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    • 专利摘要:
    LASER DEVICE, LIGHT AMPLIFYING SYSTEM, LASER AMPLIFICATION DEVICE, AND MATERIAL TRANSFER SYSTEM Laser plate and its method for use in high power applications including semiconductor fabrication and the deposition of diamond and/or carbon layers diamond type, among other materials. A lamp-powered plate design with a face-to-face beam propagation scheme and a reflecting end that redirects the amplified radiation away from the same input surface is used. Also disclosed is a side-by-side amplifier configuration that allows for very high peak and average power with scalability. Cavity filters adjacent to the lamp pumps convert the normally usable UV portion of the lamp pump spectrum to light in the laser plate's absorption band, thus increasing the overall efficiency of the pump. The angle of the end reflecting surface is changed to make an output beam be at a different angle from the input beam, thus eliminating the costly need to separate the beams externally to the laser with a subsequent power loss.
    公开号:BR112015002090B1
    申请号:R112015002090-9
    申请日:2013-08-01
    公开日:2021-05-25
    发明作者:Martin A. Stuart；Stephen L. Cunningham
    申请人:Martin A. Stuart；Stephen L. Cunningham；
    IPC主号:
    专利说明:

    CROSS REFERENCES TO RELATED ORDERS
    [1] This application claims the benefit of U.S. patent application serial number 13/566,144, filed August 3, 2012, and incorporated herein by reference. FUNDAMENTALS
    [2] This application relates generally to the field of Lasers and Laser Amplifiers. More specifically, this application refers to solid state laser amplifiers in the form of a plate that is optically pumped by lamps and where the beam enters a Brewster angle face and experiences multiple rebound reflections due to the full internal reflection before exit through the same face that the beam entered.
    [3] Generally speaking, the lamp-powered board has been around for many years. The state of the art is exemplified by General Electric's design of a powered, face-pumped, face-to-face multi-rebound Krypton arc lamp, Nd:Yag (Yttrium and Aluminum Doped Aluminum Garnet) total internal reflex (TIR) ). In the General Electric project, the Nd:Yag crystal was face pumped with Krypton arc lamps. This particular design achieved a conversion efficiency (laser output power divided by electrical energy by) of ~4% with an output that reached a range of kilowatts. In this project, a Krypton arc flash or arc lamps (consisting of cerium doped with quartz envelopes) that discharge a spectrum of a blackbody and in-line emission photons that were subsequently reflected as evenly as possible to adjacent faces of the place of Yttrium Grenade and Neodymium-doped Aluminum. This gain element selectively absorbs portions of this energy. This energy excites Neodymium atoms to a high energy state, in which a laser beam is generated or amplified.
    [4] Later versions incorporate diode laser pump sources to increase efficiency and architectural simplicity (by producing a particular frequency of photonic energy that is highly absorbed by the doped Yag). Even later versions employed by Iterbius Vanadato doped with Nd (YbV04) as a means of gain. These systems have become the standard, with the limitation being the maximum size at which YAG, Vanadate or Gain crystals can be manufactured. U.S. Patents 3,633,126 and 3,631,362 discuss related technologies.
    [5] The previously mentioned diode-pumped systems have demonstrated a 10% system efficiency, with efficiencies that can approach 25% under ideal circumstances, but at a high financial cost, with the breakdown having approximately 50% efficiency for the diode pump laser, 65% efficiency for Nd:VO4, for Nd:YAG, the efficiency was about 50% conversion for 1.064 micron of radiation, and the subsequent beam cleaning reduces the system output efficiency for a minimum of 10%, with an overall efficiency of well-designed systems being around 25%. The upper limit for the output feed current has been demonstrated with both Yag Ceramic slabs that were fiber edge pumped and with face pump versions, both of which were built primarily by Northrop Grumman. Their system demonstrated a power of 25 kW (kilowatts) per laser head, with an efficiency of ~50% for the diode pump lasers, and a conversion efficiency of ~50% in the Nd:Yag slab to a slab. output efficiency of approximately 25%.
    [6] The limiting efficiency for existing lamp pump designs is primarily in two areas. The first is inefficiency due to the fact that the lamp pump emission spectrum typically does not match the excitation spectrum for the laser crystal material. Second is the inefficiency of the beam extracting from the gain material, due to the fact that the beam passes through no more than twice and incompletely fills the gain material. These disadvantages have interfered with the potential practical applications of the plate laser concept. SUMMARY OF THE INVENTION
    [7] A transverse, lamp-powered, face-pumped laser plate and an amplifier design with a face-to-face beam propagation scheme are presented here. A final TIR (total internal reflection) rebound redirects the amplified radiation back to the same input face but in a different angled direction, making the featured design practical for use in a larger system if desired.
    [8] It is also presented the use of bomb lamps that produce more photons in a useful spectrum compared to lamp designs based on noble gases. Cavity fluorescent filters have also been employed to convert a non-useful portion of the lamp output to useful pump bands at higher efficiency. This improves manageability and energy efficiency.
    [9] Provided as an exemplary embodiment is a laser device comprising: a crest plate, and a cavity filter material provided on at least one side of the crystal plate to receive light energy from a light source, so that the cavity filter material converts the light energy received in a first frequency band into a second frequency band which is absorbed by the crystal plate.
    [10] For the above laser, the crystal plate is adapted to receive a beam of light incident on one end of the crystal plate and an angle, and also emits an amplified laser beam from one end at a different angle. from the first angle or emits an amplified laser beam transposed linearly from the incident light beam after absorbing light energy at the second frequency.
    [11] Further provided is an exemplary embodiment of a laser device comprising: a crystal plate; a light source providing light energy, including an ultraviolet frequency band; and a cavity filter material including samarium doped terbium fluoride which is provided on at least one side of the crystal plate to receive light energy from a light source, and to convert the light energy into a first ultraviolet frequency band. on a light energy in a second frequency band of visible light to the absorption of a crystal plate to amplify the laser beam.
    [12] The crystal plate above is adapted to emit a laser beam amplifying from an end that does not include a rear reflector surface.
    [13] Further provided is an exemplary embodiment of a laser device comprising: a crystal plate; a light source providing light energy including an ultraviolet frequency band and a portion in a visible light frequency band; and a cavity filter material transparent to the visible light frequency band and which is provided on at least one side of the crystal plate to receive light energy from a light source, and to convert the light energy into a first ultraviolet frequency band into light energy in a frequency band converted less than the ultraviolet frequency band to the absorption of the crystal plate.
    [14] The above laser light source and cavity filter material is arranged so that at least a portion of the light energy portion is in a visible light frequency band is transmitted through the cavity filter to the plate of crystal, and that the crystal plate is adapted to absorb both a portion of the light energy portion in a visible frequency band transmitted through the cavity filter, and also to absorb a portion of the light energy in the frequency band converted to amplify a laser beam for emission from the laser plate.
    [15] Further provided is an exemplary embodiment of a laser device comprising: a crystal plate; a light source providing light energy in a first frequency band; a cavity filter material provided on at least one side of the crystal plate for receiving a portion of the light energy from the light source, and for converting at least a portion of the light energy in a first frequency band to light energy in a second frequency band to be absorbed at least partially by the crystal plate; a plurality of elastic fasteners for securing device components while allowing thermal expansion of one or more device components; and a coolant circulation system for circulating a coolant in a device to cool the device such that the crystal plate is adapted to emit an amplified laser beam from an end of the crystal plate.
    [16] An exemplary laser device is also provided comprising: a crystal plate having a front face that forms a point provided at an acute angle with respect to the bottom of the crystal plate to receive an incident beam of light provided at a first angle with respect to the front face, the crystal plate having a rear wall which is provided at a rear angle other than 90 degrees with respect to the bottom of the crystal plate; a light source providing light energy, including a portion in a first frequency band and that is provided at the top or bottom of the crystal plate to receive light energy from an energy source, and to convert light energy into a first band of frequency into light energy in the frequency band converted to at least partial absorption by the crystal plate.
    [17] The above laser light source and cavity filter material is arranged so that at least a portion of the light energy portion in a second frequency band is transmitted through the cavity filter to the crest plate, and additionally, the crystal plate is adapted to amplify the laser beam to emit from the crystal plate by absorbing either a portion of the part of the light energy in a second frequency band transmitted through the cavity filter, when by the absorption of a portion of light energy in the converted frequency band.
