subjected to heat treatment by passing, at a speed of 3 m / s, under a single laser line formed by the two elementary laser lines.
For the treatment of the SI sample, the two elementary laser lines are combined with a 20 mm overlap and a zero offset. The single laser line thus formed has a constant width. The profile of the merit factor F = -j = of the single laser line at the overlap area of the two elementary laser lines is shown in FIG. 3A. For ease of reading, the merit factor was normalized to the average out-of-coverage merit factor. It can be noted that the merit factor has a maximum greater than 20% higher than the average merit factor outside the recovery zone.
For the treatment of the sample S2, the two elementary laser lines are combined with a recovery identical to the treatment of S1 (20 mm) and a shift of 60 μm. The single laser line thus has a greater width (100 μm) at the level of the overlap zone compared to the non-overlapping zones. The profile of the p-factor F = - ^ = of the single laser line at the overlap area of the two elementary laser lines is shown in FIG. 3B. It can be noted that the merit factor does not vary by more than 15% compared to the average merit factor outside the recovery zone.
After treatment, the samples are observed with the naked eye under an artificial sky. The sample SI has a mark visible to the naked eye at the region of the substrate corresponding to the passage under the overlap zone of the elementary laser lines. On the contrary, the sample S2 appears homogeneous. The offset of the two elementary laser lines thus makes it possible to satisfactorily reduce the defects caused by an inhomogeneity of treatment at the level of the overlap of two elementary laser lines.
权利要求:
Claims (9)
[1" id="c-fr-0001]
A laser apparatus comprising: a plurality of laser modules each generating an elementary laser line of length (L) and width (W) focused at a work plane; and conveying means for receiving a substrate; wherein said laser modules are positioned so that the generated elementary laser lines are substantially parallel to each other and combine into a single laser line, each elementary line having a lengthwise recovery (R) with a laser line adjacent elementary; and the conveying means allow the substrate to travel perpendicularly to the single laser line; characterized in that, for at least two adjacent elementary laser lines (LAI, LA2), the elementary laser lines have an offset (D) relative to each other in the width direction, said offset being less than half the sum of the widths of said two adjacent elementary laser lines; the covering (R) of said at least two adjacent elementary laser lines (LAI, LA2) being such that, in the absence of an offset, the linear power profile of the single laser line has a local maximum at the overlap area .
[2" id="c-fr-0002]
2. Apparatus according to claim 1, characterized in that said local maximum of the linear power profile of the single laser line has a value greater than 20%, preferably greater than 10%, relative to the average linear power of each of said at least two adjacent elementary laser lines (LAI, LA2) out of coverage area.
[3" id="c-fr-0003]
3. Apparatus according to claim 1 or 2, characterized in that said shift (D) is chosen so that the merit factor F of the single laser line at the overlap has a variation of less than 20%, preferably less than 15%, more preferably less than 10%, even more preferably less than 5%, relative to the average merit factor of each of said at least two adjacent elementary laser lines (LAI, LA2) outside the recovery zone; the merit factor F at a given point of a laser line being defined by:

where w and P are respectively the width and the local linear power of the laser line at this given point.
[4" id="c-fr-0004]
4. Apparatus according to any one of claims 1 to 3, characterized in that said offset (D) is greater than 10% of the width of each of said at least two adjacent elementary laser lines (LAI, LA2).
[5" id="c-fr-0005]
5. Apparatus according to any one of claims 1 to 4, characterized in that the linear power profiles of the elementary laser lines have a central plate (p) and two lateral flanks (J), the central plate (p) having a substantially constant linear power, and each side flank (f) having a linear power gradient.
[6" id="c-fr-0006]
6. Apparatus according to claim 5, characterized in that the overlap (R) between two adjacent elementary laser lines (LAI, LA2) is at least equal to the length of the shortest of the lateral flanks (f) of said two adjacent elementary laser lines. (LAI, LA2) at the level of the recovery zone.
[7" id="c-fr-0007]
7. A method of adjusting a laser apparatus comprising a plurality of laser modules each generating an elementary laser line of length (Z) and width (W) focused at a work plane; and conveying means for receiving a substrate; wherein said laser modules are positioned so that the generated elementary laser lines are substantially parallel to each other and combine in the length direction into a single laser line; and the conveying means allow the substrate to travel perpendicularly to the single laser line; said method comprising: - measuring linear power profiles and widths of two adjacent elementary laser lines (LAI, LA2) taken individually; determining the overlap-shift torque (R, D) necessary so that the merit factor F of the single laser line at the overlap area has a variation of less than 20%, preferably less than 15%, more preferably less than 10%, even more preferably less than 5%, with respect to the average merit factor of each of said two adjacent elementary laser lines (LAI, LA2) outside the recovery zone; the merit factor F at a given point of a laser line being defined by:

where w and P are respectively the width and the local linear power of the laser line at that given point; and positioning the laser modules corresponding to said two adjacent elementary laser lines (LAI, LA2) so that said two adjacent elementary laser lines have the determined overlap-shift torque.
