• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to medical imaging and more particularly to intra-oral dental radiology. The sensor according to the invention comprises a series (SPHx) of arrival detection photodiodes of an X-ray flash. The series of photodiodes occupies the location of a central column of the pixel array. The signal of the missing pixel in each line can be reconstructed by interpolation of the signals provided by the pixels adjacent to the line. The photodiodes of detection are identical to the photodiodes of the CMOS active pixels. They are all electrically connected on one side to a reference potential and on the other side to a detection conductor (CD) extending along the series of photodiodes. This detection conductor is connected to a detection circuit (DX) providing a picture triggering signal when the detected current or the variation of this current exceeds a threshold showing that an X-ray flash has started.
    公开号:FR3032105A1
    申请号:FR1550738
    申请日:2015-01-30
    公开日:2016-08-05
    发明作者:Caroline Papaix；Florian Julien；Nathalie Pascal；Stephane Crespin
    申请人:e2v Semiconductors SAS；
    IPC主号:
    专利说明:

    [0001] The invention relates to medical imaging and more particularly to intra-oral dental radiology. Recent dental radiology systems utilize silicon-based MOS technology image sensors coated with a layer of scintillator material that converts X-rays into visible light in a wavelength spectrum to which silicon is sensitive. The image sensor integrates electrical charges generated by the light which itself is generated by the scintillator. The sensor comprises a matrix of active pixels, each pixel comprising a photosensitive element (most often a photodiode) and some transistors for collecting the charges generated by the light in the pixel to convert them into voltage. A sequencing circuit ensures the operation of the whole of the sensor to ensure the reinitialization of the pixels, then the integration of charges from an integration start time and for a certain duration, and finally the reading of the voltages representing the electrical charges accumulated in the pixels. The reading of these voltages is done by a reading circuit placed at the foot of each of the columns of pixels of the matrix. The reading of a line of pixels is done by simultaneously addressing all the pixels of this line using a line decoder; for this, the pixels each comprise a line selection transistor which is made conductive under the control of the line decoder, and this simultaneously for all the pixels of the same line. The line selection transistor then connects the pixel to a respective column conductor, common to all the pixels of the same column of pixels, to transfer on this column conductor a useful signal representing the charges generated in the pixel at the intersection of the selected line and the column in question. The transfer is done simultaneously for all the pixels of the line, each to its respective column driver. The X-ray sensor is placed behind the human body part to be observed: for an intraoral oral radiological sensor it is therefore placed in the patient's mouth, close to the dental region to be observed. An X-ray source is placed outside the patient's mouth, facing the sensor and exposing it with a short X-ray flash, through the biological tissue or other material to be observed. Among the important constraints of the use of such a system, it is particularly necessary to consider the risk of exposure of the patient and his entourage to X-rays. It is necessary to minimize the dose of X-rays sent, while making kind of getting a good picture of the region being observed. This is why the X-ray source emits a brief flash corresponding to a limited dose of radiation. This requires that the sensor be ready to record an image from the start of the flash, otherwise part of the dose sent would be useless. But it is also necessary to avoid that the image taking starts before the beginning of the illumination because even in the absence of X-rays the pixels accumulate electric charges, because of the existence of currents of darkness in the photodiodes, that is to say, currents generated even in the absence of light, therefore in the absence of X-rays. These charges must be evacuated before the beginning of the image. So we try to synchronize the start of the integration of payloads in the photodiodes with the departure of the X-ray flash. In the same way, we try to synchronize the stop of the integration of useful charges with the stop X-ray flash. In the prior art, several solutions have been used to effect this synchronization. One solution is to use a wired connection between the sensor and the X-ray source to trigger the integration of an electronic image at the same time as the X-ray source is started. However, it is preferable to avoid a connection. wired in the congested medical environment where the radiological image is taken. Furthermore the wired connection requires a common protocol between the sensor and the source, which is hardly compatible with the fact that the sensor should be able to be exposed by any source, or vice versa that the source