    [18] For the above laser, the acute angle and rear angle are chosen so that the amplified laser beam emitted from the front face of the crystal plate at an angle that is different from the first angle, so that the first Incident light beam entering the crystal plate is not coincident with the laser beam amplified from the crystal plate.
    [19] Further provided is a laser amplification system using any of a plurality of the above series lasers for the amplification of the light beam.
    [20] A system and method for manufacturing the use of one or more plate lasers, as described in this document, for manufacturing a component, such as a semiconductor device or a coated conductor, for example, by vaporization and deposition of a substance on or within the component. The deposited material can be a dopant, or a layer of material such as a diamond or diamond-like carbon, for example.
    [21] Additional exemplary modalities are also provided, some but not all of which are described in this document below in more detail. BRIEF DESCRIPTION OF THE FIGURES
    [22] The advantages and characteristics of the exemplary modalities described in this document will become apparent to those skilled in the art with which this disclosure is related after reading the following description, with reference to the attached drawings, in which:
    [23] FIG. 1 is a schematic drawing of an external view of an exemplary embodiment of the invention;
    [24] FIG. 2 is a schematic drawing showing two layers of a filter cavity material that is provided on both sides of the laser plate material;
    [25] FIG. 3 is a schematic end view drawing of an exemplary embodiment of the invention of Fig. 1, showing a relationship between a laser plate, two cavity filters, pump lamps, a ceramic reflector, and an outer case;
    [26] FIG. 4 is a schematic drawing of another exemplary modality, adding an external water collector for cooling;
    [27] FIG. 5 is a schematic drawing of the general transverse geometry of a laser plate of an exemplary embodiment;
    [28] FIG. 6 is a schematic drawing of an on-axis laser beam path entering and exiting the amplifier board of an exemplary embodiment;
    [29] FIG. 7A is a schematic drawing of the displacement effect of a laser beam to obtain a separation of an output beam from the input beam for an exemplary embodiment;
    [30] FIG. 7B is a schematic drawing of the effect of displacing a plurality of laser beams for an exemplary embodiment shown in Fig. 7A;
    [31] FIG. 8A and 8B are schematic drawings showing the effect of varying the angle of a shell in front of the laser plate in an exemplary embodiment;
    [32] FIG. 9 is a schematic drawing of an example arrangement for providing an input and output beam in beams of different directions for an exemplary embodiment;
    [33] FIGs. 10A and 10B are schematic drawings showing an exemplary separation of an output beam from an input beam by varying the angle of an end surface in an exemplary embodiment;
    [34] FIG. 11 is a schematic drawing showing an interior structure of a section of an exemplary daisy chain amplifier that utilizes a large plate laser crystal and adds more pump bulbs;
    [35] FIG. 12 is a schematic drawing showing a cross section of the amplifiers in a chain showing how the laser beam enters and leaves the gain material;
    [36] FIG. 13 is a schematic drawing showing an example of combining a plurality of the amplifiers of Fig. 12 in series to provide very high laser output powers;
    [37] FIG. 14 is a schematic drawing showing an exemplary arrangement for manufacturing components using one or more plate lasers; and
    [38] FIG. 15 is a schematic drawing showing an example sample configuration for the exemplary arrangement of Fig. 14 DETAILED DESCRIPTION OF THE INVENTION
    [39] As discussed above, an exemplary embodiment of a lamp-powered, face-pumping laser plate and amplifier design with a face-to-face beam propagation scheme is provided. A final TIR rebound redirects the amplified radiation back to the same input face but in a different angled direction, making the presented design practical for use on a larger system if desired. By this geometric choice, the laser light pulse can be generated or amplified, passing through the same piece of gain material at least four times (and not the normal twice) on each turn inside the laser plate. Under conditions of energy extraction efficiency of ~60% per pass, this would result in, for example, about 97% of the energy stored in the laser plate being extracted. This feature contributes to the increased efficiency of the exemplary device.
    [40] The use of bomb lamps that use metals or metal halide alloys, which produce more photons in a useful spectrum compared to noble gas-based lamp designs, is also presented. Fluorescent cavity filters have also been employed to convert non-useful portions of a lamp output (in an ultraviolet portion of the spectrum of Mercury and Indium arc lamps plus thallium lodide lamps for the Sapphire Ti laser) to pumping bands useful at reasonably high efficiency. These improvements result in a system that operates with efficiency and power capacity capabilities normally associated only with diode laser pumping versions. However, the exemplary system presented here achieves this efficiency by using lamps in place of diode lasers, and can therefore be much cheaper to implement the same amount of output power than previous designs using diode laser pumps.
    [41] For the presented gain materials used in the example models, the presented lamp-pumped design has output power levels that exceed the diode-pumped versions of lasers of the same size. For example, the emission efficiency of visible light (635-670 nm and 680.4 nm, red light) from pump lasers used to operated Alexandrite devices, for example, at a conversion efficiency of approximately 20%. In addition, frequency-doubled Nd lasers, with an output of 532 nm, green light, used to pump the Titanium Sapphire green absorption band, also operate at an optical conversion efficiency of about 20%. In comparison, the electrical efficiency for optics of Imetal arc lamps and metal halide lamps are both between 70-73%. This improvement and architecture can be used to amplify pulsed or continuous wave laser beams to very high power levels with a system efficiency that has an upper limit close to forty percent. Output per head is expected to be in the 6.5-15.5 kW range for the head design featuring Alexandrite (for Titanium in the ~3.6kW range), but designs are not limited to these levels of power.
    [42] GENERAL CONFIGURATION OF THE LASER DEVICE
    [43] FIG. 1 shows a schematic representation of the general configuration of an exemplary embodiment of the invention. The ends of the crystal plate 1 and one of the six pumping lamps 2 extend out of the housing 3. The housing allows liquid cooling through the slots 4. These slots 4 enter a water trap external to the housing 3, as will be discussed further below.
    [44] FIG. 2 shows where cavity filter plates 5 reside within the housing on both sides of the crystal plate laser 1. In this figure, only three of the six pump lamps 2 are shown for clarity. The purpose of the cavity filter plates 5 is to convert the ultraviolet portion of the light emitted from the pump lamps 2 into the visible spectrum, where it is more readily absorbed by the crystal plate material 1.
    [45] FIG. 3 shows a schematic end view of an exemplary embodiment showing the primary elements within the general housing. The center of the structure is the crystal plate 1 surrounded at the top and bottom by cavity filter plates 5 with 8' gaps. The six lamps 2 used to pump the laser crystal 1 are provided outside the cavity filter plates 5. Surrounding these components are four ceramic reflectors 6 which are placed in a housing 7, which can be made of stainless steel. Frame 7 in FIG. 3 may be of the same type as housing 3 in FIG. 1, but this is not a requirement. At intervals 8' and 8 between the frames a coolant, such as cooling water, is provided which flows to cool the lamps 2 and the crystal plate 1.
    [46] FIG. 4 shows an exemplary embodiment that provides a water trap 10 used to cool the laser. Two cover slots 9 of collector 10 extend through outer casing 7 and through ceramic reflectors 6'. The water flows in opposite directions through the two slots 9 and through the gaps 8' to cool the central laser plate 1. The water also flows in a separate circuit in the axial direction (towards the lamp pumps 2 in Figs. 2 and 3) in spans 8 to cool the pump lamps 2. The cooling water temperatures for plate laser crystal 1 and pump lamps 2 may be different as they are in separate circuits (described below) that allow the plate to operate at an efficient temperature that is higher than that of the lamps.
    [47] Additionally, in the example of FIG. 4 there are holes 11 drilled or otherwise provided in the ceramic reflectors 6', which are placed a few inches apart from each other along the laser plate 1 and the cavity filter plates 5. These holes allow for stopping. -Silicone or Teflon shocks are used to support the respective slabs and to absorb differences in thermal expansion as the laser elements heat up and expand. In addition, the silicone forms a water seal to keep the water above the plate laser crystal 1 and the cavity filter plates 5 separate the different temperatures of water that is cooling the pump lamps 2.