[8" id="c-fr-0008]
8. Use of the laser apparatus as defined in any one of claims 1 to 6 for the heat treatment of a coating deposited on a substrate.
[9" id="c-fr-0009]
9. A method of heat treating a coating deposited on a substrate comprising: - providing a laser apparatus as defined in claim 7; the adjustment of the laser apparatus according to the adjustment method of claim 7; supplying the substrate coated with the coating to be treated on the conveying means so that the coating is at the level of the work plane; the scrolling of the substrate perpendicularly to the single laser line; the recovery of the substrate coated with the heat-treated coating.
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ZA201801194B|2019-01-30|
BR112018003218A2|2018-09-25|
MX2018002260A|2018-03-23|
JP2018529523A|2018-10-11|
RU2018110269A|2019-09-26|
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FR3040319B1|2017-11-24|
RU2018110269A3|2020-02-07|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题
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US20040136416A1|2001-12-21|2004-07-15|Koichiro Tanaka|Method and apparatus for laser irradiation and manufacturing method of semiconductor device|
WO2014111664A1|2013-01-18|2014-07-24|Saint-Gobain Glass France|Process for obtaining a substrate equipped with a coating|
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FR3005878B1|2013-05-24|2016-05-27|Saint-Gobain Glass France|PROCESS FOR OBTAINING A SUBSTRATE WITH A COATING|
FR3012264B1|2013-10-21|2017-04-21|Saint-Gobain Glass France|MODULAR LASER APPARATUS|KR102110016B1|2017-09-26|2020-05-12|주식회사 포스코아이씨티|Laser System for Pickling Process and Method for Performing Pickling Process Using That Laser System|
FR3072895B1|2017-10-31|2019-10-18|Saint-Gobain Glass France|METHOD FOR ALIGNING A PLURALITY OF LASER LINES|
US10822270B2|2018-08-01|2020-11-03|Guardian Glass, LLC|Coated article including ultra-fast laser treated silver-inclusive layer in low-emissivity thin film coating, and/or method of making the same|
法律状态:
2016-08-25| PLFP| Fee payment|Year of fee payment: 2 |
2017-03-03| PLSC| Publication of the preliminary search report|Effective date: 20170303 |
2017-08-11| PLFP| Fee payment|Year of fee payment: 3 |
2018-08-03| PLFP| Fee payment|Year of fee payment: 4 |
2019-08-21| PLFP| Fee payment|Year of fee payment: 5 |
2021-05-07| ST| Notification of lapse|Effective date: 20210405 |
优先权:
申请号 | 申请日 | 专利标题
FR1557907A|FR3040319B1|2015-08-25|2015-08-25|MODULAR LASER APPARATUS|FR1557907A| FR3040319B1|2015-08-25|2015-08-25|MODULAR LASER APPARATUS|
KR1020187008014A| KR20180043323A|2015-08-25|2016-08-23|Wherein each of the lines comprises a plurality of laser modules each generating one line, the lines overlapping with offsets in the width direction,|
US15/754,869| US20180264593A1|2015-08-25|2016-08-23|Modular laser device|
EP16763921.0A| EP3341154A1|2015-08-25|2016-08-23|Laser apparatus comprising a plurality of laser modules, each generating one line, the lines overlapping with an offset in the widthwise direction|
BR112018003218-2A| BR112018003218A2|2015-08-25|2016-08-23|A laser apparatus comprising a plurality of laser modules that each generate a line, the lines covering with a widthwise offset|
MX2018002260A| MX2018002260A|2015-08-25|2016-08-23|Laser apparatus comprising a plurality of laser modules, each generating one line, the lines overlapping with an offset in the widthwise direction.|
RU2018110269A| RU2018110269A3|2015-08-25|2016-08-23|
PCT/FR2016/052104| WO2017032947A1|2015-08-25|2016-08-23|Laser apparatus comprising a plurality of laser modules, each generating one line, the lines overlapping with an offset in the widthwise direction|
CA2995655A| CA2995655A1|2015-08-25|2016-08-23|Laser apparatus comprising a plurality of laser modules, each generating one line, the lines overlapping with an offset in the widthwise direction|
AU2016311313A| AU2016311313A1|2015-08-25|2016-08-23|Laser apparatus comprising a plurality of laser modules, each generating one line, the lines overlapping with an offset in the widthwise direction|
JP2018510353A| JP2018529523A|2015-08-25|2016-08-23|Modular laser equipment|
CN201680062429.0A| CN108136542A|2015-08-25|2016-08-23|Including wherein each giving birth to the laser aid of multiple laser modules being overlapped in the case that into a line, each line deviates in the direction of the width|
ZA2018/01194A| ZA201801194B|2015-08-25|2018-02-21|Laser apparatus comprising a plurality of laser modules, each generating one line, the lines overlapping with an offset in the widthwise direction|
CONC2018/0001868A| CO2018001868A2|2015-08-25|2018-02-22|Laser apparatus comprising several laser modules that each generate a line, lines that overlap with a width shift|
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