should be able to illuminate any which sensor. It has also been proposed to place an x-ray detector next to the image sensor, in the mouth or outside the mouth; this requires an additional component and a connection between this component and the sensor. In a particular situation relating exclusively to a CCD technology sensor and not a MOS technology sensor, the sensor having a CCD central load transfer register in which the charges produced by the two halves of a front sensor are discharged. to be shifted step-by-step to a charge-voltage conversion circuit external to the array, it has already been proposed (US Patent 5,510,623) not to mask the central register against light, whereas it should be 'to be. The register is based on silicon and is therefore photosensitive by nature. It accumulates charges if it receives light and discharges its charges step-by-step into the charge-voltage conversion circuit. The resulting voltage level is continuously monitored; it represents a dark current noise before the start of an X-ray flash; if this level increases significantly, it means that a flash X has started and can trigger a complete image. This solution is not transferable to CMOS sensors that do not have a read charge transfer register; in addition, it disrupts the operation of the sensor by making the central photosensitive register while it reads the charges generated in the matrix, which deteriorates the image. In yet another solution, in CCD technology, three x-ray detecting diodes 20 are placed behind the pixel array. The resulting technology requires more manufacturing steps. In another solution, pixels distributed in the array are used as reference pixels and are monitored to trigger image capture if the level of a number of these reference pixels exceeds a threshold. This requires specific addressing means to read the reference pixels. This is also the case if reference areas of several pixels are used to make this detection. In another solution, a detection cell larger than one pixel and capable of surrounding the entire array is provided to detect the arrival of a flash X. This solution is cumbersome and the detection may be done in a place where few X-rays arrive because of the obstacles they have to cross. In a particular solution, the overall image read by the pixels is compared to an image taken in the dark before exposure to X-rays. When the read image suddenly becomes significantly different from the image taken in the dark, concludes that the flash has started. This requires reading the entire matrix to have this information abrupt change of brightness level of the complete image. US Patent Publication 2007/0176109 recalls these 5 different solutions, which are derived from different patent publications, and proposes an alternative solution with faster-response X-ray arrival detection pixels than ordinary pixels. the matrix. These pixels are located at the periphery of the matrix and are addressable by the same addressing means as the pixels of the matrix. They are preferably larger, and therefore more bulky, than the pixels of the matrix. In publication W02011 / 008421, the pixel array is read with subsampling, i.e. all pixels are not read; only peripherally located pixel lines are actually read to detect the arrival of X-rays. This complicates the internal organization of the sensor and its sequencing circuits. In patent EP0757474, it is specified that the detection threshold is scalable and depends on the previous image, to take into account that the dark current of the pixels that detect the arrival of the flash X depends on the ambient temperature conditions, which can vary a lot. To avoid the disadvantages of the devices of the prior art and at least result in a better compromise between the constraints imposed by each of these devices, the invention proposes to modify the detection means present on the sensor. An intra-oral X-ray image sensor is proposed in the following manner: it comprises a matrix of rows and columns of photosensitive pixels each comprising a photodiode and a transistor circuit for collecting the charges generated by the light in the pixel and converting them into voltage, with for each column of pixels a column driver common to all the pixels of the column, the column conductor being connected to a respective reading circuit for the column, and with a circuit of Addressing lines for addressing the pixels of a selected line and reporting useful signals from the pixels of the selected line to the column conductors and showing the illumination of these pixels.
    [0002] The sensor according to the invention is characterized in that it comprises, in the middle of the matrix and in the place of a central column or a central line of pixels, a series of photodiodes all electrically connected in parallel with a side to a reference potential and on the other side to the same detection conductor extending along the series of photodiodes, this detection conductor being connected to a detection circuit providing a trigger signal for imaging when the detected current or the variation of this current exceeds a threshold showing that an X-ray flash has started.