    [48] THE PLATE LASER CRYSTAL
    [49] In one exemplary design, the plate laser crystal 1 comprises Chromium doped with Alexandrite (Cr:BeAI2O4), but in another example, the plate laser crystal may comprise Titanium doped with Sapphire. Most of the plate crystal is made of doped material. But it could also be subsequently processed by undoped sections of Alexandrite crystal (BeAI2O4) or Sapphire Ti, Clear Sapphire and undoped at edges and ends via diffusion bonding to produce clear caps. The purpose of the transparent cover sections is to reduce lens distortion due to thermal gradients produced at high pumping powers. These clear caps reduce the distortion effect by a factor of three, due to the fact that the unstopped portion does not have a heat load from the extra or unextracted energy of the gain material.
    [50] The preferred crystal growth method to produce the laser plate crystal is via the classic Heat Exchange Method (HEM). This crystal growth technology produces inclusion-free crystals for any of the exemplary gain materials. By this method, damage-free power limits of, for example, up to 23 gigawatts per square centimeter can be realized for the Alexandrite material (also with similar power capacity results for the Sapphire material). On the other hand, in amplification configurations where the Czochralski crystal growth method is used, Alexandrite crystals can be produced with a power limit, for example, of 1-1.5 gigawatts per square centimeter radiance for lengths pulse rate of 1 nanosecond. These damage values are well above the typically planned operating powers, which can be hundreds of mega-Watts per square centimeter.
    [51] Subsequent to obtaining the crystal plate for the laser plate, a reflective coating such as silicon dioxide about one micron thick can be applied to the sides, and possibly the edges, to act as a reflector for the amplified laser light and to protect the seals that may overlap the rebound site.
    [52] As the designer wishes, the clear diffusion bonded caps can be omitted from the sides, and the plate crystal can be closed on the sides within the alumina ceramic cavity, with an additional design element that is a dielectric mirror being applied to both sides and the edge of the crystal to facilitate the desired reflections from the amplifier beam. This variation would allow for a simple, compressed seal around the crystal body.
    [53] PUMPING LAMPS
    [54] Exemplary 2 pump lamps can utilize Mercury filling (eg with 7 Torr Argon co-filled) clear polished sapphire envelopes or clear fused silica envelopes. Particularly, when Sapphire is used, Kovar, which is an alloy with a high nickel content, can be used in such lamps as it has an almost identical expansion coefficient and can be brazed to the envelope using industry standard techniques. Tungsten electrodes are brazed to Kovar and are the electrodes that establish the arc on Mercury.
    [55] Lamps constructed and energized in such a way have an efficiency, for example, about 72% for Mercury and, for example, about 70% for Thallium sludge. These lamps are best powered with a high frequency AC power supply. Such power supplies are commercially available and are referred to as ballasts, with operating frequencies of 40-100 kHz. The lamp is sized by choosing the rate of waste heat removal (eg 240 W/cm2 surface area using deionized water), and scaling to a useful size. For example, a lamp with a bore diameter of about 4.5 mm rotating at about 135 V/cm will pass about 5.8 amps. For a Mercury arc lamp, once the plasma has established itself in the perforation and the mercury has been vaporized, the impedance characteristics are such that even if the applied voltage is tripled, the current will only increase by approximately twenty percent . Thus, the one-foot lamps 1 can be powered, for example, at up to 35 KW or about 1000 watts per cm. However, in the long run, the power is reduced to ~400 watts per cm and the length is shortened. Normal practice is to use a 6mm diameter fused clear quartz with, for example, a 2mm bore with an arc that is about 8-15 cm long. In these lamps powered with an AC power supply, there is about 10% heat loss per electrode, and care must be taken due to the fact that heat loads can be generated on the electrodes themselves and their adjacent area in the envelope.
    [56] CAVITY FILTER PLATES
    [57] Exemplary cavity filter plates 5 as shown in FIGs. 1-3 are individually composed of a rectangular block crystal of Terbium Fluoride (TbF3) doped with —0.1% Samarium, which has absorption bands that span most of the ultraviolet spectrum. The transfer of energy to the Samarium ion is a practically lossless transfer of radiation via the crystal matrix. The crystal then fluoresces in an absorption peak band near the 595 nm of an Alexandrite crystal, converting UV energy that would otherwise be lost into useful visible light, thus increasing the pumping efficiency of the system. There is a residual heat load from the energy difference between the average input frequency and the specific emission frequency. This is called the Stokes shift. This difference is responsible for the residual heat in the crystal, even if all or most of the available energy is extracted.
    [58] The spectral output of Mercury lamps at this power level is approximately 1/3 at UV. Thus, the use of cavity filter plates to recycle as much UV radiation energy as possible is desired to increase efficiency. In addition, the Terbium Fluoride filter sheets reduce the amount of UV radiation that falls on the Alexandrite crystal. This radiation, over time, would likely damage the crystal and reduce its transparency, which, in turn, limits its usability and therefore the life of the laser device.
    [59] Other crystal designs are also feasible for use on the cavity filter plate. These include (but are not limited to) Terbium Grenade with Sapphire-doped Titanium gain material; Terbium, Cerium, Titanium doped with YALO; Gadolyleum, Gallium, Terbium, Cerium, YAG-doped Samarium, Samarium-doped Terbium Fluoride; and Terbium-Samarium doped with Lithium Fluoride and Yttrium. Each has its own specific advantages. Most are less efficient than Samarium-doped Terbium Fluoride, but other oxide crystals can handle higher input power levels with a shift in which more heat would be left behind due to lower conversion efficiency.
    [60] CAVITY REFLECTORS
    [61] The exemplary 6, 6' ceramic cavity reflector as shown in FIG. 4 can consist of a non-degrading ceramic, including, for example, a high purity composition of AI2O3 (Alumina) The component can be finished with a sealing enamel that allows a waterproof seal on its edges through a silicone rubber seal, preferably clear or white. The cavity reflector 6 is intended to reflect light (radiation) from the lamps 2 back to the device to be used. This reflector 6 is preferably made of an inert substance (thermally, chemically, and in terms of radiation), such as the ceramic material described above.
    [62] The arrangement of cavity reflectors 6, 6' resembles a rectangular tube with two rectangular slots at each end to facilitate the flow of water in the open space 8 along the length of the lamps 2. This also cools one face of the cavity filter 5. Additionally, there are square reflector end caps at each end of the pumping chamber, in which there are holes allowing lamps to pass through. There is a separate seal compression plate to allow the silicone rubber O-ring seals to be compressed against the lamp and reflective end walls. At one end there is a rectangular hole for the laser plate to fit through and be sealed through the compression O-ring and seal plate.
    [63] On the outer top and bottom, near the ends, two additional devices are provided that allow water to enter and exit each side (not shown). This is to receive the cooling water for the lamps and partially for the cavity filter.
    [64] PLATE LASER CRYSTAL SHAPE
    [65] FIG. 5 shows the side view of the general shape of the plate laser crystal 1. The shape is defined by the plate width 12, a plate length 13 measured from the midpoint of each end, a wedge angle acting as a Brewster optical window 14 to the face where the incoming and outgoing beams pass, and an angle 15 to the reflecting end of the crystal. All four of these parameters are interconnected in the exemplary embodiments, and plate 1 laser crystals must have a specific set of these parameters for desired operation.
    [66] FIG. 6 shows a preferred exemplary situation where the reflective angle 15 is provided at 90 degrees and the entry angle is defined by the Brewster angle (for example, the Brewster angle for the Alexandrite C axis is 60.06 degrees so the angle of wedge 14 of the input surface is 29.94 degrees), so the desired plate length is uniquely related to the plate width. For the case of the input laser beam 16 located on the centerline, the length should be such that the center of the beam collides with the corner of the plate at the reflecting end, so that the output beam is also on the centerline. For the case shown in FIG. 6, the incident and output beam 16 are always co-linear. Light 20 from the pump lamps enters the top and bottom faces of the plate, while laser light sources enter, and amplified laser light exits, through the Brewster angle.
    [67] When the incident beam is shifted up or down relative to the front of the plate surface, the outgoing beam is also shifted in the opposite direction. This is shown in FIG. 7A, where the single incident beam 16 is midway between the centerline and the edge of the entrance window. So if the incident beam (or plurality of beams) is only half the size of the window, as shown at 17 in FIG. 7B, then the output beam 17' is physically separated from the incident beam 17. This configuration solves the problem of beam separation, but limits the beam cross-sectional area to be less than half the size of the surface face. .
    [68] Front wedge angle 14 does not necessarily need to be placed in Brewster's Angle, as in the previous figures. As the wedge angle changes, the internal reflection angles of beam 16 within the plate change, and the number of total reflections in a given length changes. Two examples of the other incident wedge angles that work for the same length and width are shown in FIGs. 8A and 8B. In the first example of FIG. 8A, wedge angle 14 is 37.6 degrees, and in the second example of FIG. 8B the wedge angle 14' is 46.2 degrees. It is possible to find a board length that will work for a wide range of angles. In all cases, however, the incident output beams are on top of each other (coincident) in opposite directions.
    [69] However, there is a range of angles close to 90 degrees that can also be used. Such a condition is shown in FIG. 9, in which the angle of the 14" front surface is 90 degrees with respect to the axis of the plate. For solutions around this angle, the output beam and input beam are not aligned. This has a good feature for separating the input and output beam 16. However, the front surface area is at a minimum when compared to wedge angles 14 and 14', and this limits the power density of the amplified light.
    [70] Finally, preferred exemplary modalities provide for the reflective surface at the end of the plate to be at an angle other than 90 degrees. This is shown in FIGs. 10A, 10B for example two angles 15 and 15'. In the first example of FIG. 10A, end angle 15 is 88.25 degrees, and this results in the output beam being separated by 9.41 degrees from the input beam axis. In the second example of FIG. 10B, the 15' angle is 91.80 degrees, and the output beam is 13.50 degrees separated from the input beam. Other angles can be used depending on the ratio of slab length to slab width, and these two are only shown as examples. This configuration in desirable features of separating the input and output beams and allowing a full aperture to be filled with the incident beam.
    [71] Another example design used for the same materials and a general arrangement discussed above, but with a slightly different architecture, is particularly shown in FIG. 11. This variation could allow scaling to much higher power levels. In this example, there is a row of lamps 22 provided on only one side of crystal gain 21, and there are more of them. Instead of three lamps on one side of the four cm wide exemplary crystal in FIGs. 1-4, there could be up to 24 lamps for a 30 cm long crystal, for example. Furthermore, the crystal axis is laterally rotated such that axis B is along the dimension of 30 cm. Also shown is a single cavity filter plate 25 which is located between the pump lamps 22 and the laser gain material 21.
    [72] FIG. 12 shows an example cross-section of one of the segments 30 of an exemplary laser amplifier chain, where the segment 30 incorporates the structure of FIG. 11. This figure shows the laser amplifier plate 21, the cavity filter plate 25, and the pump lamp assembly 22. It is also shown in the ceramic cavity reflectors 26 that cover only one side of the amplifier plate 21 and a stainless steel case 27. The cavity reflector 26 is intended to reflect light (radiation) from the lamps 22 back to the device to be used. This reflector 26 is preferably made of an inert substance (thermally, chemically, and in terms of radiation), such as high alumina ceramic material, for example. The gaps between the amplifier plate 21 and the cavity filter 25 they allow the passage of cooling water as before, and the space around the pump lamps 22 also allows for a separate cooling water circuit. The plates are held in place by seals 29, which keep the water circuit separate and allow for thermal expansion of the parts as the temperature increases.
    [73] Also shown in FIG. 12 is the amplified laser beam path. The center of the beam is shown by a solid line 16 as it impinges on the surface of the gain crystal 21 at the Brewster angle. The beam refracts (changes the angle) as it passes through the surface, and it is completely refracted from the rear surface, and exits at Brewster's angle. The beam is wide, as indicated by the dashed lines 16' and 16", and traverses the gain medium twice (in and out).
    [74] FIG. 13 shows how the amplification steps 30 can be combined in a chain of amplifiers to result in an amplified beam of extremely high power. amplify The laser beam 16 alternately passes through each of the amplification steps 30 on either side of the path of beam. Between each amplification stage, there is a reflective surface 31 that holds the pumping lamp photons in a cavity until they are absorbed by the laser's gain material.
    [75] At lower power levels, the laser amplifier can be constructed using the example lasers discussed with respect to FIGs. 1-4. As the power level increases along the amplifier chain, the amplifier could change its design to the exemplary configuration shown in FIGs. 11-13. The result is a high powered beam at higher efficiencies than was previously possible, up to the power capacity limit of the exemplified gain materials cultivated using the HEM method. The laser beam is expanded in cross section so that this architecture presents a surface area plate with which it interacts. The head size is limited only by the size of the HEM furnace producing the boule, from which the crystal plate is cut. For example, if this configuration is done on an active plate 15 cm high by 30 cm long and 1 cm thick, using a beam cross section of ~15 cm x 15 cm, this would generate a beam with a huge amount of average and peak power in a simple and relatively small device.
    [76] However, even if a plate amplifier crystal is mounted via the methods described, such as diffusion bonding, the ideal pumping lamp size is likely limited to ~15 cm long or 6 Kilowatts of power for envelopes. diameter drill hole. This limit is due to the 20% heat deposited on the electrodes (corresponding to 10% from each end if operated on an AC waveform input). The electrode acting as an anode receives heat deposition, which occurs every half cycle. This heat load is manageable in a 6mm diameter quartz tube with a long life. Different dimensions will have different heat removal characteristics, and therefore different service lives. If the power and length of the pumping lamp is chosen to be used with larger plate crystals, the lamp would then be constructed with electrode sections entering 90 degree arms with the 15 cm arc section between the two in a configuration abbreviated to "U". This type of lamp would be mounted on parallel bases staggered across the rear reflector so that the lines shown in FIG. 11 would be replaced with arrays. The arrangement could be such that it achieves a uniform bomb light intensity with Mercury arc lamps or Thallium lodide lamps used with Alexandrite (Mercury lamp) or Titanium-Sapphire laser plates (Tallium lodide lamps ).
    [77] ALTERNATIVE MATERIALS
    [78] A variation of the designs described above is to use Thallium slurry along with Mercury as a filler for the arc lamp (this changes the spectrum of the pumping light, reference to Patent 7,061,182, incorporated by reference, which if modified to include cooling capacity and have a higher power load, could be used to pump pumping light source to provide longer service life at lower efficiency cost). Another option is to use the indium sludge with fill inside the sapphire lamps with the sapphire doped with Titanium (Ti: AI2O3) as the laser plate gain medium. In the event that indium sludge lamps are used, cavity filters would also be desirable for use as the lamp produces UV light. A cavity filter could be avoided for this (Hg/Ar + Thallium lodide) configuration, as the lamp has an output of 71%, mostly 535 nm. This is a band that is almost at the peak of the Ti:AI2O3 absorption band.
    [79] Although this configuration would likely not support being used as an oscillator, this configuration would be used as a practical amplifier. It would be even less efficient than the Alexandrite amplifier, as the fluorescence decay time is approximately twenty-five times longer (eg 75 microseconds vs. 3.2 microseconds) at a temperature of 180 degrees Celsius compared to With Titanium Sapphire Gain Material. However, if the creative designer needed to operate at frequencies higher than that of Alexandrite, the Ti:AI2O3 system would also be able to do that.
    [80] APPLICATIONS
    [81] One of several important uses of high power lasers is in Pulsed Laser Deposition (PLD). If the high repetition rate Q-switch pulses (these pulses are created using one of several commercially available methods of exemplary laser-applied switching devices discussed in this disclosure) are directed to spray targets, then discrete layers of any atomic species or composite can be transferred to the substrate that makes up the micro-layer structured device. An improvement over the High Power PLD would be to use both versions of this laser in one use of the vaporization target PLD. In this example, the higher average power laser (eg Alexandrite producing high radiance Q-switch pulses at approximately 13.333 Hz) could be used to remove the target material at a high rate. A second beam of a higher repetition rate (eg 312.5 kHz) from a Titanium laser operated as an ultra-fast laser is directed onto the transiting plume of an ionic atomic deposition material. This dual laser use would greatly improve the quality of the produced films, due to the fact that any ejected particulate matter would be completely converted to atomic ionized matter by the second laser.