    [0003] If the sensor has a generally rectangular shape (possibly with cut corners) having a length and a width where the length is greater than the width, it is expected that the series of photodiodes is put in the place of a column or a line oriented in the direction of the length. In most cases, the columns (in the direction of the collection of signals) are oriented in the direction of the length, but it is not obligatory; the series of photodiodes used to detect an X-ray flash and the detection conductor then extend in the direction of the column conductors which collect the useful signals. The photodiodes are preferably distributed at the same pitch as the pixels in the columns or rows of pixels that surround it. These photodiodes are preferably technologically identical to the photodiodes of the pixels and they preferably have the same dimensions. In particular embodiments, it is expected that there will be one or more other series of photodiodes, either in column or in line, or both, each occupying all or part of the column or the line of pixels that they replace. Other characteristics and advantages of the invention will become apparent on reading the following detailed description which is made with reference to the appended drawings in which: FIG. 1 represents a general view of a dental radiological sensor of the prior art; FIG. 2 represents the general organization of the matrix of pixels in an embodiment of the prior art; FIG. 3 represents the general organization of the matrix of pixels in a dental radiological sensor according to the invention; FIG. 4 represents an electrical diagram corresponding to the architecture of the sensor according to the invention; FIG. 5 represents an example of organization of the matrix with several series of column detection photodiodes; FIG. 6 represents an example of organization with a column and a line of detection photodiodes; FIG. 7 represents an example of organization with a series of central column photodiodes and sets of photodiodes on three different lines, each occupying only a portion of a line. FIG. 1 shows at scale 1 an intra-oral dental radiological sensor 10 comprising a visible image sensor covered with a scintillator emitting visible light under the effect of X-rays, all enclosed in a case whose dimensions (a few centimeters on the side, a few millimeters thick) allow the introduction into the mouth of a patient. The sensor has an output cable 20 but wireless communication would also be possible between the sensor and a computer for collecting the electronic image. The visible image sensor is made of monocrystalline silicon, which is sensitive to the visible light emitted by the scintillator. It consists of a matrix of photosensitive pixels and control and readout circuits capable of triggering the acquisition of an electronic image and of extracting from each pixel a useful signal representing the illumination of this pixel. For reasons of patient comfort, the sensor housing may have a rectangular shape with cut corners as shown in FIG. 1, and the integrated circuit chip on which the 30 pixel matrix and the control circuits are formed. and reading preferably has itself a rectangular shape with cut corners. Such an integrated circuit chip is shown in FIG. 2 and is designated by the reference CPT. The matrix of photosensitive pixels is designated by MPIX; it is composed of a regular arrangement with constant columns of pixels and lines of 35 pixels. The reference CPIX denotes a pixel column taken as an example and hatched; similarly, the reference LPIX designates a line of pixels, taken by way of example and also hatched. The sequencing circuits, which comprise control and read circuits, are symbolized here in a very simplified way by the representation of: a line decoder LDEC, on an elongated lateral edge of the chip or even on both edges, which serves to successively address the different lines of pixels by means of line conductors which each connect all the pixels of the same line, and of a reading circuit RD which serves to extract the useful signal from the pixels of a line addressed; this signal is collected by column conductors which connect all the pixels of the same column of pixels and it is directed by these conductors to the read circuit RD placed at the foot of the matrix. PLT output pads of the integrated circuit chip provide analog or digital electronic signals to the outside of the chip representing the electronic image resulting from the X-ray exposure. In the following, given Since the designations of "lines" and "columns" are appellations which may be arbitrary, it will be understood that the word "line" applies to lines of pixels extending in the direction of the addressed line conductors. by the line decoder, and that the word "column" applies to columns of pixels extending in the direction of the column conductors which collect the useful signals of the pixels. In other words, we address the pixels line by line and collect the useful signal at the foot of the different columns. When the sensor has a rectangular shape (possibly with cut corners) rather than square, which is often the case), the columns are generally oriented in the direction of the length while the lines are oriented in the direction of the width, but it is not obligatory. Figure 3 shows the organization of a sensor according to the invention. In the sense of the length of the sensor, and in the middle of the MPIX matrix, a column of pixels has been replaced by a series SPHx of detection photodiodes, all connected to the same detection conductor CD which extends along the replaced column and which is connected to a detection circuit DX located at the foot of the matrix. FIG. 3 shows an enlarged local view explaining this better in a symbolic form: the matrix is composed of pixels distributed regularly with a certain pitch along the lines and each represented by a hatched square, each pixel comprising a