    [82] This represents a spectrum of fabrication technologies that at one end are referred to as additive fabrication, where deposition takes place, and at the other end, removal or subtractive fabrication takes place, with the combination of both making up the complete process. A large-scale example would be spraying exotic and previously difficult, or not yet fabricated, PLD plasma compounds such as Hafnium Carbide Tantalum - the highest melting point on Earth - onto a material with expansion equivalence, such as an Iron Nickel alloy. of attached sketch, like Kovar, to build a specific shape with or without a structured internal architecture, perhaps for cooling, and then remove a specific amount to achieve a net-shaped part. Such a device would be suitable for hypersonic vehicle control surfaces, either on the vehicle wing or on the exhaust plasma plume. An extension of this same technology and materials would be reusable vehicle skin heat shield materials, which would be lighter and stronger than current material combinations. A microscopic level of this same technology would be the PLD deposition of layers of semiconductor materials, with the subsequent removal of specific areas, with the subsequent deposition of other semiconductor materials to make the device. An illustrative example would be to produce diode laser boules to make cheap diode lasers, as an example. This would be representative of Micro-electronic or Micro Electro-Mechanical circuit devices or MEMs, due to the fact that this high power pulsed laser technology, when used in conjunction with harmonic or frequency conversion devices, would allow the generation of levels hitherto unknown power in parts of low frequency portions of the spectrum, thus allowing the fabrication of direct microelectronic devices. This technology would be particularly useful for manufacturing Diamond-Type Carbon Microelectronic Devices (DCL), as another example. Another example is the deposition of a Boron Arsenide material as a heat sink material to control the heat of semiconductors. , this laser can also be used as an enhanced ion emitter for high speed molecule beam epitaxy fabrication machines. This would be in addition to or as a replacement for the high voltage ion source gun in commercially available machines. In this application example, the use of a Q-switch source and the locked source mode (options using pulses lasting nanoseconds, or even picoseconds or less) acting as the ion source, and then the ion beam to the super atomization will achieve beam currents that would be limited only by the ability of the target devices' boules to aggregate the deposited ions into a useful structure, rather than being inherent deposition thickness limits, such as 1-10 microns per hour for millimeter or centimeter per hour thick.
    [83] An example would be depositing a Diamond-Type Carbon (DLC) coating (or depositing diamond coatings themselves) onto any mechanical metal substrate using the laser or dual laser. DLC layers have at least four features, which make them important for commercial applications. Firstly, DLC has the desirable characteristic of being extremely hard, and a surface that is coated with DLC will, in practical terms, never show any wear. Second, DLC layers have a very high thermal conductivity (several times higher than copper) which makes them ideal for use as heat sinks to remove heat from any surface to which it is attached. Third, the DLC layers are electrically insulated and have a very high breakdown voltage (~10,000 volts per micron thickness). The fourth DLC has a very low coefficient of thermal expansion, allowing its use as a substrate to manufacture integrated circuits and microelectronic devices with an extremely high operating power, due to the fact that DLC conducts operating heat away from structures. monolithic stacked circuit boards. Therefore, they can be used to provide effective electrical insulation with relatively thin layers or thick slabs/plates and architected blocks to be monolithically stacked for use in a variety of high-voltage or high-grid applications, including electrical capacitors for electrical storage. energy.
    [84] DLC insulation applied to copper or aluminum wires used in the manufacture of various products would allow a DLC insulated device to operate at higher temperatures than would be possible with polymer insulation materials. The operating temperature limit for devices with conventional polymer insulated wires is about 200 degrees C. In comparison, the DLC coating would work up to its graphitization temperature, which starts at close to about 400 degrees C. The combination of DLC's thermal conductivity, its low coefficient of thermal expansion, and its low voltage insulation allow the devices built to be several times smaller in physical size compared to their polymer-insulated counterparts, yet operate at the same power levels .
    [85] DLC coatings created by Pulsed Laser Deposition (PLD) (where the spray target is graphite or pure carbon) have been demonstrated in small samples, but the barrier to larger scale commercial applications has been the lack of availability of lasers. high power and low cost, such as the plate laser disclosed in this document. One implementation is to use an Alexandrite and/or Titanium laser, like the design discussed in this document, to produce a medium power Q switch and/or ultra fast pulses being directed to the donor spray target, with the Titanium version Sapphire producing pulse speeds of about 312,500 KHz or more, being used at the same time and being directed to the same plume (thus super-spraying, atomizing and ionizing it) while it is going towards the substrate. This method can be used for any electrical discharge material, and is not limited to graphite as the source material.
    [86] Another commercial application is the production of low-cost solar cells or integrated circuits by PLD. Virtually any material can be deposited onto any substrate in any order or thickness with computer-controlled deposition and removal of large or small atomic amounts of the deposited material. The barrier to commercial applications has been the availability of a low-cost, high-power laser source. Any of the lasers disclosed in this document can be used to enable the generation of economical high-speed, high-efficiency multi-layer PV (photovolatile) films such as, for example, Silicon, Germanium, Gallium Arsenite on Germanium, Gallium Nitride, Indium Gallium Nitride, Gallium Phosphoride or any other Gallium alloy, Including in this claim any currently existing semiconductor alloy that has been produced by sputtering, chemical vapor or ion deposition on any substrate material that can be produced with the described laser or dual laser systems. This technology, which would include large-area, high-speed manufacturing of Graphene - a one-atom-thick sheet of carbon atoms in a single-layer configuration or multiple layers in shaped parts.
    [87] Since PLD has the lowest deposition temperature, it is currently possible that PV films can be grown on suitable thermoplastic woven surfaces or sheets. This would provide a path to flexible PV assemblies at a low manufacturing cost compared to conventional MOCVD (metal-organic chemical vapor deposition) methods.
    [88] High power lasers have a number of applications in the areas of welding and/or cutting. Q-switched versions of the plate laser would allow steel plates tens of inches thick to be cut at accelerated speeds. 20 kW CO2 lasers are currently being used in shipyards, but 100 kW lasers are rare and very expensive. This would probably not be home to board laser systems, as discussed in this document, which can be manufactured more cost-effectively. A system composed of a series of laser amplifiers, such as the examples provided in this document, could provide several magnitudes. of this power at reduced operating costs compared to other megawatt class laser systems.
    [89] A single or combination laser source such as the pulsed or continuous wave described (such as exemplified in 8.220.0965) used in conjunction with a high power laser system can also be used in conjunction with a laser system high power for encapsulation and/or underground excavation. The use of a continuous and/or Q-switched pulse train beam as a combined architecture would allow the slicing of the rock face of an excavation target into thick vertical plates. If a rectangular section under the slices were to be excavated for use in a conveyor belt material removal system then the cutting beam were to be directed horizontally several feet above this space on each vertical slice, and then after the horizontal slices had been made, then the weight of the stone slabs would, at some point, break the rock and free it to fall onto the articulated conveyor belt system. It is possible for a 1 megawatt beam, by vaporizing a 1 inch diameter hole in 22 feet of rock in about one second, to remove a 10 meter by 10 meter by one meter "panel" of rock in about an hour with the conveyor belt removal system. Compact 5 megawatt systems are feasible in heavy truck mounted architectures. This would represent a 25-50 time improvement in tunneling speed.
    [90] The pulse duration of lasers may be important to their application. The longer the pulse duration of a laser, the more likely it is that the material being vaporized will contain unwanted particles in a plume. This can happen even with pulses that are several billionths, or nanoseconds, in duration. However, as you approach a pulse that is a trillionth of a second in duration, the atomic relaxation time is approximated and this tends to limit the material's ability to transfer heat energy to adjacent atoms, and thus , agglomerates tend not to cool enough to allow for an accretion, and this improves atomization and reduces particle contamination. This is one reason why an explosive can be machined with an ultra-fast system and not a Q-switch system, with an ultra-fast or ultra-short heat pulse, the heat from vaporization goes away along with the plume.
    [91] Therefore, there is no interest in pulses that are less than 1 picosecond and are called ultrafast. The typical pulse length of a Titanium Sapphire system is 100 femtoseconds, and such systems have produced pulses that are less than 100 attoseconds.
    [92] When a substance is vaporized with smaller laser pulses, there are fewer particles the project creator has to deal with, which produces a better thin film and a simpler process. This feature is why these MOPA designs would be useful in manufacturing integrated circuits and Mechanical Micro Electronics systems. The fabrication of DLC substrate and diamond semiconductor integrated circuit using these laser designs is particularly interesting.
    [93] The problem with making these short pulses is that the short pulse passing through a gain material 1) does not spend enough time interacting with the carried atom to induce them to release their stored energy; 2) A system to produce such ultra-fast pulses typically requires a large crystal (20 mm dia. by 6 in length) that redirects the short pulse through it about 8 to 20 times to get the desired energy; and 3) when the desired energy is obtained, the brightness is quite high, which could destroy the surface of the optical system. Assuming that the radiance of a pulse of 1 joule that is a trillion-second in duration would produce a radiance of a trillion watts. The energy scale law for damage levels is the square root or !4 power of a pulse duration difference, on the basis of what a radiance level of 5 GW/cm for a pulse of 1 ns duration could support, for example, 156 MW for a pulse of 1 picosecond duration. This pulse length is, for example, about 1000 times smaller, and hence the square root of 1000 = 31.62, the exemplary energy and radiance level would be, for example, a trillion watts at 1 joule, so , the new damage threshold would be, for example, 1/31.62 = 0.03162 joules.
    [94] This is why, in traditional ultra-fast systems, the actual pulse duration is about % of a nanosecond in duration and is compressed into a pair of grids so that it modulates the frequency by pulses (chirp) or overlaps spectrally with the spectral components. This brings up another problem with ultra-fast amplifiers: the speed of light is typically different for different colors in most optical materials, which leads to "scatter" where the 500 picosecond blue section travels slower than the 500 picosecond red section of the wrist itself. This is one of the most important reasons why the average power output of most systems is limited to ultra-fast systems, and is typically supplied below 100 watts. An exemplary prior art system costs about $300,000, is cooled with liquid nitrogen, and needs a dual frequency pump laser with Q-switch that is 5 times more powerful to achieve the 100 watts needed to power it, thus producing a system that is, for example, about $500,000. By contrast, obtaining the 3,600 watts of the Sapphire Ti amplifier disclosed in this document is on the order of, for example, about $100,000 at the time of this writing. The reason the manufacturer made the ultra-fast 100 watt system described here was that it produced science, which films of interest were made from, and that Metal-Organic Chemical Vapor Deposition was not able to do.
    [95] However, a solid-state pulse compression technology based on directing scattered pulses through a series of glass prisms with a high shrinkage index, which are configured in an anti-parallel fashion, could be used to correct the problem. By sending a pulse through the tip of each prism, the physical distance is greater for a slower waveform (higher frequency) through the glass and smaller for a faster waveform (lower frequency), the difference in length of the The path in the air opposed to the glass allows a slow frequency to be compensated for by this strategy, so that it returns to its pulse position, just as it entered the amplifier. This architecture provides a mount that has a mirror at the far end of the beam path so that light bounces back through the prism mount. These mount prisms can be supplied about the size of about an amplifier head or larger, which is useful for providing a dispersion compensation head or heads close to the actual power head or heads.
    [96] EXEMPLARY APPLICATION SYSTEM
    [97] To illustrate how these components work, and how they can be used, Figure 14 shows a pulse from a first feed laser (seed laser) 40, through an amplifier 42 and mirrors 48, 47 to its point. end in the chamber 45 process, and then we'll repeat this for a second feed 41. The first laser feed 40 works as the feed for a chain of ultra fast amplifiers 42. The pulse duration frequency and repetition rate is set in this component, according to the desired application. For example, it can produce a !6 nanosecond pulse, with this pulse having, for example, a bandwidth of 100 nm, 750 nm to 850 nm, with, for example, 312,500 pulses being emitted per second. Alternatively, the bandwidth of the Titanium Sapphire fluorescent output produces light from 650 nm to 1100 nm, at the same rates mentioned, allowing the laser to operate at those frequencies where desirable.
    [98] The amplifier chain may comprise a series configuration of amplification modules, as shown in Fig. 1 for an exemplary module, where the pulse is introduced into a Titanium Sapphire gain crystal, as shown in Figs. 2 and 10A and 10B. The laser beam propagates from face to face (FIG. 10A and 10B) as it passes through the tip and tip crystal and returns, although it enters and exits at different angles for separation purposes, being amplified and dispersed due to fact that the speed of light for the red component is faster than that of the blue component. This causes those sections that have a duration of 14 ns to be delayed relative to each other, and effectively increase the pulse. Upon exiting the first plate, the pulse can be routed to the compressor or scatter compensator (described below) which will reverse the shifting effect of the gain crystal, so that the now amplified pulse again has a duration of % ns. This is repeated for each amplification step until the desired power level is reached, and then the pulse is compressed with the same compensator type and design, but the architecture and size is perhaps larger to accommodate the higher levels of energy.
    [99] The compression device can be constructed to produce a pulse that is 5,000 times smaller by a process called chirping. This is where the red and blue sections are translated in time, so that they partially overlap extremely, and portions of the different colored front and rear edges have been separated in order to establish destructive interference, and this effect leaves the non-overlapping section in the center of the pulse that is at a 1 picosecond duration level, but does not decrease the energy content of the pulse.
    [100] Referring again to FIG. 14, the final compression stage would be located in the first amplifier housing 42, at the end of a chain of amplifiers included for the output beam 51. The emitted beam 51 would proceed to the first beam splitter 48, where a portion 51' of the energy The ultra-fast pulse would be reflected to the process or sampling chamber 45 to thermalize a substance in the particles in plume 58 of Figure 15. The other portion of beam 51 being transmitted through splitter 45 enters triplicate module 44, where a fraction of the energy of pulse is converted, for example, into photons of 1/3 wavelength or 266 nm. These photons and this portion of the pulse are directed at the moving mirror 47, where a 1 picosecond 266 nm picosecond 52 pulse of light is directed at the sample being coated in the sample chamber 45, as shown in FIG. 15, sample 59. This is where UV photons displace electrons from the surface of sample 59 and photoionize the surface, thereby increasing coating quality and speed. In a second Alexandrite amplifier chain, shown in FIG. 14, a second power laser 41 generates a beam 53 with, for example, a 50 ns pulse that has a bandwidth of up to 100 nm, at a rate of 13.333 pulses per second (pulse width, repetition rate and bandwidth are chosen by a coating engineer to optimize the process). This beam 53 is directed to the amplifier chain 43, where the pulse is increased in terms of energy content and leaves the amplifier chain 43 via the beam path 54 to another mirror 47, where it is directed to the source material. in test compartment 45. Source sample 57 is shown in FIG. 15, and must be vaporized, becoming the atomized plume 58.
    [101] This train of laser pulses in beam 54 does not necessarily need to be compressed, due to the fact that this effect does not work well on pulses that are greater than 600 picoseconds. Scattering in the Alexandrite gain material does not markedly affect pulse duration, and this beam need only reach the desired power level to be effective in vaporizing the material at the source. Different materials require different pulse durations to optimize this effect, which is tuned to the power laser for each amplifier chain and material to be deposited.
    [102] Thus, FIG. 14 shows an exemplary component architecture for the layout of a real-condition PLD laser source generator that incorporates both the Alexandrite MOPA and Sapphire MOPA systems described in this document. Each has a power laser or Master oscillator, 40, 41, which can be either a Sapphire TI or an Alexandrite master oscillator, respectively. A master oscillator defines coherence duration, pulse frequency, pulse duration, and rate repeat for each chain of amplifiers. So, feed 40 is an ultra-fast feed laser, which would produce % nanosecond (or less) pulses with a bandwidth of about 100 nm (750nm-850nm) (or a narrower bandwidth) whatever, for example, repeated about 3.2 μs (or less) or 312,500 times per second It would likely be latched (a method of producing very short duration and very coherent power pulses) to achieve these short pulses.
    [103] Similarly, power 41 would be a source for the Alexandrite 43 amplifier chain, and would produce Q-switch pulses, for example, with 50 ns +/-20 ns with 100nm or less bandwidth , every, for example, 75 µs or 13,333 times per second Bandwidth is a desirable characteristic for the ultra-fast laser, as the pulse length is compressed to about 6000 times by overlapping the spectral components to the components blue and red components for destructive interference on the timeline of each individual pulse. This effect is possible due to the coherent duration of the power pulse (in which the peaks and troughs of the photon amplitude waves are aligned just like marching soldiers).