photodiode and some transistors; a central column of the matrix is replaced by simple photodiodes, each represented by a circle, and these photodiodes are all directly connected to the common detection conductor CD, itself connected to the detection circuit DX. The pitch of the matrix is retained, in that the series of photodiodes occupies a maximum width equal to the pitch of the pixels. Preferably, the detection photodiodes of this series are distributed in the direction of the columns with the same column step as the pixels. The steps in line and in column are in principle identical. Also preferably, but not necessarily, the series of photodiodes extends over all or almost all of the height of the pixel array. Finally, preferably, the photodiodes are identical in all points (technology and dimensions) to the photodiodes that are present in the active pixels. FIG. 4 represents the electrical diagram corresponding to this organization, in an example in which each pixel comprises a photodiode PH and three MOS transistors which are a transistor Trs of periodic reset of the photodiode at the beginning of integration, a reading transistor TL mounted voltage follower for copying on its source the potential present on its gate, and a line selection transistor TS controlled by a line driver (not shown) connected to all TS transistors of a line controlled by the line decoder. The selection transistor connects, when made conductive, the read transistor to a DC column conductor. The sequencing circuits for acquiring an electronic image at the time of an X-ray flash (including the line decoder) are not shown in FIG. 4; they control the reset transistors and the line select transistors. The pixel could comprise a fourth transistor or transfer transistor when the pixel is formed with an intermediate storage node isolated from the photodiode by this transistor. The reset transistor then serves to reset the storage node. Finally, a fifth transistor may be provided to separately reset the photodiode and the intermediate storage node.
    [0004] The detection photodiodes of the SPHx series are each housed in the space reserved for a pixel, but this space does not include transistors (or, if it has them for reasons of simplification of the patterning patterns of the matrix, these transistors are not controlled like those of the pixels of the matrix and in particular they are not connected to the line decoder). These photodiodes PHx are all connected to the ground, that is to say to a reference potential to which are connected all the photodiodes PH of the pixels, and they are all directly connected (that is to say without interposition of a controllable transistor) to the column conductor CD. The line decoder is therefore not used for addressing the PHx photodiodes since they are systematically connected to the conductor CD and continuously supply the latter with the current they generate under the effect of light in the presence of an X-ray flash or the inevitable dark current that they generate in the absence of X-rays.
    [0005] The detection circuit DX has an input connected to the detection conductor CD. This circuit can have a very simple threshold comparator function and it provides an output signal to the general sequencer of the pixel matrix to allow the triggering of a full image capture when the current received by the detector exceeds a threshold determined. The current threshold can be a fixed threshold or a threshold adapted automatically according to the conditions of the environment (in particular according to the temperature conditions). In the case of a fixed threshold, the threshold is chosen with a value sufficient not to cause tripping under the effect of the dark current of the series of photodiodes when the latter increases as a result of an increase in temperature. In the case of an automatically adapted threshold, several solutions can be provided. For example, it can be provided that a variable threshold is generated by a temperature sensitive circuit, the threshold increasing with temperature. Alternatively, the threshold may be set to a certain value above an average of the dark current received on the conductor prior to X-ray exposure; thus, only a sudden jump in current, due to an X-ray flash, will cause the threshold to be exceeded and will trigger image capture. Alternatively, it can be provided that the threshold is defined as a differential between two successive instants, the threshold being a slope threshold of growth of the current received. In practice, the current is converted into voltage by a simple current-voltage conversion circuit such as a capacitive transimpedance amplifier (CTIA), and it is this voltage that is observed, in absolute value. or in variation, to produce the electronic imaging authorization signal A simple threshold voltage comparator will be used in the simplest case.
    [0006] The series of detection photodiodes PHx placed in the middle of the matrix and in the direction of the longer length of the rectangular sensor has the very important advantage of generally receiving a larger dose of X-rays (i.e. of light generated by the X-rays but we will speak more simply and for convenience of dose of X-rays) than photodiodes which would be placed on the side of the matrix of pixels. Indeed, when the sensor is in the mouth, it is placed so that its median line in the direction of the length is very little masked by the teeth or the jaw of the patient. Conversely, if a series of photodiodes were placed on the side of the matrix, it would often be masked by the jaw or teeth and receive much less x-rays. However, it is important that the integration is triggered from the beginning of the reception. X-ray flash and it is therefore important that the photodiode array is the least masked possible to react faster. The invention makes it possible to optimize the probability of a rapid detection of the appearance of the X-ray flash.