    [104] There is a frequent need to explore atomic-level correlated characteristics in PLD fabrication; one of these features is to increase the probability that the vaporized atoms in the plume will attract and adhere to each other in a structured order on the substrate being coated. This is why a creator will often want to include the ability to stimulate these atoms to do this by creating short wavelength photons from frequency-converted portions of the laser amplifier. This is achieved in the triplicater 44. This device is an array of harmonic frequency conversion crystals on a support that converts a portion of the selected beam to make 266 nm photons. The unused portion of this beam 51, which is mainly reflected from beam splitter 48, is directed towards the plume so that it thermalizes atoms and particles that are in transit from the ion source to the substrate being coated.
    [105] The reason why the largest portion of the ultrafast laser is used for this purpose is to take advantage of the 25-fold or greater repetition rate of the Titanium laser, and create enough photoionization events through the irradiation of the UV 52 beam, to improve surface accretion and organization in the structured film (as would be required for Gallium Nitride structures) for the desired regions of the substrate being coated (specifically large area or dashed lines, in cases of extreme fineness). In the coating chamber illustrated in Fig. 15, Beam 52 is, for example, the portion of the photoionizing 266 nm ultraviolet beam illuminating sample 59. The largest portion that thermalizes or atomizes plume 58 is through beam 51, the beam of alexandrite Alexandrite 54, and of higher average power and lower repetition rate, is illuminating the ion source 57. The optimization particles through the angles of incidence irradiation levels in the plume, source and substrate are within the discretion of the film engineer . All these parameters are variable by changing the characteristics of the feed and vacuum chamber lasers, or the partial atmosphere of the partial pressure of choice.
    [106] Therefore, an approach as shown in FIGs. 14 and 15 can be used for semiconductor fabrication (doping and/or depositing layers on semiconductor substrates as workpieces) or to coat various workpiece items with desired materials such as diamond or DLC.
    [107] A real-conditions architecture that exploits the high efficiency and power generation capability of the laser amplifiers described above, for example, in an architecture called MOPA (acronym for Master Oscillation Power Amplifier), is described in larger details in this section.
    [108] Each type of gain crystal - Chromium-doped Chrysoberyl, also known as Alexandrite and Titanium-doped Sapphire - operates as, and is supplied with, a separate Master Oscillator for each laser type, and a beam train amplifier associate. Each type of gain material has characteristics that favor the generation of complementary pulse sizes and energy levels. MOPA Alexandrite is best used in generating, for example, pulses with a duration of 1-200 nanoseconds, sometimes called Q-switched, and in a repetitive pulse train, whereas Sapphire Titanium MPOA preferentially generates lengths of sub-nanosecond pulse that would be tailored for compression of sub picosecond pulse lengths, sometimes called ultrafast. Anti-parallel grid or active mirror prism compression systems would be used. Alternatively, a Simulated Brillion Scatter mirror could be used with the compression prisms so that wavefront distortions could be corrected simultaneously.
    [109] To exploit the project's capabilities, a creator of a PLD system could use two types of lasers described in this document in the same coating system. Each type of laser is adjustable, so that within a standard coating bandwidth, which is typically ±10% of a center frequency, both could easily operate at separate but distinct output frequencies that both would produce polarized outputs. High reflectivity polarizing beam splitters or mirrors would be used to combine or separate both beams, probably at the source.
    [110] The Titanium Sapphire crystal has a fluorescence lifetime which is, for example, about 3.2 μs vs. Alexandrite which at typical amplifier design system temperatures is, for example, around 75 μs although it has a fluorescent lifetime ranging from, for example, 1.5 milliseconds at temperatures below zero to, for example, 75 μs at 150 degrees Centigrade. This relates to output power and extraction efficiency as the cross-session switches to Alexandrite at different temperatures. If the gain medium is loaded to saturation, a creator can extract a pulse and recharge the gain crystal within the time period or faster. Ti Sapphire lasers are typically pumped, for example, at 5-200 ns, although the average is 50 ns+/-20 ns, green laser pulses and often the gain section of the Ti Sapphire crystal is saturated to the point of saturation. make super radiant.
    [111] This means that the gain crystal will produce much smaller pulses (~2-5 ns) without any kind of special approach, like adding a Q-switch or associated electronics. Alternatively, if larger pulses are desired, as in millisecond welders, the pumping energy must be added at a rate sufficient to charge the gain material under multiples of the fluorescence time period so that they are actually being operated at almost -CW during the pulse.
    [112] The disclosed design takes advantage of the fact that amplifiers do not need to be charged or pumped to levels that would allow them to operate as oscillators, although the Alexandrite device can operate as the oscillator if desired. The lasers are only charged at whatever level the lamps (in the disclosed design) allow, but because the lamp's emission is used at the disclosed efficiency, the amplifiers have a pulse sent through themselves to extract the stored energy between fluorescent time period.
    [113] One can run pulse trains at higher repetition rates through Alexandrite, but in such a case one would have to carefully consider the stimulated emission cross section, which is more favorable for producing very certain pulses high gain through Titanium, as opposed to Alexandrite being favored for producing larger nanosecond pulses in pulse trains. However, this exact specification is left to the breeder. This feature makes it possible for a 650 nm diode laser to pump a small Alexandrite board in a Q-switched fashion, or in a Locked and Q-Switched Mode by power swing, as shown, for example, in the configuration in Figure 14 , items 42 and 43. Power master oscillators for the Alexandrite or Titanium Sapphire amplifier chains are shown at items 40 and 41 in FIG. 14.
    [114] Projects of PLD systems in real conditions will drive the ultra-fast pulse or Q-switch trains in the plume (FIG. 15 item 51) and perhaps have a portion of said beams or beams converted into harmonic generators (FIG. . 14 item 44) to achieve the shortwave UV spectrum so that a breeder has the option of targeting the optical power levels and frequencies of interest above and radiating the intended plume or substrate (FIG. 15 items 51 & 54) , such that the atomic agglomerates of or particles are atomized, ionized, or removed, and the surface of the substrate being coated is also photoionized (and has electrons eliminated) so that this state will increase accretion to the structured atomic assembly.
    [115] The table below shows an exemplary operating configuration for various applications of the disclosed lasers.

    [116] The temperature-dependent emission cross section relates to the extraction efficiency, and the damage threshold should be carefully designed and maintained at levels safely below it, due to the fact that the active gain volume in the design favors pulse trains with a high energy content that can be harmful if components in the laser path are damaged or disturbed.
    [117] Many other exemplary modalities can be provided through the various combinations of the features described above. Although the modalities described above in this document use specific examples and alternatives, it should be understood by those skilled in the art that several additional alternatives can be used, and equivalents can be replaced by elements and/or steps described in this document, without the need to deviate the intended scope of this application. Modifications may be necessary to adapt the modalities to a particular situation or particular needs without departing from the intended scope of application. It is intended that the application is not limited to the particular exemplary implementation and exemplary modalities described in this document, but that the claims are given in their broadest reasonable interpretation, so as to cover all new and non-obvious modalities, literal or equivalent, disclosed or not, thus contemplated.
    权利要求:
    Claims (22)
    [0001]
    1. Laser device, characterized in that it comprises: a crystal plate (1; 21) having chromium doped with alexandrite; and a cavity filter material (5; 25) including samarium-doped terbium fluoride, provided on at least one side of the crystal plate (1; 21) and adapted to receive light energy (20) from a light source (2; 22), such that the cavity filter material (5; 25) converts light energy received in a first frequency band into light energy in a second frequency band, which is absorbed by the crystal plate (1 ; 21), wherein: the crystal plate (1; 21) is adapted to receive a beam of incident light (16; 17) at one end of the crystal plate (1; 21) at an angle and also emits a beam of amplified laser (17') from one end both at an angle different from the first angle and emits the amplified laser beam (17') linearly transposed from the incident light beam (16; 17) after absorbing light energy on the second frequency.
    [0002]
    2. Device according to claim 1, characterized in that the crystal plate (1; 21) is provided with a reflective rear surface that is not at 90 degrees with respect to the horizontal axis of the crystal plate.