    [0007] For example, when the desired image is an image taken with the mouth almost closed, while the patient bites a sensor support, the sensor is placed on the support so that the median line in the direction of the length is arranged along the support. Since the support is X-ray transparent, it passes a dose of X-rays directly onto the series of photodiodes aligned along the median line of the sensor. Therefore, even in this particular case of the closed mouth, the series of photodiodes is particularly well exposed to X-rays. Since the series of photodiodes occupy only the width of a column of pixels, it does not interfere very little the final electronic image. Typically, the pixels may have a size of 20 micrometers by 20 micrometers, while the details useful to the practitioner for his diagnosis rarely have a dimension less than 100 micrometers per 100 micrometers. The luminance value of the missing pixel in each line 10 is reconstructed by interpolation between the two neighboring pixels of the same line and this is very easy since all the missing pixels are located at the same median position in the different lines. The large number (several hundred) of PHx detection photodiodes present in the series makes it possible to obtain a sufficient detection current without it being necessary to provide that the photodiodes of detection have a surface greater than one pixel. The detection circuit DX will in principle be placed at the bottom of the matrix of pixels, with the read circuits RD of the matrix. It has been shown in FIG. 3 as being located below the RD readout circuits but it is not mandatory. Its location depends in particular on its size, which is greater or smaller depending on the embodiment envisaged, and according to the desired functionalities (detection of occurrence of flash X, detection of dose received for stopping the shooting of image, triggering d 'flash stop).
    [0008] It is very easy to manufacture the series of photodiodes since the photodiodes are technologically identical to the photodiodes of the useful pixels of the matrix.
    [0009] The series of detection photodiodes and the detection conductor CD can also be used to determine the end of the imaging. Indeed, it is possible to integrate a signal representing the current received on the conductor CD; the integral of the current then represents an X-ray dose received by the series of photodiodes. This dose is representative of the dose received by the patient. An integration termination control circuit can therefore be connected to the CD conductor as the DX circuit to perform received dose sensing and to control the sequencing circuitry to complete the integration of electrical charges into the pixels. Finally, the series of photodiodes and the sense conductor can be used to stop the X-ray flash when the received dose has reached a predetermined value. An X flash stop control circuit must then be connected to the detection conductor CD, and this circuit transmits a stop signal to the X-ray source (for example by wire) when the received dose is sufficient. The flash stop control circuit X may be the same as the integration stop control circuit. In the case where the lines of pixels decoded by the line decoder are oriented in the direction of the greatest length of the sensor, the series of photodiodes placed in the middle of the matrix in the direction of the greatest length would replace a line of pixels by occupying the width of this line. To ensure effective detection even in cases where the sensor would be placed in the mouth in such a way that the middle line of the sensor would be partially masked by the jaw or dentition, one or two other secondary series of photodiodes aligned in the direction of the greatest length of the sensor parallel to the first series and each replacing a respective column (or row) of pixels. These other series of photodiodes are each connected to a conductor 25 extending parallel to the series and connected to the detection conductor CD. The currents of these other series add to the current generated in the first series of photodiodes. FIG. 5 shows an example with two other series of photodiodes SPHx1 and SPHx2 replacing two other columns of pixels, respectively on either side of the central column SPHx. The image information is also reconstructed by interpolation of the signals provided by two pixels located on a line on either side of a detection photodiode. It is also possible, for the same purpose, to add a series of photodiodes aligned in a direction perpendicular to the greatest length of the sensor. The common conductor which connects the photodiodes of this additional series is connected to the conductor CD of the first series SPHx so that the currents of the photodiodes of the two series are added. Figure 6 shows an example with a main series SPHx and a secondary series SPHy, perpendicular. In this example the secondary series is placed on a median line of the matrix, but it could be placed on either side of this line; one can also have two series or three secondary series of photodiodes aligned in this direction. Again, for each secondary series, the luminance received by a missing pixel is interpolated by interpolation, but this time by interpolating the signals of two pixels placed in columns on either side of a given photodiode. This solution can be combined with that of FIG. 5 in which there are several series in columns in the direction of the length of the sensor. In all cases, the conductors of all the series are connected directly to the CD conductor of the main series SPHx which is oriented in the direction of the greatest length. Finally, Figure 7 shows that the series of photodiodes do not necessarily extend over the entire length or width of the pixel array. In Figure 7, there is a columnar main series SPHx, extending the full length of the matrix in the longest direction, and several SPHy series extending in the width direction each on a part of the width. The series preferably depart from the central series to facilitate the connection between the different conductors corresponding to each series, but this is not mandatory, the connection can also be made from outside the matrix.
    权利要求:
    Claims (7)
    [0001]
    REVENDICATIONS1. Intraoral X-ray image sensor in MOS technology comprising a matrix (MPIX) of lines and columns of photosensitive pixels each comprising a photodiode (PH) and a transistor circuit (Trs, TL, TS) making it possible to collect the charges generated. by the light in the pixel and converting them into voltage, and: - for each column of pixels a column conductor (CC) common to all the pixels of the column, the column conductor being connected to a respective reading circuit for the column (RD), - a line addressing circuit (LDEC) for addressing the pixels of a selected line, and reporting on the column conductors useful signals from the pixels of the selected line and representing the illumination of these pixels , sensor characterized in that it comprises, in the middle of the matrix and instead of a central column or a central line of pixels, a series (SPHx) of photodiodes (PHx) of detection all electrically connected. t on one side to a reference potential and on the other side to the same detection conductor (CD) extending along the series of photodiodes, this detection conductor being connected to a detection circuit (DX) providing an image triggering signal when the detected current or the variation of this current exceeds a threshold showing that an X-ray flash has started.
    [0002]
    A radiological image sensor according to claim 1 having a generally rectangular shape, optionally with cut corners, and thus having a length and a width where the length is greater than the width, characterized in that the series of detection photodiodes is placed in the place of a column or a central line oriented lengthwise, the detection conductor extending in the lengthwise direction.
    [0003]
    3. X-ray image sensor according to claim 2, characterized in that the detection conductor extends in the direction of the column conductors.
    [0004]
    4. An image sensor according to one of claims 1 to 3, characterized in that the detection photodiodes are distributed at the same pitch as the pixels in the columns or rows of pixels that surround it.
    [0005]
    5. An image sensor according to one of claims 1 to 4, characterized in that the photodiodes of detection are technologically identical to the photodiodes of the pixels and they preferably have the same dimensions.
    [0006]
    6. Image sensor according to one of claims 1 to 5, characterized in that it comprises at least one other series of photodiodes parallel (SPHx2, SPHx3) or perpendicular (SPHy) to the first series, all the photodiodes of the other series being connected directly to a common conductor itself connected to the detection conductor (CD).
    [0007]
    An image sensor according to claim 6, characterized in that one or more series of photodiodes occupy only a portion of the length of a row or column of pixels of the array.
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    法律状态:
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    2016-08-05| PLSC| Publication of the preliminary search report|Effective date: 20160805 |
    2016-12-29| PLFP| Fee payment|Year of fee payment: 3 |
    2018-01-25| PLFP| Fee payment|Year of fee payment: 4 |
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    申请号 | 申请日 | 专利标题
    FR1550738A|FR3032105B1|2015-01-30|2015-01-30|RADIOLOGICAL SENSOR WITH DETECTION OF X-RAYS|FR1550738A| FR3032105B1|2015-01-30|2015-01-30|RADIOLOGICAL SENSOR WITH DETECTION OF X-RAYS|
    PCT/EP2016/050730| WO2016120091A1|2015-01-30|2016-01-15|Radiation sensor with x-ray detection|
    CN201680007883.6A| CN107257661B|2015-01-30|2016-01-15|Radiation sensor using X-ray detection|
    US15/547,095| US9907521B2|2015-01-30|2016-01-15|Radiation sensor with X-ray detection|
    JP2017538207A| JP6752801B2|2015-01-30|2016-01-15|Radiation sensor by X-ray detection|
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