    [0003]
    3. Device according to claim 1 or 2, characterized in that the reflective surface includes a silicon dioxide coating or a stacked 1/4 wavelength dielectric multilayer that comprises a regulation or frequency selector behavior for the laser beam, but transparent to pump light.
    [0004]
    4. Device according to any one of claims 1 to 3, characterized in that the crystal plate (1; 21) is adapted in such a way that the output laser beam (17') emitted by the crystal plate (1; 21) is separated by some angle or distance from the input beam (16; 17) of light energy from the source.
    [0005]
    5. Device according to any one of claims 1 to 4, characterized in that the first frequency is an ultraviolent light frequency, and in that the second frequency is a frequency that is lower than ultraviolet light.
    [0006]
    6. Device according to any one of claims 1 to 5, characterized in that it additionally comprises a plurality of elastic fasteners (29) adapted to hold components of a device (30), while allowing the thermal expansion of a or more device components.
    [0007]
    7. Device according to any one of claims 1 to 6, characterized in that it additionally comprises a coolant circulation subsystem adapted for the circulation of a coolant in a device to cool the crystal plate (1; 21) and/or the cavity filter material (5; 25) by circulating a coolant between the crystal plate (1; 21) and the cavity filling material (5; 15).
    [0008]
    8. Device according to any one of claims 1 to 7, characterized in that one end is provided at an acute angle (14; 14') with respect to the adjacent side of the crystal plate (1; 21), and is provided at an oblique angle to the opposite adjacent side of the crystal plate (1; 21).
    [0009]
    9. System for the amplification of light, characterized in that it comprises a plurality of laser devices (30), as defined in any one of claims 1 to 8, arranged in series.
    [0010]
    10. Laser amplification device, characterized in that it comprises: a plurality of laser plates arranged in series, each of said laser plates comprising: a housing, a crystal plate having chromium doped with alexandrite, and a material of cavity filter including samarium doped terbium fluoride, provided on at least one side of the crystal plate and adapted to receive light energy from a light source, such that the cavity filter material converts received light energy into a first frequency band into light energy in a second frequency band, which is absorbed by the crystal plate, wherein: the crystal plate is adapted to receive a beam of light incident on one end of the crystal plate at an angle and also emits an amplified laser beam from one end either at an angle different from the first angle or emits a linearly amplified laser beam transposed to from an incident light beam after absorption of light energy at the second frequency; wherein the output of a previous one of said laser plates in the series is used as an input to one of the subsequent laser plates in the series, and in that the output of the last of said laser plates in the series is used as the output of the amplification device.
    [0011]
    11. Device according to claim 10, characterized in that the crystal plate is provided with a reflective rear surface that is not at 90 degrees with respect to the horizontal axis of the crystal plate.
    [0012]
    12. Device according to claim 10 or 11, characterized in that the reflective surface includes a silicon dioxide coating or a stacked 1/4 wavelength dielectric multilayer comprising a regulation or frequency selector behavior for the laser beam but transparent to pump light.
    [0013]
    13. Device according to any one of claims 10 to 12, characterized in that the crystal plate is adapted so that the output laser beam emitted by the crystal plate is separated by some angle or distance from the incoming beam of light energy from the source.
    [0014]
    14. Device according to any one of claims 10 to 13, characterized in that the first frequency is an ultraviolent light frequency, and in that the second frequency is a frequency that is lower than ultraviolet light.
    [0015]
    15. Device according to any one of claims 10 to 14, characterized in that it additionally comprises a plurality of elastic fasteners adapted to hold components of a device, while allowing the thermal expansion of one or more components of the device.
    [0016]
    16. Device according to any one of claims 10 to 15, characterized in that it additionally comprises a coolant circulation system adapted to circulate a coolant in the device, to cool the crystal plate and/or the filter material of cavity.
    [0017]
    17. Device according to any one of claims 10 to 16, characterized in that one end is provided at an acute angle with respect to the adjacent side of the crystal plate, and is provided at an oblique angle with respect to the adjacent side opposite of the crystal plate.
    [0018]
    18. A system for transferring a material from a first object to a second object, characterized in that it comprises: providing a first amplification subsystem comprising one or more first laser devices, wherein each of said first laser devices comprises a laser plate including: a crystal plate having chromium doped with alexandrite, and a cavity filter material including terbium fluoride doped with samarium, provided on at least one side of the crystal plate and adapted to receive light energy from of a light source, such that the cavity filter material converts light energy received in a first frequency band into light energy in a second frequency band, which is absorbed by a crystal plate, wherein: the plate is adapted to receive a beam of light incident on one end of the crystal plate at an angle, and also emits an amplified laser beam at from an end either at an angle other than the first angle and emits a linearly transposed amplified laser beam from the incident light beam after absorbing light energy at the second frequency; providing a first single-frequency laser adapted to produce a first single frequency laser beam having a desired first pulse characteristic to power said first amplification subsystem to generate a first laser beam output; providing a second amplification subsystem comprising one or more second laser devices, providing a second single frequency laser adapted to produce a second single frequency laser beam having a desired pulse characteristic to power said second amplification subsystem to generate a second laser beam output; providing a first laser routing subsystem adapted to route at least a portion of said first s laser beam output so that the first object vaporizes a portion of the first object, wherein: providing a second laser routing subsystem adapted to route at least a portion of said second laser beam output to a second object, to prepare the second object to accept at least part of the vaporized portion of the first object on or within the second object.
    [0019]
    19. System according to claim 18, characterized in that said first single frequency laser is an ultra-fast laser, having a pulse width of % nanosecond or less, and a relatively narrow band of 100 nm or less .
    [0020]
    20. System according to claim 18 or 19, characterized in that said first single frequency laser is an ultra-fast laser emitting a pulse every 3.2 μs or less.
    [0021]
    21. System according to any one of claims 18 to 20, characterized in that said second single frequency laser is a Q-switched laser with a pulse width of 1 nanosecond or more.
    [0022]
    22. System according to any one of claims 18 to 21, characterized in that said first laser routing subsystem is further adapted to route another portion of said first laser beam in a plume of a vaporized portion of the first object to burn particles of said first object present in said plume to further atomize said plume.
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    同族专利:
    公开号 | 公开日
    EP3185373B1|2021-04-07|
    IN2015DN00970A|2015-06-12|
    RU2015102528A|2016-09-20|
    US20160043524A1|2016-02-11|
    EP2880722A1|2015-06-10|
    JP6743087B2|2020-08-19|
    CN104604049A|2015-05-06|
    CN104604049B|2019-08-13|
    JP2018164090A|2018-10-18|
    RU2650807C2|2018-04-17|
    US9246299B2|2016-01-26|
    US9287112B2|2016-03-15|
    WO2014022635A1|2014-02-06|
    US20170070022A1|2017-03-09|
    RU2650807C9|2018-09-06|
    JP6415435B2|2018-10-31|
    EP3185373A1|2017-06-28|
    US10777960B2|2020-09-15|
    EP2880722B1|2019-10-09|
    JP2015528217A|2015-09-24|
    BR112015002090A2|2017-07-04|
    US20160211637A1|2016-07-21|
    US20150311064A1|2015-10-29|
    US20130301662A1|2013-11-14|
    US9525262B2|2016-12-20|
    EP2880722A4|2016-04-27|
    CA2879746A1|2014-02-06|
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    法律状态:
    2018-12-04| B06F| Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]|
    2020-03-03| B06U| Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]|
    2020-10-13| B06A| Notification to applicant to reply to the report for non-patentability or inadequacy of the application [chapter 6.1 patent gazette]|
    2021-03-16| B09A| Decision: intention to grant [chapter 9.1 patent gazette]|
    2021-05-25| B16A| Patent or certificate of addition of invention granted|Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 01/08/2013, OBSERVADAS AS CONDICOES LEGAIS. |
    优先权:
    申请号 | 申请日 | 专利标题
    US13/566,144|2012-08-03|
    US13/566,144|US9246299B2|2011-08-04|2012-08-03|Slab laser and amplifier|
    PCT/US2013/053166|WO2014022635A1|2012-08-03|2013-08-01|Slab laser and amplifier and method of use|
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